Handbook of Surface Metrology

development because of their future critical importance and in which they are not expert, they use internal funding sources. These latter are the topics of the thrust area. Three FY-92 funded projects are discussed in this section. Each project cleady moves the Fabrication Technology thrust area towards the goals outlined above. They have also continued their membership in the North Carolina State University Precision Engineering Center, a multidisciplinary research and graduate program established to provide the new technologies needed by high-technology institutions in the US. As members, they have access to and use of the results of their research projects, many of which parallel the precision engineering efforts at LLNL. 30. Butler, C.; Yang, Q. A fiber-optic 3D analog probe for component scanning on coordinate-measuring machines. Sensors and Actuators A; 1992 Oct 5; San Sebastian, Spain. Uxbridge, UK: Brunel Univ.; 1993 Jun: 473-9. This paper describes a fiber-optic three-dimensional (3D) position sensor for component scanning on coordinate-measuring machines. An accuracy and repeatability of better than 1 I~m have been achieved with the prototype. Its applications also include analog and / or touch trigger probing and position sensing for machine tools, robots, etc. 31. anon: Flatness and Straightness Measurements. (Latest citations from the INSPEC Database), Published Search. Springfield, VA: National Technical Information Service 1993 Dec; PB93-853463. The bibliography contains citations concerning the development and applications of flatness and straightness measurement technology. A variety of measuring techniques is discussed, including laser beam, interferometry, infrared spectrometry, x-ray diffraction, and standard comparators. Citations examine applications in integrated circuit metrology, studies of optical surfaces and semiconductor films, and industrial products inspection. (Contains a minimum of 182 citations and includes a subject term index and title list.). 32. Hatamura, Yotaro; Nagao, Takaaki; Mitsuishi, Mamoru. Fundamental structure for Intelligent manufacturing. Precision Engineering. 1993 Oct; 15(4): 266-273. In order to realize a high-precision, flexible manufacturing system with easy operation and 24-hour unmanned capability, a completely new concept for 'intelligent manufacturing' has been introduced. The fundamental concept and structure of intelligent manufacturing, as implemented in our laboratories, are discussed in this article. The main components of the system are knowledge, sensors, and actuators. The physical model provides fundamental knowledge concerning the process. The physical model uses sensor readings of the current system behavior to predict the future system behavior. Then the controller can bring the system into correspondence with the desired state through the use of appropriate actuators. Many different elements, such as force sensors, fail-safe mechanisms, finepositioning mechanisms, and actively controlled machine structures have been incorporated into the system. Most of these components have been tested in our laboratories. Through the use of intelligent manufacturing systems, manufacturing technology may enter a new stage of development. Moreover, such a system may open new possibilities for manufacturing in alien worlds, such as in space or on the atomic scale. 9 Refs. 33. Whitehouse, D. J. Handbook of Surface Metrology. lOP Pub; 1994 Apr. 1000 pages. ISBN 0-7503-0039-6. 34. Rastogi, Pramod. Holographic Interferometry. Spr-Verlag; 1994 Mar. ISBN 0-387-57354-2. 35. Magara, Takuji; Yamada, Hisashi; Sato, Seiji; Yatomi, Takeshi; Kobayashi, Kazuhiko. Improvement of surface quality by non-electrolysis wlre-EDM. Journal of the Japan Society for Precision Engineering. 1993 Jul; 59(7): 11571162. This paper describes the method for improvement of surface quality by non-electrolysis wire electric discharge machining (Wire-EDM). In wire-EDM which generally employs low-conductivity water as dielectric, electrolytic current may flow via the dielectric and an electrolytic effect may cause change of properties over wide area of a workpiece. A non-electrolysis power supply developed to prevent electrolytic corrosion permits a full range of non-electrolytic machining from rough machining to finishing, achieving high-quality (surface) machining with high productivity. In life tests using actual dies, nonelectrolytic machining produces few burrs on punched products and increases die life significantly. 6 Refs. 36. Takasu, Shuuhei; Masuda, Masami. Influence of unbalanced mass of roundness of workplece In the centerless g r i n d i n g (2nd report) the examination of analytical stable g r i n d i n g c o n d i t i o n s by experiments. Journal of the Japan Society for Precision Engineering. 1993 Aug; 59(8): 1239-1244. In centerless grinding, unbalanced parts are hard to get precise accuracy, because the centrifugal force caused by rotating the unbalanced mass tends to move the part up and down, and / or fall down the part from work support blade. The unbalanced parts are classified into 3 types by the position of unbalanced mass. The first report presents the criteria of this movement of each type of the unbalanced part by analyzing the balance of the forces working on it. This paper deals the experiment of centerless grinding of those 3 types unbalanced parts. The experimental results indicate that the accuracy was not affected substantially by the unbalanced mass under the stable grinding conditions, and this is Coincident with analytical results. 1 Ref. 37. Rosolen, G. C.; Hoole, A. C. F.; Welland, M. E.; Broers, A. N. Integrated nanofabricatlon with the scanning electron microscope and scanning t u n n e l i n g microscope. Applied Physics Letters. 1993 Oct 25; The combination of electron beam lithography using the scanning electron microscope (SEM) and direct nanofabrication with the scanning tunneling microscope (STM) has been used to fabricate a nanometer size link between two prefabricated nanometer size wires. The wires were fabricated by electron beam lithography using a high resolution SEM. This sample was then transferred to a combined SEM and STM instrument which is used to locate the wires, position them beneath the STM tip, and fabricate the link using the technique of tip bias pulsing with the STM. 38. Meyer, J. D. Joint DoD / NIST Workshop on International Precision Fabrication Research and Development. Gaithersburg, MD: Natl Inst of Standards & Technology 1993 Mar; NIST Special Publication - 849.