Nuclear Instruments and Methods in Physics Research B43 (1989) 589 North-Holl~d, Amsterdam
589
BOOK REVIEW
This section of NIM B will bring reviews of books relevant for the regular readership of the journal. Books for review should be sent to one of the Editors. ELECTRON AND ION OPTICS by Miklos Szilagyi (Plenum Press, New York, 1988) pp. xvi + 539, US $78.50. ISBN O-306-42717-6 Leuel: Specialist Reuiewer: Paul A. Miller, Sandia National Laboratories, USA This book presents the basic theory of electron and ion optics as applied to devices such as electron and ion microprobes, electron microscopes, cathode-ray display tubes, and tools for iithography in microelectronics fabrication. The author has in one volume provided up-to-date coverage of the majority of fundamental theoretical topics relevant to the optics of Low-current charged-particle beams. The major emphasis is on calculating static electric and magnetic fields, particle trajectories, and images formed in systems with linear arrays of electric and magnetic lenses. Beam deflectors and collective effects (self-fields in higher-intensity beams) are treated less extensively. The book contains detailed discussions of motion of charged particles in static applied fields, calculation of fields generated by biased electrodes and current-carrying coils, focusing by azimuthally symmetric fields, aberration theory, electrostatic and magnetic lenses, and multipoles. Electrostatic immersion and unipotential lenses are treated in great detail. Magnetic lens treatment is limited somewhat to the basic features, with the reader being referred to another, earlier text for more comprehensive analysis. Approximately 20% of the book is devoted to developing a nonrelativistic third-order aberration theory, which in general is complex and could be very confusing. While this presentation is detailed and rigorous, it also relates the physical meaning of all the aberrations and it provides an overview of the essence of the calculations. This makes the topic much easier to understand and appreciate. Image telecentricity, important in l~tho~aphy, is not discussed.
0168-583X/89/$03.50 0 Elsevier Science Publishers B.V. (North-Holland Physics Publishing Division)
The author devotes 10% of the text to numerical techniques for field solution, trajectory calculation, and lens design. Integration, differentiation, inte~olation, opti~zation, and solution of ordinary and partial differential equations by computer are all discussed as they apply to charged-particle optics. A brief discussion of sources of computational error is included, This emphasis on numerical techniques is appropriate because analytic treatments are not available for treating many practical problems. Many of the detailed elaborations in the text necessarily use the paraxial approximation, and they frequently are nonrelativistic in the case of electrostatic systems. This is appropriate for most probe-for~ng focused-beam systems. Broad-area patterned beams are not treated. Basic derivations in this book, however, are generally three-Dimensions and relativistic, and thus can serve as starting points for further work. The book is suited for readers with prior knowledge of vector calculus, complex variables, electromagnetism, and classical mechanics. However, the author provides clear and concise reviews of key areas of these topics that serve as helpful reminders. The book has 539 pages organized into 12 chapters, each of which contains a brief summary at its end. Figures are used effectively. SI units are used throughout. The table of contents is quite detailed. This aids in locating particular topics as does the lo-page index. The 425 references span the rich history of this mature field and include references published as recently as 1987. The text thus can serve as a reference work for researchers as well as instructional material for graduate-level students. The text flows logically. Definitions and terminology are always explained clearly. The author has been very successful in meeting his worthwhile goal of providing a self-contained, systematic, and up-to-date introduction to the theory of electron and ion optics.