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WYKO RST surface profiler
Tencor Instruments announces new atomic force metrology system for semiconductor applications Tencor Instruments has announced the Tencor AF-10, an atomic force metrology system designed to meet the requirements of semiconductor applications. The Tencor AF-10 provides three-dimensional imaging and measurement of surface topography on intact 200 mm semiconductor wafers and photomasks. The result of the company's recent strategic alliance with Park Scientific Instruments (PSI), the system was developed and manufactured by PSI and will be marketed exclusively by Tencor Instruments to the semiconductor industry. The Tencor AF-10's linearized scanning method with real-time positional feedback and calibration allows accurate three-dimensional metrology. The achieved lateral image resolution exceeds that of optical microscopes, while the vertical resolution is greater than that of electron microscopes. The system has been specifically designed for semiconductor production use where measurement of the extremely fine submicron features
encountered in trenches, vias or plugs is becoming increasingly important. In addition, measuring microroughness is also a critical application as it correlates directly to breakdown voltages and operating speed of memory cells. An 8 x 8" inspection area allows whole wafers up to 200 mm to be measured. Replacement of the measurement tip is simple, a cartridge design with proprietary cantilever eliminates the need for laser and optical alignment. The entire tip replacement process can be completed in less than two minutes. The tip and sample can be viewed either normally with high magnification or at an oblique angle for precise placement of the tip over the feature of interest. The system's user interface is based on the Windows 3.1 multitasking environment. Images, data displays, tables and charts can be processed simultaneously. Comprehensive data analysis and presentation capabilities include parameters such as step height, microrough-
Tencor ® AF-10 Atomic Force Metrology System A 5-by-5 micron scan of a DRAM shows the granularity of polysilicon lines. In addition to the SEM-like quality of the image, the Tencor AF-10 adds calibrated measurements in X-Y and Z, w i t h o u t having to break the wafer hess, surface area and bearing ratio over either a single profile line or a selected area. Tencor Instruments, 2400 Charleston Rdo, Mountain View, CA 94043, USA.
System 2000 offers sub-nanometer multi-axis positioning Queensgate Instruments announces the System 2000 NanoPositioning System. System 2000 combines piezoelectric (and electrostrictive) translators, multi-axis stages, and position sensors to create instruments that can move and measure to better than a nanometer. System 2000 has a wide range of applications. These include controlling sophisticated Atomic Force Microscopes, aligning semiconductor wafers, measuring deformation of precision structures, and controlling interferometers and machine tools.
System 2000 is based on Queensgate's NanoSensor capacitive position measuring technology. New closed-loop metrological XY and XYZ stages have integrated position sensors that offer high performance for scanning probe, X-ray and confocal microscopy. Its linearity (better than 0.1%), combined with its sub-nanorneter noise and repeatability, generates metrological and scientific measurements to a high accuracy. Queensgate Instruments Inc., 1760 Grand Ave., Merrick, NY 11566, USA.
WYK0 RST surface profiler The new WYKO RST Rough surface Tester rapidly measures roughness and step heights to 100/zm on surfaces such as textured aluminum and steel, etched silicon, plastics, magnetic tape and diskettes, ceramics, and even paper. The RST optical profiler features DSP electronics that measure areas much faster than stylus systems. Each data point is processed independently, so surfaces with discontinuities PRECISION ENGINEERING
or steeply sloped subareas can be measured without those regions affecting the surrounding data. Results are displayed as threedimensional color graphics along with industry-standard surface statistics. The RST DOS-based software features database and easy networking for process control applications. WYKO Corp., 2650 E. EIvira Rd., Tucson, AZ 85706, USA. 195
encountered in trenches, vias or plugs is becoming increasingly important. In addition, measuring microroughness is also a critical application as it correlates directly to breakdown voltages and operating speed of memory cells. An 8 x 8" inspection area allows whole wafers up to 200 mm to be measured. Replacement of the measurement tip is simple, a cartridge design with proprietary cantilever eliminates the need for laser and optical alignment. The entire tip replacement process can be completed in less than two minutes. The tip and sample can be viewed either normally with high magnification or at an oblique angle for precise placement of the tip over the feature of interest. The system's user interface is based on the Windows 3.1 multitasking environment. Images, data displays, tables and charts can be processed simultaneously. Comprehensive data analysis and presentation capabilities include parameters such as step height, microrough-
Tencor ® AF-10 Atomic Force Metrology System A 5-by-5 micron scan of a DRAM shows the granularity of polysilicon lines. In addition to the SEM-like quality of the image, the Tencor AF-10 adds calibrated measurements in X-Y and Z, w i t h o u t having to break the wafer hess, surface area and bearing ratio over either a single profile line or a selected area. Tencor Instruments, 2400 Charleston Rdo, Mountain View, CA 94043, USA.
System 2000 offers sub-nanometer multi-axis positioning Queensgate Instruments announces the System 2000 NanoPositioning System. System 2000 combines piezoelectric (and electrostrictive) translators, multi-axis stages, and position sensors to create instruments that can move and measure to better than a nanometer. System 2000 has a wide range of applications. These include controlling sophisticated Atomic Force Microscopes, aligning semiconductor wafers, measuring deformation of precision structures, and controlling interferometers and machine tools.
System 2000 is based on Queensgate's NanoSensor capacitive position measuring technology. New closed-loop metrological XY and XYZ stages have integrated position sensors that offer high performance for scanning probe, X-ray and confocal microscopy. Its linearity (better than 0.1%), combined with its sub-nanorneter noise and repeatability, generates metrological and scientific measurements to a high accuracy. Queensgate Instruments Inc., 1760 Grand Ave., Merrick, NY 11566, USA.
WYK0 RST surface profiler The new WYKO RST Rough surface Tester rapidly measures roughness and step heights to 100/zm on surfaces such as textured aluminum and steel, etched silicon, plastics, magnetic tape and diskettes, ceramics, and even paper. The RST optical profiler features DSP electronics that measure areas much faster than stylus systems. Each data point is processed independently, so surfaces with discontinuities PRECISION ENGINEERING
or steeply sloped subareas can be measured without those regions affecting the surrounding data. Results are displayed as threedimensional color graphics along with industry-standard surface statistics. The RST DOS-based software features database and easy networking for process control applications. WYKO Corp., 2650 E. EIvira Rd., Tucson, AZ 85706, USA. 195