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Epitronics & Gusset
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NTT laser on silicon N T T has succeeded, for the first time, in the stable operation of a laser on a Si substrate for more than lk hrs at room temperature. N T T is conducting the research for its VI&P (Visual, intelligent and Personal Communications) program, with an aim toward achieving a datacomms speed of lTbps (1 trillion bits/sec) over trunk networks. To reach this goal, it is necessary to develop an optical interconnection technology that uses optical signals to effect signal exchanges between VLSI chips and speed-up devices used in switches and terminals. It was first necessary to d e v e l o p an O E I C t h a t would integrate both optical and electronic circuits on a silicon s u b s t r a t e . However, because of the differences in the thermal expansion coefficients of GaAs, InP and Si, it has been quite difficult to stably operate an optical device oma Si substrate. N T T succeeded in the stable operation of the laser (a 1.541am-wavelength QW) by i n s e r t i n g a s p e c i a l strain a b s o r b i n g b u f f e r layer between the silicon a n d the l a s e r - e m i t t i n g layer. The success of this device is expected to help improve the performance of future data processing and communications equipment and contribute to its further miniaturization. • Hiroyuki Kanamaru, N I T Corp. Tel: [81] (0)3 3509 3101.
Epitronics & Gusset Epitronics wishes it to be known that the recent ap-
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pointment of Gusset Consuiting & Trading AG is not limited to Germany, Switzerland and the Netherlands. Gusset has in fact been given representation rights throughout all of Europe. • Epitronics Corp. TeU fax: (602) 581 3663 / 3415.
Plasmas picks Chell Plasmos o f Munich, the manufacturer of thin film measurement systems, P E C V D equipment, and anodic bonding systems, has appointed Chell Instruments as its distributor for the UK. At the same time, Paul Montgomery, who has sold and serviced Piasmos equipment in the U K for the past four years, has joined Chell to take responsibility for Plasmos marketing. • Chell Instruments Ltd. Tel~fax: [44] ( 0 ) 692 402488 / 406177.
Mitsubishi RF FETs L band Mitsubishi Electric U K Ltd., has begun marketing its L and S band high o u t p u t GaAs microwave power amplifier FETs for 2.3GHz at 37dBm (6W) and 40dBm (10W). M E says t h a t it has "extended the RF window by realising lower cost devices using GaAs solutions" with applications expected to include mobile comms etc. • Mitsubishi Electric UK Ltd. Tel~fax: [44] (0)707 276100 / 278692.
Intel & Chemraz G r e e n e , T w e e d & Co., Notts., UK, show technical i n f o r m a t i o n on the
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Chemraz 503 perfluoroelastomer O ring product based on findings at Intel's fab in Santa Clara. Intel was having problems with O-rings failing as primary seals in wet processing and contaminating wafers. O-ring materials were f o u n d to be incompatible with process chemistries and leaching impurities. In one case, use of a wrong O-ring costing $20 caused the loss of a $20k quartz bath. Intel took samples from a range of manufacturers and subjected them to typical chemistries and then examined them. They found that there is no ideal O-ring currently available to suit all contexts but an unfilled O-ring from Greene, Tweed was determined to be the best all r o u n d ring for aqueous applications. Intel is working with G T to develop better rings with reduced metal impurities. • Nick Hattie, G,T & Co. Tel~fax: [44] ( 0 ) 602 866555 / 866235.
Megabit line of OMs Solkatronic Chemicals, N J, USA, is introducing a new line of high purity organometallic compounds, called the Megabit" line. T M G and T M A is said by Solkatronic to be "synergistic with its in-house manufactured Megabit and MOCVD arsine and phosphine. It is a natural step toward our increased commitment to be a major materials supplier to thesemiconductor industry." • Frank Scornavacca, Solkatronic Chemicals Inc. Tel~fax: (201) 882 7900 / 7967.
ESC start-up
Livingston 92 Expo is go After the big success of the 1991 Livingston Vacuum and Semiconductor Processing Exhibition, Trident Exhibitions has responded to company requests for a 1992 event at the same location. V&SP 92 will be held on May 13th and 14th and over a third o f the 96 exhibitors from the 1991 event (which saw over 1 300 visitors over the two days) have a l r e a d y rebooked. Stand size will be larger next year and "early bird" d i s c o u n t s are c u r r e n t l y available. • Trident Exhibitions Ltd. Tel~fax: [44] ( 0 ) 8 2 2 614671 / 614818.
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The Equipment Support C o m p a n y is a c o m p a n y b a s e d in H u n t i n g d o n , Cambs, UK, newly formed to offer service support for production and R&D equipment in the semiconductor and vacuum industries. ESC can cover service and support of computer c o n t r o l l e d and v a c u u m process related equipment encompassing wafer handling, computer interfacing, RF and DC power supplies and vacuum systems from low pressure to UHV including gas control. ESC covers Europe and Scandinavia and currently has contracts for a wide variety of equipment, including MOVPE, RIE and spray etchers. It has been appointed service agents for CVT throughout Europe. ESC was f o u n d e d by David Wastell, ex-TI and Cambridge Instruments, and Duncan Rhead, who was once a service engineer with CVT. • David Wastell, ECS Ltd. Fax: [44] (0)480 831226.
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NTT laser on silicon N T T has succeeded, for the first time, in the stable operation of a laser on a Si substrate for more than lk hrs at room temperature. N T T is conducting the research for its VI&P (Visual, intelligent and Personal Communications) program, with an aim toward achieving a datacomms speed of lTbps (1 trillion bits/sec) over trunk networks. To reach this goal, it is necessary to develop an optical interconnection technology that uses optical signals to effect signal exchanges between VLSI chips and speed-up devices used in switches and terminals. It was first necessary to d e v e l o p an O E I C t h a t would integrate both optical and electronic circuits on a silicon s u b s t r a t e . However, because of the differences in the thermal expansion coefficients of GaAs, InP and Si, it has been quite difficult to stably operate an optical device oma Si substrate. N T T succeeded in the stable operation of the laser (a 1.541am-wavelength QW) by i n s e r t i n g a s p e c i a l strain a b s o r b i n g b u f f e r layer between the silicon a n d the l a s e r - e m i t t i n g layer. The success of this device is expected to help improve the performance of future data processing and communications equipment and contribute to its further miniaturization. • Hiroyuki Kanamaru, N I T Corp. Tel: [81] (0)3 3509 3101.
Epitronics & Gusset Epitronics wishes it to be known that the recent ap-
i~i~i~ .ii:
::. ii~:
pointment of Gusset Consuiting & Trading AG is not limited to Germany, Switzerland and the Netherlands. Gusset has in fact been given representation rights throughout all of Europe. • Epitronics Corp. TeU fax: (602) 581 3663 / 3415.
Plasmas picks Chell Plasmos o f Munich, the manufacturer of thin film measurement systems, P E C V D equipment, and anodic bonding systems, has appointed Chell Instruments as its distributor for the UK. At the same time, Paul Montgomery, who has sold and serviced Piasmos equipment in the U K for the past four years, has joined Chell to take responsibility for Plasmos marketing. • Chell Instruments Ltd. Tel~fax: [44] ( 0 ) 692 402488 / 406177.
Mitsubishi RF FETs L band Mitsubishi Electric U K Ltd., has begun marketing its L and S band high o u t p u t GaAs microwave power amplifier FETs for 2.3GHz at 37dBm (6W) and 40dBm (10W). M E says t h a t it has "extended the RF window by realising lower cost devices using GaAs solutions" with applications expected to include mobile comms etc. • Mitsubishi Electric UK Ltd. Tel~fax: [44] (0)707 276100 / 278692.
Intel & Chemraz G r e e n e , T w e e d & Co., Notts., UK, show technical i n f o r m a t i o n on the
I',ii
~/~ ~::ii i~
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Chemraz 503 perfluoroelastomer O ring product based on findings at Intel's fab in Santa Clara. Intel was having problems with O-rings failing as primary seals in wet processing and contaminating wafers. O-ring materials were f o u n d to be incompatible with process chemistries and leaching impurities. In one case, use of a wrong O-ring costing $20 caused the loss of a $20k quartz bath. Intel took samples from a range of manufacturers and subjected them to typical chemistries and then examined them. They found that there is no ideal O-ring currently available to suit all contexts but an unfilled O-ring from Greene, Tweed was determined to be the best all r o u n d ring for aqueous applications. Intel is working with G T to develop better rings with reduced metal impurities. • Nick Hattie, G,T & Co. Tel~fax: [44] ( 0 ) 602 866555 / 866235.
Megabit line of OMs Solkatronic Chemicals, N J, USA, is introducing a new line of high purity organometallic compounds, called the Megabit" line. T M G and T M A is said by Solkatronic to be "synergistic with its in-house manufactured Megabit and MOCVD arsine and phosphine. It is a natural step toward our increased commitment to be a major materials supplier to thesemiconductor industry." • Frank Scornavacca, Solkatronic Chemicals Inc. Tel~fax: (201) 882 7900 / 7967.
ESC start-up
Livingston 92 Expo is go After the big success of the 1991 Livingston Vacuum and Semiconductor Processing Exhibition, Trident Exhibitions has responded to company requests for a 1992 event at the same location. V&SP 92 will be held on May 13th and 14th and over a third o f the 96 exhibitors from the 1991 event (which saw over 1 300 visitors over the two days) have a l r e a d y rebooked. Stand size will be larger next year and "early bird" d i s c o u n t s are c u r r e n t l y available. • Trident Exhibitions Ltd. Tel~fax: [44] ( 0 ) 8 2 2 614671 / 614818.
i',il
The Equipment Support C o m p a n y is a c o m p a n y b a s e d in H u n t i n g d o n , Cambs, UK, newly formed to offer service support for production and R&D equipment in the semiconductor and vacuum industries. ESC can cover service and support of computer c o n t r o l l e d and v a c u u m process related equipment encompassing wafer handling, computer interfacing, RF and DC power supplies and vacuum systems from low pressure to UHV including gas control. ESC covers Europe and Scandinavia and currently has contracts for a wide variety of equipment, including MOVPE, RIE and spray etchers. It has been appointed service agents for CVT throughout Europe. ESC was f o u n d e d by David Wastell, ex-TI and Cambridge Instruments, and Duncan Rhead, who was once a service engineer with CVT. • David Wastell, ECS Ltd. Fax: [44] (0)480 831226.