CMP filtration for semiconductors Entegris Inc. has developed new Chemical Mechanical Planarization (CMP) filtration solutions using nano-melt-blown (NMB) filter media for semiconductors. The company has also expanded its CMP research, analytical services and manufacturing capabilities in Taiwan to meet growing demand for CMP filtration solutions in the semiconductor market. Entegris adds that CMP processes continue to grow in complexity in both the materials used and the need for greater planarity in each layer of semiconductor devices. The company says that as its customers produce integrated circuits with smaller feature sizes, its nano-fibre technology reduces
the number of defect-causing contaminants from reaching the wafer. The Entegris filter platform using NMB media now includes the Planargard® bulk, Solaris® pointof-tool and Planarcap® pointof-dispense ranges to provide contamination control solutions throughout the CMP process area. The NMB media uses the increased porosity of the nanofibres to reduce shear stress placed upon the slurry during transport and filtration operations. These innovations result in extended filter lifetime and greater removal of defect-causing contaminants. www.entegris.com
Filtration solutions using nano-melt-blown media for semiconductors from Entegris.
MVC evaporators for produced water treatment
IDE Technologies is supplying Bomo Environmental Engineering with two horizontal Mechanical Vapour Compression evaporators. IDE Technologies is supplying Bomo Environmental Engineering, part of the SPBC (BOMO) group, with two horizontal Mechanical Vapour Compression (MVC) evaporators to establish a new produced water treatment facility in Karamay, Xinjian – the first of its kind in China. The facility will also be the first in China to operate under a Build Operate Own (BOO) model. IDE Technologies says that the MVC evaporators will provide a reliable solution at low cost, with reduced energy consumption and high availability.
The MVC evaporators will process and treat produced water to supply high quality distillate continuously, yielding a total capacity of 5,000 m3/day. IDE Technologies adds that the pre-fabricated evaporators will be shipped to the site after assembly and testing, minimizing on-site work, saving time, and reducing construction and installation costs. The new facility will treat produced water from Shengli Oil’s Xinchun oil field. Operated under a BOO licence for 15 years, it will provide boiler feed water for steam production. www.ide-tech.com
European certification for biogas membrane separators Air Products’ PRISM® Membranes division in St. Louis, Missouri, USA has received Pressure Equipment Directive (PED) certification from DNV GL Business Assurance Italia S.r.l. for its latest line of biogas membrane separators. “This certification confirms that our biogas separation product meets the European standards for design, manufacture and safe operation of pressurized equipment,” says Biogas business manager, Greg Malcolm. “Air Products is a leading manufacturer of gas separation membranes, and this certification builds on our commitment to the European biogas market.”
www.filtsep.com
Air Products’ PRISM Membrane Separators are manufactured at its facility in St. Louis. The biogas separators contain polymeric hollow fibres that use selective permeation to separate biogas into two enriched streams of biomethane and carbon dioxide. Air Products PRISM Membranes works with preferred partners around the world to offer separation products that can be engineered into complete systems, and in areas where local regulations require specific engineering protocols. www.airproducts.com
The AquaR2RO™ membrane is designed for use in facilities requiring Zero Liquid Discharge (ZLD) or very high recovery.