1104. Investigation of titanium sheets for sputter-ion pumps

1104. Investigation of titanium sheets for sputter-ion pumps

Classified Abstracts 1101--1109 451 Vacuum Apparatus and Auxiliaries 20 22 Determination of the diffusion coefficients of H and CO in nickel by me...

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Classified Abstracts 1101--1109

451

Vacuum Apparatus and Auxiliaries

20

22 Determination of the diffusion coefficients of H and CO in nickel by means of a mass spectrometer. See Abstr. No. 1083.

20 : 30 : 19 1102. Apparatus for the controlled deposition of multilayer films.

22 Mass-spectrometric studies at high temperatures : The dissociation energies of the monofluorides and difluorides of Silicon and Germanium. See Abstr. No. 1084.

20.

Pumping Systems

1101. Vacuum coaters. Electron Equip. News, 6, Sept. 1964, 37.

(France) The vacuum deposition is controlled by observing changes in the optical transmittance or reflectance of the multilayer film. The apparatus can be used over the complete wavelength range from ultraviolet to near infrared and ensures constancy of deposition to within ± M65 for the narrow band-pass filter of a 13 Cage layer film. (Japan) T. Sawaki et al., J. Phys., (France), 25 (1/2), 1964, 258-261.

21.

Pumps

and P u m p

Fluids

21 1103. Sputter-ion pumps for low pressure operations. (U.S.A.) The pumping speed of sputter-ion pumps depends on the intensity of the cold cathode gas discharge. This discharge will retain constant characteristics (I/P ratio) down to a limiting pressure when it becomes very much less intense. The value of this transition pressure depends on the electrode geometry, voltage and magnetic field and usually ranges from 10 8 to 10 -9 torr. By careful choice of the parameters, the critical region can be extended to 10 -zz tort. S. L. Rutherford, Trans. 10 Nat. Vac. Symp., New York, 1963, 185-190. 21 : 41 1104. Investigation of titanium sheets for sputter-ion pumps.

22 Ionization vacuum gauge measures absolute pressure up to lmm Hg. See Abstr. No. 1088. 22 Mass spectrometer investigations of the degassing of molybdenum, tungsten and niobium on heating them in vacuum. See Abstr. No. 1153. 22 Mass-spectrometric study of the reactions of O atoms with NO andNO2. SeeAbstr. No. 1161. 22 Ultra-high vacuum in unbaked (rubber-sealed) systems. See Abstr. No. 1065. 22 Mechanical McLeod gauge for accurate measurement of pressures in the 5~-500tz range. See Abstr. No. 1066. 22 1106. A differential mercury manometer. (Great Britain) A U-tube mercury manometer is modified to measure differential pressure ranging from 0.5 to .001 torr. (Great Britain) H. J. M. Hanley, J. Sci. Instrum., 41 (7), July, 1964, 486.

(Italy) Titanium sheets supplied by different makers were examined as to their suitability for cathode coating in sputter ion pumps. Considerable differences were found in the pumping speed for argon (factor 5) and relation of discharge current to gas pressure (factor 2½). G. Reich, Nuovo Ctmento Suppl. (Ser. 1), 1 (2), 1963, 487-493. 21 " 41 1105. Interpretation of anomalous currents in titanium iongetter pumps. (Hungary) An anomalous current component on the pump collector was noted when the grid temperature exceeded 1400°C. This was traced to the p r ~ e n c e of ionized titanium atoms in the suction compartment of the pump. R. Toros, Acta Tech. Hungar., 45 (1/2), 1964, 213-223.

Gas evolution during the baking of sputter-ion pumps. No. 1152. 22.

J. P. Freytag and A. Schram, Nuovo Cimento Suppl. (Ser. 1), 1 (2), 1963, 405-417. 22 1108. A fast electrometer amplifier for partial pressure gauges

21 See Abstr.

Gauges 22

Micromanometers.

22 1107. Realization of a Bayard-Alpert gauge. (Italy) The influence of the following parameters on the sensitivity of a B - A gauge is examined (1) pitch and wire diameter of grid, (2) length of filament, (3) length and diameter of collector wire, (4) shielding at ends of grid and between electrode and glass bulb. It appears that the sensitivity of a standard reference gauge can be increased by 50 per cent by proper choice of parameters.

See Abstr. No. 1067. 22

(U.S.A.) Partial pressure gauges used in conjunction with fast processes require very high scanning rates and the response of the electrometer amplifier of the d.c. signal of the gauge must be very rapid. A short description of the circuit of a suitable 3-stage electrometer amplifier is given, including results obtained when used with an omegatron gauge. A. Barz and P. Herrwerth, Trans. 10 Nat. Vae. Syrup,, New York, 1963,275-277.

Vacuum instrumentation. See Abstr. No. 1068.

22 22

Calibrating thermal conductivity gauges. See Abstr. No. 1069.

1109. Vacuum gauges. (Great Britain) Electron. Equip. News, 6, June 1964, 46.