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918. Basic achievements and problems of investigation of interaction of atomic particles with solid surfaces
Classified abstracts 912-925
912. Changes in structure of germanium ment and subsequent annealing. (USSR)
16 and silicon at ion bombard-
Using the methods of ele&on diffriction, the short-range order structure of amorphous Ge films is investigated after their bombardment with N+, Ar+ and Xe+ ions. It is shown that sputtering of surface atoms can cause amorphization of surface layer. P V Pavlov, Kristallograf, 18 (4), 1973, 807-812 (in Russian).
energy in the range of 5 to 400 eV are described. The angular distribution of secondary ions from clean tungsten is studied both experimentally and theoretically in dependence on the incidence angle and energy of primary Na+ ions. Reflection of Na+ ions from (110) MO surface and of Na +, K+ and Cs+ ions from (100) W surface is studied experimentally. D D Gruich et al, Atomic Collisions Tashkent 1972, 28-55 (in Russian).
on Solid
Surfaces,
Coil, FAN
16 913. Investigation of surface layer of silicon after etching in highfrequency gas-discharge plasma. (USSR)
16 920. Scattering of alkali ions by surface of metallic and semiconducting poly- and single crystals. (USSR)
Using the method of measurement of surface recombination rate, the surface layer of silicon and silicon covered with a copper film is investigated after treatment in high-frequency gas-discharge plasma. R P Berzinya et al, Izv AN Latv SSR Ser Fiz Tekh Nauk, No 3, 1973,
Secondary ion emission from clean boron bombarded with 50 to 1200 eV K+, Na+, Li+, Rb+ and Cs+ ions is investigated in the temperature interval of 300 to 1500°K. It is found that in the process of ion scattering the dominating role is played by mass of target atoms and not by the density of target material. Scattering of alkali ions by complex surfaces as NbTi alloy and binary compound alpha-sic is also studied. ChannellinE of K+. Na+. Rb+. Cs+ and Li+ ions in tungsten, molybdenum-and copper single crystals is studied experimentally. The balance of mass and energy at interaction of alkali ions with surface of single crystals is considered at an energy of 1 keV of incident ions. On the basis of obtained experimental data and theoretical results it is shown that the mechanism of ion scattering by solid surface can be considered similarly as scattering of heavy particles in gases.
25-28 (in Russian). 16 films on silicon surface in glow
914. Formation and removal of SiO, discharge. (USSR)
Oxidation of Si in oxygen plasma of glow discharge is studied with the account of electric field in dielectric. A method for determination of dielectric film thickness with the aid of a probe is presented. A I Grigonis and L I Pranyabichyus, 433437 (in Russian). 915. Investigation of real structure methods. (Germany)
Liet Fiz Rinkinys,
of GaAs
13 (3), 1973,
16:33 by electron microscopy
Nonuniformities of GaAs have been observed in a transmission electron microscope. Surface of GaAs samples is investigated with the aid of replica electron microscopy. Carbon films, deposited on sample surface at transmission measurements due to contamination, were used as replicas. A Tempel and M Schulz, Krist und Techn, 8 (l-3), 1973, 271-278 (in German). 916. Induced field. (USSR)
polarization
of adsorbed
molecules
in intensive
16 light
The experiments on the changes in optical characteristics of layers of acetone, alcohol and CO adsorbed at pressure of 10m2 torr on molybdenum due to illumination with a plane polarized light beam from a gas laser are described. The molybdenum substrates were cleaned by heating in vacuum lo-’ torr before adsorption. 0 M Artamonov and Yu I Asalkhanov, Optika Spectroskop, 35 (5), 1973, 894-897 (in Russian). 917. Changes in properties ion bombardment. (USSR)
of Si-SiO,
interface
at medium
16 energy
The influence of bombardment by Ar, B and P ions with medium energy on electron structure of Si-SiO, interface is investigated. E I Zorin et al, Microelectronics, 122-l 28 (in Russian).
Coil, No 6, Sov Radio Moscow
918. Basic achievements and problems of investigation of atomic particles with solid surfaces. (USSR)
1973,
16 of interaction
Basic achievements and problems of investigation of interaction of atomic particles with solid surfaces are reviewed. The importance of the method of double modulation for investigation of effects associated with ion bombardment of metals is emphasized. Scattering of ions by solid surfaces, ion-electron emission, secondary electron emission, emission phenomena due to neutral particles and laser radiation, cathodic sputtering and theoretical results are considered. U A Arifov, Atomic Collisions 1972, 3-27 (in Russian). 919.
Reflection
on Solid Surfaces,
of slow ions of alkali
metals
Coil, FAN Tashkent 16 from solid surfaces.
(USSR) Experimental devices for investigation of the coefficient of secondary ion emission, energy and angular distributions of secondary ions are described. The devices are pumped with mercury diffusion pumps and after bake-out a pressure of 3 x IO-’ torr is reached in the devices. The experimental results of investigation of secondary ion emission from polycrystalline tungsten and molybdenum in dependence on the incidence angle of slow alkali metal ions with 318
Kh Kh Khadzhimukhamedov et al, Atomic Collisions on Solid Surfaces, Coil, FAN Tashkent 1972, 56-75 (in Russian). 921. Some peculiarities of angular, space and energy distribution ions scattered by single crystal. (USSR)
16 of
The influence of crystalline structure and target temperature on the process of Rb+ ion scattering by W and MO single crystal faces is studied experimentally in the region of incident ion energy of 0.5 to 5 keV. A A Aliev and U A Arifov, Atomic Collisions FAN Tashkent 1972, 76-89 (in Russian).
on Solid Surfaces,
922. Angular and energy distribution of electrons and single crystal molybdenum. (USSR)
scattered
Coil,
16 by poly-
Angular and energy distributions of secondary electrons at bombardment of poly- and single crystal molybdenum by electrons with energy ranging from 100 to 2ooO eV are investigated. The experiments were performed at pressures less than 1 x IO-’ torr. True secondary, elastically reflected, electrons with characteristic energy losses and Auger electrons were found in the secondary electron spectra. A A Aliev et al, Atomic Collisions Tashkent 1972, 90-99 (in Russian).
on Solid
Surfaces,
CON, FAN
16 923. Energy spectrum of electrons of kinetic emission at high energy of bombarding ions. (USSR)
Energy spectra of electrons emitted at bombardment of MO and Ni by Na+ and K+ ions with energies of 10 to 40 keV are investigated at residual gas pressure of 2 x lo-’ torr. It is found that the fine structure in energy spectrum of electrons of kinetic emission is basically determined by the Auger process accompanied by recombination of holes and electrons in metal and also by neutralization and deactivation on surface of normal and excited multiply charged ions. Kh Dzhurakulov et al, Atomic Collisions on Solid Surfaces, Coil, FAN Tashkent 1972, 1@109 (in Russian). 924. The effect of ion bombardment
on emissivity
16 of surface. (USSR)
Vacuum devices with residual pressure 1O-6 torr for investigation of the influence of ion bombardment on emissivity of solids are described. The effect of 02+ and Nz + ion bombardment on emissivity of a coating is studied. R R Rakbimov et al, Atomic Collisions Tashkent 1972, 109-124 (in Rsusian). 925. Investigation
on Solid Surfaces,
Coil, FAN
16 of negative ion sputtering of some metals at their
bombardment with cesium ions. (USSR) Using a magnetic mass spectrometer, negative ion sputtering of copper, silver and graphite by positive cesium ions is investigated at conditions of fast deposition of sodium film decreasing the work function of surface. It is found that the fast deposition of an alkali
912. Changes in structure of germanium ment and subsequent annealing. (USSR)
16 and silicon at ion bombard-
Using the methods of ele&on diffriction, the short-range order structure of amorphous Ge films is investigated after their bombardment with N+, Ar+ and Xe+ ions. It is shown that sputtering of surface atoms can cause amorphization of surface layer. P V Pavlov, Kristallograf, 18 (4), 1973, 807-812 (in Russian).
energy in the range of 5 to 400 eV are described. The angular distribution of secondary ions from clean tungsten is studied both experimentally and theoretically in dependence on the incidence angle and energy of primary Na+ ions. Reflection of Na+ ions from (110) MO surface and of Na +, K+ and Cs+ ions from (100) W surface is studied experimentally. D D Gruich et al, Atomic Collisions Tashkent 1972, 28-55 (in Russian).
on Solid
Surfaces,
Coil, FAN
16 913. Investigation of surface layer of silicon after etching in highfrequency gas-discharge plasma. (USSR)
16 920. Scattering of alkali ions by surface of metallic and semiconducting poly- and single crystals. (USSR)
Using the method of measurement of surface recombination rate, the surface layer of silicon and silicon covered with a copper film is investigated after treatment in high-frequency gas-discharge plasma. R P Berzinya et al, Izv AN Latv SSR Ser Fiz Tekh Nauk, No 3, 1973,
Secondary ion emission from clean boron bombarded with 50 to 1200 eV K+, Na+, Li+, Rb+ and Cs+ ions is investigated in the temperature interval of 300 to 1500°K. It is found that in the process of ion scattering the dominating role is played by mass of target atoms and not by the density of target material. Scattering of alkali ions by complex surfaces as NbTi alloy and binary compound alpha-sic is also studied. ChannellinE of K+. Na+. Rb+. Cs+ and Li+ ions in tungsten, molybdenum-and copper single crystals is studied experimentally. The balance of mass and energy at interaction of alkali ions with surface of single crystals is considered at an energy of 1 keV of incident ions. On the basis of obtained experimental data and theoretical results it is shown that the mechanism of ion scattering by solid surface can be considered similarly as scattering of heavy particles in gases.
25-28 (in Russian). 16 films on silicon surface in glow
914. Formation and removal of SiO, discharge. (USSR)
Oxidation of Si in oxygen plasma of glow discharge is studied with the account of electric field in dielectric. A method for determination of dielectric film thickness with the aid of a probe is presented. A I Grigonis and L I Pranyabichyus, 433437 (in Russian). 915. Investigation of real structure methods. (Germany)
Liet Fiz Rinkinys,
of GaAs
13 (3), 1973,
16:33 by electron microscopy
Nonuniformities of GaAs have been observed in a transmission electron microscope. Surface of GaAs samples is investigated with the aid of replica electron microscopy. Carbon films, deposited on sample surface at transmission measurements due to contamination, were used as replicas. A Tempel and M Schulz, Krist und Techn, 8 (l-3), 1973, 271-278 (in German). 916. Induced field. (USSR)
polarization
of adsorbed
molecules
in intensive
16 light
The experiments on the changes in optical characteristics of layers of acetone, alcohol and CO adsorbed at pressure of 10m2 torr on molybdenum due to illumination with a plane polarized light beam from a gas laser are described. The molybdenum substrates were cleaned by heating in vacuum lo-’ torr before adsorption. 0 M Artamonov and Yu I Asalkhanov, Optika Spectroskop, 35 (5), 1973, 894-897 (in Russian). 917. Changes in properties ion bombardment. (USSR)
of Si-SiO,
interface
at medium
16 energy
The influence of bombardment by Ar, B and P ions with medium energy on electron structure of Si-SiO, interface is investigated. E I Zorin et al, Microelectronics, 122-l 28 (in Russian).
Coil, No 6, Sov Radio Moscow
918. Basic achievements and problems of investigation of atomic particles with solid surfaces. (USSR)
1973,
16 of interaction
Basic achievements and problems of investigation of interaction of atomic particles with solid surfaces are reviewed. The importance of the method of double modulation for investigation of effects associated with ion bombardment of metals is emphasized. Scattering of ions by solid surfaces, ion-electron emission, secondary electron emission, emission phenomena due to neutral particles and laser radiation, cathodic sputtering and theoretical results are considered. U A Arifov, Atomic Collisions 1972, 3-27 (in Russian). 919.
Reflection
on Solid Surfaces,
of slow ions of alkali
metals
Coil, FAN Tashkent 16 from solid surfaces.
(USSR) Experimental devices for investigation of the coefficient of secondary ion emission, energy and angular distributions of secondary ions are described. The devices are pumped with mercury diffusion pumps and after bake-out a pressure of 3 x IO-’ torr is reached in the devices. The experimental results of investigation of secondary ion emission from polycrystalline tungsten and molybdenum in dependence on the incidence angle of slow alkali metal ions with 318
Kh Kh Khadzhimukhamedov et al, Atomic Collisions on Solid Surfaces, Coil, FAN Tashkent 1972, 56-75 (in Russian). 921. Some peculiarities of angular, space and energy distribution ions scattered by single crystal. (USSR)
16 of
The influence of crystalline structure and target temperature on the process of Rb+ ion scattering by W and MO single crystal faces is studied experimentally in the region of incident ion energy of 0.5 to 5 keV. A A Aliev and U A Arifov, Atomic Collisions FAN Tashkent 1972, 76-89 (in Russian).
on Solid Surfaces,
922. Angular and energy distribution of electrons and single crystal molybdenum. (USSR)
scattered
Coil,
16 by poly-
Angular and energy distributions of secondary electrons at bombardment of poly- and single crystal molybdenum by electrons with energy ranging from 100 to 2ooO eV are investigated. The experiments were performed at pressures less than 1 x IO-’ torr. True secondary, elastically reflected, electrons with characteristic energy losses and Auger electrons were found in the secondary electron spectra. A A Aliev et al, Atomic Collisions Tashkent 1972, 90-99 (in Russian).
on Solid
Surfaces,
CON, FAN
16 923. Energy spectrum of electrons of kinetic emission at high energy of bombarding ions. (USSR)
Energy spectra of electrons emitted at bombardment of MO and Ni by Na+ and K+ ions with energies of 10 to 40 keV are investigated at residual gas pressure of 2 x lo-’ torr. It is found that the fine structure in energy spectrum of electrons of kinetic emission is basically determined by the Auger process accompanied by recombination of holes and electrons in metal and also by neutralization and deactivation on surface of normal and excited multiply charged ions. Kh Dzhurakulov et al, Atomic Collisions on Solid Surfaces, Coil, FAN Tashkent 1972, 1@109 (in Russian). 924. The effect of ion bombardment
on emissivity
16 of surface. (USSR)
Vacuum devices with residual pressure 1O-6 torr for investigation of the influence of ion bombardment on emissivity of solids are described. The effect of 02+ and Nz + ion bombardment on emissivity of a coating is studied. R R Rakbimov et al, Atomic Collisions Tashkent 1972, 109-124 (in Rsusian). 925. Investigation
on Solid Surfaces,
Coil, FAN
16 of negative ion sputtering of some metals at their
bombardment with cesium ions. (USSR) Using a magnetic mass spectrometer, negative ion sputtering of copper, silver and graphite by positive cesium ions is investigated at conditions of fast deposition of sodium film decreasing the work function of surface. It is found that the fast deposition of an alkali