- Email: [email protected]
Filter boom for semiconductors
Filter boom for semiconductors US company Extraction Systems says it has recently sold a number of
of products for contamination measurement and control in ultraclean
filter systems to manufactures of 300 mm semiconductors
environments.
in the
USA,Taiwan and Europe. The Extraction
3000 is a hybrid chemical filter designed to
protect the resists and optics used in deep ultraviolet (DUV)
Contact: Extraction Systems, Extraction Systems Inc, 10 Forge Park, Franklin, MA 02038, USA.
lithography systems. The filter systems work by capturing molecular
Tel: +1 508 553 3900;
contamination,
Fax: +I 508 X3-3901;
bases and condensables that could damage the thin,
sensitive resists and optical components used in lithography. To enable
E-mail: [email protected];
a high level of flexibility, the system uses several in-series filters
Website: www.extractionsystems.com.
which can be optimized to suit specific filtration requirements.
Using in-series filters
is also said to reduce the cost of ownership by allowing continuous measurement
of filter
condition and service life during operation, with no interruptions contamination
in the molecular
control.
Extraction Systems has headquarters in Franklin, Massachusetts, and produces a range
Air filtration website Hi-Tech UK has launched a new website offering its Purex fume extraction and purification systems as well as information about processes that create hazardous dust and fumes. The company’s systems are used to clean hazardous dust and fumes from air by
Continuous innovation, strong customer k&s a&I! o&$ solvingphilosophyhave made Sefar a leading, global manufacturz ’ n woven filters. uctsare ready for filtei fia rotary drum filters an We invite you to experience the 5
recycling purified air back into the work place. The new website, www.purexltd.co.uk,
contains information
on which processes can produce hazardous material, for example soldering, laser marking, laser welding, chemical handling and gluing, and highlights a range of Purex systems desi gned as a solution. Hi-Tech says the site will be continuously
developed and over the
coming months, it will be updated in six languages and have links to other resources
and information.
The company
also plans to offer a news service with upto-date information developments.
about its new
Purex currently
offers
modular filter systems that can include cabinets, pumps, control systems, sensors, pre-filters,
main HEPA filters and chemical
filters. Contact: Hi- Tech UK, Purex House, Fafield Park, Manvers, Rotherham S63 5DB, UK. Tel: +44 1709 763000; Fax: +44 1709 763001; Website: www.purexltd.co. uk
Filtratlon+Separation
RES No.507 - USE THE FAST NEW ENQUIRY SERVICE
@ www.filtsep.com October
200-l
13
of products for contamination measurement and control in ultraclean
filter systems to manufactures of 300 mm semiconductors
environments.
in the
USA,Taiwan and Europe. The Extraction
3000 is a hybrid chemical filter designed to
protect the resists and optics used in deep ultraviolet (DUV)
Contact: Extraction Systems, Extraction Systems Inc, 10 Forge Park, Franklin, MA 02038, USA.
lithography systems. The filter systems work by capturing molecular
Tel: +1 508 553 3900;
contamination,
Fax: +I 508 X3-3901;
bases and condensables that could damage the thin,
sensitive resists and optical components used in lithography. To enable
E-mail: [email protected];
a high level of flexibility, the system uses several in-series filters
Website: www.extractionsystems.com.
which can be optimized to suit specific filtration requirements.
Using in-series filters
is also said to reduce the cost of ownership by allowing continuous measurement
of filter
condition and service life during operation, with no interruptions contamination
in the molecular
control.
Extraction Systems has headquarters in Franklin, Massachusetts, and produces a range
Air filtration website Hi-Tech UK has launched a new website offering its Purex fume extraction and purification systems as well as information about processes that create hazardous dust and fumes. The company’s systems are used to clean hazardous dust and fumes from air by
Continuous innovation, strong customer k&s a&I! o&$ solvingphilosophyhave made Sefar a leading, global manufacturz ’ n woven filters. uctsare ready for filtei fia rotary drum filters an We invite you to experience the 5
recycling purified air back into the work place. The new website, www.purexltd.co.uk,
contains information
on which processes can produce hazardous material, for example soldering, laser marking, laser welding, chemical handling and gluing, and highlights a range of Purex systems desi gned as a solution. Hi-Tech says the site will be continuously
developed and over the
coming months, it will be updated in six languages and have links to other resources
and information.
The company
also plans to offer a news service with upto-date information developments.
about its new
Purex currently
offers
modular filter systems that can include cabinets, pumps, control systems, sensors, pre-filters,
main HEPA filters and chemical
filters. Contact: Hi- Tech UK, Purex House, Fafield Park, Manvers, Rotherham S63 5DB, UK. Tel: +44 1709 763000; Fax: +44 1709 763001; Website: www.purexltd.co. uk
Filtratlon+Separation
RES No.507 - USE THE FAST NEW ENQUIRY SERVICE
@ www.filtsep.com October
200-l
13