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Gauges from Alcatel
Vacuum
news
In East Germany, there are more than two high vacuum companies, exhibiting in Brno (see report from the Leipzig SpFing Fair 1967. Vacuum. 17 (7). Julv 1967. 407-409). At Brno, VEB Carl Zeiss, Jena; showed two similar coaters HBA 1 and HBA 120/2, both with a glass bell jar pumped by a 120 litre/sec oil diffusion pump. The company is also producing a series of oil diffusion pumps for speeds of 30 to 2,000 litre/sec, baffles, valves (including needle valves), flanges, connections, greases, Penning and Pirani gauges. One of the series of electron microscoves. Tvve EF * . _416 was shown in action. The second East German exhibitor, VEB Labortechnik, Ilmenau, exhibited their IVM-05 Bayard-Alpert gauge measuring up to 1O-8 torr, and two-stage gas-ballast, rotary vane type oil-sealed pumps VZ 3 and VZ 7 with pumping speeds of 3 and 7 m3/hour and with a vertical pump axis. A smaller pump 2DS 1 with speed of 1 ma/hour was mounted on a co&on shaft with the motor. The Soviet Union and other East European countries did not exhibit high vacuum products at Brno. The comnetition from the West on this market, as-it appeared at Brno, was as follows : AEI Ltd, Scientific Apparatus Dept, Manchester, England, was exhibiting its well-known MS 10 c 2 mass spectrometer which was shown in action, Mini-mass, a 180” partial pressure gauge having a sensitivity of 10-l’ torr for Na, which was very interesting due to its very low price, and the wide range of UHV components such as flanges, windows, gaskets, valves and triode ion pumps. Balzers. Fiirstentum Liechtenstein. was exhibiting Halogen Leak Detectors HLG 2 and HSG 1, ionisation gauges IMG-U 2 (up to lo-l2 torr), IMG 2, KVG 713 (from 1 to 5 x 10 -B torr with thermocouple and Penning gaugeheads) and KVG 613, coaters MikroBA 3 and Sputron II and Exhalograph for hot extraction gas analysis. The exhibited coaters BA 710 and BA 510, based on a well-known design, were equipped with Electron Beam Evaporator EV 3, “flash” evaporator BEF 101 with controlled continuous charging, thin film monitors GSM 201 (optical) and QSG 101 (quartz crystal method) and with Automatic Pumping Unit Control BSP 102 making fully automatic pumping of the coater possible. Bell & Howell GmbH, Friedberg, West ~~;eny,w~hentermg the East European Amertcan Consohdated Vacuum Corporation’s models. In Brno: the company was exhibiting one oil diffusion pump from the Blue Line series and the PlasmaVac coater, the only commercially-available system for low energy DC and RF cathode sputtering of metals, semiconductors and dielectrics. The wide range of CVc’s fluids, components, devices and systems was offered together with CEC leak detectors and mass spectrometers. In the stand with the old name of W C Heraeus GmbH, Hanau, West Germany, one could find Heraeus’ and Leybold’s products, as both companies had merged
604
two months previous, to improve the position of both manufacturers. From the production line of Heraeus there were exhibited Combivac, Piravac 3, Penningvac 2 and Ionivac 2 high vacuum gauges and a new High Vacuum Evaporator A 500 V with fully automatic high speed pumping system evacuating a stainless steel bell-jar, of volume 115 litres, down to 1 x lo-’ torr in 5 minutes and. with Viton gaskets, reaching an ultimate pressure of 5 x lo-” tort-. F?om Leybold’s production there appeared the Thermotron TM 1l/2 vacuum gauge, the Topatron RF partial pressure gauge and the four-stage oil diffusion pump Levboiet 3000/7 with Cold Cav Baffle. wh>ch-can be used as a booster as well as UHV pump because the pumping speed of 3000 litreslsec is constant from 10-O to 1O-3 torr (the working range is lo-* to 1O-2 torr and a highest fore-pressure of 0.6 torr is uossible). r ~Fried’ Krupp Mess & Analysentechnik, West Germany (vreviouslv Bremen. ATLAS) showed its mass sp&tromet& GD 156 and leak detector GD with the sensitivity of lo-la std cc/set for any search gas with-the mass number from 4 to 46. Both devices have been described in this Journal. The following systems of interest to vacuum engineers were exhibited by Western companies not manufacturing basic vacuum devices: very small Ultrasonic Leak Detector Type 1873 made by Dawe Instruments Ltd, London (detecting orifices of 0.01 inch with pressure difference of 10 vsi at 45 ft range): High Temperature High * Vacuum Fu%ace HVO& 6,5/18 ftemuerature \._~~~= _~~~~~of 2500°C in the hot zone of 65 mm diameter by 180 mm height at pressures of 10-s torr) and Annealing and Sintering Furnace VSgr 30/60 (temperature of 1600°C in a space of 300 mm diameter by 600 mm height and pressures of 1O-4 torr), both made by Degussa, Frankfurt (Main), West Germany; JSM Scanning Electron Microscope and JEM 150 Electron Microscope made by JEOL Co Ltd, Tokyo, Japan; Helium Liquidizer VR 8 (capacity of 8 litres of liquid He per hour) exhibited by Linde AG Werksgruppe Muenchen, West Germany; WAB Vacuum Rotational Evaporator Pilot Plant 601 (for drying), exported by Maschinen-Export und Finanz AG, Zurich, Switzerland; and VacSeal furnaces made by Metals Research Ltd, Melbourn, Herts. Some equipment was not shown, but only offered: large mass spectrometers from Perkin-Elmer GmbH, Wien, Austria; Electron Beam Welding Plant Type 543 made by Sciaky SA, Vitry-sur-Seine, France; and mass spectrometer M-66 from Varian AG, Zug, Switzerland. The lastnamed company although well known in the vacuum world did not try to enter the East European market with conventional high and ultrahigh vacuum components and was exhibiting only the products of its Instrument Group. (The Vacuum News Editor would like to express his gratitude to Ing Vladimir Vanek, Vokovice, Czechoslovakia, for preparing this report).
Technical
and industrial
developments Gauges from Alcatel Three new vacuum gauges have been intro-
duced by Alcatel (France): the ACF. 10 cold cathode ionization gauge, the ATH.21 thermocouple gauge, and the APS.1 safety pressurestat. The ACF.10 features a double plasma cathode system having the advantages of great stability of pressure reading without adverse effect on the response time, and fouling of the gauge is substantially delayed. These improvements are considered to raise the reliability of the gauge to be on a par with triode gauges. Pressures from 1 X 1O-2 to 1 X lo-” torr are indicated continuously on a single logarithmic scale graduated both in torr and Pas&s. The fully transistorized supply is stabilized for up to 10 per cent fluctuation in mains supply. The gauge electrodes are remova’ble and easily cleaned and the operation of the gauge is unaffected by sudden inrushes of air or by external magnetic fields. The ATH.21 thermocounle gauge is recommended for industrial-mea&&ment of primary and intermediate pressures either in the vacuum chamber or at intermediate stages in pumping sets. Two separately-calibrated measuring channels are provided with selection on the keyboard, and calibration may be carried out from the front at any time during service. Power supply stability is again to 10 per cent fluctuation in mains supply and a wide range of fitting gauge heads-are available. The APS.l messurestat is claimed to be the only type with Pirani gauge which will never give a false reading in any chance or unforeseen circumstances. With a range of settings from 1 to 1 x 10-a torr the pressurestat provides a signal which may remotecontrol the opening or closing of valves at the selected pressure. A defective vacuum will be indicated if there is no power supply while the filaments are heating, if the gauge cable is disconnected or broken or if the filament is broken. The gauge consists of a single plug, mounted by means of a neoprene ioint, on the chamber to be monitored. A standard 30 mm diameter Alcatel flange is usually fitted but connections for 20.5 mm or standard NW20 delivery tubes may be made. Alcatel. France Circle number 45 on Reader Enquiry Service card
Noble VacIon pumps
The Vacuum Division of Varian Associates have introduced a new line of VacIon pumps which have improved speed and stability in the pumping of noble gases. Complete stability is assured even with pure argon at below 1 x 1O-6 torr. Three sizes are available, 140, 270 and 500 litres/ set with pumping speeds for argon, 21 per cent of air speed and for helium, 30 per
news
In East Germany, there are more than two high vacuum companies, exhibiting in Brno (see report from the Leipzig SpFing Fair 1967. Vacuum. 17 (7). Julv 1967. 407-409). At Brno, VEB Carl Zeiss, Jena; showed two similar coaters HBA 1 and HBA 120/2, both with a glass bell jar pumped by a 120 litre/sec oil diffusion pump. The company is also producing a series of oil diffusion pumps for speeds of 30 to 2,000 litre/sec, baffles, valves (including needle valves), flanges, connections, greases, Penning and Pirani gauges. One of the series of electron microscoves. Tvve EF * . _416 was shown in action. The second East German exhibitor, VEB Labortechnik, Ilmenau, exhibited their IVM-05 Bayard-Alpert gauge measuring up to 1O-8 torr, and two-stage gas-ballast, rotary vane type oil-sealed pumps VZ 3 and VZ 7 with pumping speeds of 3 and 7 m3/hour and with a vertical pump axis. A smaller pump 2DS 1 with speed of 1 ma/hour was mounted on a co&on shaft with the motor. The Soviet Union and other East European countries did not exhibit high vacuum products at Brno. The comnetition from the West on this market, as-it appeared at Brno, was as follows : AEI Ltd, Scientific Apparatus Dept, Manchester, England, was exhibiting its well-known MS 10 c 2 mass spectrometer which was shown in action, Mini-mass, a 180” partial pressure gauge having a sensitivity of 10-l’ torr for Na, which was very interesting due to its very low price, and the wide range of UHV components such as flanges, windows, gaskets, valves and triode ion pumps. Balzers. Fiirstentum Liechtenstein. was exhibiting Halogen Leak Detectors HLG 2 and HSG 1, ionisation gauges IMG-U 2 (up to lo-l2 torr), IMG 2, KVG 713 (from 1 to 5 x 10 -B torr with thermocouple and Penning gaugeheads) and KVG 613, coaters MikroBA 3 and Sputron II and Exhalograph for hot extraction gas analysis. The exhibited coaters BA 710 and BA 510, based on a well-known design, were equipped with Electron Beam Evaporator EV 3, “flash” evaporator BEF 101 with controlled continuous charging, thin film monitors GSM 201 (optical) and QSG 101 (quartz crystal method) and with Automatic Pumping Unit Control BSP 102 making fully automatic pumping of the coater possible. Bell & Howell GmbH, Friedberg, West ~~;eny,w~hentermg the East European Amertcan Consohdated Vacuum Corporation’s models. In Brno: the company was exhibiting one oil diffusion pump from the Blue Line series and the PlasmaVac coater, the only commercially-available system for low energy DC and RF cathode sputtering of metals, semiconductors and dielectrics. The wide range of CVc’s fluids, components, devices and systems was offered together with CEC leak detectors and mass spectrometers. In the stand with the old name of W C Heraeus GmbH, Hanau, West Germany, one could find Heraeus’ and Leybold’s products, as both companies had merged
604
two months previous, to improve the position of both manufacturers. From the production line of Heraeus there were exhibited Combivac, Piravac 3, Penningvac 2 and Ionivac 2 high vacuum gauges and a new High Vacuum Evaporator A 500 V with fully automatic high speed pumping system evacuating a stainless steel bell-jar, of volume 115 litres, down to 1 x lo-’ torr in 5 minutes and. with Viton gaskets, reaching an ultimate pressure of 5 x lo-” tort-. F?om Leybold’s production there appeared the Thermotron TM 1l/2 vacuum gauge, the Topatron RF partial pressure gauge and the four-stage oil diffusion pump Levboiet 3000/7 with Cold Cav Baffle. wh>ch-can be used as a booster as well as UHV pump because the pumping speed of 3000 litreslsec is constant from 10-O to 1O-3 torr (the working range is lo-* to 1O-2 torr and a highest fore-pressure of 0.6 torr is uossible). r ~Fried’ Krupp Mess & Analysentechnik, West Germany (vreviouslv Bremen. ATLAS) showed its mass sp&tromet& GD 156 and leak detector GD with the sensitivity of lo-la std cc/set for any search gas with-the mass number from 4 to 46. Both devices have been described in this Journal. The following systems of interest to vacuum engineers were exhibited by Western companies not manufacturing basic vacuum devices: very small Ultrasonic Leak Detector Type 1873 made by Dawe Instruments Ltd, London (detecting orifices of 0.01 inch with pressure difference of 10 vsi at 45 ft range): High Temperature High * Vacuum Fu%ace HVO& 6,5/18 ftemuerature \._~~~= _~~~~~of 2500°C in the hot zone of 65 mm diameter by 180 mm height at pressures of 10-s torr) and Annealing and Sintering Furnace VSgr 30/60 (temperature of 1600°C in a space of 300 mm diameter by 600 mm height and pressures of 1O-4 torr), both made by Degussa, Frankfurt (Main), West Germany; JSM Scanning Electron Microscope and JEM 150 Electron Microscope made by JEOL Co Ltd, Tokyo, Japan; Helium Liquidizer VR 8 (capacity of 8 litres of liquid He per hour) exhibited by Linde AG Werksgruppe Muenchen, West Germany; WAB Vacuum Rotational Evaporator Pilot Plant 601 (for drying), exported by Maschinen-Export und Finanz AG, Zurich, Switzerland; and VacSeal furnaces made by Metals Research Ltd, Melbourn, Herts. Some equipment was not shown, but only offered: large mass spectrometers from Perkin-Elmer GmbH, Wien, Austria; Electron Beam Welding Plant Type 543 made by Sciaky SA, Vitry-sur-Seine, France; and mass spectrometer M-66 from Varian AG, Zug, Switzerland. The lastnamed company although well known in the vacuum world did not try to enter the East European market with conventional high and ultrahigh vacuum components and was exhibiting only the products of its Instrument Group. (The Vacuum News Editor would like to express his gratitude to Ing Vladimir Vanek, Vokovice, Czechoslovakia, for preparing this report).
Technical
and industrial
developments Gauges from Alcatel Three new vacuum gauges have been intro-
duced by Alcatel (France): the ACF. 10 cold cathode ionization gauge, the ATH.21 thermocouple gauge, and the APS.1 safety pressurestat. The ACF.10 features a double plasma cathode system having the advantages of great stability of pressure reading without adverse effect on the response time, and fouling of the gauge is substantially delayed. These improvements are considered to raise the reliability of the gauge to be on a par with triode gauges. Pressures from 1 X 1O-2 to 1 X lo-” torr are indicated continuously on a single logarithmic scale graduated both in torr and Pas&s. The fully transistorized supply is stabilized for up to 10 per cent fluctuation in mains supply. The gauge electrodes are remova’ble and easily cleaned and the operation of the gauge is unaffected by sudden inrushes of air or by external magnetic fields. The ATH.21 thermocounle gauge is recommended for industrial-mea&&ment of primary and intermediate pressures either in the vacuum chamber or at intermediate stages in pumping sets. Two separately-calibrated measuring channels are provided with selection on the keyboard, and calibration may be carried out from the front at any time during service. Power supply stability is again to 10 per cent fluctuation in mains supply and a wide range of fitting gauge heads-are available. The APS.l messurestat is claimed to be the only type with Pirani gauge which will never give a false reading in any chance or unforeseen circumstances. With a range of settings from 1 to 1 x 10-a torr the pressurestat provides a signal which may remotecontrol the opening or closing of valves at the selected pressure. A defective vacuum will be indicated if there is no power supply while the filaments are heating, if the gauge cable is disconnected or broken or if the filament is broken. The gauge consists of a single plug, mounted by means of a neoprene ioint, on the chamber to be monitored. A standard 30 mm diameter Alcatel flange is usually fitted but connections for 20.5 mm or standard NW20 delivery tubes may be made. Alcatel. France Circle number 45 on Reader Enquiry Service card
Noble VacIon pumps
The Vacuum Division of Varian Associates have introduced a new line of VacIon pumps which have improved speed and stability in the pumping of noble gases. Complete stability is assured even with pure argon at below 1 x 1O-6 torr. Three sizes are available, 140, 270 and 500 litres/ set with pumping speeds for argon, 21 per cent of air speed and for helium, 30 per