respect
to fixed
substrate.
points
of reference
Each beam thereby
a relatively moveable
force induced movable
upon
the
has a fixed end and axial
free end. Compressive
by axial movement,
inner
and
A controllable
due to a high aspect ratio profile of each The
amount
movement
occurs
of lateral
transversely
or
large in relation
to the applied
which
causes
perpendicular
amplifier
force/movement
stages,
applied
movement
pairs
an input
to the movable
of a first beam generates
these
a transverse
as
axial
free end
motion
ot
of that beam.
2001
Inventors: M.T.A.
MacDonald
Saif, N.C.
Applicant: Honeywell
International
This
array
of
polymer
generally
sheets
predetermined
device
bonded
dielectric
films
includes
of electric
the
electrodes,
forces are generated
near the point is smallest. displacement electrostatic
forces.
the plurality
of sheets forms
of unit
most
is disposed
the
members
change
in the medium
generares
resistance
member
about
according
for the bundle
optical
the
fibres,
remove
dust and moisture
remains
in the finished
controllable The
outer
A device
be used
as a
device in
equipment,
such as
Applicant:
A device includes
2001
scanner
a barcode
for scanning substrate.
The
a micro-machined a detector,
mirror,
mounted
is
scanner
side
embodiment,
a laser
on a single
layers
are configured
activation
is caused
substrates.
Lenses
a laser beam deflected
the micro-machined
mirror.
also
without
a barcode
The scanner
by rotating
using
by may
an actuator
detecting
200 1
Applicant: Lucent
preformed
This
provide between
into a
predetermined
by
displacement
.mu.m individual to about
or into
flaps
mechanical
to bias
the pairs, or the sheets may form curved
portions
preferably
corrugations
each other.
an
applied
between from
thick
to
provide
1 .mu.m
to about
rhe cells preferably
displacement
of from about
100
of optical plurality
have an
mounted welded
Patent number: US 6184608
Magnetorheological integrated flywheel
W.R. Herb
brake with
transferred optical
USA
A magnetorheological
includes
an outer,
having
a hollow
provides
member
array-type
rotating
flywheel
interior
space,
cc3
brake member
and
by a welded
or brazed
an
Smart Materials Bulletin
inner
fixed
port
adapted of
may
fibres. be
By
out of the housing fibres.
The device
into
pins
housing.
A pair
of windows
and a left side frame. absorb
sensory
micro-
heated
of
effectively
suppressing
generation
of the
for the Two
200 1
reduces
induction
in a favourable
the
device.
including
E. Higuchi
construction,
outside signals
it is
collision
Applicant: Fugi Xerox Co., Ltd, Japan
a plurality
housing
of
Electromagnetic induction heating device and image recording device
has a simple
of the
of a
collision.
Publication date; 27 February Inventors: Y. Urushiyama,
of
rigidity
Accordingly,
impact
and partial
The electromagnetic
in the
an
can be
for a form
in any form of collision
via another
protruding
microelectromechanical
the
to the foregoing,
by the device for adjusting
fibres and may be
has
control
the
means,
array-type
electrical
ports for optical
with this
transmitted
via one of the optical
by a
in which
than that of the
appropriate
Patent number: US 6193303
a plurality
for interacting
optical
to a value
flange.
of the housing
flange and includes
Due
overall collision
is
signal of
and left side frames
of the
device
operation
of the frame
is predicted.
to
the
sensor. The actuator
of the frame greater
appropriately
of a plurality
microelectromechanical
electromechanical
Applicant: Lord Corporation,
possible
of ports
in another
housing
right
in one
information
2001
Inventors: C. Cabuz, R.D. Horning,
A bundle
packaged a housing
is mounted
of elements
Publication date: 6 February
a
device having
of ports.
or brazed
plurality
Inc., USA to
fibres
An array-type
5 .mu.m
200 .mu.m.
relates
microelectromechanical with a plurality
a
the pairs. The sheets are
about
and
load
Technologies
invention
for
into
to an output
in a portion
collision
opposite
sensor
inputted
for controlling
according
of a
deformation
force
is arranged
At least one of every pair of the sheets may be
working
of a frame has
detection
force detection
adjusted
pairs of actuators
force
of rhe right
such
a control
a force in a direction
the external
rigidity
detector
Further,
deformation
an external
periphery by
of the
or facilitating
deformation
Inventors: M. Stern, C. Ray
operation
to a form of collision
for generating
an external
is
of the right and left
sensor.
device for controlling
in the
device
device
of a collision
as an acceleration
of the actuator
the laser diode.
13 February
rigidity
frame, and a controller
a micro-
Patent number: US 6186399 Publication date:
a stack of layers of
of a right
The control
for controlling
by an output
diode as well as expand
mirror
of a car body
of a car. The
according
frames
judged
of restricting
machined
Kabushiki
rigidity
to the side frames.
frame,
of the
Kogyo
rigidity
direction
has a controller
Packaged microelectromechanical devices and systems
such that bi-directional
for controlling
longitudinal
Inc., USA
or several connected
scan
Giken
a device for adjusting
can be used to focus a laser beam from the laser
the sheets
2001
side frame and a left side frame extending
on a common
but in the
of leaks.
Honda
potential
intensely
assembly Helium
Japan
device for adjusting
and
during
Device for controlling rigidity and deformation of car body
Applicant: Symbol
diode,
the
Inuentor: K.S. Bhalla
attached
may include
and
gas is used to
assembly.
Publication date: 13 February
Kaisha,
and vehicles.
Technologies,
of
array-type
Patent number: US 6188814
by the field
may
pressurised
gas enables detection
rheology
of the
The
Scanner and mirror with shape memory alloy hinges
formed
the
to
or resistance-generating
An integrated
of the plurality
windows,
member
member.
rotating
sealed enclosure
or brazed
a hermetically
inert
produced
inner
provides
device,
to rotation
the
housing
microelectromechanical
the
to the invention
The
conduits.
on the outer
space.
flanges.
inert gas are
by welded
in
fixed
and
in the
pressurised
in the housing
is mounted
a field acting
in the working
rotating
of magnetically
for providing
mounted
substrate
generation
In a preferred
cells. The
to
for each cell permit
of fluid during
of the
fixed
conduits
with the
whereby
where the gap between
Inlets and outlets
and
on the sheets
array of unit cells. A source
electrostatic
a
in
conductive
associated
connects
a
flexible
together
of electrodes
operably
ro
the
Inventor: J.D. Carlson
to form an array of unit
are deposited
form a plurality
wall medium
space is
Patent number: US 6186290
thin
cells on at least one layer. Thin
of
Publication date: 13 February
Inc., USA
parallel
pattern
inner
medium
conveyors,
Polymer microactuator array with macroscopic force and displacement microactuator
space
exercise equipment,
Publication date: 6 February
surfaces
particles
generate
flywheel/brake
Patent number: US 6183097
plurality
interior
and
space. The inner
space. A field generator
selectably
axial force or axial
the
metal
working the
is relatively
it. By arranging
in cooperating
micromotion
permeable
transverse
of a beam due to buckling
movement
arrays
the
member
or buckle.
buckling
between
member.
deform
beams
provide
interior
is sized so that a working
to the
in-plane beam.
in the hollow
fixed member
end of a beam, will cause that beam to Buckling
applied
disposed
an
electromagnetic heats the object
heating
device
holds an objecr heating
condition
the irregularities object
energy induction
to be while
of heat
to be heated, consumption. heating
to be heated
and The
device which
provided
with
at
May 2001
least
an
electromagnetic
generating of magnetic manner
material that
induction be
it
in
exciting
which
the
magnetic
field
electromagnetic A movable relative
which
which
to the
which
is capable
object
the intensity
of the fluctuation
penetrates
the
heat generating
least
portion
Furthermore, constructed
an
image that
heating
object
to be heated
device
is disposed
recording the
device
that forms
etching.
and
integrated accelerometer
core.
capacitive
device
is
an
control
to the
having
active
anti-lock
systems
that
S.r.I., Italy has a stator
which
has a circular
extension
arms. These
arms support
electrodes
is
then
grown.
components are
substrate
and beneath
removed,
is excavated another sacrificial mobile
The
the rotor region structures
extending
direction
circuitry
the
sacrificial
an
aperture
substrate. and
USA, Kionix,
or
for
micro-mirror
micro-mirror
is
is useful in
such as in biaxial scanner
or
systems.
Publication date: 13 March R.W.
200 1
McClelland,
N.M.
Rensing,
PM. Zavracky
N.C.
assemblies
released
mirror
are dried
assemblies
and the dried
of separated
mirror
Patent number: US 6200882
of discrete
from a single silicon
wafer. The basic
structure
of the micromechanical
accelerometer
is etched
in the wafer to form a released portion
mounted
assemblies,
which
tape to produce
assemblies.
200 1
Torsional micromechanical system
mirror
A torsional
micromechanical
a mirror
mirror
mirror
structure
rotation a
Technical developments Industry trends
news
industries
Features Technical articles on
Research Trends mirror
rotatably
support
assembly
over and within
of the mirror
includes
a support layer.
system supported for
The latest research results published
in
the key journals
a cavity in
is sized sufficiently
reflecrive
is coplanar
In Brief Breaking
projects and developments
USA
assembly
movement
assembly
supporting
News Business activities
Corporation,
University,
unimpeded
month
around the world
MicroOptical
Northeastern
rotational
Next
Related
K.J. Jackson
a base. The cavity
provided
mirror
Publication date: 13 March
by a torsional
is
are
Inventors: J.D. Drake, J.H. Jerman,
includes
accelerometer
mirror
to produce
The
from the mounting
Applicant:
ulletin
are diced or scribed to produce
the
Inc.,
mirror
assemblies
tape
assemblies.
and
to produce
dried
mirror
the
Foundation
assemblies
The washed
and finally
of the
entails
to an acid release
to produce
to
release
together
method
assemblies
a mounting
assemblies
are separated
for processing formed
mirror
assemblies.
assemblies
of
Inc., USA
The
a plurality
B. Vigna
Smart Materials Bulletin
are
Patent number: US 6201629
and
Davis,
a method
the released mirror
a plurality
2001
capacitive
rinsing
mirror
Inc., USA
A micromechanical
T.J.
one
the remainder
Research
etch to produce
is
Microelectromechanical accelerometer for automotive applications Applicant: Cornell
assembly
and the base. A process
M.B. Spitzer, ED. Aquilino,
assemblies
the mirror
mirror
Patent number: US 6198145 Inventors: I? Ferrari,
mirror
200 1
wafer.
onto
layer
from
a silicon
mounted
chip. Publication date: 6 March
accuracy
actuator the
assemblies
torsional
applications
Inventors:
Technology,
of mirror
mounted
extending
separare
is removed
video display
accelerometers
extreme
presents
of
region
The epitaxial
and the stator,
from
regions
a portion
from
washed
layer
electronic
conductive
a plurality
exposing
and
An epiraxial
subsequently
to define
with radial
is to form a sacrificial
substrate.
forming the entire
and a
The first stage in
and the biasing
formed,
through
circumferential
process
various
drive
spaced across the gap between
The torsional
other
Method for processing a plurality micromachined mirror assemblies This invenrion
on a silicon
electrodes
active
and
a magnetic to
MacDonald
Applicant: Seagate
region
control,
braking
Galvin,
Applicant: STMicroelectronics,
with one another.
provide
assembly
on the mirror
provided.
Publication date: 13 March G.J.
to push
can be used for airbag
to out of plane forces.
Inventors:
microactuator
the
operative
torsional
assembly.
actuator
rhe
Patent number: US 6 199874
2001
which
Other
mirror
means, support
provided
assembly.
An
of the mirror
embodiment, is
metal.
the torsional
mirror
motion
assembly
at the downstream device.
of the torsional
causes rotational
mirror
to apply a driving
By this
the mirror
resistance
heating
be
drive
assembly.
fabricating
require
sensitivity,
may
is operative
to torsionally
In another
torsional
at least one torsion
of an electroplated
assembly
assembly
is provided
includes
The micromechanical
and fixing unit or a pressure of the
may also
from
formed
motion is
the accelerometer
suspension
control,
high
although
accelerometer
wafer
is formed.
deployment,
support
electronics
acceleromerer
steering
for
VLSI
spring
force
in the
as the base. The
assembly
actuator
step
circuitry
on the same
to at
a The
reactive-ion
The accelerometer
signal-conditioning
formed,
form
all etching
a signal-conditioned
Manufacturing a semiconductor material integrated microactuator
the manufacturing
embodiment,
is
Inventor: R. Maeyama
interleaved
etch
magnetic
corresponds
induction
in a substantially
using
on the same wafer from which
is provided
Publication date: 27 February
rotor
etched the first
so as to
electromagnetic
to
accelerometer.
wafer
support
with metal
the basic structure,
preferred
reactive-ion
wherein
Patent number: US 6195525
The integrated
sufficient
is preferably
comprise
are coated
capacitive
for ar least
in another
the
magnetic
body which
electromagnetic
process
electromagneric
the
such
carrying
the
layer.
layer is provided
of
image
etching
of moving
to be heated
induction
induction
penetrates
conditions
substrate
a fluctuation
heat generating
under
to
same
and the released and remaining
of the substrate
an
and
around
generates
induction core
a
manner,
in the substrate, portions
micromechanical
layer of the object
is wound
and
in such a
electromagnetic
opposed
which
core
heat
core made
is disposed
faces
an
coil
magnetic
field
a magnetic
heat generating
heated
change
induction
layer includes
to allow
assembly.
The
structure
for
The
with and formed
Patents Recently published US and WO patents
support from the
May 2001