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4389569 Emission computed tomograph
A soft X-ray lithography system including an Xray tube having an evacuated and sealed-off envelope provided with an X-ray transparent window made of beryllium material and enclosing a rotatable anode target made of graphite material, the target having an annular sloped surface carrying a focal track layer made of titanium carbide material and having a focal spot area aligned with an electron emitting cathode to generate characteristic titanium K alpha X-rays which pass in a beam through the window, a mask aligned with the window and having transparent portions which transmit the beamed X-rays, and a workpiece, such as a semiconductor wafer, for example, having a surface coated with a photoresist film disposed in alignment with the mask to have selected portions of the film irradiated by the X-rays transmitted through the transparent portions of the mask.
from the spectra on the basis of the relationship and thereafter evaluating the reproductive status of the mammal from such ratios. 4389569 EMISSION
COMPUTED
TOMOGRAPH
Hiroyuki Hattori, Kazuo Uemura, assigned to Shimadzu Corporation
Kyoto, Japan,
An emission computed tomograph provided with a collimator ring rotatable about an object being examined and having a plurality of slits for defining the direction of incidence of the radiation emitted from the objection the radiation detectors. The slits are arranged circumferentially of the ring and directed at successively different angles relative to the radial direction of the collimator ring, so that as the ring is rotated, the object is tomographically scanned. The collimator ring may be divided into a plurality of equal arcuate portions, in each of which the slits are directed toward the object in parallel with each other, so that as the collimator ring is rotated to scan the object, only the parallel profile data thereof can be obtained.
4386854 METHOD AND MEANS FOR OPTICALLY GENERATING SIGNALS FOR USE IN MONITORING AN ENVIRONMENT USING TOMOGRAPHIC TECHNIQUES Robert Byer, assigned to The Board of Trustees of the Leland Stanford Junior University
4388728 SOFT
X-RAY
LITHOGRAPHY
/y
SYSTEM
Saurabh D. Emmanuel, assigned to The Machlett Laboratories Incorporated
The environment within an area is monitored through use of tomographic reconstruction techniques. Signals for use in the tomographic reconstruction are generated optically by a laser which transmits signals to reflectors positioned about the area and then to detectors around or within the area. Several embodiments illustrate the method whereby the signals are generated by sequential illumination of detectors or by simultaneous illumination of detectors. For information about PATSEARCH@ Pergamon International Information Corporation 1340 Old Chain Bridge Road McLean, Virginia 22101 USA Telephone (703) 442-0900 Telex:90-1811
Pergamon InfoLine Limited
Pergamon Press Canada Ltd
12 Vandy Street London EC2A 2DE England Telephone: (01) 377 4650 Telex: 88114614
150 Consumers Road Suite 104 Willowdale, Ontario Canada M2J 1P9 Telephone: (416) 497-8337 Telex: 06525460
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from the spectra on the basis of the relationship and thereafter evaluating the reproductive status of the mammal from such ratios. 4389569 EMISSION
COMPUTED
TOMOGRAPH
Hiroyuki Hattori, Kazuo Uemura, assigned to Shimadzu Corporation
Kyoto, Japan,
An emission computed tomograph provided with a collimator ring rotatable about an object being examined and having a plurality of slits for defining the direction of incidence of the radiation emitted from the objection the radiation detectors. The slits are arranged circumferentially of the ring and directed at successively different angles relative to the radial direction of the collimator ring, so that as the ring is rotated, the object is tomographically scanned. The collimator ring may be divided into a plurality of equal arcuate portions, in each of which the slits are directed toward the object in parallel with each other, so that as the collimator ring is rotated to scan the object, only the parallel profile data thereof can be obtained.
4386854 METHOD AND MEANS FOR OPTICALLY GENERATING SIGNALS FOR USE IN MONITORING AN ENVIRONMENT USING TOMOGRAPHIC TECHNIQUES Robert Byer, assigned to The Board of Trustees of the Leland Stanford Junior University
4388728 SOFT
X-RAY
LITHOGRAPHY
/y
SYSTEM
Saurabh D. Emmanuel, assigned to The Machlett Laboratories Incorporated
The environment within an area is monitored through use of tomographic reconstruction techniques. Signals for use in the tomographic reconstruction are generated optically by a laser which transmits signals to reflectors positioned about the area and then to detectors around or within the area. Several embodiments illustrate the method whereby the signals are generated by sequential illumination of detectors or by simultaneous illumination of detectors. For information about PATSEARCH@ Pergamon International Information Corporation 1340 Old Chain Bridge Road McLean, Virginia 22101 USA Telephone (703) 442-0900 Telex:90-1811
Pergamon InfoLine Limited
Pergamon Press Canada Ltd
12 Vandy Street London EC2A 2DE England Telephone: (01) 377 4650 Telex: 88114614
150 Consumers Road Suite 104 Willowdale, Ontario Canada M2J 1P9 Telephone: (416) 497-8337 Telex: 06525460
ix