Microelectromechanical accelerometer for automotive applications

least

an

electromagnetic

generating of magnetic manner

material that

induction be

it

in

exciting

which

the

magnetic

field

electromagnetic A movable relative

which

which

to the

which

is capable

object

the intensity

of the fluctuation

penetrates

the

heat generating

least

portion

Furthermore, constructed

an

image that

heating

object

to be heated

device

is disposed

recording the

device

that forms

etching.

and

integrated accelerometer

core.

capacitive

device

is

an

control

to the

having

active

anti-lock

systems

that

S.r.I., Italy has a stator

which

has a circular

extension

arms. These

arms support

electrodes

is

then

grown.

components are

substrate

and beneath

removed,

is excavated another sacrificial mobile

The

the rotor region structures

extending

direction

circuitry

the

sacrificial

an

aperture

substrate. and

USA, Kionix,

or

for

micro-mirror

micro-mirror

is

is useful in

such as in biaxial scanner

or

systems.

Publication date: 13 March R.W.

200 1

McClelland,

N.M.

Rensing,

PM. Zavracky

N.C.

assemblies

released

mirror

are dried

assemblies

and the dried

of separated

mirror

Patent number: US 6200882

of discrete

from a single silicon

wafer. The basic

structure

of the micromechanical

accelerometer

is etched

in the wafer to form a released portion

mounted

assemblies,

which

tape to produce

assemblies.

200 1

Torsional micromechanical system

mirror

A torsional

micromechanical

a mirror

mirror

mirror

structure

rotation a

Technical developments Industry trends

news

industries

Features Technical articles on

Research Trends mirror

rotatably

support

assembly

over and within

of the mirror

includes

a support layer.

system supported for

The latest research results published

in

the key journals

a cavity in

is sized sufficiently

reflecrive

is coplanar

In Brief Breaking

projects and developments

USA

assembly

movement

assembly

supporting

News Business activities

Corporation,

University,

unimpeded

month

around the world

MicroOptical

Northeastern

rotational

Next

Related

K.J. Jackson

a base. The cavity

provided

mirror

Publication date: 13 March

by a torsional

is

are

Inventors: J.D. Drake, J.H. Jerman,

includes

accelerometer

mirror

to produce

The

from the mounting

Applicant:

ulletin

are diced or scribed to produce

the

Inc.,

mirror

assemblies

tape

assemblies.

and

to produce

dried

mirror

the

Foundation

assemblies

The washed

and finally

of the

entails

to an acid release

to produce

to

release

together

method

assemblies

a mounting

assemblies

are separated

for processing formed

mirror

assemblies.

assemblies

of

Inc., USA

The

a plurality

B. Vigna

Smart Materials Bulletin

are

Patent number: US 6201629

and

Davis,

a method

the released mirror

a plurality

2001

capacitive

rinsing

mirror

Inc., USA

A micromechanical

T.J.

one

the remainder

Research

etch to produce

is

Microelectromechanical accelerometer for automotive applications Applicant: Cornell

assembly

and the base. A process

M.B. Spitzer, ED. Aquilino,

assemblies

the mirror

mirror

Patent number: US 6198145 Inventors: I? Ferrari,

mirror

200 1

wafer.

onto

layer

from

a silicon

mounted

chip. Publication date: 6 March

accuracy

actuator the

assemblies

torsional

applications

Inventors:

Technology,

of mirror

mounted

extending

separare

is removed

video display

accelerometers

extreme

presents

of

region

The epitaxial

and the stator,

from

regions

a portion

from

washed

layer

electronic

conductive

a plurality

exposing

and

An epiraxial

subsequently

to define

with radial

is to form a sacrificial

substrate.

forming the entire

and a

The first stage in

and the biasing

formed,

through

circumferential

process

various

drive

spaced across the gap between

The torsional

other

Method for processing a plurality micromachined mirror assemblies This invenrion

on a silicon

electrodes

active

and

a magnetic to

MacDonald

Applicant: Seagate

region

control,

braking

Galvin,

Applicant: STMicroelectronics,

with one another.

provide

assembly

on the mirror

provided.

Publication date: 13 March G.J.

to push

can be used for airbag

to out of plane forces.

Inventors:

microactuator

the

operative

torsional

assembly.

actuator

rhe

Patent number: US 6 199874

2001

which

Other

mirror

means, support

provided

assembly.

An

of the mirror

embodiment, is

metal.

the torsional

mirror

motion

assembly

at the downstream device.

of the torsional

causes rotational

mirror

to apply a driving

By this

the mirror

resistance

heating

be

drive

assembly.

fabricating

require

sensitivity,

may

is operative

to torsionally

In another

torsional

at least one torsion

of an electroplated

assembly

assembly

is provided

includes

The micromechanical

and fixing unit or a pressure of the

may also

from

formed

motion is

the accelerometer

suspension

control,

high

although

accelerometer

wafer

is formed.

deployment,

support

electronics

acceleromerer

steering

for

VLSI

spring

force

in the

as the base. The

assembly

actuator

step

circuitry

on the same

to at

a The

reactive-ion

The accelerometer

signal-conditioning

formed,

form

all etching

a signal-conditioned

Manufacturing a semiconductor material integrated microactuator

the manufacturing

embodiment,

is

Inventor: R. Maeyama

interleaved

etch

magnetic

corresponds

induction

in a substantially

using

on the same wafer from which

is provided

Publication date: 27 February

rotor

etched the first

so as to

electromagnetic

to

accelerometer.

wafer

support

with metal

the basic structure,

preferred

reactive-ion

wherein

Patent number: US 6195525

The integrated

sufficient

is preferably

comprise

are coated

capacitive

for ar least

in another

the

magnetic

body which

electromagnetic

process

electromagneric

the

such

carrying

the

layer.

layer is provided

of

image

etching

of moving

to be heated

induction

induction

penetrates

conditions

substrate

a fluctuation

heat generating

under

to

same

and the released and remaining

of the substrate

an

and

around

generates

induction core

a

manner,

in the substrate, portions

micromechanical

layer of the object

is wound

and

in such a

electromagnetic

opposed

which

core

heat

core made

is disposed

faces

an

coil

magnetic

field

a magnetic

heat generating

heated

change

induction

layer includes

to allow

assembly.

The

structure

for

The

with and formed

Patents Recently published US and WO patents

support from the

May 2001