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Balzers rotary pump range extended
VACUUM Manufacturers
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Manufacturers and others are invited to submit information for inclusion in this feature addressed to The Vacuum News Editor V a c u u m Pergamon Press Ltd Head!ngton Hill Hall Oxford OX3 0BW
New products
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Balzers rotary pump range extended Balzers High Vacuum Ltd have extended their range of single and two-stage rotary pumps to cover pumping speeds 4-120 m3h. Suitable for all vacuum tasks in the coarse and medium range in research and industry, the pumps (UNO/DUO 004A-120A) are of compact design having a directly flanged motor and have a built-in high vacuum safety valve which effectively prevents oil backstreaming into the chamber. The single stage pumps have an ultimate partial pressure without gas ballast of <1.3 x 10-2 mbar and the two-stage pumps have an ultimate pressure of <1.3 x 10-4 mbar. Fitted with standardized PNEUROP connections, the pumps' applications can be extended with a wide range of accessories. Owing to their large oil capacity only occasional oil changes are necessary and servicing is simple, parts subject to wear being replaced without adjustment. The pumping stages can be changed without venting the vacuum chamber. Balzers High Vacuum Ltd, Northbridge Road, Berkhamsted, Herts HP4 LEN, UK
New vapour booster pump fluid Longer life, high auto-ignition temperature and reduced pump maintenance are some of the main advantages claimed for Grade 200 Vapour Booster Pump Fluid. Grade 200 permits an achievable vacuum of better than 7 x 10-5 mbar at 20°C and an auto-ignition point of 360°C, which is over 50 ° higher than that of mineral based hydrocarbon fluids. Low volatility loss greatly reduces consumption, in fact in a 13 week field trial the saving was shown to be over 80% compared with the hydrocarbon fluid it replaces. Oxidation resistance and hydrolytic stability allow high throughputs of air and water vapour to be pumped without damage, and greatly reduce the need for periodic pump cleaning. Pumps, unless they are already contaminated, can be converted by simply draining off the old fluid and refilling with Grade 200. Edwards High Vacuum, Manor Royal, Crawley, West Sussex RHIO 2LW, UK
New Edwards isolation valves Three new, solenoid-operated vacuum isolation valves, the Edwards PV-E Series, have low power consumption and low operating temperatures as well as being among the most light and compact valves of their type available. Two coils and an electronic switching circuit enable high power to be applied for a very short period to open the valve; power is then reduced automatically to the much lower level required to hold it open. The valves can be opened against a pressure differential of 1 atm in either direction and operating temperature will not exceed 35 * above ambient. An argon arc welded stainless steel bellows assembly isolates the valve body and drift-proof microswitches give positive indication of valve state. Pressure range of the PV-E Series is 10-9-1000 mbar and leak rate is 10 -s mbar Is -~. The three valves in the range have molecular conductances of 5, 15 and 60 Is -1 and weigh 0.68, 1.5 and 3.7 kg, respectively. The
largest valve is 230 mm high. Standard ISO SC-type pipeline connections in 10, 25 and 40 mm sizes, respectively, are used and packs of quick-release screwed coupling components are available as accessories. Edwards High Vacuum, Manor Royal, Crawley, West Sussex, RHIO 2LW, UK
Balzers vacuum gauge An inexpensive and easily operated vacuum gauge giving rapid and dependable total pressure readings from 0.1 to 10 -8 mbar, and for use both in the laboratory and industrial production, the IMG 030 hot cathode ionization gauge has stable electronics which eliminate repeated zero and emission adjustments and protection is provided against excessive pressure increase, short circuits or emission failure. In vacuum coating plants for thin films the gauge can be combined with other Balzers components to maintain constant pressures in the ion source and work chamber automatically. In particle accelerators and similar large plants where long distances between gauge head and measuring instrument are common, the IMG 030 allows the use of standard cables up to 50 m. Balzers High Vacuum Ltd, Northbridge Road, Berkhamsted, Herts HP4 LEN, UK
New multi-station sputter coater A new multi-station sputter coater, the MSS 355, features three independent chambers rotating within the main chamber. This arrangement allows the loading of one chamber while the process (heating, ion-etching, planar magnetron sputtering) continues uninterrupted in the other two, the Knudsen planetary substrata holders moving from station to station without breaking vacuum. The sputter source gives easy deposition of AI-alloys with good film adhesion, superior step-coverage and controlled uniformity and reproducibility. Single button computer aims to eliminate operational faults while the programmed sequence ensures optimum plant utilization. Typical output is 60 3 in. wafers per hour for 1 t~m AI-alloys. An electro pneumatic system to lower and swing out the sputter source and a counter weighted lid allow easy access to the vacuum chamber. The lightweight planetaries and handy height make for ease of loading and unloading. Balzers High Vacuum Ltd, Northbridge Road, Berkhamsted, Herts HP4 LEN, UK
Sputtering device for the electron microscopist An improved version of the Balzers Sputtering Device 07 120 for the preparation of electron microscopic specimens is announced. The device now has a rotary symmetric magnetic field and, because the target and specimen table are water-cooled, a high sputter rate can be maintained without the specimen temperature rising beyond approximately 25°C. The specimen surface is easily cleaned, an etching device being brought into operation simply by changing plugs on the unit. A built-in aperture enables 259
News
and others
Manufacturers and others are invited to submit information for inclusion in this feature addressed to The Vacuum News Editor V a c u u m Pergamon Press Ltd Head!ngton Hill Hall Oxford OX3 0BW
New products
and
developments
Balzers rotary pump range extended Balzers High Vacuum Ltd have extended their range of single and two-stage rotary pumps to cover pumping speeds 4-120 m3h. Suitable for all vacuum tasks in the coarse and medium range in research and industry, the pumps (UNO/DUO 004A-120A) are of compact design having a directly flanged motor and have a built-in high vacuum safety valve which effectively prevents oil backstreaming into the chamber. The single stage pumps have an ultimate partial pressure without gas ballast of <1.3 x 10-2 mbar and the two-stage pumps have an ultimate pressure of <1.3 x 10-4 mbar. Fitted with standardized PNEUROP connections, the pumps' applications can be extended with a wide range of accessories. Owing to their large oil capacity only occasional oil changes are necessary and servicing is simple, parts subject to wear being replaced without adjustment. The pumping stages can be changed without venting the vacuum chamber. Balzers High Vacuum Ltd, Northbridge Road, Berkhamsted, Herts HP4 LEN, UK
New vapour booster pump fluid Longer life, high auto-ignition temperature and reduced pump maintenance are some of the main advantages claimed for Grade 200 Vapour Booster Pump Fluid. Grade 200 permits an achievable vacuum of better than 7 x 10-5 mbar at 20°C and an auto-ignition point of 360°C, which is over 50 ° higher than that of mineral based hydrocarbon fluids. Low volatility loss greatly reduces consumption, in fact in a 13 week field trial the saving was shown to be over 80% compared with the hydrocarbon fluid it replaces. Oxidation resistance and hydrolytic stability allow high throughputs of air and water vapour to be pumped without damage, and greatly reduce the need for periodic pump cleaning. Pumps, unless they are already contaminated, can be converted by simply draining off the old fluid and refilling with Grade 200. Edwards High Vacuum, Manor Royal, Crawley, West Sussex RHIO 2LW, UK
New Edwards isolation valves Three new, solenoid-operated vacuum isolation valves, the Edwards PV-E Series, have low power consumption and low operating temperatures as well as being among the most light and compact valves of their type available. Two coils and an electronic switching circuit enable high power to be applied for a very short period to open the valve; power is then reduced automatically to the much lower level required to hold it open. The valves can be opened against a pressure differential of 1 atm in either direction and operating temperature will not exceed 35 * above ambient. An argon arc welded stainless steel bellows assembly isolates the valve body and drift-proof microswitches give positive indication of valve state. Pressure range of the PV-E Series is 10-9-1000 mbar and leak rate is 10 -s mbar Is -~. The three valves in the range have molecular conductances of 5, 15 and 60 Is -1 and weigh 0.68, 1.5 and 3.7 kg, respectively. The
largest valve is 230 mm high. Standard ISO SC-type pipeline connections in 10, 25 and 40 mm sizes, respectively, are used and packs of quick-release screwed coupling components are available as accessories. Edwards High Vacuum, Manor Royal, Crawley, West Sussex, RHIO 2LW, UK
Balzers vacuum gauge An inexpensive and easily operated vacuum gauge giving rapid and dependable total pressure readings from 0.1 to 10 -8 mbar, and for use both in the laboratory and industrial production, the IMG 030 hot cathode ionization gauge has stable electronics which eliminate repeated zero and emission adjustments and protection is provided against excessive pressure increase, short circuits or emission failure. In vacuum coating plants for thin films the gauge can be combined with other Balzers components to maintain constant pressures in the ion source and work chamber automatically. In particle accelerators and similar large plants where long distances between gauge head and measuring instrument are common, the IMG 030 allows the use of standard cables up to 50 m. Balzers High Vacuum Ltd, Northbridge Road, Berkhamsted, Herts HP4 LEN, UK
New multi-station sputter coater A new multi-station sputter coater, the MSS 355, features three independent chambers rotating within the main chamber. This arrangement allows the loading of one chamber while the process (heating, ion-etching, planar magnetron sputtering) continues uninterrupted in the other two, the Knudsen planetary substrata holders moving from station to station without breaking vacuum. The sputter source gives easy deposition of AI-alloys with good film adhesion, superior step-coverage and controlled uniformity and reproducibility. Single button computer aims to eliminate operational faults while the programmed sequence ensures optimum plant utilization. Typical output is 60 3 in. wafers per hour for 1 t~m AI-alloys. An electro pneumatic system to lower and swing out the sputter source and a counter weighted lid allow easy access to the vacuum chamber. The lightweight planetaries and handy height make for ease of loading and unloading. Balzers High Vacuum Ltd, Northbridge Road, Berkhamsted, Herts HP4 LEN, UK
Sputtering device for the electron microscopist An improved version of the Balzers Sputtering Device 07 120 for the preparation of electron microscopic specimens is announced. The device now has a rotary symmetric magnetic field and, because the target and specimen table are water-cooled, a high sputter rate can be maintained without the specimen temperature rising beyond approximately 25°C. The specimen surface is easily cleaned, an etching device being brought into operation simply by changing plugs on the unit. A built-in aperture enables 259