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Clean vacuum pumping for metal surface modification by ion implantation
Vacuum News gases, this type of filter is permanently sealed into a rugged nylon housing and the complete unit is disposable.
gives an exceptionally clean system virtually free from contamination.
In service at Charing Cross Hospital, the Balston filter units, even though appreciably smaller than the original equipment are nevertheless providing the same 14 months interval between changes. Of greater significance, however, is the fact that the Balston filter elements, offering equal filtration capabilities, are at least 80% cheaper than the original equipment.
The HSDE ion implantation machine uses a 250 mm dia Diffstak MK 2. This consists of a diffusion pump, a water-cooled baffle to prevent backstreaming, a high vacuum valve and a rough pumping line, all integrated in a single stainless steel casing. Its backing pump is the .Edwards E2M40 double stage mechanical rotary pump. This combination gives an air pumping speed of 2000 I s-l and will quickly attain the equipment working level of 10-O mbar.
Balston has worked closely with hospital, laboratory and industrial users of filtration systems for many years. This experience has resulted in the development of a complete range of systems embodying the design principles essential to efficient and economic filtration of media for analytical or process purposes. Balston Limited, Medway Mill, Moncktons Lane, Maidstone, Kent ME14 208
An optional version of the Diffstak. has an integral liquid nitrogen cooled cryo surface which greatly reduces pumpdown time for applications where very high vapour loads have to be pumped. Edwards High Vacuum, Manor Royal, Crawley, West Sussex RHl 0 2LW
Leybold-Heraeus provide coating technologies Clean vacuum pumping for metal modification by ion implantation
surface
Edwards Diffstak vacuum pumps are playing a central role in the metals surface modification technique of ion implantation now beginning to emerge in manufacturing industry. They provide the extremely clean vacuum that is essential to the operation of the Type 222 ion implantation machines produced by Hawker Siddeley Dynamics Engineering. Two such machines, based on a prototype developed by the UK Atomic Energy Research Establishment, Harwell, are now in operation. One is at the Lucas Research Centre. Shirley, West Midlands, where it is being used for further investigation into increasing the wear resistance of tools by this process. The second machine is at Verdict Ion Technology, a division of Verdict Precision Engineering, Southall, Middlesex. and is currently being used to provide an (ion) implantation service to industry. The process is expected to lead to considerable savings by extending the life of tools. These include press, cold stamping and lamination tools, knives, punches, dies. and tools used in plastic moulding. Hawker Siddeley’s ion implantation machine drives a stream of nitrogen ions into the surface of the tool so that they lodge at controlled depths, usually between 100 and 1000 atomic layers below the surface. The ions are produced by an ion source, comprising a nitrogen gas supply and an electrical chamber in which the gas atoms are ionized by a high potential. They are then formed into a beam and accelerated by a further high potential to give them the necessary energy of 100 keV to penetrate the metal surface. The ionization and acceleration can only be achieved in a vacuum. Ion source, accelerator and components to be implanted are therefore all enclosed in a stainless steel workchamber, of 0.23 m3 volume, to which the Diffstak vacuum pumping equipment is connected. Pressure in the workchamber is pumped down to between 1 O-’ mbar and 2 x lo-’ mbar before the ion implantation can begin. For successful implantation it is essential that the ion beam should have a high purity, of approximately 90%. Contaminating molecules must therefore be kept to very low levels inside the workchamber. It is for this reason that Hawker Siddeley chose the Diffstak diffusion pumping system for their machine. One of the Diffstak’s big advantages over conventional systems is its reduction of elastomer seals. This, combined with its water-cooled baffle and the unique Edwards Co-Seal, which eliminates crevices and trapped volumes,
analytical
back-up
for
The development of new vacuum coating processes is interlinked with the research and development of improved thin films with special physical properties. Scientists use latest surface analysis techniques to examine coated layers. Leybold-Heraeus are leading manufacturers of large industrial coating plant and provide surface analysis equipment to research and industry. The latter has been used in the past to support the development of coating techniques. It was only logical therefore to combine the equipment and the experience to provide it to other oossible clients. Leybold-Heraeus now offer express X-ray analysis with SEM photography, depth profiling or point analysis and complete investigations to determine the cause of coating defects. The company also offers to make its experience available to clients who wish to develop new processes. . Leybold-Heraeus Ltd. 16 Endeavour Way, Durnsford Road, London SW1 9 8UH
E.I.S. (Midlands) Ltd official ‘Maximator’ range
distributors
of
E.I.S. (Midlands) Limited, have recently been appointed official factory authorized distributors for the range of ‘Melter’ Air Operated Hydraulic Pumps, Gas Boosters and Ancillary Equipment, known as the ‘Maximator’ range. They are ideally suited for the Hydraulic, Mining, Civil Engineering, Offshore and Petro-chemical Industries, and will find ready application for use on Pneumatic Equipment. The units offered are capable of handling a wide variety of Fluids and Gases in a pressure range of up to 6000 bar (90,000 psi) on liqurds and1 5,000 bar (200,000 psi) on gas, with flow rates up to 50 I min-’ (10 G.P.M.) on liquids and high flow rates for gas (rates on application). E.I.S. (Midlands) Limited, ‘Ricspur’ Works, Walsall Road, Walsall Wood, West Midlands
News
from Torvac
State of trade. While commentators still seem to differ about the degree of industrial recovery, equipment business at Torvac Limited is strong, with good export demand on top of improvement at home. So our production capacity is now almost full to the end of November, with prospects good into 1984. We have been selectively recruiting to increase capacity. .
603
gives an exceptionally clean system virtually free from contamination.
In service at Charing Cross Hospital, the Balston filter units, even though appreciably smaller than the original equipment are nevertheless providing the same 14 months interval between changes. Of greater significance, however, is the fact that the Balston filter elements, offering equal filtration capabilities, are at least 80% cheaper than the original equipment.
The HSDE ion implantation machine uses a 250 mm dia Diffstak MK 2. This consists of a diffusion pump, a water-cooled baffle to prevent backstreaming, a high vacuum valve and a rough pumping line, all integrated in a single stainless steel casing. Its backing pump is the .Edwards E2M40 double stage mechanical rotary pump. This combination gives an air pumping speed of 2000 I s-l and will quickly attain the equipment working level of 10-O mbar.
Balston has worked closely with hospital, laboratory and industrial users of filtration systems for many years. This experience has resulted in the development of a complete range of systems embodying the design principles essential to efficient and economic filtration of media for analytical or process purposes. Balston Limited, Medway Mill, Moncktons Lane, Maidstone, Kent ME14 208
An optional version of the Diffstak. has an integral liquid nitrogen cooled cryo surface which greatly reduces pumpdown time for applications where very high vapour loads have to be pumped. Edwards High Vacuum, Manor Royal, Crawley, West Sussex RHl 0 2LW
Leybold-Heraeus provide coating technologies Clean vacuum pumping for metal modification by ion implantation
surface
Edwards Diffstak vacuum pumps are playing a central role in the metals surface modification technique of ion implantation now beginning to emerge in manufacturing industry. They provide the extremely clean vacuum that is essential to the operation of the Type 222 ion implantation machines produced by Hawker Siddeley Dynamics Engineering. Two such machines, based on a prototype developed by the UK Atomic Energy Research Establishment, Harwell, are now in operation. One is at the Lucas Research Centre. Shirley, West Midlands, where it is being used for further investigation into increasing the wear resistance of tools by this process. The second machine is at Verdict Ion Technology, a division of Verdict Precision Engineering, Southall, Middlesex. and is currently being used to provide an (ion) implantation service to industry. The process is expected to lead to considerable savings by extending the life of tools. These include press, cold stamping and lamination tools, knives, punches, dies. and tools used in plastic moulding. Hawker Siddeley’s ion implantation machine drives a stream of nitrogen ions into the surface of the tool so that they lodge at controlled depths, usually between 100 and 1000 atomic layers below the surface. The ions are produced by an ion source, comprising a nitrogen gas supply and an electrical chamber in which the gas atoms are ionized by a high potential. They are then formed into a beam and accelerated by a further high potential to give them the necessary energy of 100 keV to penetrate the metal surface. The ionization and acceleration can only be achieved in a vacuum. Ion source, accelerator and components to be implanted are therefore all enclosed in a stainless steel workchamber, of 0.23 m3 volume, to which the Diffstak vacuum pumping equipment is connected. Pressure in the workchamber is pumped down to between 1 O-’ mbar and 2 x lo-’ mbar before the ion implantation can begin. For successful implantation it is essential that the ion beam should have a high purity, of approximately 90%. Contaminating molecules must therefore be kept to very low levels inside the workchamber. It is for this reason that Hawker Siddeley chose the Diffstak diffusion pumping system for their machine. One of the Diffstak’s big advantages over conventional systems is its reduction of elastomer seals. This, combined with its water-cooled baffle and the unique Edwards Co-Seal, which eliminates crevices and trapped volumes,
analytical
back-up
for
The development of new vacuum coating processes is interlinked with the research and development of improved thin films with special physical properties. Scientists use latest surface analysis techniques to examine coated layers. Leybold-Heraeus are leading manufacturers of large industrial coating plant and provide surface analysis equipment to research and industry. The latter has been used in the past to support the development of coating techniques. It was only logical therefore to combine the equipment and the experience to provide it to other oossible clients. Leybold-Heraeus now offer express X-ray analysis with SEM photography, depth profiling or point analysis and complete investigations to determine the cause of coating defects. The company also offers to make its experience available to clients who wish to develop new processes. . Leybold-Heraeus Ltd. 16 Endeavour Way, Durnsford Road, London SW1 9 8UH
E.I.S. (Midlands) Ltd official ‘Maximator’ range
distributors
of
E.I.S. (Midlands) Limited, have recently been appointed official factory authorized distributors for the range of ‘Melter’ Air Operated Hydraulic Pumps, Gas Boosters and Ancillary Equipment, known as the ‘Maximator’ range. They are ideally suited for the Hydraulic, Mining, Civil Engineering, Offshore and Petro-chemical Industries, and will find ready application for use on Pneumatic Equipment. The units offered are capable of handling a wide variety of Fluids and Gases in a pressure range of up to 6000 bar (90,000 psi) on liqurds and1 5,000 bar (200,000 psi) on gas, with flow rates up to 50 I min-’ (10 G.P.M.) on liquids and high flow rates for gas (rates on application). E.I.S. (Midlands) Limited, ‘Ricspur’ Works, Walsall Road, Walsall Wood, West Midlands
News
from Torvac
State of trade. While commentators still seem to differ about the degree of industrial recovery, equipment business at Torvac Limited is strong, with good export demand on top of improvement at home. So our production capacity is now almost full to the end of November, with prospects good into 1984. We have been selectively recruiting to increase capacity. .
603