- Email: [email protected]
FEG added to environmental SEM
TOOLS & TECHNIQUES UPDATE
Thin film XRD at high temperature
Raman spectroscopy with SEM Renishaw plc’s structural and chemical analyzer adds Raman, photoluminescence, and cathodoluminescence spectrometry capabilities to a standard scanning electron microscope (SEM). The result of collaborations between Renishaw and a number of manufacturers, the analyzer can be fitted to most SEM makes and models. Raman spectroscopy systems are usually built into optical microscopes. The structural and chemical analyzer, in contrast, combines the chemical, physical, and structural information of Raman spectroscopy with SEM imaging and the elemental analysis of energy dispersive spectroscopy (EDS). Characterization of a wide range of samples is possible at the micrometer scale under high vacuum, ultrahigh vacuum, or environmental conditions. The structural and chemical analyzer inserts fully retractable optics between the SEM’s objective lens and the sample. This positions an analysis spot with submicron precision and repeatability, while retaining the ability to view the sample using secondary electron imaging or analyze it using EDS. Cathodoluminescence and photoluminescence studies can also probe electrical and physical properties at the submicron scale.
The operation of PANalytical’s X’Pert PRO MRD X-ray Diffractometer can be extended by fitting an Anton Paar DHS 900 domed hot stage attachment. This allows thin film X-ray diffraction (XRD) measurements to be made at nonambient temperatures up to 900°C. The X’Pert PRO MRD is designed for applications including rocking curve analysis, in-plane diffraction, wafer mapping, reciprocal space mapping, and reflectivity measurements. The DHS 900 allows samples to be investigated in vacuum, air, or inert gas, so avoiding oxidation or other chemical reactions at elevated temperatures. PANalytical also announces a new release of its phase analysis software module, X’Pert HighScore, which complements the latest developments from the International Centre for Diffraction Data. X’Pert Reflectivity is another software package, which simplifies the analysis of X-ray reflectometry (XRR) data. XRR is a standardless and nondestructive technique for providing information on the thickness, roughness, and density of thin films on a surface. Contact: www.panalytical.com
Contact: www.renishaw.com
52
Twin XRF detectors Twin-X is a new compact and versatile X-ray fluorescence (XRF) spectrometer from Oxford Instruments. A unique elemental analysis system allows rapid and nondestructive measurements of solids, liquids, powders, and pastes. The combination of two proven detector technologies in this instrument gives optimum performance over a wide elemental range. Other features include a ten position autosampler, an integrated PC, clear and powerful software, and a method template wizard. Contact: www.oxford-instruments.com
Compact XRF spectrometers SPECTRO Analytical Instruments is introducing the 200T Series X-ray Fluorescence (XRF) spectrometers to its range of compact, general purpose analyzers. They can be used for both qualitative and quantitative nondestructive analysis of liquids, solids, powders, films, coatings, and other materials. Pressing a single button starts the measurement process. Features include automatic stabilization to eliminate drift, a standardization feature to reduce calibration frequency, data logging and networking software, optional tunable technology for excitation of selected elements, and an optional power inverter makes the 200T Series easy to transport.
FEG added to environmental SEM
High resolution diffractometer
Contact: www.spectro.com
A new environmental scanning electron microscope (ESEM™) with field emission gun (FEG) technology is being launched by FEI Company. The Quanta™ FEG offers high resolution, noncharging imaging, making the microscope suitable for a wide range of applications. The ability to image without charging samples is particularly useful for the analysis of advanced photomasks and low-k dielectrics. The Quanta FEG has three imaging modes: high vacuum, low vacuum, and ESEM. The ESEM mode allows dynamic wetting, heating, tensile, and compression experiments to be performed. The FEG technology ensures accurate energy dispersive spectroscopy (EDS), wavelength dispersive spectroscopy (WDS), and electron backscattering diffraction (EBSD) analyses. A beam current of over 100 nA gives a continuous operation stability of better than 0.1% per hour. The microscope has automatic focus, stigmator, contrast, and brightness features.
The ARL X’TRA is a powder X-ray diffractometer from Thermo Electron Corp. A number of the instrument’s features are designed to give high performance and easeof-use. A large goniometer radius increases resolution, which is important for samples with severe peak overlap, and improves low angle performance. A Peltier-cooled Si(Li) solid state detector increases sensitivity to weak phases and can collect data rapidly. The energy resolution of this detector removes the need for a Kβ filter and monochromators as the undesirable source lines and sample fluorescence can be electronically discriminated from the X-ray diffraction (XRD) data. This method produces higher diffraction intensities and superior resolution than conventional systems. The ARL X’TRA is designed with vertical θ:θ geometry for simplified sample preparation and stable mounting, and uses WinXRD data collection and analysis software.
Focus on UV curing A new focused spot system produces high intensity UV light for the irradiation of small areas without the need for a light guide. The focused spot from UV Light Technology Ltd. is ideal for rapid curing of UV materials where accurate and localized irradiation is important. It can be fitted with three choices of 250 W UV lamps with peak outputs at different wavelengths. The emission can then be matched to the UV absorption spectrum of photoinitiators in the irradiated material. Light intensity greater than 1000 mW/cm2 is produced over an area up to 30 mm in diameter.
Contact: www.feicompany.com
Contact: www.thermo.com/spectroscopy
Contact: www.uv-light.co.uk
May 2003
Thin film XRD at high temperature
Raman spectroscopy with SEM Renishaw plc’s structural and chemical analyzer adds Raman, photoluminescence, and cathodoluminescence spectrometry capabilities to a standard scanning electron microscope (SEM). The result of collaborations between Renishaw and a number of manufacturers, the analyzer can be fitted to most SEM makes and models. Raman spectroscopy systems are usually built into optical microscopes. The structural and chemical analyzer, in contrast, combines the chemical, physical, and structural information of Raman spectroscopy with SEM imaging and the elemental analysis of energy dispersive spectroscopy (EDS). Characterization of a wide range of samples is possible at the micrometer scale under high vacuum, ultrahigh vacuum, or environmental conditions. The structural and chemical analyzer inserts fully retractable optics between the SEM’s objective lens and the sample. This positions an analysis spot with submicron precision and repeatability, while retaining the ability to view the sample using secondary electron imaging or analyze it using EDS. Cathodoluminescence and photoluminescence studies can also probe electrical and physical properties at the submicron scale.
The operation of PANalytical’s X’Pert PRO MRD X-ray Diffractometer can be extended by fitting an Anton Paar DHS 900 domed hot stage attachment. This allows thin film X-ray diffraction (XRD) measurements to be made at nonambient temperatures up to 900°C. The X’Pert PRO MRD is designed for applications including rocking curve analysis, in-plane diffraction, wafer mapping, reciprocal space mapping, and reflectivity measurements. The DHS 900 allows samples to be investigated in vacuum, air, or inert gas, so avoiding oxidation or other chemical reactions at elevated temperatures. PANalytical also announces a new release of its phase analysis software module, X’Pert HighScore, which complements the latest developments from the International Centre for Diffraction Data. X’Pert Reflectivity is another software package, which simplifies the analysis of X-ray reflectometry (XRR) data. XRR is a standardless and nondestructive technique for providing information on the thickness, roughness, and density of thin films on a surface. Contact: www.panalytical.com
Contact: www.renishaw.com
52
Twin XRF detectors Twin-X is a new compact and versatile X-ray fluorescence (XRF) spectrometer from Oxford Instruments. A unique elemental analysis system allows rapid and nondestructive measurements of solids, liquids, powders, and pastes. The combination of two proven detector technologies in this instrument gives optimum performance over a wide elemental range. Other features include a ten position autosampler, an integrated PC, clear and powerful software, and a method template wizard. Contact: www.oxford-instruments.com
Compact XRF spectrometers SPECTRO Analytical Instruments is introducing the 200T Series X-ray Fluorescence (XRF) spectrometers to its range of compact, general purpose analyzers. They can be used for both qualitative and quantitative nondestructive analysis of liquids, solids, powders, films, coatings, and other materials. Pressing a single button starts the measurement process. Features include automatic stabilization to eliminate drift, a standardization feature to reduce calibration frequency, data logging and networking software, optional tunable technology for excitation of selected elements, and an optional power inverter makes the 200T Series easy to transport.
FEG added to environmental SEM
High resolution diffractometer
Contact: www.spectro.com
A new environmental scanning electron microscope (ESEM™) with field emission gun (FEG) technology is being launched by FEI Company. The Quanta™ FEG offers high resolution, noncharging imaging, making the microscope suitable for a wide range of applications. The ability to image without charging samples is particularly useful for the analysis of advanced photomasks and low-k dielectrics. The Quanta FEG has three imaging modes: high vacuum, low vacuum, and ESEM. The ESEM mode allows dynamic wetting, heating, tensile, and compression experiments to be performed. The FEG technology ensures accurate energy dispersive spectroscopy (EDS), wavelength dispersive spectroscopy (WDS), and electron backscattering diffraction (EBSD) analyses. A beam current of over 100 nA gives a continuous operation stability of better than 0.1% per hour. The microscope has automatic focus, stigmator, contrast, and brightness features.
The ARL X’TRA is a powder X-ray diffractometer from Thermo Electron Corp. A number of the instrument’s features are designed to give high performance and easeof-use. A large goniometer radius increases resolution, which is important for samples with severe peak overlap, and improves low angle performance. A Peltier-cooled Si(Li) solid state detector increases sensitivity to weak phases and can collect data rapidly. The energy resolution of this detector removes the need for a Kβ filter and monochromators as the undesirable source lines and sample fluorescence can be electronically discriminated from the X-ray diffraction (XRD) data. This method produces higher diffraction intensities and superior resolution than conventional systems. The ARL X’TRA is designed with vertical θ:θ geometry for simplified sample preparation and stable mounting, and uses WinXRD data collection and analysis software.
Focus on UV curing A new focused spot system produces high intensity UV light for the irradiation of small areas without the need for a light guide. The focused spot from UV Light Technology Ltd. is ideal for rapid curing of UV materials where accurate and localized irradiation is important. It can be fitted with three choices of 250 W UV lamps with peak outputs at different wavelengths. The emission can then be matched to the UV absorption spectrum of photoinitiators in the irradiated material. Light intensity greater than 1000 mW/cm2 is produced over an area up to 30 mm in diameter.
Contact: www.feicompany.com
Contact: www.thermo.com/spectroscopy
Contact: www.uv-light.co.uk
May 2003