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Biaxially aligned YBa2Cu3O7−x thin film tapes
=-----
..
__L.L w
Physica C 185-189 (1991) 1959-1960 North-Holland
BIAXIALLY ALIGNED YBa2Cu307_ x THIN FILN TAPES Yasuhiro IIJIMA, Nobuo TANABE, Yoshimitsu IKENO* and Osamu KOHNO M a t e r i a l s Research Lab., Fujikura L t d . , 1 - 5 - 1 , Kiba, Koto-ku, Tokyo 135, JAPAN *Super-GM, 5-14-10, Nishitenma, Osaka 530, JAPAN We r e p o r t the formation o f crystalline, Ni-based a l l o y
biaxially o r i e n t e d f i l m s of y t t o r i u m - s t a b i l i z e d
ZrO2 (YSZ) on a p o l y -
( H a s t e l l o y c276) by Ion-Beam-Assisted Deposition (IBAD), and the subsequent a-b plane alLgned YBa2Cu3OT-x (YBCO) f i l m s d e p o s i t e d by l a s e r a b l a t i o n . Jc o f 6.0x104 A/cm2 (77 K, 0 T) and 1.4x104 A/cm2 (77 K, 0.6 T) were obtained. A new method to prevent i n t e r g r a n u l a r - w e a k - l i n k s has been developed for a p p l i c a t i o n o f oxide superconducting t h i n f i l m s , for tape-shaped c a b l e s , magnets, magnetic s h i e l d s , microwave d e v i c e s , e t c . bardment, and can s t r o n g l y modify the s t r u c t u r a l
1. INTRODUCTION High quality YBa2Cu307_ x (YBCO) thin films
deposited on single crystal substrates have a structure,
biaxial
c-axis oriented perpendicular
properties
of the resulting thin films.
A-b
p l a n e a l i g n e d ~BCO f i l m s were d e p o s i t e d on t h o s e YSZ b u f f e r l a y e r s by l a s e r a b l a t i o n .
to the s u b s t r a t e , and the a- and b - a x e s a l i g n e d in the plane parallel
to the substrate. 1
Jc
r e a c h e d o v e r 106 A/cm 2 (77 K, 0 T) and t o l e r a t e d magnetic field well.
Our o b j e c t i v e i s t o im-
prove superconducting p r o p e r t i e s line metallic
on p o l y c r y s t a l -
substrates applicable for wires,
magnets, magnetic s h i e l d s ,
etc.
Jc of These
f i l m s r a n g e d from 103 t o 104 A/cm 2 (77 K, 0 T), that are sensitive
to magnetic f i e l d . 2 , 3
have a m o n o - a x i a l s t r u c t u r e ,
c-axis oriented
p e r p e n d i c u l a r to the s u b s t r a t e , b- a x e s d i s t r i b u t e d
They
but t h e a - and
randomly.
on
Several mirror-like
p o l i s h e d p l a t e s of Has-
t e l l o y c276 were p r e p a r e d . Ni-based a l l o y
H a s t e l l o y c276 i s a
t h a t is not s u s c e p t i b l e to h e a t
and o x i d a t i o n . 2 were 10x18xO.5~.
The d i m e n s i o n s o f the samples The IBAD system had dual ion
sources. The YSZ target was sputtered by Ar + ion beam from the first ion source.
An assisting
O+Ar ion beam from the second ion source concurrently bombarded the films.
The energy of the
assistip~ ion beam ranged from 300 to I000 eV.
R e c e n t l y many e x p e r i m e n t s have c o n c e n t r a t e d weak l i n k s a t t h e g r a i n boundary o f YBCO
m i s a l i g n e d i n a-b p l a n e . 4 , 5
2. EXPERIMENTAL PROCEDURES
They c o n c l u d e d t h a t
To v a r y t h e i n c i d e n t a n g l e o f t h e a s s i s t i n g ion beam, t h e s u b s t r a t e s were mounted on h o l d e r s t h a t c o u l d be i n c l i n e d t o t h e d e s i r e d p o s i t i o n
l a r g e - a n g l e g r a i n b o u n d a r i e s i n a-b p l a n e s had
relative
v e r y weak s u p e r c o n d u c t i n g c o u p l i n g .
t h i c k n e s s from 0.3 to 0.4 m i c r o m e t e r s .
indicate erties
that sufficient
The r e s u l t s
superconducting prop-
can h a r d l y be o b t a i n e d w i t h the e x i s t e n c e
o f l a r g e - a n g l e g r a i n b o u n d a r i e s i n the a - b p l a n e of YBCO. We produced biaxially oriented YSZ films on
t o t h e ion beam.
The YSZ f i l m s had
Next, YBCO f i l m s were d e p o s i t e d by l a s e r a b l a t i o n on H a s t e l l o y c27S c o v e r e d with the YSZ films. used.
An Ar-F excimer l a s e r
(A =193 nm) was
The r a t e o f l a s e r s h o t was 5 per second.
The s u b s t r a t e
t e m p e r a t u r e was s e t a t 700 oc, and
polycrystalline substrates by Ion Beam Assisted
the p a r t i a l
Deposition 6 (IBAD), a method to deposit thin
f i l m s had a t h i c k n e s s o f 1.0 m i c r o m e t e r s .
films with concurrent energetic particle bom-
0921-4534/91/$03.50 © 1991 - Elsevier Science Publishers B.V.
p r e s s u r e of 02 was 2OO mTorr.
Structural
All rights ~served.
YBCO
p r o p e r t i e s were e v a l u a t e d by X-ray
Y. lijima
1960
et aL / Biaxially aligned YBa2Cu~O7.x thin film tapes
0
g01
~-- 10s
.
.
.
0000
30
.
0
.
.
.
0
0
i
I
.
.
0
I0 4
E0
P70
90 ¶{~I
-30
I
• "O,O
I
I
0.2
0.4
I
~
0.6
'
0.8
t
.0
HAGNETICFIELO (Tesla} -90
180
FIGURE 1 X-ray p o l e f i g u r e for the YSZ <111> peak of the f i l m d e p o s i t e d on p o l y c r y s t a U i n e H a s t e l l o y c276 s u b s t r a t e by IBAD.
FIGURE 3 The relationships between Jc and magnetic field for the biaxially aligned YBa2Cu307_ x film•
Figure
2 shows X-raypole figure for the
<103> peaks of YBCO films deposited on the biaxially aligned YSZ films.
9O
The c-axis was
oriented perpendicular to the substrate, and aand b-axes were aligned to the YSZ <110> axis in the plane parallel to the substrate.
This
epitaxial relation is similar to the result for
"~
270
go
single crystal YSZ substrates.1
The FWI~d of
<103> signals were approximately 30 degrees. Figure 3 shows magnetic field dependence of Jc for the YBCO film deposited on the biaxially aligned ¥SZ layer.
The direction of the magnet-
ic field was perpendicular to both the c-axis of
180
the YBCO film and the direction of the transFIGURE 2 X-ray pole figure for YBa2Cu307_ x <103> peak on Hastelloy c276 substrate with the biaxially aligned YSZ buffer layer.
porting current.
Jc of 6.0xlO 4 A/cm 2 (77 K, 0
T), and 1.4x104 A/cm 2 (77 K, 0.6 T) were obtained.
It was better than the ones for poly-
crystalline substrates reported so far, pardiffraction.
Superconducting properties were
ticularly in magnetic field.
measured by the DC four probe method.
3. RESULTS & DISCUSSION Biaxially aligned YSZ films were formed by
ACKNOWLEDGMENT Thisworkwas performedas a partof " R l D on S@erc0nductingTechnologyfor ElectricPowerApparatuses" as a subjectof Super-~undertheMoonlightProject of Agencyof IndustrialScienceandTec~n010gy,MITI,beingconsignedby N~O.
!BAD, when the direction of the assisting ion beam was inclined from 30 to 60 degrees toward
REFERENCES
the substrates.
X-ray pole
1. J . P. Zheng, e t . a l . Appl. Phys. £ e t t . 58 (1991) 540 2. E. Naruml, et al. AppI. Phys. Left. 58 (1991) 1202
The <100> axis
3. J. Saltoh, et al. Jpn. J. App1. Phys. BO (1991) L718
Figure 1 shows
figure for the ¥SZ <111> peaks.
4. D. Dlmos, et al. Phys. Rev. £ett. 61 (1988) 219
of YSZ was oriented normal to the substrate, and there exists apparent in-plane ordering.
5. M. F. Chisholm, et al. NATURE 351 (1991) 47 6. S. M. Rossnagel et al. MRS Bul. Feb.lS/Mar.16 (1987) 40
..
__L.L w
Physica C 185-189 (1991) 1959-1960 North-Holland
BIAXIALLY ALIGNED YBa2Cu307_ x THIN FILN TAPES Yasuhiro IIJIMA, Nobuo TANABE, Yoshimitsu IKENO* and Osamu KOHNO M a t e r i a l s Research Lab., Fujikura L t d . , 1 - 5 - 1 , Kiba, Koto-ku, Tokyo 135, JAPAN *Super-GM, 5-14-10, Nishitenma, Osaka 530, JAPAN We r e p o r t the formation o f crystalline, Ni-based a l l o y
biaxially o r i e n t e d f i l m s of y t t o r i u m - s t a b i l i z e d
ZrO2 (YSZ) on a p o l y -
( H a s t e l l o y c276) by Ion-Beam-Assisted Deposition (IBAD), and the subsequent a-b plane alLgned YBa2Cu3OT-x (YBCO) f i l m s d e p o s i t e d by l a s e r a b l a t i o n . Jc o f 6.0x104 A/cm2 (77 K, 0 T) and 1.4x104 A/cm2 (77 K, 0.6 T) were obtained. A new method to prevent i n t e r g r a n u l a r - w e a k - l i n k s has been developed for a p p l i c a t i o n o f oxide superconducting t h i n f i l m s , for tape-shaped c a b l e s , magnets, magnetic s h i e l d s , microwave d e v i c e s , e t c . bardment, and can s t r o n g l y modify the s t r u c t u r a l
1. INTRODUCTION High quality YBa2Cu307_ x (YBCO) thin films
deposited on single crystal substrates have a structure,
biaxial
c-axis oriented perpendicular
properties
of the resulting thin films.
A-b
p l a n e a l i g n e d ~BCO f i l m s were d e p o s i t e d on t h o s e YSZ b u f f e r l a y e r s by l a s e r a b l a t i o n .
to the s u b s t r a t e , and the a- and b - a x e s a l i g n e d in the plane parallel
to the substrate. 1
Jc
r e a c h e d o v e r 106 A/cm 2 (77 K, 0 T) and t o l e r a t e d magnetic field well.
Our o b j e c t i v e i s t o im-
prove superconducting p r o p e r t i e s line metallic
on p o l y c r y s t a l -
substrates applicable for wires,
magnets, magnetic s h i e l d s ,
etc.
Jc of These
f i l m s r a n g e d from 103 t o 104 A/cm 2 (77 K, 0 T), that are sensitive
to magnetic f i e l d . 2 , 3
have a m o n o - a x i a l s t r u c t u r e ,
c-axis oriented
p e r p e n d i c u l a r to the s u b s t r a t e , b- a x e s d i s t r i b u t e d
They
but t h e a - and
randomly.
on
Several mirror-like
p o l i s h e d p l a t e s of Has-
t e l l o y c276 were p r e p a r e d . Ni-based a l l o y
H a s t e l l o y c276 i s a
t h a t is not s u s c e p t i b l e to h e a t
and o x i d a t i o n . 2 were 10x18xO.5~.
The d i m e n s i o n s o f the samples The IBAD system had dual ion
sources. The YSZ target was sputtered by Ar + ion beam from the first ion source.
An assisting
O+Ar ion beam from the second ion source concurrently bombarded the films.
The energy of the
assistip~ ion beam ranged from 300 to I000 eV.
R e c e n t l y many e x p e r i m e n t s have c o n c e n t r a t e d weak l i n k s a t t h e g r a i n boundary o f YBCO
m i s a l i g n e d i n a-b p l a n e . 4 , 5
2. EXPERIMENTAL PROCEDURES
They c o n c l u d e d t h a t
To v a r y t h e i n c i d e n t a n g l e o f t h e a s s i s t i n g ion beam, t h e s u b s t r a t e s were mounted on h o l d e r s t h a t c o u l d be i n c l i n e d t o t h e d e s i r e d p o s i t i o n
l a r g e - a n g l e g r a i n b o u n d a r i e s i n a-b p l a n e s had
relative
v e r y weak s u p e r c o n d u c t i n g c o u p l i n g .
t h i c k n e s s from 0.3 to 0.4 m i c r o m e t e r s .
indicate erties
that sufficient
The r e s u l t s
superconducting prop-
can h a r d l y be o b t a i n e d w i t h the e x i s t e n c e
o f l a r g e - a n g l e g r a i n b o u n d a r i e s i n the a - b p l a n e of YBCO. We produced biaxially oriented YSZ films on
t o t h e ion beam.
The YSZ f i l m s had
Next, YBCO f i l m s were d e p o s i t e d by l a s e r a b l a t i o n on H a s t e l l o y c27S c o v e r e d with the YSZ films. used.
An Ar-F excimer l a s e r
(A =193 nm) was
The r a t e o f l a s e r s h o t was 5 per second.
The s u b s t r a t e
t e m p e r a t u r e was s e t a t 700 oc, and
polycrystalline substrates by Ion Beam Assisted
the p a r t i a l
Deposition 6 (IBAD), a method to deposit thin
f i l m s had a t h i c k n e s s o f 1.0 m i c r o m e t e r s .
films with concurrent energetic particle bom-
0921-4534/91/$03.50 © 1991 - Elsevier Science Publishers B.V.
p r e s s u r e of 02 was 2OO mTorr.
Structural
All rights ~served.
YBCO
p r o p e r t i e s were e v a l u a t e d by X-ray
Y. lijima
1960
et aL / Biaxially aligned YBa2Cu~O7.x thin film tapes
0
g01
~-- 10s
.
.
.
0000
30
.
0
.
.
.
0
0
i
I
.
.
0
I0 4
E0
P70
90 ¶{~I
-30
I
• "O,O
I
I
0.2
0.4
I
~
0.6
'
0.8
t
.0
HAGNETICFIELO (Tesla} -90
180
FIGURE 1 X-ray p o l e f i g u r e for the YSZ <111> peak of the f i l m d e p o s i t e d on p o l y c r y s t a U i n e H a s t e l l o y c276 s u b s t r a t e by IBAD.
FIGURE 3 The relationships between Jc and magnetic field for the biaxially aligned YBa2Cu307_ x film•
Figure
2 shows X-raypole figure for the
<103> peaks of YBCO films deposited on the biaxially aligned YSZ films.
9O
The c-axis was
oriented perpendicular to the substrate, and aand b-axes were aligned to the YSZ <110> axis in the plane parallel to the substrate.
This
epitaxial relation is similar to the result for
"~
270
go
single crystal YSZ substrates.1
The FWI~d of
<103> signals were approximately 30 degrees. Figure 3 shows magnetic field dependence of Jc for the YBCO film deposited on the biaxially aligned ¥SZ layer.
The direction of the magnet-
ic field was perpendicular to both the c-axis of
180
the YBCO film and the direction of the transFIGURE 2 X-ray pole figure for YBa2Cu307_ x <103> peak on Hastelloy c276 substrate with the biaxially aligned YSZ buffer layer.
porting current.
Jc of 6.0xlO 4 A/cm 2 (77 K, 0
T), and 1.4x104 A/cm 2 (77 K, 0.6 T) were obtained.
It was better than the ones for poly-
crystalline substrates reported so far, pardiffraction.
Superconducting properties were
ticularly in magnetic field.
measured by the DC four probe method.
3. RESULTS & DISCUSSION Biaxially aligned YSZ films were formed by
ACKNOWLEDGMENT Thisworkwas performedas a partof " R l D on S@erc0nductingTechnologyfor ElectricPowerApparatuses" as a subjectof Super-~undertheMoonlightProject of Agencyof IndustrialScienceandTec~n010gy,MITI,beingconsignedby N~O.
!BAD, when the direction of the assisting ion beam was inclined from 30 to 60 degrees toward
REFERENCES
the substrates.
X-ray pole
1. J . P. Zheng, e t . a l . Appl. Phys. £ e t t . 58 (1991) 540 2. E. Naruml, et al. AppI. Phys. Left. 58 (1991) 1202
The <100> axis
3. J. Saltoh, et al. Jpn. J. App1. Phys. BO (1991) L718
Figure 1 shows
figure for the ¥SZ <111> peaks.
4. D. Dlmos, et al. Phys. Rev. £ett. 61 (1988) 219
of YSZ was oriented normal to the substrate, and there exists apparent in-plane ordering.
5. M. F. Chisholm, et al. NATURE 351 (1991) 47 6. S. M. Rossnagel et al. MRS Bul. Feb.lS/Mar.16 (1987) 40