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A high performance acoustic — Technical aspects and selected applications
Imaging, Newport Beach, California (United States), 4-6 Feb. 1987. pp. 275-284. Proceedings of the SPIE - The International Society for Optical Engineering, Vol. 768 (1987) Films and coatings are integral elements of devices used for a variety of purposes in engineering, electronic, optical and other applications. The performance, functional characteristics, and structural properties of the devices all depend on the adhesion between the film and substrate. Adhesion measurement techniques that are currently available are not comparable from one laboratory to another, nor are there any techniques that are non-contacting, quantitative and reliable. In this work, surface acoustic waves (SAWs) are used to introduce stresses between the films and their substrates. Regions of the film having weak bonding forces will produce a different response than the regions having strong bonding forces. The response is measured as a change in the velocity of the waves. The waves are excited on the substrate with a high numerical aperture cylindrical lens. The V(z) response of the film system is then obtained and processed to extract the SAW velocity. The results of these measurements on a film system with known regions of strong and weak adhesion will be presented. These measurements will be compared to simulations of the change in surface wave velocity as the bond stiffness between the film and substrate is changed. 38386
Tsai, C.S.; Lee, C.C.
Nondestructive imaging and characterizations of electronic materials and devices using scanning acoustic microscopy An International Symposium on Pattern Recognition and Acoustical Imaging, Newport Beach, California (United States), 4-6 Feb. 1987. pp. 260-266. Proceedings of the SPIE - The International Society for Optical Engineering, Vol. 768 (1987) In this paper, a description of the scanning acoustic microscope (SAM) is first given to be followed by a brief and selective review of the recent applications of the SAM in nondestructive study of solid-state materials and devices. Some of the recent progress of the imaging and the methodologies for quantitative characterization of thin- and thick- solid state electronic materials and devices that are being made at the authors' institution is stressed. 38369
Lewis, C.F.
Ultrasonics reveal the inside picture Materials Engineering, Vol. 105, No. 3, pp. 39-43 (Mar. 1988) Ultrasonic testing can be used to detect flaws within the interior of a specimen. It detects delaminations and other thin large area flaws better than X rays and can produce high resolution images instantaneously. Recent improvements in computer operation ultrasonic inspection systems such as image analysis and enhancement make it a very valuable nondestructive testing tool. Applications of three ultrasonic inspection techniques, appropriate to particular frequencies and degrees of resolution required are discussed, namely C-Scans, scanning laser acoustic microscopy and scanning acoustic microscopy. 38183 Ohigashi, H.; Koyama, K.; Takahashi, S.; Kimura, K.; Maida, Y.; Wada, Y.
High-resolution scanning acoustic microscope using a thin film transducer of P(VDF-TrFE) Ultrasonic Technology 1987. Proceedings of the Toyohashi International Conference on Ultrasonic Technology, Toyohashi (Japan), 20-22 Apr. 1987. pp. 63-70. Edited by K. Toda. MYU (1987) Piezoelectric properties of a thin film of ferroelectric copolymers, namely, vinylidene fluoride and trifluoroethylene (P(VDF-TrFE)), were studied. Concave spherical transducers composed of a (P(VDF-TrFE) thin film were developed for use in a scanning acoustic microscope. Thin films of differing thicknesses were coated on a concave spherical electrode from a dimethylformamide solution. Poling treatments were carried out under an electric field of ca. 100 MV/m. The electromechanical coupling factors ranged from 0.25 to 0.28 for these thin films. The insertion loss and the irradiated acoustic field were measured and compared with the theoretical predictions. Acoustic micrographs of some materials were taken with the new transducer in the range of 100 to 200 MHz. The resolution attained by the new transducer was higher than that by conventional transducers. 38182
Kushibiki, J.-L; Chubachi, N.
Line-focus-beam acoustic microscope and its application to inhomogeneity detection in saw device materials Ultrasonic Technology 1987. Proceedings of the Toyohashi International Conference on Ultrasonic Technology, Toyohashi (Japan), 20-22 Apr. 1987. pp. 71-80. Edited by K. Toda. MYU (1987) A line-focus-beam acoustic microscope system has been developed which can inspect elastic inhomogeneities in materials with an accuracy better than + 0.01% in velocity, at a point, and + 0.03% over a scanning area of 55 mm x 55 mm. The system has been applied to investigate elastic inhomogeneities of SAW device materials such as PZT ceramics, LiTaO3 , and ZnO on glass. It has been shown that this system is a powerful tool for solving some industrial problems of materials as well as devices. 38175
Kojima, S.
Photoacoustic microscopy and quantitative measurements Ultrasonic Technology 1987. Proceedings of the Toyohashi International Conference on Ultrasonic Technology, Toyohashi (Japan), 20-22 Apr. 1987. pp. 141-150. Edited by K. Toda. MYU (1987) A scanning laser photoaconstic microscope has been manufactured and the
NDT International February 1990
various types of textures have been observed. A new method regarding the measurements of a thermal diffusion length has been proposed and applied to several specimens. The temperature dependence has also been investigated. 38168
Okawai, H.; Tanaka, M.; Chubachi, N.
Two-dimensional quantitative display in color scales for acoustic properties of a tissue by using the scanning acoustic microscope Ultrasonic Technology 1987. Proceedings of the Toyohashi International Conference on Ultrasonic Technology, Toyohashi (Japan), 20-22 Apr. 1987. pp. 15-24. Edited by K. Toda. M Y U (1987) It was verified that the two-dimensional quantitative display in color scales facilitated both the understanding of the structures or connections of tissues and the measuring of the acoustic properties of individual tissues. The optimum number of color shades for display in the color scale was found to be ten. Moreover, it was found that adjusting the range for displaying the signal level was useful in order to evaluate the distribution of individual tissues and in order to measure acoustic properties quantitatively. 38167
Karaki, K.; Sakai, M.
Acoustic microscope using liquid nitrogen Ultrasonic Technology 1987. Proceedings of the Toyohashi International Conference on Ultrasonic Technology, Toyohashi (Japan), 20-22 Apr. 1987. pp. 25-30. Edited by K. Toda. M Y U (1987) We have successfully developed an acoustic microscope using liquid nitrogen, and have obtained acoustic images at 1GHz. The resolving power is approximately the same as that of a conventional optical microscope. We have evaluated the resolving power based on the acoustic image of the edge. The improvement of the resolution was recognized when we obtained an acoustic image from an acoustic microscope using liquid nitrogen at 200 MHz. But, the improvement can be explained by the fact that the speed of sound in liquid nitrogen is slower than that in water. We have not observed the nonlinear effect. 38166
Chubachi, N.
Progress of acoustic microscopy reviewed with a history of ultrasonic measurement technology in Japan Ultrasonic Technology 1987. Proceedings of the Toyohashi International Conference on Ultrasonic Technology, Toyohashi (Japan), 20-22 Apr. 1987. pp. 41-44. Edited by K. Toda. M Y U (1987) It may be said in Japan that the history of ultrasonic measurement technology started early in 1920, associated with the research on ultrasonic fish-tinders. This paper reviews some original works on the ultrasonic measurement equipment develo[aed in this country in relation to acoustic microscopy which is now developing new fields of ultrasonic measurement, especially in material evaluation and nondestructive testing, such as ultrasonic microspectroscopy and micrometrology. 38165
Kessler, L.W.; Oravecz, M.G.
Review of progress in scanning laser acoustic microscope (SLAM) Technology Ultrasonic Technology 1987. Proceedings of the Toyohashi International Conference on Ultrasonic Technology, Toyohashi (Japan); 20-22 Apr. 1987. pp. 45-46. Edited by K. Toda. MYU (1987) This paper describes recent advances in the development of and applications of Scanning Laser Acoustic Microscopy (SLAM). The SLAM concept produces high frequency (10-500 MHz) transmission acoustic images of samples by means of plane wave ultrasonic illumination and focused beam laser detection. The laser is electronically scanned over the sample at television rates, viz., 525 lines per frame and 30 frames per second. In the conventional implementation of SLAM technology, the extremely fast scan rates have been utilized for real-time inspection and quality control of manufactured components of simple and complex geometrical shapes. Recently, the technology has been extended to greatly enhance the applicability of acoustic microscopy. There are three topics to be discussed: quantitative materials analysis, examination of large (m 2) samples, and diffraction corrected holographic reconstruction of out-of-focus features. 38124
Lin Zsecherng; Wade. G.
Subsurface imaging in acoustic microscopy Acoustical Imaging, Vol. 15. Proceedings of the 15th International Symposium on Acoustical Imaging, Halifax, Nova Scotia (Canada), 14-16 Jul. 1986. pp. 443-452. Edited by Hugh W. Jones. Plenum Press, 704 pp. (1987) Acoustic microscopy is capable of producing micrographs with a high degree of resolution. When an acoustic microscope operates in the transmission mode, the micrograph is simply a shadowgraph of all the structure encountered'by the paths of acoustic rays passing through the objects. Because of diffraction and overlapping, the resultant images are difficult to comprehend in the case of specimens of substantial thickness and structural complexity. The principles of diffraction tomography and acoustic holography can be used to overcome this problem. In this paper, experimental results are presented of subsurface imaging using holographic image reconstruction with a modified scanning laser acoustic microscope (SLAM). Modeling of the imaging process as a two-dimensional linear system is described. The compensation for the nonuniform frequency response of the wavefield detection and the computation of wave propagation are discussed. A series of images to demonstrate that high-quality, highresolution subsurface images can be obtained from holographic data with image processing are shown.
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Tsai, C.S.; Lee, C.C.
Nondestructive imaging and characterizations of electronic materials and devices using scanning acoustic microscopy An International Symposium on Pattern Recognition and Acoustical Imaging, Newport Beach, California (United States), 4-6 Feb. 1987. pp. 260-266. Proceedings of the SPIE - The International Society for Optical Engineering, Vol. 768 (1987) In this paper, a description of the scanning acoustic microscope (SAM) is first given to be followed by a brief and selective review of the recent applications of the SAM in nondestructive study of solid-state materials and devices. Some of the recent progress of the imaging and the methodologies for quantitative characterization of thin- and thick- solid state electronic materials and devices that are being made at the authors' institution is stressed. 38369
Lewis, C.F.
Ultrasonics reveal the inside picture Materials Engineering, Vol. 105, No. 3, pp. 39-43 (Mar. 1988) Ultrasonic testing can be used to detect flaws within the interior of a specimen. It detects delaminations and other thin large area flaws better than X rays and can produce high resolution images instantaneously. Recent improvements in computer operation ultrasonic inspection systems such as image analysis and enhancement make it a very valuable nondestructive testing tool. Applications of three ultrasonic inspection techniques, appropriate to particular frequencies and degrees of resolution required are discussed, namely C-Scans, scanning laser acoustic microscopy and scanning acoustic microscopy. 38183 Ohigashi, H.; Koyama, K.; Takahashi, S.; Kimura, K.; Maida, Y.; Wada, Y.
High-resolution scanning acoustic microscope using a thin film transducer of P(VDF-TrFE) Ultrasonic Technology 1987. Proceedings of the Toyohashi International Conference on Ultrasonic Technology, Toyohashi (Japan), 20-22 Apr. 1987. pp. 63-70. Edited by K. Toda. MYU (1987) Piezoelectric properties of a thin film of ferroelectric copolymers, namely, vinylidene fluoride and trifluoroethylene (P(VDF-TrFE)), were studied. Concave spherical transducers composed of a (P(VDF-TrFE) thin film were developed for use in a scanning acoustic microscope. Thin films of differing thicknesses were coated on a concave spherical electrode from a dimethylformamide solution. Poling treatments were carried out under an electric field of ca. 100 MV/m. The electromechanical coupling factors ranged from 0.25 to 0.28 for these thin films. The insertion loss and the irradiated acoustic field were measured and compared with the theoretical predictions. Acoustic micrographs of some materials were taken with the new transducer in the range of 100 to 200 MHz. The resolution attained by the new transducer was higher than that by conventional transducers. 38182
Kushibiki, J.-L; Chubachi, N.
Line-focus-beam acoustic microscope and its application to inhomogeneity detection in saw device materials Ultrasonic Technology 1987. Proceedings of the Toyohashi International Conference on Ultrasonic Technology, Toyohashi (Japan), 20-22 Apr. 1987. pp. 71-80. Edited by K. Toda. MYU (1987) A line-focus-beam acoustic microscope system has been developed which can inspect elastic inhomogeneities in materials with an accuracy better than + 0.01% in velocity, at a point, and + 0.03% over a scanning area of 55 mm x 55 mm. The system has been applied to investigate elastic inhomogeneities of SAW device materials such as PZT ceramics, LiTaO3 , and ZnO on glass. It has been shown that this system is a powerful tool for solving some industrial problems of materials as well as devices. 38175
Kojima, S.
Photoacoustic microscopy and quantitative measurements Ultrasonic Technology 1987. Proceedings of the Toyohashi International Conference on Ultrasonic Technology, Toyohashi (Japan), 20-22 Apr. 1987. pp. 141-150. Edited by K. Toda. MYU (1987) A scanning laser photoaconstic microscope has been manufactured and the
NDT International February 1990
various types of textures have been observed. A new method regarding the measurements of a thermal diffusion length has been proposed and applied to several specimens. The temperature dependence has also been investigated. 38168
Okawai, H.; Tanaka, M.; Chubachi, N.
Two-dimensional quantitative display in color scales for acoustic properties of a tissue by using the scanning acoustic microscope Ultrasonic Technology 1987. Proceedings of the Toyohashi International Conference on Ultrasonic Technology, Toyohashi (Japan), 20-22 Apr. 1987. pp. 15-24. Edited by K. Toda. M Y U (1987) It was verified that the two-dimensional quantitative display in color scales facilitated both the understanding of the structures or connections of tissues and the measuring of the acoustic properties of individual tissues. The optimum number of color shades for display in the color scale was found to be ten. Moreover, it was found that adjusting the range for displaying the signal level was useful in order to evaluate the distribution of individual tissues and in order to measure acoustic properties quantitatively. 38167
Karaki, K.; Sakai, M.
Acoustic microscope using liquid nitrogen Ultrasonic Technology 1987. Proceedings of the Toyohashi International Conference on Ultrasonic Technology, Toyohashi (Japan), 20-22 Apr. 1987. pp. 25-30. Edited by K. Toda. M Y U (1987) We have successfully developed an acoustic microscope using liquid nitrogen, and have obtained acoustic images at 1GHz. The resolving power is approximately the same as that of a conventional optical microscope. We have evaluated the resolving power based on the acoustic image of the edge. The improvement of the resolution was recognized when we obtained an acoustic image from an acoustic microscope using liquid nitrogen at 200 MHz. But, the improvement can be explained by the fact that the speed of sound in liquid nitrogen is slower than that in water. We have not observed the nonlinear effect. 38166
Chubachi, N.
Progress of acoustic microscopy reviewed with a history of ultrasonic measurement technology in Japan Ultrasonic Technology 1987. Proceedings of the Toyohashi International Conference on Ultrasonic Technology, Toyohashi (Japan), 20-22 Apr. 1987. pp. 41-44. Edited by K. Toda. M Y U (1987) It may be said in Japan that the history of ultrasonic measurement technology started early in 1920, associated with the research on ultrasonic fish-tinders. This paper reviews some original works on the ultrasonic measurement equipment develo[aed in this country in relation to acoustic microscopy which is now developing new fields of ultrasonic measurement, especially in material evaluation and nondestructive testing, such as ultrasonic microspectroscopy and micrometrology. 38165
Kessler, L.W.; Oravecz, M.G.
Review of progress in scanning laser acoustic microscope (SLAM) Technology Ultrasonic Technology 1987. Proceedings of the Toyohashi International Conference on Ultrasonic Technology, Toyohashi (Japan); 20-22 Apr. 1987. pp. 45-46. Edited by K. Toda. MYU (1987) This paper describes recent advances in the development of and applications of Scanning Laser Acoustic Microscopy (SLAM). The SLAM concept produces high frequency (10-500 MHz) transmission acoustic images of samples by means of plane wave ultrasonic illumination and focused beam laser detection. The laser is electronically scanned over the sample at television rates, viz., 525 lines per frame and 30 frames per second. In the conventional implementation of SLAM technology, the extremely fast scan rates have been utilized for real-time inspection and quality control of manufactured components of simple and complex geometrical shapes. Recently, the technology has been extended to greatly enhance the applicability of acoustic microscopy. There are three topics to be discussed: quantitative materials analysis, examination of large (m 2) samples, and diffraction corrected holographic reconstruction of out-of-focus features. 38124
Lin Zsecherng; Wade. G.
Subsurface imaging in acoustic microscopy Acoustical Imaging, Vol. 15. Proceedings of the 15th International Symposium on Acoustical Imaging, Halifax, Nova Scotia (Canada), 14-16 Jul. 1986. pp. 443-452. Edited by Hugh W. Jones. Plenum Press, 704 pp. (1987) Acoustic microscopy is capable of producing micrographs with a high degree of resolution. When an acoustic microscope operates in the transmission mode, the micrograph is simply a shadowgraph of all the structure encountered'by the paths of acoustic rays passing through the objects. Because of diffraction and overlapping, the resultant images are difficult to comprehend in the case of specimens of substantial thickness and structural complexity. The principles of diffraction tomography and acoustic holography can be used to overcome this problem. In this paper, experimental results are presented of subsurface imaging using holographic image reconstruction with a modified scanning laser acoustic microscope (SLAM). Modeling of the imaging process as a two-dimensional linear system is described. The compensation for the nonuniform frequency response of the wavefield detection and the computation of wave propagation are discussed. A series of images to demonstrate that high-quality, highresolution subsurface images can be obtained from holographic data with image processing are shown.
45