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Electrostatic ion pump
Vacuum
Important
Notice
news
to Readers
Manufacturers
For further information on any matter mentioned in Vacuum news, tear out and p o s t o n e of the r e a d e r e n q u i r y service cards.
and others
Manufacturers and others are invited to submit information for inclusion in this feature, addressed to the Vacuum N e w s Editor, Vacuum, Pergamon Press Ltd, Headington Hill Hall, Oxford OX3 0BW,
Contents
Technical and industrial developments
653
Electrostatic ion pump - - Helium leak detector with remote indication - - Extractor ionization gauge - - High p r e s s u r e ionization gauge - - P u l s e bias sputtering s y s t e m - - Modular ion implantation s y s t e m s - - M a s s spectrometer for educational use - - Vacuum flange gaskets - - Straight-through valves - - Rotary push-pull feedthrough - - Hot pressing s y s t e m - - Vertical vacuum furnace
Commercial news
655
M o l e c u l a r b e a m a p p a r a t u s - - MRC/Sloan marketing a g r e e m e n t - - Sony visit Wentgate - - European expansion by
Electrotech - - Wabco Westinghouse enter UK market M a s s f l o w m e t e r s - Roots p u m p s Helium leak detectors - - Industrial control equipment
N e w Literature
657
Varian/NRC catalogue--
Conference a n d g r o u p a c t i v i t i e s
657
Third Israeli Vacuum announcements
Technical and industrial developments Electrostatic ion pump
A n electrostatic ion p u m p reaching 3 × 1 0 - " t o r r in only 17 h on a 155 litre system, including 12 h of bakeout at 250°C, is claimed as a significant i m p r o v e m e n t in b o t h pressure and p u m p d o w n time over 6-inch sputter-ion pumps. The Series 220 Electro I o n has been tested by v a c u u m users in the field for over a year prior to its introduction. 12 pumps were installed on scanning electron microscopes as part of this test and their titanium sublimators are providing over 7000 h o f continuously powered operation in this application. A m o n g other pre-introduction applications is a physical adsorption experiment in which the p u m p provides a base pressure of 2 × 10 -~2 torr as measured by a Varian
The new electrostatic Granville-Phillips.
ion pump
from
H e l m e r ® gauge. Standard e q u i p m e n t includes automatically controlled starting, bakeout, ion p u m p i n g and subhmation pumping. The p u m p weighs 35 lb, can be m o u n t e d in any position, and cools f r o m bakeout to operating temperature in less than 3 min. [Granville-Philips C o m p a n y ] Circle number 30 on Reader Enquiry Servwe card Helium leak detector with remote indication A general purpose, portable, mass spectom e t e r leak detector, the Ultratest M consists of two units, the mass spectometer with its v a c u u m system and the control unit for b o t h v a c u u m system and leak detector. The vacuum system comprises of a Leybodiff 170L air cooled diffusion p u m p (170 1 s-a), backed by a D 2 A tnvac-rotary p u m p giving a p u m p i n g speed for helium of 20 1 s -1. A liquid nitrogen cooled cold trap with an effectwe hfe of 24 h is fitted and the entire system is automatically controlled via the control unit. The mass spectometer has a sensitivity of 2 × 10 -1~ torr 1 s -~ and can be used with hydrogen and helium (He 3 and He4). The two umts can be up to 5 m apart and the leak detector control unit can then be r e m o v e d and carried by the o p e r a t o r around the plant as he searches for leaks. The leak detector control unit can be used up to 30 m from the Ultratest M and provides wsual and audible signal of a leak [Leybold Heraeus Ltd] Ctrcle number 31 on Reader Enquiry Service card Extractor ionization gauge The gauge head of the Ionivac I M 50 is
Congress - -
Institute of Physics
based on the " E x t r a c t o r " principle, enabling pressures as low as 2 × 10 -12 t o r r to be measured. The linear measuring range of the instrument is 3 × 10 -4 t o r t to 2 × 10 -12 torr. The " E x t r a c t o r " gauge is a further development of the Bayard-Alpert Gauge. In the Bayard-Alpert gauge, spurious positive current due to x-radiation, from the grid tends to swamp the pos]t~ve ion current at the collector at low pressures. In the " E x t r a c t o r " gauge, the thin wire collector is r e m o v e d f r o m within the structurem and placed below it and behind an annular extractor electrode. Only a small p r o p o r t i o n of the area of the grid surface can thus " s e e " the collector. The spurious posltwe current is considerably reduced, and the hnear response of the gauge is extended to 2 × 10 -12 torr. Pressure can be read on a continuous logarithmic range, or on linear ranges with factors of 3 and 10. On the linear ranges the filament is automatically swttched off if the pressure exceeds 30 per cent over the m a x i m u m value of any range. Emission
b
The Ultratest M, a mass spectrometer leak detector supplied by Leybold-Heraeus. 653
Important
Notice
news
to Readers
Manufacturers
For further information on any matter mentioned in Vacuum news, tear out and p o s t o n e of the r e a d e r e n q u i r y service cards.
and others
Manufacturers and others are invited to submit information for inclusion in this feature, addressed to the Vacuum N e w s Editor, Vacuum, Pergamon Press Ltd, Headington Hill Hall, Oxford OX3 0BW,
Contents
Technical and industrial developments
653
Electrostatic ion pump - - Helium leak detector with remote indication - - Extractor ionization gauge - - High p r e s s u r e ionization gauge - - P u l s e bias sputtering s y s t e m - - Modular ion implantation s y s t e m s - - M a s s spectrometer for educational use - - Vacuum flange gaskets - - Straight-through valves - - Rotary push-pull feedthrough - - Hot pressing s y s t e m - - Vertical vacuum furnace
Commercial news
655
M o l e c u l a r b e a m a p p a r a t u s - - MRC/Sloan marketing a g r e e m e n t - - Sony visit Wentgate - - European expansion by
Electrotech - - Wabco Westinghouse enter UK market M a s s f l o w m e t e r s - Roots p u m p s Helium leak detectors - - Industrial control equipment
N e w Literature
657
Varian/NRC catalogue--
Conference a n d g r o u p a c t i v i t i e s
657
Third Israeli Vacuum announcements
Technical and industrial developments Electrostatic ion pump
A n electrostatic ion p u m p reaching 3 × 1 0 - " t o r r in only 17 h on a 155 litre system, including 12 h of bakeout at 250°C, is claimed as a significant i m p r o v e m e n t in b o t h pressure and p u m p d o w n time over 6-inch sputter-ion pumps. The Series 220 Electro I o n has been tested by v a c u u m users in the field for over a year prior to its introduction. 12 pumps were installed on scanning electron microscopes as part of this test and their titanium sublimators are providing over 7000 h o f continuously powered operation in this application. A m o n g other pre-introduction applications is a physical adsorption experiment in which the p u m p provides a base pressure of 2 × 10 -~2 torr as measured by a Varian
The new electrostatic Granville-Phillips.
ion pump
from
H e l m e r ® gauge. Standard e q u i p m e n t includes automatically controlled starting, bakeout, ion p u m p i n g and subhmation pumping. The p u m p weighs 35 lb, can be m o u n t e d in any position, and cools f r o m bakeout to operating temperature in less than 3 min. [Granville-Philips C o m p a n y ] Circle number 30 on Reader Enquiry Servwe card Helium leak detector with remote indication A general purpose, portable, mass spectom e t e r leak detector, the Ultratest M consists of two units, the mass spectometer with its v a c u u m system and the control unit for b o t h v a c u u m system and leak detector. The vacuum system comprises of a Leybodiff 170L air cooled diffusion p u m p (170 1 s-a), backed by a D 2 A tnvac-rotary p u m p giving a p u m p i n g speed for helium of 20 1 s -1. A liquid nitrogen cooled cold trap with an effectwe hfe of 24 h is fitted and the entire system is automatically controlled via the control unit. The mass spectometer has a sensitivity of 2 × 10 -1~ torr 1 s -~ and can be used with hydrogen and helium (He 3 and He4). The two umts can be up to 5 m apart and the leak detector control unit can then be r e m o v e d and carried by the o p e r a t o r around the plant as he searches for leaks. The leak detector control unit can be used up to 30 m from the Ultratest M and provides wsual and audible signal of a leak [Leybold Heraeus Ltd] Ctrcle number 31 on Reader Enquiry Service card Extractor ionization gauge The gauge head of the Ionivac I M 50 is
Congress - -
Institute of Physics
based on the " E x t r a c t o r " principle, enabling pressures as low as 2 × 10 -12 t o r r to be measured. The linear measuring range of the instrument is 3 × 10 -4 t o r t to 2 × 10 -12 torr. The " E x t r a c t o r " gauge is a further development of the Bayard-Alpert Gauge. In the Bayard-Alpert gauge, spurious positive current due to x-radiation, from the grid tends to swamp the pos]t~ve ion current at the collector at low pressures. In the " E x t r a c t o r " gauge, the thin wire collector is r e m o v e d f r o m within the structurem and placed below it and behind an annular extractor electrode. Only a small p r o p o r t i o n of the area of the grid surface can thus " s e e " the collector. The spurious posltwe current is considerably reduced, and the hnear response of the gauge is extended to 2 × 10 -12 torr. Pressure can be read on a continuous logarithmic range, or on linear ranges with factors of 3 and 10. On the linear ranges the filament is automatically swttched off if the pressure exceeds 30 per cent over the m a x i m u m value of any range. Emission
b
The Ultratest M, a mass spectrometer leak detector supplied by Leybold-Heraeus. 653