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Handbook of thin film materials
Handbook of Thin Film Materials Edited by H.S. Nalwa
Volume 1. DEPOSITION AND PROCESSING OF THIN FILMS Chapter 1. Methods of Deposition of Hydrogenated Amorphous Silicon for Device Applications Wilfried G. J. H. M. van Sark Chapter 2.
Atomic Layer Deposition Markku Leskelgi
Chapter 3.
Laser Applications in Transparent Conducting Oxide Thin Films Processing Frederick Ojo Adurodija
Chapter 4.
Cold Plasma Processes in Surface Science and Technology Pierangelo Gr6ning
Chapter 5.
Electrochemical Formation of Thin Films of Binary III-V Compounds L. Peraldo Bicelli, V. M. Kozlov
Chapter 6.
Fundamentals for the Formation and Structure Control of Thin Films: Nucleation, Growth, Solid-State Transformations Hideya Kumomi, Frank G. Shi
Chapter 7.
Ion Implant Doping and Isolation of GaN and Related Materials S. J. Pearton
Chapter 8.
Plasma Etching of GaN and Related Materials S. J. Pearton, R. J. Shul
Chapter 9.
Residual Stresses in Physically Vapor-Deposited Thin Films Yves Pauleau Chapter 10. Langmuir-Blodgett Films of Biological Molecules Victor Erokhin Chapter 11. Structure Formation During Electrocrystallization of Metal Films V. M. Kozlov, L. Peraldo Bicelli Chapter 12. Epitaxial Thin Films of Intermetallic Compounds Michael Huth Chapter 13. Pulsed Laser Deposition of Thin Films: Expectations and Reality Leonid R. Shaginyan Chapter 14. Single-Crystal/~"-Alumina Films Chu Kun Kuo, Patrick S. Nicholson
Volume 2. CHARACTERIZATION AND SPECTROSCOPY OF THIN FILMS Chapter 1. Classification of Cluster Morphologies Nan Li, Martin Zinke-Allmang Chapter 2.
Band Structure and Orientation of Molecular Adsorbates on Surfaces by Angle-Resolved Electron Spectroscopies P. A. Dowben, Jaewu Choi, Bo Xu
xxiii
xxiv
CONTENTS OF VOLUMES IN THIS SET Chapter 3.
Superhard Coatings in C - B - N Systems: Growth and Characterization Arun K. Sikder, Ashok Kumar
Chapter 4.
ATR Spectroscopy of Thin Films Urs Peter Fringeli, Dieter Baurecht, Monira Siam, Gerald Reiter, Michael Schwarzott, Thomas Biirgi, Peter Briiesch
Chapter 5.
Ion-Beam Characterization in Superlattices Z. Zhang, J. R. Liu, Wei-Kan Chu
Chapter 6.
In Situ and Real-Time Spectroscopic Ellipsometry Studies: Carbon Based and Metallic TiNx Thin Films Growth S. Logothetidis
Chapter 7.
In Situ Faraday-Modulated Fast-Nulling Single-Wavelength Ellipsometry of the Growth of Semiconductor, Dielectric, and Metal Thin Films J. D. Leslie, H. X. Tran, S. Buchanan, J. J. Dubowski, S. R. Das, L. LeBrun
Chapter 8.
Photocurrent Spectroscopy of Thin Passive Films E Di Quarto, S. Piazza, M. Santamaria, C. Sunseri
Chapter 9.
Electron Energy Loss Spectroscopy for Surface Study Takashi Fujikawa
Chapter 10. Theory of Low-Energy Electron Diffraction and Photoelectron Spectroscopy from Ultra-Thin Films Jiirgen Henk Chapter 11. In Situ Synchrotron Structural Studies of the Growth of Oxides and Metals A. Barbier, C. Mocuta, G. Renaud Chapter 12. Operator Formalism in Polarization-Nonlinear Optics and Spectroscopy of Polarization-Inhomogeneous Media L L Gancheryonok, A. V. Lavrinenko Chapter 13. Secondary Ion Mass Spectrometry and Its Application to Thin Film Characterization Elias Chatzitheodoridis, George Kiriakidis, lan Lyon Chapter 14. A Solid-State Approach to Langmuir Monolayers, Their Phases, Phase Transitions, and Design Craig J. Eckhardt Chapter 15. Solid State NMR of Biomolecules Akira Naito, Miya Kamihira
Volume 3. FERROELECTRIC AND DIELECTRIC THIN FILMS Chapter 1. The Electrical Properties of High-Dielectric-Constant and Ferroelectric Thin Films for Very Large Scale Integration Circuits Joseph Ya-min Lee, Benjamin Chihming Lai Chapter 2.
High-Permittivity (Ba, Sr)TiO3 Thin Films M. Nayak, S. Ezhilvalavan, T. Y. Tseng
Chapter 3.
Ultrathin Gate Dielectric Films for Si-Based Microelectronic Devices C. Krug, L J. R. Baumvol
Chapter 4.
Piezoelectric Thin Films: Processing and Properties Floriana Craciun, Patrizio Verardi, Maria Dinescu
Chapter 5.
Fabrication and Characterization of Ferroelectric Oxide Thin Films Jong-Gul Yoon, Tae Kwon Song
CONTENTS OF VOLUMES IN THIS SET Chapter 6.
Ferroelectric Thin Films of Modified Lead Titanate J. Mendiola, M. L. Calzada
Chapter 7.
Point Defects in Thin Insulating Films of Lithium Fluoride for Optical Microsystems Rosa Maria Montereali
Chapter 8.
Polarization Switching of Ferroelectric Crystals Lung-Han Peng
Chapter 9.
High-Temperature Superconductor and Ferroelectric Thin Films for Microwave Applications F~lix A. Miranda, Joseph D. Warner, Guru Subramanyam
Chapter 10. Twinning in Ferroelectric Thin Films: Theory and Structural Analysis S. Pamir Alpay Chapter 11. Ferroelectric Polymer Langmuir-Blodgett Films Stephen Ducharme, S. P. Palto, V. M. Fridkin Chapter 12. Optical Properties of Dielectric and Semiconductor Thin Films L Chambouleyron, J. M. Marffnez
Volume 4. SEMICONDUCTOR AND SUPERCONDUCTING THIN FILMS Chapter 1. Electrochemical Passivation of Si and SiGe Surfaces J. Rappich, Th. Dittrich Chapter 2.
Epitaxial Growth and Structure of III-V Nitride Thin Films Dharanipal Doppalapudi, Theodore D. Moustakas
Chapter 3.
Optical Properties of Highly Excited (A1, In) GaN Epilayers and Heterostructures Sergiy Bidnyk, Theodore J. Schmidt, Jin-Joo Song
Chapter 4.
Electrical Conduction Properties of Thin Films of Cadmium Compounds R. D. Gould Carbon-Containing Heteroepitaxial Silicon and Silicon/Germanium Thin Films on Si(001) H. JOrg Osten
Chapter 5.
Chapter 6.
Low-Frequency Noise Spectroscopy for Characterization of Polycrystalline Semiconductor Thin Films and Polysilicon Thin Film Transistors Charalabos A. Dimitriadis, George Kamarinos
Chapter 7.
Germanium Thin Films on Silicon for Detection of Near-Infrared Light G. Masini, L. Colace, G. Assanto
Chapter 8.
Physical Properties of Amorphous Gallium Arsenide Roberto Murri, Nicola Pinto
Chapter 9.
Amorphous Carbon Thin Films S. R. P. Silva, J. D. Carey, R. U. A. Khan, E. G. Gerstner, J. V. Anguita
Chapter 10. High- Tc Superconductor Thin Films B. R. Zhao Chapter 11. Electronic and Optical Properties of Strained Semiconductor Films of Groups IV and III-V Materials George Theodorou Chapter 12. Growth, Structure, and Properties of Plasma-Deposited Amorphous Hydrogenated Carbon-Nitrogen Films D. E Franceschini Chapter 13. Conductive Metal Oxide Thin Films Quanxi Jia
xxv
xxvi
CONTENTS OF VOLUMES IN THIS SET
Volume 5. NANOMATERIALS AND MAGNETIC THIN FILMS Chapter 1. Nanoimprint Techniques Hella-C. Scheer, Hubert Schulz, Thomas Hoffmann, Clivia M. Sotomayor Torres Chapter 2. The Energy Gap of Clusters Nanoparticles, and Quantum Dots Klaus Sattler Chapter 3. Electronic States in GaAs-A1As Short-Period Superlattices: Energy Levels and Symmetry Weikun Ge, Jian-Bai Xia Chapter 4. Spin Waves in Thin Films, Superlattices and Multilayers Zhang Zhi-Dong Chapter 5. Quantum Well Interference in Double Quantum Wells Zhang Zhi-Dong Chapter 6. Electro-Optical and Transport Properties of Quasi-Two-Dimensional Nanostructured Materials Rodrigo A. Rosas, Ratil Riera, Jos~ L. Marfn, Germdn Campoy Chapter 7. Magnetism of Nanophase Composite Films D. J. Sellmyer, C. P. Luo, Y. Qiang, J. P. Liu Chapter 8. Thin Magnetic Films Hans Hauser, Rupert Chabicovsky, Karl Riedling Chapter 9. Magnetotransport Effects in Semiconductors Nicola Pinto, Roberto Murri, Marian Nowak Chapter 10. Thin Films for High-Density Magnetic Recording Genhua Pan Chapter 11. Nuclear Resonance in Magnetic Thin Films and Multilayers Mircea Serban Rogalski Chapter 12. Magnetic Characterization of Superconducting Thin Films M. R. Koblischka
Volume 1. DEPOSITION AND PROCESSING OF THIN FILMS Chapter 1. Methods of Deposition of Hydrogenated Amorphous Silicon for Device Applications Wilfried G. J. H. M. van Sark Chapter 2.
Atomic Layer Deposition Markku Leskelgi
Chapter 3.
Laser Applications in Transparent Conducting Oxide Thin Films Processing Frederick Ojo Adurodija
Chapter 4.
Cold Plasma Processes in Surface Science and Technology Pierangelo Gr6ning
Chapter 5.
Electrochemical Formation of Thin Films of Binary III-V Compounds L. Peraldo Bicelli, V. M. Kozlov
Chapter 6.
Fundamentals for the Formation and Structure Control of Thin Films: Nucleation, Growth, Solid-State Transformations Hideya Kumomi, Frank G. Shi
Chapter 7.
Ion Implant Doping and Isolation of GaN and Related Materials S. J. Pearton
Chapter 8.
Plasma Etching of GaN and Related Materials S. J. Pearton, R. J. Shul
Chapter 9.
Residual Stresses in Physically Vapor-Deposited Thin Films Yves Pauleau Chapter 10. Langmuir-Blodgett Films of Biological Molecules Victor Erokhin Chapter 11. Structure Formation During Electrocrystallization of Metal Films V. M. Kozlov, L. Peraldo Bicelli Chapter 12. Epitaxial Thin Films of Intermetallic Compounds Michael Huth Chapter 13. Pulsed Laser Deposition of Thin Films: Expectations and Reality Leonid R. Shaginyan Chapter 14. Single-Crystal/~"-Alumina Films Chu Kun Kuo, Patrick S. Nicholson
Volume 2. CHARACTERIZATION AND SPECTROSCOPY OF THIN FILMS Chapter 1. Classification of Cluster Morphologies Nan Li, Martin Zinke-Allmang Chapter 2.
Band Structure and Orientation of Molecular Adsorbates on Surfaces by Angle-Resolved Electron Spectroscopies P. A. Dowben, Jaewu Choi, Bo Xu
xxiii
xxiv
CONTENTS OF VOLUMES IN THIS SET Chapter 3.
Superhard Coatings in C - B - N Systems: Growth and Characterization Arun K. Sikder, Ashok Kumar
Chapter 4.
ATR Spectroscopy of Thin Films Urs Peter Fringeli, Dieter Baurecht, Monira Siam, Gerald Reiter, Michael Schwarzott, Thomas Biirgi, Peter Briiesch
Chapter 5.
Ion-Beam Characterization in Superlattices Z. Zhang, J. R. Liu, Wei-Kan Chu
Chapter 6.
In Situ and Real-Time Spectroscopic Ellipsometry Studies: Carbon Based and Metallic TiNx Thin Films Growth S. Logothetidis
Chapter 7.
In Situ Faraday-Modulated Fast-Nulling Single-Wavelength Ellipsometry of the Growth of Semiconductor, Dielectric, and Metal Thin Films J. D. Leslie, H. X. Tran, S. Buchanan, J. J. Dubowski, S. R. Das, L. LeBrun
Chapter 8.
Photocurrent Spectroscopy of Thin Passive Films E Di Quarto, S. Piazza, M. Santamaria, C. Sunseri
Chapter 9.
Electron Energy Loss Spectroscopy for Surface Study Takashi Fujikawa
Chapter 10. Theory of Low-Energy Electron Diffraction and Photoelectron Spectroscopy from Ultra-Thin Films Jiirgen Henk Chapter 11. In Situ Synchrotron Structural Studies of the Growth of Oxides and Metals A. Barbier, C. Mocuta, G. Renaud Chapter 12. Operator Formalism in Polarization-Nonlinear Optics and Spectroscopy of Polarization-Inhomogeneous Media L L Gancheryonok, A. V. Lavrinenko Chapter 13. Secondary Ion Mass Spectrometry and Its Application to Thin Film Characterization Elias Chatzitheodoridis, George Kiriakidis, lan Lyon Chapter 14. A Solid-State Approach to Langmuir Monolayers, Their Phases, Phase Transitions, and Design Craig J. Eckhardt Chapter 15. Solid State NMR of Biomolecules Akira Naito, Miya Kamihira
Volume 3. FERROELECTRIC AND DIELECTRIC THIN FILMS Chapter 1. The Electrical Properties of High-Dielectric-Constant and Ferroelectric Thin Films for Very Large Scale Integration Circuits Joseph Ya-min Lee, Benjamin Chihming Lai Chapter 2.
High-Permittivity (Ba, Sr)TiO3 Thin Films M. Nayak, S. Ezhilvalavan, T. Y. Tseng
Chapter 3.
Ultrathin Gate Dielectric Films for Si-Based Microelectronic Devices C. Krug, L J. R. Baumvol
Chapter 4.
Piezoelectric Thin Films: Processing and Properties Floriana Craciun, Patrizio Verardi, Maria Dinescu
Chapter 5.
Fabrication and Characterization of Ferroelectric Oxide Thin Films Jong-Gul Yoon, Tae Kwon Song
CONTENTS OF VOLUMES IN THIS SET Chapter 6.
Ferroelectric Thin Films of Modified Lead Titanate J. Mendiola, M. L. Calzada
Chapter 7.
Point Defects in Thin Insulating Films of Lithium Fluoride for Optical Microsystems Rosa Maria Montereali
Chapter 8.
Polarization Switching of Ferroelectric Crystals Lung-Han Peng
Chapter 9.
High-Temperature Superconductor and Ferroelectric Thin Films for Microwave Applications F~lix A. Miranda, Joseph D. Warner, Guru Subramanyam
Chapter 10. Twinning in Ferroelectric Thin Films: Theory and Structural Analysis S. Pamir Alpay Chapter 11. Ferroelectric Polymer Langmuir-Blodgett Films Stephen Ducharme, S. P. Palto, V. M. Fridkin Chapter 12. Optical Properties of Dielectric and Semiconductor Thin Films L Chambouleyron, J. M. Marffnez
Volume 4. SEMICONDUCTOR AND SUPERCONDUCTING THIN FILMS Chapter 1. Electrochemical Passivation of Si and SiGe Surfaces J. Rappich, Th. Dittrich Chapter 2.
Epitaxial Growth and Structure of III-V Nitride Thin Films Dharanipal Doppalapudi, Theodore D. Moustakas
Chapter 3.
Optical Properties of Highly Excited (A1, In) GaN Epilayers and Heterostructures Sergiy Bidnyk, Theodore J. Schmidt, Jin-Joo Song
Chapter 4.
Electrical Conduction Properties of Thin Films of Cadmium Compounds R. D. Gould Carbon-Containing Heteroepitaxial Silicon and Silicon/Germanium Thin Films on Si(001) H. JOrg Osten
Chapter 5.
Chapter 6.
Low-Frequency Noise Spectroscopy for Characterization of Polycrystalline Semiconductor Thin Films and Polysilicon Thin Film Transistors Charalabos A. Dimitriadis, George Kamarinos
Chapter 7.
Germanium Thin Films on Silicon for Detection of Near-Infrared Light G. Masini, L. Colace, G. Assanto
Chapter 8.
Physical Properties of Amorphous Gallium Arsenide Roberto Murri, Nicola Pinto
Chapter 9.
Amorphous Carbon Thin Films S. R. P. Silva, J. D. Carey, R. U. A. Khan, E. G. Gerstner, J. V. Anguita
Chapter 10. High- Tc Superconductor Thin Films B. R. Zhao Chapter 11. Electronic and Optical Properties of Strained Semiconductor Films of Groups IV and III-V Materials George Theodorou Chapter 12. Growth, Structure, and Properties of Plasma-Deposited Amorphous Hydrogenated Carbon-Nitrogen Films D. E Franceschini Chapter 13. Conductive Metal Oxide Thin Films Quanxi Jia
xxv
xxvi
CONTENTS OF VOLUMES IN THIS SET
Volume 5. NANOMATERIALS AND MAGNETIC THIN FILMS Chapter 1. Nanoimprint Techniques Hella-C. Scheer, Hubert Schulz, Thomas Hoffmann, Clivia M. Sotomayor Torres Chapter 2. The Energy Gap of Clusters Nanoparticles, and Quantum Dots Klaus Sattler Chapter 3. Electronic States in GaAs-A1As Short-Period Superlattices: Energy Levels and Symmetry Weikun Ge, Jian-Bai Xia Chapter 4. Spin Waves in Thin Films, Superlattices and Multilayers Zhang Zhi-Dong Chapter 5. Quantum Well Interference in Double Quantum Wells Zhang Zhi-Dong Chapter 6. Electro-Optical and Transport Properties of Quasi-Two-Dimensional Nanostructured Materials Rodrigo A. Rosas, Ratil Riera, Jos~ L. Marfn, Germdn Campoy Chapter 7. Magnetism of Nanophase Composite Films D. J. Sellmyer, C. P. Luo, Y. Qiang, J. P. Liu Chapter 8. Thin Magnetic Films Hans Hauser, Rupert Chabicovsky, Karl Riedling Chapter 9. Magnetotransport Effects in Semiconductors Nicola Pinto, Roberto Murri, Marian Nowak Chapter 10. Thin Films for High-Density Magnetic Recording Genhua Pan Chapter 11. Nuclear Resonance in Magnetic Thin Films and Multilayers Mircea Serban Rogalski Chapter 12. Magnetic Characterization of Superconducting Thin Films M. R. Koblischka