Effect of Dimethylformamide, Current Density and Resistivity on Pore Geometry in P-type Macroporous Silicon

Effect of Dimethylformamide, Current Density and Resistivity on Pore Geometry in P-type Macroporous Silicon

Available online at www.sciencedirect.com ScienceDirect Procedia Materials Science 5 (2014) 764 – 771 ,QWHUQDWLRQDO&RQIHUHQFHRQ$GYDQFHVLQ0DQXID...

3MB Sizes 0 Downloads 42 Views

Available online at www.sciencedirect.com

ScienceDirect Procedia Materials Science 5 (2014) 764 – 771

,QWHUQDWLRQDO&RQIHUHQFHRQ$GYDQFHVLQ0DQXIDFWXULQJDQG0DWHULDOV(QJLQHHULQJ $00(

(IIHFWRIGLPHWK\OIRUPDPLGHFXUUHQWGHQVLW\DQGUHVLVWLYLW\RQSRUH JHRPHWU\LQSW\SHPDFURSRURXVVLOLFRQ

6+DOGDUD$'HD6 &KDNUDERUW\D6*KRVKD DQG8*KDQWDE D

$VDQVRO(QJLQHHULQJFROOHJH$VDQVRO,QGLD E 16+0'XUJDSXU,QGLD

$EVWUDFW $ V\VWHPDWLF VWXG\ ZDV GRQH WR IDEULFDWH 0DFUR SRURXV VLOLFRQ ILOPV E\ HOHFWURFKHPLFDO HWFKLQJ RI SíW\SH VLOLFRQ ZLWK D UHVLVWLYLW\UDQJHRI±ȍFPIRU PLQLQDQHOHFWURO\WHFRQWDLQLQJK\GURIOXRULFDFLG +) ZDWHUDQG G\PHWK\OIRUPDPLGH '0)  6DPSOHV ZHUH VWXGLHG XVLQJ VFDQQLQJ HOHFWURQ PLFURVFRS\ 7KH PRUSKRORJ\ RI PDFURSRUH IRUPDWLRQ ZDV REVHUYHG YDU\LQJ+)'0)UDWLRLQWKHVROXWLRQVXEVWUDWHUHVLVWLYLW\DQGDQRGL]DWLRQFXUUHQWGHQVLW\&URVVVHFWLRQDOPLFURJUDSKVUHYHDOHG PDFURSRUHV RI DSSUR[LPDWHO\ FROXPQDU VKDSH EXW IRU ORZ UHVLVWLYH VXEVWUDWH SRUH ZDOOV DUH IUDJLOH $ FRQVLVWHQW YDULDWLRQ RI DYHUDJHSRHGHQVLW\DQGDYHUDJHSRUHOHQJWKZDVREVHUYHG © 2014 Elsevier Ltd. This is an open access article under the CC BY-NC-ND license ‹  7KH$XWKRUV3XEOLVKHGE\(OVHYLHU /WG (http://creativecommons.org/licenses/by-nc-nd/3.0/). 6HOHFWLRQDQGSHHUUHYLHZXQGHUUHVSRQVLELOLW\RI 2UJDQL]LQJ &RPPLWWHHRI$00( Selection and peer-review under responsibility of Organizing Committee of AMME 2014 .H\ZRUGV0DFURSRURXVVLOLFRQHOHFWURFKHPLFDOHWFKLQJ

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

&RUUHVSRQGLQJDXWKRU7HO 

(PDLODGGUHVV VDQGBMX#\DKRRFRP

2211-8128 © 2014 Elsevier Ltd. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/3.0/). Selection and peer-review under responsibility of Organizing Committee of AMME 2014 doi:10.1016/j.mspro.2014.07.326

S. Haldar et al. / Procedia Materials Science 5 (2014) 764 – 771

 ([SHULPHQW %RURQGRSHGRQHVLGHGSROLVKHGVLOLFRQZDIHUVRI^`FU\VWDORULHQWDWLRQDQGRIYDULRXVUHVLVWLYLW\IURP Ÿ FPWR Ÿ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

 5HVXOWV  2UJDQLFHOHFWURO\WH '0) GHSHQGHQFH 7R VWXG\ WKH GHSHQGHQFH RQ WKH YROXPHWULF UDWLR RI +) DQG '0) LQ WKH VROXWLRQ  XVLQJ  Ÿ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

765

766

S. Haldar et al. / Procedia Materials Science 5 (2014) 764 – 771

)LJ 6(0VRISODQHDQGFURVVVHFWLRQDOYLHZRISW\SHVLOLFRQVXEVWUDWHIRUGLIIHUHQWYROXPHWULFUDWLRRI+)DQG'0) VXEVWUDWHUHVLVWLYLW\  Ÿ FPFXUUHQWGHQVLW\ P$FP DQGWLPHRIHWFKLQJ PLQ  D +)'0)  E  +)'0)  F  +)'0)  G  +)'0) 

)LJ 9DULDWLRQRIDYHUDJHSRUHGHQVLW\YV+)'0)YROXPHWULFUDWLR5HVLVWLYLW\  Ÿ FPFXUUHQWGHQVLW\ P$FP DQGWLPHRIHWFKLQJ PLQ

S. Haldar et al. / Procedia Materials Science 5 (2014) 764 – 771

)LJ 9DULDWLRQRIDYHUDJHSRUHOHQJWKYV +)'0)YROXPHWULFUDWLR5HVLVWLYLW\  Ÿ FPFXUUHQWGHQVLW\ P$FP DQGWLPH PLQ

 $QRGL]DWLRQFXUUHQWGHQVLW\GHSHQGHQFH 7KH HIIHFW RI DQRGL]DWLRQ FXUUHQW GHQVLW\ RQ PDFURSRUH IRUPDWLRQ ZDV VWXGLHG V\VWHPDWLFDOO\ 7KH VWXG\ ZDV GRQHNHHSLQJRWKHUSDUDPHWHUFRQVWDQW UHVLVWLYLW\RKPFP+)'0) WLPH PLQ ,Q)LJ DG WKH PRUSKRORJ\ RI PDFURSRUHV RQ SW\SH VLOLFRQ DUH VKRZQ )RUP )LJ  DG  LW LV FOHDU WKDW ZLWK WKH LQFUHDVLQJ RI FXUUHQWGHQVLW\WKHDYHUDJHSRUHGHQVLW\ LQFUHDVHVZKLFKLVDOVRVKRZQJUDSKLFDOO\LQ)LJ7KHDYHUDJHSRUHOHQJWK DOVRLQFUHDVHVZLWKWKHLQFUHDVLQJRIFXUUHQWGHQVLW\ZKLFKLVFOHDUIURP)LJ DG DQGVKRZQJUDSKLFDOO\LQ)LJ

767

768

S. Haldar et al. / Procedia Materials Science 5 (2014) 764 – 771

)LJ 6(0VRISODQHDQGFURVVVHFWLRQDOYLHZRISW\SHVLOLFRQVXEVWUDWHIRUGLIIHUHQWFXUUHQWGHQVLW\ +)'0) UHVLVWLYLW\  Ÿ FP WLPH PLQ  D M P$FP E M P$FP F M P$FP G M P$FP

)LJ 9DULDWLRQRIDYHUDJHSRUHGHQVLW\YVFXUUHQWGHQVLW\5HVLVWLYLW\RISW\SHVLOLFRQZDIHU  Ÿ FP+)'0) DQGWLPHRIHWFKLQJ PLQ

)LJ 9DULDWLRQRIDYHUDJHSRUHOHQJWKYVFXUUHQWGHQVLW\5HVLVWLYLW\RISW\SHVLOLFRQZDIHU  Ÿ FP +)'0) DQGWLPHRIHWFKLQJ  PLQ

S. Haldar et al. / Procedia Materials Science 5 (2014) 764 – 771

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

)LJ 6(0VRISODQHDQGFURVVVHFWLRQDOYLHZRISW\SHVLOLFRQVXEVWUDWHIRUGLIIHUHQWUHVLVWLYH VXEVWUDWH +)'0) FXUUHQWGHQVLW\  P$FP DQGWLPHRIHWFKLQJ PLQ  D ȡ  Ÿ FP E ȡ  Ÿ FP F ȡ  Ÿ FP G ȡ  Ÿ FP

769

770

S. Haldar et al. / Procedia Materials Science 5 (2014) 764 – 771

)LJ 9DULDWLRQRIDYHUDJHSRUHGHQVLW\YVUHVLVWLYLW\RIWKHVXEVWUDWH+)'0) FXUUHQW GHQVLW\ P$FP DQGWLPHRIHWFKLQJ  PLQ

)LJ 9DULDWLRQRIDYHUDJHSRUHOHQJWKYVUHVLVWLYLW\RIWKHVXEVWUDWH+)'0) FXUUHQWGHQVLW\ P$FP DQGWLPHRIHWFKLQJ PLQ

 'LVFXVVLRQV 7KH  PHFKDQLVP  RI HOHFWURFKHPLFDO GLVVROXWLRQ RI 6L LQ +) VROXWLRQ ZDV QLFHO\ H[SODLQHG E\ $OORQJXH HW DO  ,W RFFXUV WKURXJK WKH GLIIXVLRQ RI D SRVLWLYH FKDUJH KROH  LQWR VSDFH ± FKDUJH OD\HU 1RUPDOO\  ³FKHPLFDO HWFKLQJ´ LQGLFDWHV GLSSLQJ D ZDIHU LQ VRPH HWFK EDWKV %XW OLWHUDWXUH UHYHDOHG WKDW HWFKLQJ WKDW HWFKLQJ RFFXUV DFFRUGLQJWRFKHPLFDODQGHOHFWURFKHPLFDOUHDFWLRQHYHQDWUHVWSRWHQWLDO,WFDQEHVDLGWKDWWKHK\GURO\VLVVWHSVDUH S+GHSHQGHQW7KHUHDFWLRQVFDQEHVXPPDUL]HGDVIROORZV Ł6L  Ł6L 6L+ ) K 9% Ł6L 6L+) Ł6L 6L)+H &% Ł6L 6L)+ +)  Ł6L+ +6L) +6L) +) +6L) + ŁVWDQGVIRUWULSOHERQG 7KHKROHSURGXFHGLVFDSWXUHGE\6L+VXUIDFHVWDWHRQHSURWRQOHIWDQGXOWLPDWHO\6L ± GDQJOLQJERQGV DUHIRUPHG 1H[W VWHS ) LRQ IURP +) DWWDFNV ZKLFK OHDGV SRVLWLYH SRODUL]DWLRQ RI 6L ± VXUIDFH DWRPV $V D UHVXOW +) FDQ EH DGGHGDJDLQVW6L ± 6LEDFNERQGV,QWKLVUHDFWLRQ +6L) SURGXFHGZKLFKIXUWKHUUHDFWVZLWK+)WRIRUP +6L) DQG PROHFXODU +$V DZKROH6L±+6L±)LVFRQVLGHUHGWREHUDWHGHWHUPLQLQJDQGGURSVWKHJUHDWHVWSRWHQWLDODQG

S. Haldar et al. / Procedia Materials Science 5 (2014) 764 – 771

H[SODLQ UHDFWLRQ PHFKDQLVP ,W FDQ EH DQWLFLSDWHG WKDW WKH SURSHUWLHV RI VROYHQW PD\ KDYH VRPH LQIOXHQFH RQ WKH YHORFLW\RIUHDFWLRQRUUHDFWLRQPHFKDQLVP 7KHHIIHFWRI'0)RQWKHGLVVROXWLRQRI6LLQ+)FDQEHDQDO\]HGLQWZRVHQVH$WILUVW'0)LV/HZLVEDVHDQG IRUPV FRPSOH[ ZLWK 6L) ,W FDQ DOVR EH DQWLFLSDWHG WKDW '0) PD\ IRUP VLPLODU FRPSOH[ ZLWK VLOLFRQ UHDFWLRQ LQWHUPHGLDWHEORFNLQJ WKHIXUWKHU DWWDFN E\) DQGWKHUHE\FOHDYDJHRI6L6LEDFNERQGDOVR'0) FRXOGDFWDVDQ R[LGL]LQJDJHQWRU HQKDQFHWKHR[LGHIRUPDWLRQSURFHVV7KLVPD\EH D UHDVRQRISDUWLDOGLVVROXWLRQRIQDQRSRURXV 6L ± PDWHULDOLQFDVHRI+)'0) >/XVWHWDO@ $QRWKHUZD\ LWFDQEHVDLGWKDW DSDUWIURPWKHEXON SURSHUW\PROHFXODUSURSHUW\ RIWKHVROYHQW '0) PD\KDYH VRPH UROHV LQ GLVVROXWLRQ PHFKDQLVP 6LQFH LQ WKLV ZRUN  +) LV XVHG VR WKH SUHVHQFH RI WKH SURWLF VROYHQW ZDWHU  PD\ H[HUW LW¶V HIIHFW $V WKH SURWLF VROYHQW PD\ XQGHUJR K\GURJHQ ERQGLQJ KHQFH WKH VROYDWLRQ SURFHVV HQKDQFHG 2Q WKH RWKHU KDQG DSURWLF '0) GRHVQ¶W KDV WKLV SURSHUW\ RU DQ\ DFLGLF K\GURJHQ $V D UHVXOW +) GLVVRFLDWHVOHVVEXWWKH) JHQHUDWHGDUHOHVVVROYDWHG DQGPXFKPRUHUHDFWLYH7KHUHIRUHWKHDWWDFNLQJYHORFLW\RI) LRQRQ6L ±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

$FNQRZOHGJHPHQW :HDUHWKDQNIXOWR'67 :HVW%HQJDO IRUILQDQFLQJWKLVSURMHFW 5HIHUHQFHV &KDR . - .DR 6 &
771