Equipment & Materiats Processing
Sumitomo forms gallium refining JV in Shanghai S u m i t o m o C h e m i c a l Co
The plant will have the capacity
(Osaka, J a p a n ) has f o r m e d a joint v e n t u r e in Shanghai, China
to refine 40 tons p e r year
to e x p a n d high-purity gallium
process). Sttmitomo Chemical
p r o d u c t i o n . O w n e r s h i p is:
already p r o d u c e s 40 tons p e r
• 70% S u m i t o m o Chemical;
year in J a p a n a n d is to boost
• 15% I n a b a t a & Co; a n d
that to 60 t o n s w i t h i n the year
• 15% Technical Sourcing
(so total capacity will b e over
International.
100 tons p e r year).
New galliumbearing zones discovered Following its acquisition in J u n e of gallium m i n i n g fights
(using S u m i t o m o ' s o w n
o n the Cordero p r o p e r t y in Nevada, USA (see Issue 6, page 12), Gold C a n y o n Resources I n c (Vancouver, BC, Canada) has received final assay results from I n s p e c t o r a t e / R o c k y M o u n t a i n Laboratories for the s e c o n d g r o u p of samples from
Airtron GaAs shut down
its Phase I sampling program. These have identified three major n e w zones (North Ruja;
Since acquiring wafer manufac-
N o r t h r o p G r u m m a n is said
Southwest Extension; a n d
turer Litton Airtron (Morris
to be n o t c o n t i n u i n g to p r o d u c e GaAs wafers.
W h i t e Hills) w i t h values u p to
take-over of Litton Industries ( a n n o u n c e d last December),
However, there is still a
t o n n e , in addition to values u p
possibility that the SiC division
123.7 g/t in the Harper Pit a n d
N o r t h r o p G r u m m a n Corp (Los
North East Bradley Pits areas of
Angeles, CA, USA) had b e e n try-
may c o n t i n u e ( N o r t h r o p G r u m m a n already had SiC
ing to sell the business but, after
substrate- a n d d e v i c e - m a k i n g
not finding any takers, it has n o w
t e c h n o l o g y before its acquisi-
closed the p r o d u c t i o n facility.
t i o n o f Litton).
Plains, NJ, USA) as part of its
103.8 grams gallium p e r metric
the existing "M" Fault Zone. i Gold C a n y o n is due to b e g i n ! Phase I drilling in mid-October. ! * Robert G C a r r i n g t o n - presid e n t of the Nevada-based subsidiary Gold C a n y o n Resources
EMF continues growth
USA Inc f o r m e d in J u n e - has b e e n a p p o i n t e d CEO of Gold
EblF Ltd (Cambridge, UK) says it
Also, for more c o m p l e x struc-
has seen record chemical sales
tures w i t h regrowth, TBA a n d
in Q2/2001 ( a n d 200% g r o w t h over the last 12 m o n t h s , mainly
TBP give b e t t e r p e r f o r m a n c e
for DEOXTMA and EpiProofTBP),
the lower-temperature cracking.
reflecting the large n u m b e r of MOCVD tools sold over the last few years. G r o w t h is mainly in the US a n d Taiwan. It forecasts c o n t i n u e d g r o w t h in Q3-Q4. The DEOX range of TMA,TMG a n d TMI c a n b e used w h e r e l o w o x y g e n c o n t e n t is n e e d e d (particularly for VCSELs).The d e m a n d for group V p r e c u r s o r s TBA a n d TBP has also risen
d u e to the l o w e r V/III ratio a n d
N e w materials i n c l u d i n g the
Canyon Resources Inc.
BOC Edwards launches methylsilane
nitrogen source EpiProof uDMHy and DTBSi (a metal-organic
After c o m p l e t i n g characteriza-
source r e p l a c e m e n t for silane)
tion in May, BOC Edwards
have seen double-digit growth.
(Crawley, UK) has b e g u n pro-
EMF's d o u b l i n g i n capacity is o n target. The M o c h e m g r o u p V facility at Marburg, G e r m a n y should also d o u b l e over the
d u c t i o n a n d c u s t o m e r sampling of m o n o m e t h y l s i l a n e a n d monomethylsilane/hydrogen m i x t u r e s (used as a c a r b o n precursor in the CVD of SiGeC).
n e x t 12 m o n t h s .
sharply, preferred b y m a n y start-
EMF is also p i o n e e r i n g a n e w
u p s to arsine and p h o s p h i n e .
t e c h n i q u e for in-situ m o n i t o r -
The shift is driven b y safety and the authorities (especially in the
ing of c h e m i c a l s d u r i n g the v a c u u m filling process, replac-
US). However, there is an advan-
ing certification b y ICP a n d
tage in using MO's over hydrides
NMR ( w h i c h are n o l o n g e r
Several c u s t o m e r studies are n o w u n d e r w a y to tailor specifications and m i x t u r e s to individual applications. Special m o n o m e t h y l s i l a n e b l e n d s are available.
i n terms of p u r i t y (especially
effective for m e a s u r e m e n t s at
The e l e c t r o n i c materials
for silane).TBP also eliminates
the ultra-low levels of i m p u r i -
g r o u p is also d e v e l o p i n g o t h e r
deposits in the exhaust line
ties n o w s e e n i n the DEOX
materials for low-k a n d SiGe
(a fire hazard for PH3).
grade materials).
applications.
I I I - V s R E V I E W THE A D V A N C E D S E M I C O N D U C T O R M A G A Z I N E V O L z 4 - N O 8 - O c t o b e r a o o z