A Simple Stable Inertial Nanopositioner with Piezoelectric Stacks

~1~

~1M

2018 ~ 3

~~

J.l

~

~

Nanotechnology

~

13

and

~

~

Precision

][

~

Vol. 1 No.1 Mar. 2018

Engineering

DOl 10. 13494/ j. npe. 20170023 Pang Zongqiang, Zhang Yue , Zhou Zeqing, et al. A simple stable inertial nanopositioner with piezoelectric stacks [ J]. Nanotechrwlogy and Precision Engineering, 2018, 16(1): 23-27.

A Simple Stable Inertial Nanopositioner with Piezoelectric Stacks Pang Zongqiang, Zhang Yue, Zhou Zeqing, Rong Zhou (College of Automation, Nanjing University of Posts and Telecommunications, Nanjing 210003, China)

Abstract: To build a simple and stable nanopositioner which can reduce the complexity of the scanning probe microscopy ( SPM) system, a novel inertial nanopositioner with piezoelectric stacks is presented. The nanopositioner adopts two piezoelectric stacks and one sawtooth driving signal to achieve movement. The two piezoelectric stacks are set in the adjustable direction, and are then fixed on the base. The insulated rail is fixed between the free sides of the two piezoelectric stacks, and the central shaft is pressed by four SiN balls and one CuBe spring in the insulated rail. By applying one sawtooth wave on the piezoelectric stacks, the insulated rail can drive the central shaft to move a nanometer in distance due to its inertance. Experimental results indicate that the nanopositioner can realize nanometer precision fine-tuning and centimeter range coarse adjustment in any direction. The nanopositioner enjoys high compactness and excellent mechanical stability, so it can be easily implanted into precision optical systems and SPM systems. This is an Open Access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0)

Keywords: nanopositioner; piezoelectric stacks; inertance ; sawtooth wave

Et*~~.

*

t~ . %11:fm,

cm.*w~lt!*~ § zw1t~~.

mi

~:

tt :Amffi 210oo3)

:h T '*-~ til ~ ~ f,"j J¥- ,•iHIE.ii~Jt €f.J AA *- -!YlltE; ~ ,M.i1fJ '*1J&.~=r #i:t!tt4t ..N.1%t4t '*- i~'*-~ €f.J .!_iff ff.., .$.-X.#i :i£.

r-a•~€f.J~~a~~~€f.Jm~M*--!Y11LE;~.~~m~•a~~~~-··~~~a~~~~~~~E;~€f.J M*-~ -!Yut.

.ft.
~.~m4+~~~~-~-- ~·~~~#·~- A7.i~I!JJt~ M· -lf-~ ~~.-~ · ~ - A~~~A·- $ •~ i,t ~a1t ~ ,:f'l

m~# m3t €f.J·rn-·~±1tm, ~Ir"f~ -#i~ ~ • -lf- .$JtAIHw ~# !'- .i.AA *- ~ -!Yllt. ~.!Jf):- iHl *'- aJJ , Jlta·rn-

~ AA*--!Y11LE;~~~ ~~~ •~ff..€f.JAA *-~ftff..~ I1Jl't~~ & *- ~~• €f.J•~ ·Jlt • AA *--!Y 11L E; ~ ~ ~ ~ - .~ 1t•ii.~t~Jt. :o!F'fi!.f;-~ 11-ft%' }C/lf '*- i~~$t*i*-"# T€f.J~=r#i{)ft# ..N.1%t4t '*- tt '1'1J:m.

~~iiU: ~~~t/7Jtl:l=h:it; BS.It!Jt~; ·tmt!:; WiN~ :ita~~=

1672-6o3oczo18 ) ol-oo23..()5

Since its invention, scanmng probe mtcroscopy

and diversity of nanotechnology , a senes of new disci-

( SPM) has been playing an important role in the nano-

plines are emerging, such as nanophysics , nanobiology,

technology research field [I-6]. With the in-depth study

nanochemistry,

nanoelectronics ,

l&fiiiBM: 2017-DS -30. ~ ~lji EJ : oo* E! ~f4"f:~~w1f~~Yt !!ilt!i! EI c11604158 ,61701250). f1=:1!fMfl': ltt:7JH!l\C 1982- ) .!:13 .1t±, iMiJl. iM mf1=:1!f: ltt:7JH!l\, zqpang© njupt. edu. en.

This is an Open Access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0)

nano-fabrication and

• 24 .

纳米技术与精密工程

第 1 卷第 1 期

SPM ，出e

( 1) Simp1e stab1e structure and easy to be built:

qua1ity of nanopositioner p1ays a critica1 ro1e for the nano

just using two piezoelectric stacks and one insu1ated rail ,

diι

comparing the nanopositioners with PST , the design is

nanometro1ogy. Being the core component of

positioning and measurement. However , due to their

ferent structure designs , the nanopositioners a1ways have

easler

great differences in their working stability , building com-

1y , it can be used in any direction and is compatib1e with

p1exity and cost as well [7-10] •

ultra high vacuum , high magnetic field , and ultra10w

With different structures , the nanopositioners differ

ωbuild

and enjoys better rigidity. Most important-

temperature conditions.

in their working princip1es and driving signa1s which

(2) Low driving signa1 and high output force: on1y

brings about the big difference for the building and oper-

using one channel sawtooth 10w voltage , based on the sli-

ating comp1exity. How to design a simp1e and stab1e nan-

der' s inertance , it can wa1k in any direction smooth1y

opositioner remains one of our research targets.

with nano precision and high output force.

In this paper , a brief description is made of severa1

( 3 ) Large trave1 distance: the travel distance of 由e

classica1 and popu1ar nanopositioners which still have

nanopositioner is 1imited on1y by the 1ength of the centra1

some drawbacks but have been used in commercia1 SPM

shaft , which can be app1ied in SPM systems or precise

systems.

regu1ation device in advanced optica1 systems.

(1) Pan sty1e wa1ker[11]. Using 6 shear piezo e1ec-

In this paper , a nove1 simp1e stab1e inertia1 nanoposi-

tric stacks to ho1d centra1 prismatic shaft , the centra1

tioner is described , which just uses two piezoelectric

shaft is driven to move by sequencing 6-channe1 high volt-

stacks and one simp1e sawtooth driving signal. With 10w

ages into the piezoelectric stacks. Due to its working

voltage , the nanopositioner can drive the centra1 round

princip1e and structure , the building comp1exity and e1ec-

shaft to move in any direction smooth1y , depending

tronic noise increase a 10t. Besides , it is hard to mml-

settmg posItlOn.

on 由e

mize its radia1 dimension which is mostly needed in the

1

ultra 10w temperature and high magnetic field. ( 2) Inertia1 nanopositioner 口， 12]

Stucture and principle

Using parallel

tracks or rails to support one slider , with the he1p of the

A structure schematic view of our nove1 inertia1 nan-

slider 气 inertia1 force , the slider is driven to move by ap-

opositioner is shown in Fig. 1. Two piezoelectric stacks

p1ying one pu1se driving voltage into piezoelectric ceram-

which are made of 12 pieces of piezo ceramic p1ates

ics. To make the slider not to slide on the rail random1y ,

(PZT-5H , 0.6 mm x 8 mm x 30 mm) were glued (EPO-

Mugele et αl [13] uses one small magnet ωho1d the slider ,

TEK-353ND) in the adjustab1e direction on the base.

making it not app1icab1e in such magnetic field as mag-

The insu1ated rai1 was glued between the free ends of the

netic field microscopy (MFM) in which the magnetic

two piezoe1ectric stacks. As shown in Fig. 1 (b) and

field of the small magnet may change the samp1e' s mag-

( c) , the centra1 round shaft is pressed by four SiN balls

ne tI c propertles.

and one CuBe spring inside the insu1ated rai l. The press-

(3) Koa1a Drive nanopositioner[14]. Using two piezo-

ing force shou1d meet the following requirements: the

e1ectric scanning tubes (PSTs) mounted in series and

maximum static friction force between the shaft and SiN

three spring pads to ho1d its centra1 shaft , the centra1 shaft is driven to

move 由rough

e10ngating and contracting

balls and the CuBe spring shou1d be slightly 1arger than the gravity of the centra1 shaft[15].

the two PSTs in tum. High precision machine too1 shou1d

Due to the specia1 design of the inertia1 nanoposi-

be used to get three same spring pads firstly and then

tioner , the centra1 shaft se1ection enjoys great degree of

diι

freedom. For examp1e , centra1 shafts with different mate-

ficult to a1ign the three springs in an exactly straight 1ine.

ria1s and 1engths can be chosen to adjust the output force

Comparing the above mentioned severa1 classica1

and the travel distance. Theoretically , the heavier the

nanopositioners , a novel simp1e and stab1e inertia1 nanop-

centra1 shaft , the 1arger the inertance. In this paper , one

ositioner is presented , which has severa1 outstanding ad-

norma1 tungsten rod is emp10yed as the centra1 shaft to

vantages as follows.

test its performance. The who1e nanopositioner is 30 mm

their friction force is adjusted carefully. Besides , it is

2018 年 3 月

. 25 .

庞宗强等:一种基于压电堆桔的惯性纳米步进马达(英文)

tall , 8 mm long and 3. 6 mm wide (the base size can be

mensional movement in the vertical direction. At the time

chosen flexibly as the actual application environment). It

of 丸， the force applied on the shaft is

can be easily implanted in extreme conditions , such as

is the static friction force between shaft and SiN

ultrahigh vacuum , ultralow temperature , and high mag-

is the static friction force between shaft and BeCu spring ,

netic field.

and G is the gravity of the central shaft) , so the central

As shown in Fig. 2 ( a) , one sawtooth signal is ap-

4h

+元 -

G =0

(h

balls ，五

shaft keeps stationary.

plied on the two piezoelectric stacks to achieve one-diBeCu spring

Tungsten rod

Insulated rail

rail

stack SiN balls BeCu spring

SiN balls

(b) Section view of 出e insulated rail part

Insulated rail Base (a) Front view of tbe inertial nanopositioner

(d) Photo of the inertial nanopositioner

(c) Schematic view of the insulated rail part

Fig. 1

Structure schematic view of the novel inertial nanopositioner J,

V

To

T[

T,

T3

T4

(a) Driving signal ofthe inertial nanopositioner

Fig. 2

(b) Schematic diagram offorce analysis ofthe central shaft

Schematic illustration of the working principle of the inertial nanopositioner

During the period of To- T 1 , with the slow increase

will carry any device fixed on

itωmove

in any direction

of the driving voltage , according to the properties of pie-

slowly. Similarly , applying inverted sawtooth signal on

zoelectricity , the two piezoelectric stacks both elongate

both piezoelectric stacks can push the central shaft to the

slowly , the insulated rail fixed on the free ends of the pie-

opposite direction step by step[12 J •

zoelectric stacks drives the central shaft to a new position. At the moment of T 1 , when the driving signal ap-

2

Experimental results

plied on the piezoelectric stacks is withdrawn suddenly , the two piezoelectric stacks contract back to their original

The performance of the novel simple and stable iner-

positions while the central shaft still keeps stationary be-

tial nanopositioner was tested in both upward and down-

cause of its inertance. Therefore , the central shaft moves

ward directions in ambient conditions. As shown in Fig.

one step towards the insulated rail , and the central shaft

3 , one sawtooth driving signal was applied on both posi-

• 26 .

纳米技术与精密工程

第 1 卷第 1 期

tive electrodes of the two piezoelectric stacks and the negative electrode was grounded. 100 Hz driving frequency

7

s6r

was taken as an example and the nanopositioner' s step indicates 由at

, V=100 V

"5

size was tested as functions of the driving voltage. Th e result

•- Qpward

-E一← Dôwnward N

':;1

"""

the central shaft can be driven to move

α3

upward at 50 V and downward at 40 V , and the minimum

4 3

step sizes in the two directions are 1. 3 nm and 2. 3 nm ,

100

respectively. As the driving voltage increases , the step sizes in both directions increase from zero to several nano-

Fig. 4

meters , and the step sizes at 100 V of upward and down-

Step size of the inertial nanopositioner as functions of driving frequency

ward are 3. 4 nm and 7. 1 nm , respectively. What needs special notice is 由at when one push-pull driving signal is

3

Conclusion

applied on the positive and negative electrodes on both piezoelectric stacks separately , the driving voltage will de-

opositioner is presented , which just uses two piezoelectric

crease by half.

stacks and one sawtooth driving signal to achieve move-

8

7~ 工EZJZJmHZ

ment. From 由e test results , the presented nanoposition-

E6 号N 5

er' s performance can be confi口ned. Depending on its setting position ，出e nanopositioner can drive any device

二4

"3 4可

with nanometer fine-tuning precision and centimeter range

2

coarse adjustment in any direction. Combining its stabili-

0

30

Fig. 3

In this paper , a novel simple and stable inertial nan-

ty and high output force , the nanopositioner presented 40

50

60

70

Driving voltage/V

80

90

100

Step size of the inertial nanopositioner as functions of driving voltage

Compared 由e

test results with the calculated step si-

can be implanted into any preClSlO n optical system and

SPM system. References: [ 1]

Binning G , Rohrer H , Ge rber C , et al. Tunneling through a

zes , it is found that the practical step sizes are smaller

controllable vacuum gap [ 1]. Appl Phys Lett , 1982 , 409

than the theoretical values , which may be caused by the

(2): 178-180.

following two reasons: (

homemade piezoelectric ceram-

[2]

ic piece (bought from Baodi吨 He吨sheng Acoustics E-

Eren B , Zherebetskyy D , Patera L L , et al. Activation of Cu ( 111) surface by decomposition into nanoclusters

d时en

lectron Apparatus Corporation) was used to make our pie-

by CO adsorption [J]. Science , 2016 , 351 (6272): 475-

zoelectric stacks , which has low polarization voltage com-

478.

pared with EBL products; ②由e CuBe spring was not ad-

[3]

eycomb network through sequence-controlled self-assembly of

justed to the best condition , affecting the nanopositioner' s

oligopeptides [ J J. Nature

performance. As shown in Fig. 4 , the step size of our inertial nan-

Abb S , Hannau L , Gutzler R , et al. Two dimensional hon-

(10335) : [4]

Communications ,

2016 ,

7

1 刁.

Song C L , Wang Y L , Jiang Y P , et al. Imaging the elec-

opositioner was also tested as functions of the driving fre-

tron-Boson coupling in superconducting FeSe films using a

quency. It can be seen that the step size of our inertial

scanning tunneling microscope [ JJ . Physical Review Le tters ,

nanopositioner has almost nothing to do with the driving frequency within certain limits , verifying the nanoposi-

2014 , 112(5): 057002.

[5]

Maier S , Lechner B A J , Somorjai G A , et al. Growth and structure of the first layers of ice on Ru (0001) and Pt ( 111 )

tioner' s stability. Repeated test results show that our in-

[JJ. Joumal of the American Chemical Society , 2016 , 138

ertial nanopositioner enjoys high structure rigidity and sta-

(9): 3145-315 1.

bility. [6]

Chiang C L , Xu C , Han Z , et al. Real-space imaging of molecular structure and chemical bonding by single-molecule

2018 年 3 月

[7 J

[8J

inelastic tunneling probe [J J. Science , 2014 , 344 (6186) :

veηlow

885-888.

view of Scientifìc Instruments , 1999 , 70 ( 2): 1459 -1463.

temperature scanning tunneling microscope [ J J. Re-

Q, Wang J H , Lu Q Y. Fully low voltage and large

[ 12 J Hou Y B , Wang J H , Lu Q Y. All low voltage lateral junc-

area searching scanning tunneling microscope [ J J. Measure-

tion scanning tunneling microscope with very high precision

ment Science and Technology , 2009 , 20: 065503.

and stability [ J J . Review of Scientifìc Instruments , 2008 , 79

Pang Z

Meng W J , Guo Y , Hou Y B , et al. Atomic resolution scanning tunneling microscope imaging up to 27 T in a water-

[9 J

• 27 .

庞宗强等:一种基于压电堆桔的惯性纳米步进马达(英文)

(11): 113707. [ 13 J Mugele F , Rettenberger A , Boneberg J , et al. New design

cooled magnet [ J J . Nano Research , 2015 , 85 ( 12): 3898-

of a variable-temperature ultrahigh vacuum scanning tunne-

3904.

ling microscope [ J J . Review of Scientifìc Instru阳脯， 1998 ,

Liu X L , Lu Q Y. A piezo motor based on a new principle

69(4): 1765-1769.

with high output force , rigidity and integrity: The Tuna

[14 J Cherepanov V , Coenen P , Voigtlander B. A nanopositioner

Drive [ J J. Review of Scient作 I邵阳阳脯， 2012 , 83:

for scanning probe microscopy: The Koala Drive [ J J . Review

11511 1.

[lO J Wa吨 Q ， Hou Y B , Lu Q Y. A compact , rigid , and ea吁

of Scientifìc Instruments , 2012 , 83(2): 023703.

[ 15 J Pang Z Q , Li X , Xu L , et 址. A simple compact UHV and

to-build piezo motor: The intact-tube GeckoDrive[JJ. Review

high magnetic field compatible inertial nanopositioner [ J J .

of Scientifìc Instruments , 2013 , 84: 056106.

Review of Scientifìc

[11 J Pan S H , Hudson E W , Davis J C. 3 He refi吨erator based

Instrume脯， 2015 ， 86:

013704.

(责任编辑:孙援援)