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Balzers-Pfeiffer
News from Morgan Matroc METALLISED
NEW DRY BACKING PUMP FROM BALZERS
CERAMICS WILL SOLVE MORE PROBLEMS IN RIGH-~CHNOLOGY FIELDS
Metallised ceramic components up to 1000 mm long or 300 mm diameter are being manufactured in numbers ranging from one-off prototypes to high volume production runs-following a multi-million pound investment by Morgan Matroc at Rugby. The ceramic components are assembled into high-integrity devices by brazing or soldering to the metal surfaces, which can be formed as conductive circuits. New materials technology and advanced production techniques developed by Morgan Matroc companies across the UK and USA have been brought together at the Rugby technical ceramics plant. “This enables us to provide elegant solutions to engineering problems where the outstanding properties of ceramics are essential for high-integrity devices in medical, electronic, laser, defence, aerospace and scientific instrument fields,” says metallised products manager Keith Parker. Complex components are pressed and machined to high accuracy in alumina ceramics. This material has exceptional dielectric strength and volume resistivity for working at high voltages. It also resists chemical attack, withstands temperatures of over 1000°C and has a very low coefficient of expansion. The company specialises in two metallising techniques, refractory and thick film, both carried out to exacting specifications. Refractory metaliising gives a very strong metal-ceramic fusion bond. This is essential when components are high-temperature brazed to form vacuum-tight seals on, for example, microwave and X-ray tubes or high voltage feed-throughs. Many high voltage assemblies are produced this way, as well as housings for power semiconductor. The refractory method uses molybdenum or molybdenummanganese inks printed on the ceramic and fired at high temperature in an oxygen-free environment. The bonded metal surface is then electroplated with nickel to give a base for brazing when high strength assemblies are manufactured. Copper or tin plating is added when solder connections are needed. Gold or silver is applied to give high resistance to corrosion. Thick film metal&sing produces conductor networks, dielectric layers, resistors and soldering faces on ceramic. A pattern of noble metal paste (gold, silver, platinum, palladium or a mixture of these) is accurately printed on the ceramic surface and fired to form an intimate bond. It will survive almost any environment where an electronic circuit is expected to operate. “Morgan Matroc’s Rugby Division has a long history of ceramics technology,” says Keith Parker. “With new plant and processes, backed by experienced materials scientists, Matroc now leads the world in production capacity for metallised ceramics, as well as technical ability.” Morgan Matroc is a member of The Morgan Crucible Company PLC, Britain’s foremost materials technology group with a network of plants and outlets throughout the world. The Rugby Division is quality assured to lSO9002/BS5750: Pt2. Further technical details from: Metallised Products, Morgan Matroc Limited, Rugby Division, St Peters Road, Rugby, Warks CV21 3QR, UK. Tel: (44) (0) 1788 542166. Fax: (44) (0) 1788 541941. Reader replies
BIKERS-PFEIFFER
:
Keith Parker, Morgan Matroc Limited, Rugby Division, St Peters Road, Rugby, Warks CV213QR, UK. Fax: (44) (01 1788 541941 Tel: (44) (0) 1788 542166 Press contact: Alex Morris, Technical Journalism & PR Services, Follywood, New Road, Wonersh, Surrey GU5 OSE, UK. Fax : (44) (0) 1483 898927 Tel : (44) (0) 1483 892348
Balzers’ new UNIDRV DBP 050 dry backing pump Higher gas flows of between 1000-2000 l/s are required for the next generation semiconductor processing machines. Balzers-Pfeiffer has designed a pumping system that comprises a fully magnetically suspended turbomolecular pump TMH 1600 M and a dry roughing pump, the UNIDRV DBP 050, specifically tailored to these requirements. Thanks to its high backing pressure tolerance of 0.6 mbar, the TMH 1600 M is best served by a dry backing pump that attains its full volume flow rate at this pressure. The DBP 050 is ideal for this purpose and incorporates features such as a valveless, three stage design ; a volume flow rate of 50 m3/h at 10 mbar with an attainable final pressure of 0.6 mbar and a temperature management system for the prevention of condensation. The innovative DBP 050 is insensitive to liquids and features process dependent sealing gas, flushing gas and gas ballast. It is safe operating at over-pressures of up to 16 bar due to its construction from GGG 40.3 which provides the necessary degree of safety for processes that involve gases such as silane. The DBP 050 has a water cooled, canned motor for maximum tightness and is extremely economical in use as it uses minimal cooling water and sealing gas volumes. All of the DBP 050’s process parameters such as motor monitoring, nitrogen supply, sealing and flushing gas flow and pressure, cooling water, intake and exhaust valves, exhaust pressure, etc., can be microprocessor controlled. The pump can be monitored and controlled either locally or remotely via a serial interface RS 232 from the host system. The addition of a dry Roots vacuum pump provides even greater volume flow rates of up to approx. 1000 m3 h if required. Further information on Balzers’ innovative UNIDRY DBP 050 pump can be obtained direct from Balzers-Pfeiffer UK, Bradbourne Drive, Tilbrook. Milton Keynes MK7 8A2, UK. Fax : (441 (01 1908 377776. Tel : 144) (0) 1908 373333 Issued for and on behalf of Balzers-F’feiffer UK, Bradbourne Drive, Tilbrook, Milton Keynes MK7 8A2, UK. Fax: f441tO) 1908 377776 Tel: 144) (0) 1908 373333 by Ann Faulkner PR, Radbourne House, Butchers Lane, Pattishall, Towcester, Northants. NN12 8ND. UK. For further information please contact: Peter Knight, Balzers-~eiffer UK Tel : (44) (0) 1908 373333 Ann Faulkner Direct Tel : (44) (0) 1327 830863
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NEW DRY BACKING PUMP FROM BALZERS
CERAMICS WILL SOLVE MORE PROBLEMS IN RIGH-~CHNOLOGY FIELDS
Metallised ceramic components up to 1000 mm long or 300 mm diameter are being manufactured in numbers ranging from one-off prototypes to high volume production runs-following a multi-million pound investment by Morgan Matroc at Rugby. The ceramic components are assembled into high-integrity devices by brazing or soldering to the metal surfaces, which can be formed as conductive circuits. New materials technology and advanced production techniques developed by Morgan Matroc companies across the UK and USA have been brought together at the Rugby technical ceramics plant. “This enables us to provide elegant solutions to engineering problems where the outstanding properties of ceramics are essential for high-integrity devices in medical, electronic, laser, defence, aerospace and scientific instrument fields,” says metallised products manager Keith Parker. Complex components are pressed and machined to high accuracy in alumina ceramics. This material has exceptional dielectric strength and volume resistivity for working at high voltages. It also resists chemical attack, withstands temperatures of over 1000°C and has a very low coefficient of expansion. The company specialises in two metallising techniques, refractory and thick film, both carried out to exacting specifications. Refractory metaliising gives a very strong metal-ceramic fusion bond. This is essential when components are high-temperature brazed to form vacuum-tight seals on, for example, microwave and X-ray tubes or high voltage feed-throughs. Many high voltage assemblies are produced this way, as well as housings for power semiconductor. The refractory method uses molybdenum or molybdenummanganese inks printed on the ceramic and fired at high temperature in an oxygen-free environment. The bonded metal surface is then electroplated with nickel to give a base for brazing when high strength assemblies are manufactured. Copper or tin plating is added when solder connections are needed. Gold or silver is applied to give high resistance to corrosion. Thick film metal&sing produces conductor networks, dielectric layers, resistors and soldering faces on ceramic. A pattern of noble metal paste (gold, silver, platinum, palladium or a mixture of these) is accurately printed on the ceramic surface and fired to form an intimate bond. It will survive almost any environment where an electronic circuit is expected to operate. “Morgan Matroc’s Rugby Division has a long history of ceramics technology,” says Keith Parker. “With new plant and processes, backed by experienced materials scientists, Matroc now leads the world in production capacity for metallised ceramics, as well as technical ability.” Morgan Matroc is a member of The Morgan Crucible Company PLC, Britain’s foremost materials technology group with a network of plants and outlets throughout the world. The Rugby Division is quality assured to lSO9002/BS5750: Pt2. Further technical details from: Metallised Products, Morgan Matroc Limited, Rugby Division, St Peters Road, Rugby, Warks CV21 3QR, UK. Tel: (44) (0) 1788 542166. Fax: (44) (0) 1788 541941. Reader replies
BIKERS-PFEIFFER
:
Keith Parker, Morgan Matroc Limited, Rugby Division, St Peters Road, Rugby, Warks CV213QR, UK. Fax: (44) (01 1788 541941 Tel: (44) (0) 1788 542166 Press contact: Alex Morris, Technical Journalism & PR Services, Follywood, New Road, Wonersh, Surrey GU5 OSE, UK. Fax : (44) (0) 1483 898927 Tel : (44) (0) 1483 892348
Balzers’ new UNIDRV DBP 050 dry backing pump Higher gas flows of between 1000-2000 l/s are required for the next generation semiconductor processing machines. Balzers-Pfeiffer has designed a pumping system that comprises a fully magnetically suspended turbomolecular pump TMH 1600 M and a dry roughing pump, the UNIDRV DBP 050, specifically tailored to these requirements. Thanks to its high backing pressure tolerance of 0.6 mbar, the TMH 1600 M is best served by a dry backing pump that attains its full volume flow rate at this pressure. The DBP 050 is ideal for this purpose and incorporates features such as a valveless, three stage design ; a volume flow rate of 50 m3/h at 10 mbar with an attainable final pressure of 0.6 mbar and a temperature management system for the prevention of condensation. The innovative DBP 050 is insensitive to liquids and features process dependent sealing gas, flushing gas and gas ballast. It is safe operating at over-pressures of up to 16 bar due to its construction from GGG 40.3 which provides the necessary degree of safety for processes that involve gases such as silane. The DBP 050 has a water cooled, canned motor for maximum tightness and is extremely economical in use as it uses minimal cooling water and sealing gas volumes. All of the DBP 050’s process parameters such as motor monitoring, nitrogen supply, sealing and flushing gas flow and pressure, cooling water, intake and exhaust valves, exhaust pressure, etc., can be microprocessor controlled. The pump can be monitored and controlled either locally or remotely via a serial interface RS 232 from the host system. The addition of a dry Roots vacuum pump provides even greater volume flow rates of up to approx. 1000 m3 h if required. Further information on Balzers’ innovative UNIDRY DBP 050 pump can be obtained direct from Balzers-Pfeiffer UK, Bradbourne Drive, Tilbrook. Milton Keynes MK7 8A2, UK. Fax : (441 (01 1908 377776. Tel : 144) (0) 1908 373333 Issued for and on behalf of Balzers-F’feiffer UK, Bradbourne Drive, Tilbrook, Milton Keynes MK7 8A2, UK. Fax: f441tO) 1908 377776 Tel: 144) (0) 1908 373333 by Ann Faulkner PR, Radbourne House, Butchers Lane, Pattishall, Towcester, Northants. NN12 8ND. UK. For further information please contact: Peter Knight, Balzers-~eiffer UK Tel : (44) (0) 1908 373333 Ann Faulkner Direct Tel : (44) (0) 1327 830863
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