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Fraunhofer uses semiconductor process exhaust in fuel cell
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Fraunhofer uses semiconductor process exhaust in fuel cell Edited by Steve Barrett – Editor, Fuel Cells Bulletin Researchers at the Fraunhofer Institute for Integrated Systems and Device Technology IISB in Erlangen, Germany have developed a PEM fuel cell power generation system that converts hydrogen-rich exhaust gas from a semiconductor manufacturing facility into electrical energy. The new approach, developed within the framework of the Bavarian energy research project SEEDs, conserves resources and increases the overall efficiency of semiconductor production.
Semiconductor epitaxy The Fraunhofer Institute for Integrated Systems and Device Technology IISB has been researching the optimisation of epitaxy processes for the production of modern semiconductors for many years – especially in the field of silicon carbide (SiC) devices, which are required for modern power electronics systems. For the epitaxy process, which produces thin layers of semiconductor material, hydrogen is required in large quantities as a carrier gas. Together with other process gases, this forms the hydrogenrich exhaust stream of the epitaxy facility. At present this exhaust stream is cleaned and then discharged into the atmosphere, without making any use of the energy content of the hydrogen. Fraunhofer IISB researchers have now developed a way to convert the previously unused energy content of the hydrogen-rich exhaust gas into electrical energy, and thus make additional use of the hydrogen used in the epitaxy process. This increases the resource and energy efficiency of semiconductor manufacturing processes, and in view of the large global production volume of semiconductor devices, the method has great potential for wide application. The heart of the power generation system comprises a polymer electrolyte membrane Hydrogen in the process exhaust from semiconductor manufacturing facilities, previously released into the atmosphere, can be converted into electrical energy using a PEM fuel cell power generation system developed at the Fraunhofer IISB. [Photo: Fraunhofer IISB]
August 2017
(PEM) fuel cell, which efficiently converts the hydrogen from the exhaust gas into energy (also using oxygen from ambient air). IISB researchers modified the fuel cell system to allow it to operate with hydrogen concentrations of between 40 and 100 vol%, in contrast to conventional PEMFC systems which require a hydrogen purity of at least 99.97 vol%.
Separate processes A special diaphragm compressor is used between the epitaxy process exhaust outlet and the fuel cell system. This compresses the exhaust gas from atmospheric pressure in front of the fuel cell, thus decoupling the electricity generation and epitaxy processes. This means that the power generation system has no impact on the sensitive epitaxy process and its process quality, nor on the facility’s gas purification system. This is an essential factor for the applicability of the process in semiconductor manufacturing. The power generation system has already been successfully tested at the industrial-quality epitaxy facility operated in the IISB clean room laboratory, and has achieved an overall electrical efficiency of up to 25%. Thus a quarter of the calorific value contained in the hydrogen exhaust
gas can be converted into electrical energy. Fuel cell systems operating on pure hydrogen generally achieve an efficiency of about 50–60%; the difference is due to additional losses in the membrane compressor and in the fuel cell system, to allow the hydrogen-rich gas to flow without damage to the fuel cell. Additional work is under way to increase the overall efficiency to over 30%, and further reduce the losses in the fuel cell system.
The SEEDs project The SEEDs project, within which this power generation system for hydrogen-rich exhaust gas was developed, is focused on examining all the energy flows in an industrial energy system, and using all resources as efficiently as possible. It takes the holistic view that all of the energy flows and the linking of different energy forms, such as chemical energy and electrical energy, can be used to increase the potential efficiency of industrial plants. The IISB building serves as a research and demonstration platform. The building is comparable to a medium-sized industrial facility, with heavily fluctuating loads, peak loads, and considerable secondary energy requirements due to the extensive laboratory and equipment technology, as well as the continuous operation of the clean room. The SEEDs project also involves the Fraunhofer Institute for Integrated Circuits IIS in Erlangen and the Fraunhofer Institute for Silicate Research ISC in Würzburg, alongside several Bavarian industrial partners. The project is funded by the Bavarian Ministry of Economic Affairs and Media, Energy and Technology.
More information Michael Steinberger, Energy Technologies Group, Fraunhofer Institute for Integrated Systems and Device Technology IISB, Erlangen, Germany. Tel: +49 9131 761434, Email: [email protected], Web: www.iisb.fraunhofer.de/en/research_areas/ energy_technologies.html SEEDs project: www.energy-seeds.org [in German]
This is based on a press release issued by Fraunhofer IISB.
Fuel Cells Bulletin
13
Fraunhofer uses semiconductor process exhaust in fuel cell Edited by Steve Barrett – Editor, Fuel Cells Bulletin Researchers at the Fraunhofer Institute for Integrated Systems and Device Technology IISB in Erlangen, Germany have developed a PEM fuel cell power generation system that converts hydrogen-rich exhaust gas from a semiconductor manufacturing facility into electrical energy. The new approach, developed within the framework of the Bavarian energy research project SEEDs, conserves resources and increases the overall efficiency of semiconductor production.
Semiconductor epitaxy The Fraunhofer Institute for Integrated Systems and Device Technology IISB has been researching the optimisation of epitaxy processes for the production of modern semiconductors for many years – especially in the field of silicon carbide (SiC) devices, which are required for modern power electronics systems. For the epitaxy process, which produces thin layers of semiconductor material, hydrogen is required in large quantities as a carrier gas. Together with other process gases, this forms the hydrogenrich exhaust stream of the epitaxy facility. At present this exhaust stream is cleaned and then discharged into the atmosphere, without making any use of the energy content of the hydrogen. Fraunhofer IISB researchers have now developed a way to convert the previously unused energy content of the hydrogen-rich exhaust gas into electrical energy, and thus make additional use of the hydrogen used in the epitaxy process. This increases the resource and energy efficiency of semiconductor manufacturing processes, and in view of the large global production volume of semiconductor devices, the method has great potential for wide application. The heart of the power generation system comprises a polymer electrolyte membrane Hydrogen in the process exhaust from semiconductor manufacturing facilities, previously released into the atmosphere, can be converted into electrical energy using a PEM fuel cell power generation system developed at the Fraunhofer IISB. [Photo: Fraunhofer IISB]
August 2017
(PEM) fuel cell, which efficiently converts the hydrogen from the exhaust gas into energy (also using oxygen from ambient air). IISB researchers modified the fuel cell system to allow it to operate with hydrogen concentrations of between 40 and 100 vol%, in contrast to conventional PEMFC systems which require a hydrogen purity of at least 99.97 vol%.
Separate processes A special diaphragm compressor is used between the epitaxy process exhaust outlet and the fuel cell system. This compresses the exhaust gas from atmospheric pressure in front of the fuel cell, thus decoupling the electricity generation and epitaxy processes. This means that the power generation system has no impact on the sensitive epitaxy process and its process quality, nor on the facility’s gas purification system. This is an essential factor for the applicability of the process in semiconductor manufacturing. The power generation system has already been successfully tested at the industrial-quality epitaxy facility operated in the IISB clean room laboratory, and has achieved an overall electrical efficiency of up to 25%. Thus a quarter of the calorific value contained in the hydrogen exhaust
gas can be converted into electrical energy. Fuel cell systems operating on pure hydrogen generally achieve an efficiency of about 50–60%; the difference is due to additional losses in the membrane compressor and in the fuel cell system, to allow the hydrogen-rich gas to flow without damage to the fuel cell. Additional work is under way to increase the overall efficiency to over 30%, and further reduce the losses in the fuel cell system.
The SEEDs project The SEEDs project, within which this power generation system for hydrogen-rich exhaust gas was developed, is focused on examining all the energy flows in an industrial energy system, and using all resources as efficiently as possible. It takes the holistic view that all of the energy flows and the linking of different energy forms, such as chemical energy and electrical energy, can be used to increase the potential efficiency of industrial plants. The IISB building serves as a research and demonstration platform. The building is comparable to a medium-sized industrial facility, with heavily fluctuating loads, peak loads, and considerable secondary energy requirements due to the extensive laboratory and equipment technology, as well as the continuous operation of the clean room. The SEEDs project also involves the Fraunhofer Institute for Integrated Circuits IIS in Erlangen and the Fraunhofer Institute for Silicate Research ISC in Würzburg, alongside several Bavarian industrial partners. The project is funded by the Bavarian Ministry of Economic Affairs and Media, Energy and Technology.
More information Michael Steinberger, Energy Technologies Group, Fraunhofer Institute for Integrated Systems and Device Technology IISB, Erlangen, Germany. Tel: +49 9131 761434, Email: [email protected], Web: www.iisb.fraunhofer.de/en/research_areas/ energy_technologies.html SEEDs project: www.energy-seeds.org [in German]
This is based on a press release issued by Fraunhofer IISB.
Fuel Cells Bulletin
13