- Email: [email protected]
Looking at the bigger picture
Editorial
Looking at the bigger picture With its increasing success in telecommunications and other markets, GaAs device makers are eager to grab a larger share of a growing market - and that’s prompting increasing interest in 6” wafers. ‘bile the move to the larger diameter wafers has long been predicted, the step up from 4” has been relatively slow to happen with firms wary about a range of factors, such as the required investment, associated with the transition. That cautious approach seems to be evaporating, however, with a number of companies declaring their intention, or at least the capability, to make the switch. Among the latest developments (see page 4) has seen Filtronic Solid State’s announcement that it is to establish a 6” GaAs line for high volume production of PHEMTs at a former Si foundry in Newton Aycliffe, UK. About &lOm will be spent in the first 12 to 18 months to equip the plant for GaAs manufacture, with production expected to begin in the second quarter of 2000. With Infineon Technologies (formerly Siemens) hoping to have its new 6” line operational before Christmas, it signals a healthy future for GaAs in Europe. The USA is also seeing escalating activity, with ANADIGICS recently commencing production on its 6” fab in Warren, NJ (see page 9). ‘Fab 2’ is currently being used for GaAs MESFET and PHEMT processing, but ANADIGICS intends to add HBTs in 2000.
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Ill-Vs Review - Covering advanced semiconductors worldwrde http://wwwelsevier.com/locate/iiivsrev Editor: Simon Pickering Tel: +44 (0)1865 843722 Fax: +44 (0)1865 843971 E-mail: s.pickeringQelsevier.co.uk Assistant Editor: Caroline Edser Tel: +44 (0)1865 843670 Fax: +44 (0)1865 843971 E-mail: [email protected] Associate Editor: Roy Szweda E-mail: [email protected],com North American Consulting Editor: Ruth Delule Managing Editor: Amanda Weaver Advertising Sales Manager & Reprints: Mervyn Patterson Tel: +44 (0)1747 855348. Fax: +44 (0)1747 851004 E-mail: 100760.1721Qcompuserve.com Marketing: Kirsty Whareham Tel: +44 (0)1865 843666
(437.
For customers in the Rest of the World: Elsevier Science, Customer Support Dept. PO Box 211, 1000 AE Amsterdam, The Netherlands Tel: +31 20-4853757 Fax: +31 20-4853432 E-mail: [email protected] Subscriptions: Annual subscriptron (six issues) NLG421/US$214/f130/E191. Price valid to end of 1999 and includes airmail delivery m Europe and airspeeded delivery elsewhere. &
A member of the Reed Elsevier plc group
Periodicals postage paid at Rahway, NJ. Ill-v’s Review is publrshed six times a year. Postmaster send all address corrections to Ill-v’s Review, do Elsevier Science Regional Sales Office, Customer Support Department, 655 Avenue of the Americas, New York, NY 10010. The opinions expressed by individuals in this publication are not necessarilythose of Elsevier,who shall not be held responsible for them. All trademarks acknowledged. Prrnted by: Friary Press Ltd. Journal Number: 02076 ISSN 0961-l 290 0 1999 Elsevier Scrence Ltd.All rights reserved.
2
Ill-Vs
Review
l
Vol.12
No. 5 1999
6--G? ,.?
4” -
Simon Pickering, Editor
This journal and the mdrvidual contributions contarned in it are protected under copyright by Elsevier Scrence Ltd, and the following terms and conditions apply to their use:
Published six trmes a year Elsevier Advanced Technology, The Boulevard, Langford Lane, Kidlington. Oxford, OX5 1AS, UK. Subscription enquiries, orders and payments: For customers residing in the Americas (North, South and Central America) Elsevier Science, Customer Support Department, PO Box 945, NewYork NY 10010, USA Tel: +l 212-633-3730 [Toll Free number for North American customers: l-800-4ES-INFO 4636)] Fax: +l 212-633-3680. E-mail: [email protected]
Alpha Industries, meanwhile, has completed the first phase of an expansion programme (page 8) that has laid the foundations for the move to bigger wafers.While the main aim of the expansion has been to expand manufacturing capability on its existing 4” furniture, all new equipment is 6” wafer compatible to enable a quick and cost effective step up to the larger size as required. Merchant epiwafer supplier, Kopin Corp is another looking to 6” (page 14).The company recently brought on line the first of six new MOCVD production systems, two of which are capable of processing 6” wafers. Of course, installed equipment provides only part of the 6” equati0n.A supply of wafers is also required, so substrate vendors are also moving in line with the 6” trend. Among them is Germany’s Freiberger Compound Materials, which has just announced plans to invest US$50 million in a new fab to expand production capacity, including 6” wafers.
Photocopying Single photocopres of smgle articles may be made for personal use as allowed by national copyrrght laws. Permission of the publisher and payment of a fee is required for all other photocopying, including multiple or systematic copying, copying for advertising or promotronal purposes, resale, and all forms of document delivery Special rates are available for educational institutions that wish to make photocopies for non-profit educational classroom use. Permissions may be sought directly from Elsevier Science Rights & Permrssions Department, PO Box 800, Oxford OX5 1DX. UK; tel: +44 (0)1865 843830, fax: +44 (OJ1865 853333, e-mail: permissronsQelsevier.co.uk. You may also contact Rights & Permissions directly through Elsevier’s home page (http://www.elsevrer.nl), selecting first ‘Customer Support’, then ‘General Information’, then ‘Permissrons Query Form’. In the USA, users may clear permissions and make payments through the Copyright Clearance Center, Inc, 222 Rosewood Drive, Danvers, MA 01923, USA; tel: 978 7508400, fax: +l 978 7504744, and m the UK through the Copyright Licensing Agency Rapid Clearance Servrce (CLARCS), 90 Tottenham Court Road, London Wl P OLP, UK; tel: +44 (0) 171 436 5931; fax: +44 (0)171 436 3986. Other countrres may have a local reprographic rights agency for payments Derivative Works Subscribers may reproduce tables of contents or prepare lists of altrcles including abstracts for mternal circulation within their institutions. Permission of the publisher is required for resale or distributron outside the mstitution. Permission of the publisher is required for all other derivative works, including compilatrons and translations. Electronic Storage or Usage Permrssion of the publisher is required to store or use electronically any material contarned in this Journal, mcludrng any article or part of an article. Contact the publisher at the address Indicated. Except as outlhned above, no part of this publication may be reproduced, stored in a retrieval system or transmitted in any form or by any means, electronic, mechanical, photocopying, recordrng or otherwise, without prior written permission of the publisher. Address permissions requests to: Elsevier Science Rights & Permrssions Department, at the marl, fax and e-mail addresses noted above. Notice No responsibility is assumed by the Publisher for any injury and/or damage to persons or property as a matter of products liabrlrty, negligence or otherwise, or from any use or operation of any methods, products, instructions or Ideas contained in the materral herern. Because of rapid advances in the medical sciences, in particular, independent verification of diagnoses and drug dosages should be made. Although all advertrsing material is expected to conform to ethical (medrcal] standards, inclusion m this publication does not constitute a guarantee or endorsement of the quality or value of such product or of the claims made of it by its manufacturer.
0961-l 290/99/$ - see front matter 0 1999 Elsevier Science Ltd. All rights reserved.
Looking at the bigger picture With its increasing success in telecommunications and other markets, GaAs device makers are eager to grab a larger share of a growing market - and that’s prompting increasing interest in 6” wafers. ‘bile the move to the larger diameter wafers has long been predicted, the step up from 4” has been relatively slow to happen with firms wary about a range of factors, such as the required investment, associated with the transition. That cautious approach seems to be evaporating, however, with a number of companies declaring their intention, or at least the capability, to make the switch. Among the latest developments (see page 4) has seen Filtronic Solid State’s announcement that it is to establish a 6” GaAs line for high volume production of PHEMTs at a former Si foundry in Newton Aycliffe, UK. About &lOm will be spent in the first 12 to 18 months to equip the plant for GaAs manufacture, with production expected to begin in the second quarter of 2000. With Infineon Technologies (formerly Siemens) hoping to have its new 6” line operational before Christmas, it signals a healthy future for GaAs in Europe. The USA is also seeing escalating activity, with ANADIGICS recently commencing production on its 6” fab in Warren, NJ (see page 9). ‘Fab 2’ is currently being used for GaAs MESFET and PHEMT processing, but ANADIGICS intends to add HBTs in 2000.
W
Ill-Vs Review - Covering advanced semiconductors worldwrde http://wwwelsevier.com/locate/iiivsrev Editor: Simon Pickering Tel: +44 (0)1865 843722 Fax: +44 (0)1865 843971 E-mail: s.pickeringQelsevier.co.uk Assistant Editor: Caroline Edser Tel: +44 (0)1865 843670 Fax: +44 (0)1865 843971 E-mail: [email protected] Associate Editor: Roy Szweda E-mail: [email protected],com North American Consulting Editor: Ruth Delule Managing Editor: Amanda Weaver Advertising Sales Manager & Reprints: Mervyn Patterson Tel: +44 (0)1747 855348. Fax: +44 (0)1747 851004 E-mail: 100760.1721Qcompuserve.com Marketing: Kirsty Whareham Tel: +44 (0)1865 843666
(437.
For customers in the Rest of the World: Elsevier Science, Customer Support Dept. PO Box 211, 1000 AE Amsterdam, The Netherlands Tel: +31 20-4853757 Fax: +31 20-4853432 E-mail: [email protected] Subscriptions: Annual subscriptron (six issues) NLG421/US$214/f130/E191. Price valid to end of 1999 and includes airmail delivery m Europe and airspeeded delivery elsewhere. &
A member of the Reed Elsevier plc group
Periodicals postage paid at Rahway, NJ. Ill-v’s Review is publrshed six times a year. Postmaster send all address corrections to Ill-v’s Review, do Elsevier Science Regional Sales Office, Customer Support Department, 655 Avenue of the Americas, New York, NY 10010. The opinions expressed by individuals in this publication are not necessarilythose of Elsevier,who shall not be held responsible for them. All trademarks acknowledged. Prrnted by: Friary Press Ltd. Journal Number: 02076 ISSN 0961-l 290 0 1999 Elsevier Scrence Ltd.All rights reserved.
2
Ill-Vs
Review
l
Vol.12
No. 5 1999
6--G? ,.?
4” -
Simon Pickering, Editor
This journal and the mdrvidual contributions contarned in it are protected under copyright by Elsevier Scrence Ltd, and the following terms and conditions apply to their use:
Published six trmes a year Elsevier Advanced Technology, The Boulevard, Langford Lane, Kidlington. Oxford, OX5 1AS, UK. Subscription enquiries, orders and payments: For customers residing in the Americas (North, South and Central America) Elsevier Science, Customer Support Department, PO Box 945, NewYork NY 10010, USA Tel: +l 212-633-3730 [Toll Free number for North American customers: l-800-4ES-INFO 4636)] Fax: +l 212-633-3680. E-mail: [email protected]
Alpha Industries, meanwhile, has completed the first phase of an expansion programme (page 8) that has laid the foundations for the move to bigger wafers.While the main aim of the expansion has been to expand manufacturing capability on its existing 4” furniture, all new equipment is 6” wafer compatible to enable a quick and cost effective step up to the larger size as required. Merchant epiwafer supplier, Kopin Corp is another looking to 6” (page 14).The company recently brought on line the first of six new MOCVD production systems, two of which are capable of processing 6” wafers. Of course, installed equipment provides only part of the 6” equati0n.A supply of wafers is also required, so substrate vendors are also moving in line with the 6” trend. Among them is Germany’s Freiberger Compound Materials, which has just announced plans to invest US$50 million in a new fab to expand production capacity, including 6” wafers.
Photocopying Single photocopres of smgle articles may be made for personal use as allowed by national copyrrght laws. Permission of the publisher and payment of a fee is required for all other photocopying, including multiple or systematic copying, copying for advertising or promotronal purposes, resale, and all forms of document delivery Special rates are available for educational institutions that wish to make photocopies for non-profit educational classroom use. Permissions may be sought directly from Elsevier Science Rights & Permrssions Department, PO Box 800, Oxford OX5 1DX. UK; tel: +44 (0)1865 843830, fax: +44 (OJ1865 853333, e-mail: permissronsQelsevier.co.uk. You may also contact Rights & Permissions directly through Elsevier’s home page (http://www.elsevrer.nl), selecting first ‘Customer Support’, then ‘General Information’, then ‘Permissrons Query Form’. In the USA, users may clear permissions and make payments through the Copyright Clearance Center, Inc, 222 Rosewood Drive, Danvers, MA 01923, USA; tel: 978 7508400, fax: +l 978 7504744, and m the UK through the Copyright Licensing Agency Rapid Clearance Servrce (CLARCS), 90 Tottenham Court Road, London Wl P OLP, UK; tel: +44 (0) 171 436 5931; fax: +44 (0)171 436 3986. Other countrres may have a local reprographic rights agency for payments Derivative Works Subscribers may reproduce tables of contents or prepare lists of altrcles including abstracts for mternal circulation within their institutions. Permission of the publisher is required for resale or distributron outside the mstitution. Permission of the publisher is required for all other derivative works, including compilatrons and translations. Electronic Storage or Usage Permrssion of the publisher is required to store or use electronically any material contarned in this Journal, mcludrng any article or part of an article. Contact the publisher at the address Indicated. Except as outlhned above, no part of this publication may be reproduced, stored in a retrieval system or transmitted in any form or by any means, electronic, mechanical, photocopying, recordrng or otherwise, without prior written permission of the publisher. Address permissions requests to: Elsevier Science Rights & Permrssions Department, at the marl, fax and e-mail addresses noted above. Notice No responsibility is assumed by the Publisher for any injury and/or damage to persons or property as a matter of products liabrlrty, negligence or otherwise, or from any use or operation of any methods, products, instructions or Ideas contained in the materral herern. Because of rapid advances in the medical sciences, in particular, independent verification of diagnoses and drug dosages should be made. Although all advertrsing material is expected to conform to ethical (medrcal] standards, inclusion m this publication does not constitute a guarantee or endorsement of the quality or value of such product or of the claims made of it by its manufacturer.
0961-l 290/99/$ - see front matter 0 1999 Elsevier Science Ltd. All rights reserved.