- Email: [email protected]
3139. Auger analysis of InSb ir detector arrays
Classified abstracts 31 37-31 41
tile photoemission experiments with LEED and work-function mcasurenaents, it is found that the surface of indium phosphide is not stable when it is activated, i.e., the photoemission slowly changed. An cstimatc of the thermalization length is derived and the value is used to describc the discrepancy betwcen the diffusion model theory and the cxf~erimcntal results at photon energies higher than 1.5 eV, Kenn-Ho Chang and P H E Meijer, J I'¢tc Sci Techm~l, 14 (3), 1977, 789-796. 36 3137. Auger electron spectroscopic depth profiling, techniques applied to ultrathin electrochemically deposited metal layers. (USAI The Auger electron spectroscopic depth profiling technique is applied to the study of the initial equivalent monolayer of electrodeposited Ag on thin-film Pt electrodes. The ultimate depth resolution of this technique is determined by examining ultrathin layers of Ag which have been ion deposited from a zeolite source in ultrahigh vacuum. The exponential decay apparent in the examination of such layers is explained from elementary considerations of the sputtering process. These are seen to be the resolution-limiting factor for these layers. The depth resolution is shown to be on the order of 5 ,~. Examination of monolayer and submonolayer films of Ag electrodeposited from an AgCIOt/sulfolane solution shows that there is an absorbed overlayer of S (of solvent origin) followed by the electrodeposited Ag film, which is rich in CI (of solute origin), followed by the Pt substrate, which also contains high levels of CI. The absence of underpotential deposition is clearly demonstrated. There appears to be two chemical states of CI present which are distinguished by their relative thermal stabilities. M L Knotok el al, J I/ac Sci Technol, 14 (2), 1977, 705-710. 36 3138. Evaluation of impurity and contamination levels on mica surfaces using SSIMS. (USA) Static secondary-ion mass spectrometry (SSIMS) has been used to analyze surfaces of Brazilian muscovite subjected to various standard cleaning techniques, viz., air cleavage, UHV cleavage, and UHV heating. The purpose of these experiments is to establish the surface composition and contamination state before and after application of the technique. Major contamination species are identified as hydrocarbon compounds, probably of atmospheric origin, either from carbonaceous gases or dust. UHV cleavage is established as the only method of those tried which produces a contamination-free surface. Preliminary results of UHV heat treatment of the surface are given. Results from a simultaneous SSIMS and ion cleaning experiment are used to indicate the form of the surface contamination observed. Absolute surface concentrations of common moscovite impurities in the UHV-cleaved surface are computed from SSIMS spectra and a knowledge of lattice sites occupied by the impurity atoms (as isomorphous replacements). (GB) M G Dowsett et al, J Vac Sci Technol, 14 (2), 1977, 711-717.
36 3139. Auger analysis of lnSb ir detector arrays. (USA) Auger and depth-profile analyses were performed on a series of lnSb infrared (Jr) detector arrays with the view of detecting interfacial contaminants and elucidating their causes which resulted from faults in the processing of the arrays. Three areas in the processing sequence were identified in which the localization of interracial contaminants and misapplication of materials had occurred with serious consequential effects on array performance and yield. These were wafer diffusion, deposition of SiO, and anodization of the InSb surface. Localized buildup of cadmium dopant during diffusion caused poor junction formation and potential nucleating sites for peeling of contacts. Poor SiO deposition producing uneven and nonstoichiometic SiO layers caused poor device performance. The anodization process was a potential source of introduction of copper contaminant. Carbon contaminant was found to occur at all interfaces of suspected arrays, and if its concentration was greater that 10 at.°~,, the array performance was seriously affected. The AES technique proved most useful in providing quality-control checks in the array processing sequence. W S Chan and J T Wan, J Vac Sci Technol, 14 (2), 1977, 718-722. 36 3140. Analysis of solid surface monolayers by mass and energy spectrometry methods. (G B) A survey is presented of the most important methods for producing mass or energy spectra with characteristic peaks of single chemical elements in the uppermost monatomic layers of solid surfaces. Some special problems are discussed, such as surface selectivity, surface layer destruction, sensitivity and the possibility of quantitative measurements. The references include some of the most instructive review papers on particular methods and important special topics. (Germany) N Treitz, J Phys E: Scient htstrmn, 10 (6), 1977, 573-585.
37. INORGANIC CHEMISTR.Y, ANALYTICAL CHEMISTRY, DISTILLATION, MISCELLANEOUS CHEMICAL APPLICATIONS, OIL AND HYDROCARBON TECHNOLOGY 37 3141. The effect of dissolved oxygen on co-field pumping in mineral oil. (GB) Using direct voltages the EHD head due to co-field motion in transformer oil has been measured for degassed oil and oil saturated with oxygen. It was found that the presence of oxygen produced a great reduction in the measured head compared with degassed oil. The effect of gap length on the head was also investigated. (Egypt) M S Khalil et al, JPhys D: ApplPhys, 10 (9), 1977, LI23-LI26.
667
tile photoemission experiments with LEED and work-function mcasurenaents, it is found that the surface of indium phosphide is not stable when it is activated, i.e., the photoemission slowly changed. An cstimatc of the thermalization length is derived and the value is used to describc the discrepancy betwcen the diffusion model theory and the cxf~erimcntal results at photon energies higher than 1.5 eV, Kenn-Ho Chang and P H E Meijer, J I'¢tc Sci Techm~l, 14 (3), 1977, 789-796. 36 3137. Auger electron spectroscopic depth profiling, techniques applied to ultrathin electrochemically deposited metal layers. (USAI The Auger electron spectroscopic depth profiling technique is applied to the study of the initial equivalent monolayer of electrodeposited Ag on thin-film Pt electrodes. The ultimate depth resolution of this technique is determined by examining ultrathin layers of Ag which have been ion deposited from a zeolite source in ultrahigh vacuum. The exponential decay apparent in the examination of such layers is explained from elementary considerations of the sputtering process. These are seen to be the resolution-limiting factor for these layers. The depth resolution is shown to be on the order of 5 ,~. Examination of monolayer and submonolayer films of Ag electrodeposited from an AgCIOt/sulfolane solution shows that there is an absorbed overlayer of S (of solvent origin) followed by the electrodeposited Ag film, which is rich in CI (of solute origin), followed by the Pt substrate, which also contains high levels of CI. The absence of underpotential deposition is clearly demonstrated. There appears to be two chemical states of CI present which are distinguished by their relative thermal stabilities. M L Knotok el al, J I/ac Sci Technol, 14 (2), 1977, 705-710. 36 3138. Evaluation of impurity and contamination levels on mica surfaces using SSIMS. (USA) Static secondary-ion mass spectrometry (SSIMS) has been used to analyze surfaces of Brazilian muscovite subjected to various standard cleaning techniques, viz., air cleavage, UHV cleavage, and UHV heating. The purpose of these experiments is to establish the surface composition and contamination state before and after application of the technique. Major contamination species are identified as hydrocarbon compounds, probably of atmospheric origin, either from carbonaceous gases or dust. UHV cleavage is established as the only method of those tried which produces a contamination-free surface. Preliminary results of UHV heat treatment of the surface are given. Results from a simultaneous SSIMS and ion cleaning experiment are used to indicate the form of the surface contamination observed. Absolute surface concentrations of common moscovite impurities in the UHV-cleaved surface are computed from SSIMS spectra and a knowledge of lattice sites occupied by the impurity atoms (as isomorphous replacements). (GB) M G Dowsett et al, J Vac Sci Technol, 14 (2), 1977, 711-717.
36 3139. Auger analysis of lnSb ir detector arrays. (USA) Auger and depth-profile analyses were performed on a series of lnSb infrared (Jr) detector arrays with the view of detecting interfacial contaminants and elucidating their causes which resulted from faults in the processing of the arrays. Three areas in the processing sequence were identified in which the localization of interracial contaminants and misapplication of materials had occurred with serious consequential effects on array performance and yield. These were wafer diffusion, deposition of SiO, and anodization of the InSb surface. Localized buildup of cadmium dopant during diffusion caused poor junction formation and potential nucleating sites for peeling of contacts. Poor SiO deposition producing uneven and nonstoichiometic SiO layers caused poor device performance. The anodization process was a potential source of introduction of copper contaminant. Carbon contaminant was found to occur at all interfaces of suspected arrays, and if its concentration was greater that 10 at.°~,, the array performance was seriously affected. The AES technique proved most useful in providing quality-control checks in the array processing sequence. W S Chan and J T Wan, J Vac Sci Technol, 14 (2), 1977, 718-722. 36 3140. Analysis of solid surface monolayers by mass and energy spectrometry methods. (G B) A survey is presented of the most important methods for producing mass or energy spectra with characteristic peaks of single chemical elements in the uppermost monatomic layers of solid surfaces. Some special problems are discussed, such as surface selectivity, surface layer destruction, sensitivity and the possibility of quantitative measurements. The references include some of the most instructive review papers on particular methods and important special topics. (Germany) N Treitz, J Phys E: Scient htstrmn, 10 (6), 1977, 573-585.
37. INORGANIC CHEMISTR.Y, ANALYTICAL CHEMISTRY, DISTILLATION, MISCELLANEOUS CHEMICAL APPLICATIONS, OIL AND HYDROCARBON TECHNOLOGY 37 3141. The effect of dissolved oxygen on co-field pumping in mineral oil. (GB) Using direct voltages the EHD head due to co-field motion in transformer oil has been measured for degassed oil and oil saturated with oxygen. It was found that the presence of oxygen produced a great reduction in the measured head compared with degassed oil. The effect of gap length on the head was also investigated. (Egypt) M S Khalil et al, JPhys D: ApplPhys, 10 (9), 1977, LI23-LI26.
667