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1722. Ultrahigh-vacuum gauge calibration system
Classified abstracts 1711--1724 T h e new series of p u m p s was designed: G I N - 5 with the speed 5,000 1/sec -~ for air, G I N - 2 (speed 2,000 I/sec -1) a n d G I N - 0 5 M 1 (speed 500 l/sec-~). A b s o r b i n g surface is for G I N - 5 : 5 0 0 × 750 ram, G I N - 2 : 260 x 600 ram, GIN-05 M 1 : 160 x 350. T h e design of these p u m p s is described in detail. Spectra o f residual gases are given a n d it is s h o w n that residual a t m o s p h e r e with ultimate total pressure 3 x 10 9 torr c o n t a i n s H2, H 2 0 , CH4, CO, Ar. Also the relation between Ti e v a p o r a t i n g speed a n d the p u m p i n g speed is shown. These p u m p s are c o m p a r e d with H e r a e u s type GP-101 (from 1960 year). M e a s u r e d values are in accordance with theoretical ones given by D u s h m a n . P h o t o g r a p h s are included. (USSR) A S Nazarov et aI, Pribory Tekh Eksp, I1 (2), Mar Apr 1966, 102-108
(in Russian). 21 1711. Triode Penning pump with refrigerated electrodes. (USSR) A new type of P e n n i n g triode p u m p that has a n o d e a n d collector cooled by liquid nitrogen is described. W i t h o u t this cooling this p u m p reaches ultimate pressure 2 . 1 0 10 torr during 48 h o u r s a n d h a s p u m p ing speed 8 1 see -a for air or 1.7 1 sec -a for A t . With cooled electrodes the same p u m p reaches 1 × 10 " t o r r in 8 h o u r s with the speed 161 sec for air a n d 3.1 1 sec -x for Ar. Cooling the electrodes increases the discharge current. Also larger p u m p s with speed 200 1 sec -~ are described. ( USS R.) M I Vinogradov and E M Rudnitskii, Priboo' Tekh Eksp, 11 (2),
Mar-Apr 1966, 108-112 (in Russian).
22. Gauges 22:12 Instrument measures very small vacuum-pressure change. See abstract n u m b e r 1635. 22 : 20 : 31 Use of the omegatron for the improvement of the pumping techniques of electron tubes. See abstract n u m b e r 1675. 22 : 25 : 21 New Zeiss Jena products in the Spring Leipzig Fair 1966. See abstract n u m b e r 1709. 22 1712. A promising approach to X-ray reduction in hot-filament ionization gauges. (USA) Several experimental gauges have been designed a n d tested, a i m e d at optimizing the electrode geometry a n d configuration o f hot-filament v a c u u m ionization gauges for a lower X-ray limit. F P Clay J r and L T Melfi Jr, J Vac Sci Technol, 3 (3), 1966, 167-168. 22 : 33 Apparatus for obtaining high speed atom and molecule beams. See abstract n u m b e r 1811. 22 : 30 1713. A mass spectrometer analysis of the residual atmosphere which results from cleaning the substrate in a conventional evaporator by means of a high frequency discharge. (France) A new technique for the deposition of thin films h a s been developed in which the n o r m a l glow discharge cleaning at pressures of the order o f 10 2 torr is replaced by cleaning with a high frequency discharge at a m u c h lower pressure. T h i s is c o m b i n e d with an adsorption effect to p r o d u c e a residual a t m o s p h e r e in which it is possible to deposit high quality films. A m a s s spectrometer analysis o f the residual a t m o s p h e r e at various stages o f the deposition cycle is given. A H Gregg and D J Reid, Le Vide, 122, 1966, 171-176 (in French). 22 1714. McLeod gauge with automatic zeroing. (USA) A M c L e o d gauge is modified to provide a n t o m a t i c zeroing, simplified operation, a n d increased sensitivity. R H Work and C E H a w k , Research/Development, 17, June 1966,
79-81. 22 1715. Disturbing phenomenon in multiple ionization. Reaction of the cathode in gas analysis using an omegatron. (France) It is often difficult to convert the ionic c u r r e n t obtained by m e a n s of a n o m e g a t r o n into partial pressure, since the possibilities of error a n d c o n f u s i o n are n u m e r o u s . A better a c q u a i n t a n c e o f the disturbing p h e n o m e n a c a n give m o r e accurate m e a s u r e m e n t . E Bescond, Le Vide, 122, 1966, 15~161 (in French). 22 1716. A two-chamber ionization gauge. (Germany) In order to avoid p e r t u r b a t i o n s o f the pressure m e a s u r e m e n t with an ionization gauge caused by the interaction of the electron gun with
510
the gas in the v o l u m e to be measured, a t w o - c h a m b e r ionization gauge was constructed. Electron b e a m p r o p a g a t i o n a n d ionization take place in two spaces separated almost completely as regards v a c u u m technique. T h e t w o - c h a m b e r gauge was calibrated for the range f r o m 10-1-I0 -1° torr a n d its behaviour studied by investigations with Blears effect. E W Blauth and G Venus, Inst jur Plasmaphysik, GmbH, Garching,
West German),, June 1965, 43 pages (in German). 22 1717. Measurement of pressure in high and ultrahigh vacuum regions using ionization gauges. Part I. Hot cathode gauges. (India) Recent developments in the design a n d operation o f h o t cathode ionization gauges are reviewed. It is n o t e d that cold-cathode gauges avoid s o m e of the limitations o f the hot-cathode gauge. S K Sharma, J Sci hut Res, 24, 1965, 57~582. 22 1718. A technique for micromanometry. (USA) A n i n s t r u m e n t for m e a s u r i n g pressure differences as low as 10 t L torr in the flow of gaseous media is described. T h e operating principle is based on Levy's observation that the velocity o f flow in a tube is determined by a n impressed pressure difference a n d the dimensions of the tube. H J Carper and R A Burton, AIAA J, 4, 1966, 549-550. 22 1719. Omegatron mass spectrometer for partial pressure measurements in upper atmosphere. (USA) A simple o m e g a t r o n mass analyzer used for m e a s u r i n g density a n d temperature o f nitrogen in the 100-350 k m region of the u p p e r a t m o s p h e r e has been developed. T h e mechanical a n d electrical c o n figurations have been designed for rocket flight application, a n d the operating parameters optimized for the u p p e r a t m o s p h e r e measuremerits. H B Niemann, Rev Sci Instrum, 37, June 1966, 722-728. 22 1720. Bayard-Alpert ion gauge as cesium partial pressure gauge.
( USA ) J Burns, Rev Sci Instrum, 37, 1966 801-802. 22 1721. A new high frequency type of mass spectrometer with two electrodes. (France) T h e principle of a new type of m a s s spectrometer using a n H F electric field generated between two parallel plates, in which ions are being injected parallel to the m e d i a n plane has been studied. T h e spectra are obtained by sweeping the frequency. F o r each m a s s there exists a whole series o f resonance frequencies permitting the transmission. By reducing the luminosity it is possible to attain a resolving power o f a b o u t 200. A low resolution prototype intended for the analysis o f h y d r o g e n ions, p r o d u c e d by a d u o p l a s m a t r o n source a n d accelerated u n d e r 30-40 kv h a s been constructed a n d tried out. Possible applications as h e l i u m leak detector or spectrometer for residual gases are envisaged. T h e whole system is light a n d compact. G Gautherin et al, Le Vide, 122, 1966, 120-131 (in French). 22 1722. Ultrahigh-vacuum gauge calibration system. (USA) In the calibration system described, a d y n a m i c v a c u u m system was used with pressure control accomplished by admitting gas at a k n o w n rate t h r o u g h a molecular leak. D H Holkeboer, Test Eng and Mgmt, 14, 1965, 16-17.
22 1723. Modified diaphragm pressure gauge for corrosive gases. (USA) T h e B o o t h - C r o m e r d i a p h r a g m gauge h a s been modified to use a line variable differential t r a n s f o r m e r to detect the position of the diap h r a g m . The sensitivity o f the unit is 0.01 t o m T h e ruggedness a n d simplicity o f the original gauge are retained. 1 Shaft, Rev Sci Instrum, 37, ]966, 767-768. 22 1724. Design of electromagnet mass-spectrometer and its characteristics. ( USSR) Designed in D u b n a U n i t e d Nuclear Research Institute, the massspectrometer c a n work u p to masses of M - - 2 6 0 . It is based on electromagnet type SP-57 with magnetic field intensity regulated up to 0.8 T a n d stabilized o n =1=0.05 per cent. Accelerating voltage stabilization (up to 65 kV) is described in detail. R a d i u s of the ion p a t h is 70 cm. High v a c u u m c h a m b e r is p u m p e d by two oil diffusion p u m p s with liquid nitrogen traps. Calibrating experiments were m a d e by analysing a mixture of Ti ~°3 a n d TI '-'°5 ions. T h e half-peak resolu-
(in Russian). 21 1711. Triode Penning pump with refrigerated electrodes. (USSR) A new type of P e n n i n g triode p u m p that has a n o d e a n d collector cooled by liquid nitrogen is described. W i t h o u t this cooling this p u m p reaches ultimate pressure 2 . 1 0 10 torr during 48 h o u r s a n d h a s p u m p ing speed 8 1 see -a for air or 1.7 1 sec -a for A t . With cooled electrodes the same p u m p reaches 1 × 10 " t o r r in 8 h o u r s with the speed 161 sec for air a n d 3.1 1 sec -x for Ar. Cooling the electrodes increases the discharge current. Also larger p u m p s with speed 200 1 sec -~ are described. ( USS R.) M I Vinogradov and E M Rudnitskii, Priboo' Tekh Eksp, 11 (2),
Mar-Apr 1966, 108-112 (in Russian).
22. Gauges 22:12 Instrument measures very small vacuum-pressure change. See abstract n u m b e r 1635. 22 : 20 : 31 Use of the omegatron for the improvement of the pumping techniques of electron tubes. See abstract n u m b e r 1675. 22 : 25 : 21 New Zeiss Jena products in the Spring Leipzig Fair 1966. See abstract n u m b e r 1709. 22 1712. A promising approach to X-ray reduction in hot-filament ionization gauges. (USA) Several experimental gauges have been designed a n d tested, a i m e d at optimizing the electrode geometry a n d configuration o f hot-filament v a c u u m ionization gauges for a lower X-ray limit. F P Clay J r and L T Melfi Jr, J Vac Sci Technol, 3 (3), 1966, 167-168. 22 : 33 Apparatus for obtaining high speed atom and molecule beams. See abstract n u m b e r 1811. 22 : 30 1713. A mass spectrometer analysis of the residual atmosphere which results from cleaning the substrate in a conventional evaporator by means of a high frequency discharge. (France) A new technique for the deposition of thin films h a s been developed in which the n o r m a l glow discharge cleaning at pressures of the order o f 10 2 torr is replaced by cleaning with a high frequency discharge at a m u c h lower pressure. T h i s is c o m b i n e d with an adsorption effect to p r o d u c e a residual a t m o s p h e r e in which it is possible to deposit high quality films. A m a s s spectrometer analysis o f the residual a t m o s p h e r e at various stages o f the deposition cycle is given. A H Gregg and D J Reid, Le Vide, 122, 1966, 171-176 (in French). 22 1714. McLeod gauge with automatic zeroing. (USA) A M c L e o d gauge is modified to provide a n t o m a t i c zeroing, simplified operation, a n d increased sensitivity. R H Work and C E H a w k , Research/Development, 17, June 1966,
79-81. 22 1715. Disturbing phenomenon in multiple ionization. Reaction of the cathode in gas analysis using an omegatron. (France) It is often difficult to convert the ionic c u r r e n t obtained by m e a n s of a n o m e g a t r o n into partial pressure, since the possibilities of error a n d c o n f u s i o n are n u m e r o u s . A better a c q u a i n t a n c e o f the disturbing p h e n o m e n a c a n give m o r e accurate m e a s u r e m e n t . E Bescond, Le Vide, 122, 1966, 15~161 (in French). 22 1716. A two-chamber ionization gauge. (Germany) In order to avoid p e r t u r b a t i o n s o f the pressure m e a s u r e m e n t with an ionization gauge caused by the interaction of the electron gun with
510
the gas in the v o l u m e to be measured, a t w o - c h a m b e r ionization gauge was constructed. Electron b e a m p r o p a g a t i o n a n d ionization take place in two spaces separated almost completely as regards v a c u u m technique. T h e t w o - c h a m b e r gauge was calibrated for the range f r o m 10-1-I0 -1° torr a n d its behaviour studied by investigations with Blears effect. E W Blauth and G Venus, Inst jur Plasmaphysik, GmbH, Garching,
West German),, June 1965, 43 pages (in German). 22 1717. Measurement of pressure in high and ultrahigh vacuum regions using ionization gauges. Part I. Hot cathode gauges. (India) Recent developments in the design a n d operation o f h o t cathode ionization gauges are reviewed. It is n o t e d that cold-cathode gauges avoid s o m e of the limitations o f the hot-cathode gauge. S K Sharma, J Sci hut Res, 24, 1965, 57~582. 22 1718. A technique for micromanometry. (USA) A n i n s t r u m e n t for m e a s u r i n g pressure differences as low as 10 t L torr in the flow of gaseous media is described. T h e operating principle is based on Levy's observation that the velocity o f flow in a tube is determined by a n impressed pressure difference a n d the dimensions of the tube. H J Carper and R A Burton, AIAA J, 4, 1966, 549-550. 22 1719. Omegatron mass spectrometer for partial pressure measurements in upper atmosphere. (USA) A simple o m e g a t r o n mass analyzer used for m e a s u r i n g density a n d temperature o f nitrogen in the 100-350 k m region of the u p p e r a t m o s p h e r e has been developed. T h e mechanical a n d electrical c o n figurations have been designed for rocket flight application, a n d the operating parameters optimized for the u p p e r a t m o s p h e r e measuremerits. H B Niemann, Rev Sci Instrum, 37, June 1966, 722-728. 22 1720. Bayard-Alpert ion gauge as cesium partial pressure gauge.
( USA ) J Burns, Rev Sci Instrum, 37, 1966 801-802. 22 1721. A new high frequency type of mass spectrometer with two electrodes. (France) T h e principle of a new type of m a s s spectrometer using a n H F electric field generated between two parallel plates, in which ions are being injected parallel to the m e d i a n plane has been studied. T h e spectra are obtained by sweeping the frequency. F o r each m a s s there exists a whole series o f resonance frequencies permitting the transmission. By reducing the luminosity it is possible to attain a resolving power o f a b o u t 200. A low resolution prototype intended for the analysis o f h y d r o g e n ions, p r o d u c e d by a d u o p l a s m a t r o n source a n d accelerated u n d e r 30-40 kv h a s been constructed a n d tried out. Possible applications as h e l i u m leak detector or spectrometer for residual gases are envisaged. T h e whole system is light a n d compact. G Gautherin et al, Le Vide, 122, 1966, 120-131 (in French). 22 1722. Ultrahigh-vacuum gauge calibration system. (USA) In the calibration system described, a d y n a m i c v a c u u m system was used with pressure control accomplished by admitting gas at a k n o w n rate t h r o u g h a molecular leak. D H Holkeboer, Test Eng and Mgmt, 14, 1965, 16-17.
22 1723. Modified diaphragm pressure gauge for corrosive gases. (USA) T h e B o o t h - C r o m e r d i a p h r a g m gauge h a s been modified to use a line variable differential t r a n s f o r m e r to detect the position of the diap h r a g m . The sensitivity o f the unit is 0.01 t o m T h e ruggedness a n d simplicity o f the original gauge are retained. 1 Shaft, Rev Sci Instrum, 37, ]966, 767-768. 22 1724. Design of electromagnet mass-spectrometer and its characteristics. ( USSR) Designed in D u b n a U n i t e d Nuclear Research Institute, the massspectrometer c a n work u p to masses of M - - 2 6 0 . It is based on electromagnet type SP-57 with magnetic field intensity regulated up to 0.8 T a n d stabilized o n =1=0.05 per cent. Accelerating voltage stabilization (up to 65 kV) is described in detail. R a d i u s of the ion p a t h is 70 cm. High v a c u u m c h a m b e r is p u m p e d by two oil diffusion p u m p s with liquid nitrogen traps. Calibrating experiments were m a d e by analysing a mixture of Ti ~°3 a n d TI '-'°5 ions. T h e half-peak resolu-