Fracture-resistant micromachined devices

Micro-optic switch for transmitting optical signals Honeywell

Applicant:

Inter-

invention

optic

switch

optical

relates

between

fibres. More specifically, switch

optic

microactuator a

fibres

fibres

between

either

one

the

fixed fibre.

instead structures

reduces

cost

assembly.

The

provides

processes

and

for

of an optical

Puterzt number: US 6169827 Publication date: 2 January

S.M.

Emo,

single

a released and

remaining are

in the wafer

metal

sufficient

to

The

etched

substrate

the first

step in the process

circuitry

is

forms

the

of etched

accelerometer signal-conditioning

is provided

holes in silicon

adapted

magnetic

magnet

field

that

to cause

the

motion

@

VLSI

electronics

on

Smart Materials Bulletin

the

same

connected

at

of the rod

which

is slidably

the piston

rhe other portion housing

of the

housing therefrom

for forming

micromachined

devices

out

polycrystalline

silicon

substrate

using

deep reactive

form

the

ion etching

comprises

the steps of

a bulk material

bulk

material

ion etching

a

comprising

of elements

a first

and using

to form

device.

also includes

forming

substrate

silicon,

micromachined

device

to

The

a method

the layer

steps

of single a first set

on the first layer. The

a portion

between

forms

sides

of one

provide

cross-beams

or more

or silicon a geometric

5:l

to 6O:l

layers

nitride, advantage

by a short-stroke

a

actuator can be used

a displacement

ratchet-driven

of

displacement

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IO-34

of can

to multiply

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stroke of

to operate

MEM

device

a

or a

Patent number: US 6175170 M.S.

200 1 Rodgers,

J.A. Hetrick

Next

month News

Business activities

of

spaced

Technical deveropments Industrytrends

are mounted

surface

of the outer isolated with

duct for applying

In Brief Breaking news Related industries

across the duct to affect the of an electrorheological

fluid

flowing

through

the damping

may be formed circumferentially

with

it to

force of the bands

with a plurality spaced,

of

longitud-

splines

extending

intervening

formed

formed

interconnected and

piston

device. Some of the electrode

align

a

fluid

and communicate

increase

inally

beams

the

A plurality

viscosity

transfer of

to An

bands

of

flexible

thermal

based on a

within

of the vehicle.

within

and

Features Technical articles on projects and developments around the world

Research Trends

grooves,

which

grooves

The latest research

splines

and

grooves

results published in

in a dielectric

sleeve mounted

micromachined

the

and are electrically

voltages

(ER)

device.

micromachined

polycrystalline

of a

one

on opposite

the fluid transfer is presented

to with

duct

on an inner

Aerospace

is

and

metal electrode

a

of a piston

surrounds

piston

or

The structure,

Inventors: S. Kota,

connected

formed

as an electrostatic

actuator

actuator.

advantage

Publication date: 16 January

an

housing

transfer

chambers

such

comb

the

microengine.

of a

and

mounted

chamber,

has

forms

end

vehicle,

end

fluid 2001

one

outer

outer

actuator

to generate

forces

chamber

of the

chamber.

providing

integrated

of the

E.I! Furiani,

crystal silicon and etching

be

in

current

is formed, may

to

microelectromechanical

provided

An inner

housing

piston

portion

electromagnet is

cylindrical

internal

or mechanical

a

is

increase

so that such an actuator

mounting

metal

A

Applicdxlt: Rosemount

the

for

an

wafer from which the accelerometer and

developed

device

structure

can

of

0.25-3

device

damping

that

geometric

about

A vibration

compliant

presented

from

Inc., USA

been

A pivotless

polysilicon

C.A.

on the vehicle.

SK. Ghosh,

invention

Mehregany,

Compliant displacementmultiplying apparatus

combination

2001

Vibration damping using ER fluids

Fracture-resistant micromachined devices

for

on the same

Public&on date: 9 January

of the inner

reactive

the

are properly

exerted

D.K. Chatterjee

deep a

set of elements

its

to an applied

the

the and

and

road

forming

reciprocating

etching

set

for absorbing

the and

providing

first

vehicle

around

receives

inventors:

and

electrical

assemblage.

all etching

the

layer

misaligned

with

so

on the

first are

portions

circumference,

of

The

layer

two spaced

eiectromagnet

a

second

between

wound

The method

etch

also may comprise

signal-conditioned

chamber

coil

in another

etching.

reactive-ion

wherein

that

although

embodiment,

accelerometer

a

using reactive-ion

for at least

basic structure,

actuating

A method

form

of the

second

that

and

insulated

Inc., USA

under

capacitive

accelerometer.

preferred

and

of the substrate

micromechanical

preferably

in the

released

with

conditions

is

basic

portion

the

portions

coated

etching

a

planes

such

first

such that the crystal

an

Publication date: 9 January

from

The

is etched

to form

a silicon wafer, a magnet inside

devices

Patentnzrmber: US 6171886

wafer.

substrate,

of

magnet.

of the micromechanical

accelerometer

at a method

including

produce

capacitive

the

joining

layers together

set

layer,

Applicant: Bridgestone/Firestone,

looks

micro-actuator

axial

is provided

silicon

structure

Kodak

USA

assemblage

Research

and

Inventors: M.

Eastman

a second

Bang, K.C. Stark

making

acts

Inc., USA

K.A.

Integrated silicon-based micro-actuator devices

patent

etching

Patent number: US 6171972

2001

Znventors: N.C. MacDonald,

response

micromechanical

accelerometer

Publication date: 9 January

wafer

L.W. Shacklette

Foundation,

to

the steps

on the second

second

plurality 200 1

Micromechanical accelerometer

A

and resistance

includes

a second layer of single

silicon,

aligned.

positioned

signal.

Cornell

requiring

with high sensitivity,

crystal

Paw numbev:US 6170332

Company,

a

and

Applicant:

systems

and

further

of elements

out of plane forces.

This

further

switch

R.A. Norwood,

braking

accuracy

to

for producing

Inventors: J, Holman,

control

of

simplifies

the path

active steering

anti-lock

Applicant:

of the switch

invention

micro-optic

control,

be

active

Shaw, S.G. Adams

signals

of the

components

can

deployment,

two fixed

cantilever

polymers

switching

the

optical

micromachined position

fibres on

can move an optical

and

Using

a

that

to transmit

between

accelerometer

extreme

polymer

so

microactuator

capacitive

other

the micro-

and optical

fibre canrilever

of providing

accelerometers

position

substrate

micromechanical

control,

optical

uses to

structures

method

The

suspension

to a micro-

used for transmitting

signals

the accelerometer

is formed.

used for airbag

national Inc., USA This

wafer from which

insulating

adjacent

Patents

duct.

Patent number: RE 370 15 Publication date: 16 January inventors: J.D. Rensel,

the key journals

the fluid

Recently published 200 1 D.A.

US and WO patents

Weitzenhof

April 2001