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4675893 Apparatus for slit radiography
Pergamon Press plc
Nucl. Traclcs 1~,41,~. Meaa., Vol. 13, No. 4. pp. i-ii. 1987 Int. J. Radiat. Appl. In~trwn.. Part D Printed in Great Britain
NEW PATENTS This Section contains abstracts and, where appropriate, illustrations of recently issued United States patents and published patent applications filed from over 30 countries under the Patent Cooperation Treaty. This information was obtained from recent additions to the Pergamon PATSEARCH * online database in accordance with interest profiles developed by the Editors. Further information about Pergamon PATSEARCH ~ can be obtained from Pergamon Orbit InfoLine Inc., 8000 Westpark Drive. McLean, Virginia 22102 U.S.A. Copies of complete patents announced in this Section are available from Pergamon Orbit lnfoLine Inc. for $8 per copy. Payment with order is required. Orders outside North America add $2 for air postage. Order by patent number for Pergamon Orbit InfoLine only.
4675072 TRENCH ETCH ENDPOINT DETECTION BY LIF Reid S Bennett, Linda M Ephrath, Geraldine C Schwartz, Gary S Selwyn assigned to International Business Machines Corporation Laser induced fluorescence is utilized to detect and control the reactive ion etch-through of a given layer in a wafer by detecting a large change in the concentration of a selected minor species from the wafer in the etching plasma. This selected minor species must be present in a significantly different concentration in the etched given layer compared to adjacent layers in the wafer in order to provide a proper endpoint detection. In one embodiment, when the large change in the selected minor species concentration is detected, then the RF electrodes for the reactor are automatically de-energized.
4675893 APPARATUS FOR SLIT RADIOGRAPHY Simo Duinker, Hugo Vlasbloem, Bloemendaal, Netherlands assigned to N V Optische lndustrie £37 De Oude Delft+38 An apparatus for slit radiography comprising an X-ray source by means of which a body being irradiated can be scanned through a slit diaphragm by a substantially planar, fan-shaped Xray beam, the scanning X-ray beam passed through the body impinging upon an X-ray detector. The apparatus comprises controllable attenuation elements coacting with the slit diaphragm, each element being adapted to influence a sector of the scanning X-ray beam under the
control of signals generated by a radiation detector device. The radiation detector device is disposed between the body being irradiated and the X-ray detector. The radiation detector device comprises at least one radiation detector extending at any moment into the scanning X-ray beam passed through the body and moving in synchronism with the scanning movement of the X-ray beam. The radiation detector device is divided into sections corresponding with the sectors of the scanning X-ray beam influenceable by the attenuation elements, while, in operation, each section of the radiation detector device generates a signal usable for controlling the attenuation elements.
4677300 RADIATION DETECTION AND ACQUISITION SYSTEM Riad A Tawil, Kenneth Velbeck assigned to Harshaw/Filtrol Partnership A radiation detection and acquisition system including a plurality of radiation detector modules each characterized by the integration in a compact package of a scintillator probe and supporting electronics which provide digital pulse count signals in response to detected scintillations that may be transmitted by a differential line driver on twisted shielded wire pairs over great distances to a count signal processing unit while maintaining signal integrity. The digital pulse count output is independent of the type of radiation detected whereby the same count signal processing unit may be employed with different detectors for respective different radiations. The detector module may also have an analog signal output so that it may be interfaced to an analog signal analyzer and a third output of the detector module provides a digital output
Nucl. Traclcs 1~,41,~. Meaa., Vol. 13, No. 4. pp. i-ii. 1987 Int. J. Radiat. Appl. In~trwn.. Part D Printed in Great Britain
NEW PATENTS This Section contains abstracts and, where appropriate, illustrations of recently issued United States patents and published patent applications filed from over 30 countries under the Patent Cooperation Treaty. This information was obtained from recent additions to the Pergamon PATSEARCH * online database in accordance with interest profiles developed by the Editors. Further information about Pergamon PATSEARCH ~ can be obtained from Pergamon Orbit InfoLine Inc., 8000 Westpark Drive. McLean, Virginia 22102 U.S.A. Copies of complete patents announced in this Section are available from Pergamon Orbit lnfoLine Inc. for $8 per copy. Payment with order is required. Orders outside North America add $2 for air postage. Order by patent number for Pergamon Orbit InfoLine only.
4675072 TRENCH ETCH ENDPOINT DETECTION BY LIF Reid S Bennett, Linda M Ephrath, Geraldine C Schwartz, Gary S Selwyn assigned to International Business Machines Corporation Laser induced fluorescence is utilized to detect and control the reactive ion etch-through of a given layer in a wafer by detecting a large change in the concentration of a selected minor species from the wafer in the etching plasma. This selected minor species must be present in a significantly different concentration in the etched given layer compared to adjacent layers in the wafer in order to provide a proper endpoint detection. In one embodiment, when the large change in the selected minor species concentration is detected, then the RF electrodes for the reactor are automatically de-energized.
4675893 APPARATUS FOR SLIT RADIOGRAPHY Simo Duinker, Hugo Vlasbloem, Bloemendaal, Netherlands assigned to N V Optische lndustrie £37 De Oude Delft+38 An apparatus for slit radiography comprising an X-ray source by means of which a body being irradiated can be scanned through a slit diaphragm by a substantially planar, fan-shaped Xray beam, the scanning X-ray beam passed through the body impinging upon an X-ray detector. The apparatus comprises controllable attenuation elements coacting with the slit diaphragm, each element being adapted to influence a sector of the scanning X-ray beam under the
control of signals generated by a radiation detector device. The radiation detector device is disposed between the body being irradiated and the X-ray detector. The radiation detector device comprises at least one radiation detector extending at any moment into the scanning X-ray beam passed through the body and moving in synchronism with the scanning movement of the X-ray beam. The radiation detector device is divided into sections corresponding with the sectors of the scanning X-ray beam influenceable by the attenuation elements, while, in operation, each section of the radiation detector device generates a signal usable for controlling the attenuation elements.
4677300 RADIATION DETECTION AND ACQUISITION SYSTEM Riad A Tawil, Kenneth Velbeck assigned to Harshaw/Filtrol Partnership A radiation detection and acquisition system including a plurality of radiation detector modules each characterized by the integration in a compact package of a scintillator probe and supporting electronics which provide digital pulse count signals in response to detected scintillations that may be transmitted by a differential line driver on twisted shielded wire pairs over great distances to a count signal processing unit while maintaining signal integrity. The digital pulse count output is independent of the type of radiation detected whereby the same count signal processing unit may be employed with different detectors for respective different radiations. The detector module may also have an analog signal output so that it may be interfaced to an analog signal analyzer and a third output of the detector module provides a digital output