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New from Moorfield Associates
Vacuum News
New uhv e-beam evaporator
Effusion cell for all major deposition systems.
new UEQ 062 effusion cell features two control modes. For retrofit, Balzers offers a high stability temperature controller. For new systems, Balzers offers its unique QuadGun Control. The vapour streams, e.g. three effusion cells and one e-beam gun, are monitored by a rapid response quadrupole mass analyser. The signal of each material is fed back to the corresponding source; this allows for unrivalled closed-loop deposition rate control, especially important for leading edge processes. The new standard UEQ 062 effusion cell covers the temperature range up to 1400°C. It is spit-free, due to a very homogeneous temperature distribution in the cell, and avoids cell-to-cell interference, thanks to the water cooled source body. The very stable deposition rates are unaffected by shutter opening. These features make the UEQ 062 an ideal wide range source. It is also the preferred source for sophisticated critical processes, in combination with the precise QuadGun rate control. New cold cathode compact gauge head from Bakers. A new compact cold cathode, high vacuum gauge head-the IKR 260, which incorporates a metal Helicoflex seal, has been introduced by Balzers to meet stringent customer requirements. The IKR 260 has a measuring range of 10-*-2x 10F9 mbar and, with the electronics removed, can be baked at temperatures up to 250°C. This extremely versatile gauge head can provide pressure measurements in any units, including mbar, Pa, torr or micron, and features a linear voltage to pressure response. It can be used with Balzers’ TPG 251 or TPG 252 gauge controllers, or as a stand-alone gauge head utilising the users’ own read-out device. The IKR 260 can be incorporated as a retrofit gauge head into existing vacuum systems using either a DN 40 or CF flange.
from Bakers.
New uhv e-beam evaporator for all major systems from Bakers. A new uhv e-beam evaporation system-the EBS 200, which is suitable for retrofitting to all major systems and backed up by a full application support service, has been launched by Balzers and features unsurpassed process control and source material utilisation. This is achieved with material dependent choice of the trajectory and dwell time of the e-beam in a 16 x 16 matrix. Parameter sets for up to 32 materials can be stored, enabling optimally designed and reproducible processes. The new EBS 200 U e-beam evaporation systems are available with one, two, or four hearth e-beam guns. They feature very high up-time, thanks to a large crucible volume and unrivalled material utilisation. These features make the EBS 200 U the ideal evaporation system for any uhv coating plant. The combination of the closedloop QuadGun rate control in Balzers’ uhv systems guarantees top film quality for MBE of Si and Si/Ge, for atomic layer epitaxy, and for other processes where very good long term stability and reproducible rate control are essential. Further information from: Allan Jaunzens Balzers Limited Bradbourne Drive Tilbrook Milton Keynes MK7 8AZ UK Tel 0908 373333 Fax0908377776
New
from
Moorfield
Associates
Digital image system. Moorfield Associates (UK, France) has launched the KSA 300, a new digital imaging system for the acquisition, analysis and archiving of RHEED and LEED diffraction patterns. The system is particularly suited to RHEED quantitative analysis during deposition of MBE and CBE layers. Captured by a CCD camera, the image is then digitised at a 512 x 512 frame size, at rates of up to 30 frames per second. The user can select the on-chip integration in any multiple of l/30 s, to be applied to any data acquisition mode, static or time resolved. When used for LEED multiple spot tracking and generation of IN curves, the kinetic energy is controlled via a 12 bit D/A board. 983
Vacuum
News
Further information
from: Jon Whitead Moorfield Associates Moorfield House Plumley Moor Road Plumley Knutsford Cheshire WA16 9RS UK Tel 565 722 609
New
from
Edwards
Two pumps in one. The RV range of rotary vacuum pumps offers users real practical benefits. There are four in the range from 3.7 to 14.2 m3 h ‘. The pumps can cope with high gas loads and still achieve high ultimate vacuum. These RV pumps have the unique ability to deliver excellent ultimate vacuum in both high vacuum and high throughput modes, with or without gas ballast; this gives the user an unrivalled opportunity to select the optimum pumping performance without compromising the application. In its high vacuum mode, the RV is ideal for analytical instrumentation, electron microscopes, physics research, backing turbo pumps, TV tube pumping and leak detection applications. Configure the same pump in the high throughput mode and it becomes suitable for mass spectrometer inlet systems, distillation, laboratory furnaces, backing vapour pumps, solvent concentration, freeze drying and other drying applications. The simple mode selector valve and three-position gas ballast control allow the pump to be reconfigured at any time, even when it is running. The benefits are: less money tied up in different pumps ‘on the shelf’, the opportunity to select optimum pumping performance without compromising the application and the ability to meet future changes in pumping requirements. The motors that power RV pumps are specially designed for international use. They are ready wired and can be configured for different voltages by flicking a rocker switch. There is no need for hard wiring as dedicated cables are available for most countries, so the user just has to plug in. The dual mode valve and choice of gas ballast are quick and easy to select. Two oil fillers allow accessories to be fitted to one, leaving the other free. Servicing requires no special tools, needing only two socket head keys. Service kits of guaranteed Edwards parts are available. A new and radical production philosophy, coupled with
Two pumps
984
in one-and
a lot more
besides!
massive investment in the latest in manufacturing technology, has prevented such problems as casting defects and porosity. All key components of the pumping cartridge are manufactured from solid cast bar, eliminating casting defects and porosity. The cartridge is assembled in a robotic assembly cell specially developed for the RV series and one of the most advanced in the world; this removes errors and inconsistencies from the assembly process. Computerised testing then ensures that no RV pumps leave the factory without a pass certificate. Ultimate vacuum ranges from 2 x 10m3 mbar to IO-’ mbar (total pressure) depending on the operational mode selected. Further information from: Mr J. F. Fowler Edwards High Vacuum Int Manor Royal Crawley West Sussex RH 30 2LW UK New
from
Surface/Interface
New uhv-compatible Hot/Cold Stage. Mountain View, California-Surface/Interface (S/I) announces the availability of their new Hot/Cold Stage (Model ALHCS) transfer station, which will heat 2-3 in. samples up to 600°C and cool them down to - 190°C. Key features of the Hot/Cold Stage are: an efficient heat transfer system that can rapidly heat and cool the sample; uhv-compatible banana plugs that eliminate the need to break vacuum to rewire the experiment or make new electrical connections; and a flexible design that enables users to connect a variety of measurement systems to the same station. Applications for the transfer station include maintenance of sample temperature during ion etching, ECR and similar processes. Designed to heat and cool samples evenly, S/l’s Hot/Cold Stage eliminates any hot or cold spots on the sample that could affect test results or process outcomes. The Hot/Cold Stage has an efficient heat transfer system and it can be cooled and then heated immediately (and vice versa) without equipment sticking or damage-the common problems that can plague such systems. The puck (which holds the sample) can be cooled with water, liquid nitrogen, or any other liquid and is heated electrically. Using an S/I precision magnetic manipulator, the Hot/Cold Stage can transfer samples in and out of a chamber through a loadlock, without breaking main chamber vacuum. Consequently, pressure stays lower and little to no moisture is introduced into the chamber. In addition, uhv-compatible banana plugs provide electrical connections and completely eliminate the need to open the vacuum chamber and manually wire the puck to implement experiments. The puck has seven
New
uhv-compatible
Hot/Cold
Stage
from
Surface/Interface.
New uhv e-beam evaporator
Effusion cell for all major deposition systems.
new UEQ 062 effusion cell features two control modes. For retrofit, Balzers offers a high stability temperature controller. For new systems, Balzers offers its unique QuadGun Control. The vapour streams, e.g. three effusion cells and one e-beam gun, are monitored by a rapid response quadrupole mass analyser. The signal of each material is fed back to the corresponding source; this allows for unrivalled closed-loop deposition rate control, especially important for leading edge processes. The new standard UEQ 062 effusion cell covers the temperature range up to 1400°C. It is spit-free, due to a very homogeneous temperature distribution in the cell, and avoids cell-to-cell interference, thanks to the water cooled source body. The very stable deposition rates are unaffected by shutter opening. These features make the UEQ 062 an ideal wide range source. It is also the preferred source for sophisticated critical processes, in combination with the precise QuadGun rate control. New cold cathode compact gauge head from Bakers. A new compact cold cathode, high vacuum gauge head-the IKR 260, which incorporates a metal Helicoflex seal, has been introduced by Balzers to meet stringent customer requirements. The IKR 260 has a measuring range of 10-*-2x 10F9 mbar and, with the electronics removed, can be baked at temperatures up to 250°C. This extremely versatile gauge head can provide pressure measurements in any units, including mbar, Pa, torr or micron, and features a linear voltage to pressure response. It can be used with Balzers’ TPG 251 or TPG 252 gauge controllers, or as a stand-alone gauge head utilising the users’ own read-out device. The IKR 260 can be incorporated as a retrofit gauge head into existing vacuum systems using either a DN 40 or CF flange.
from Bakers.
New uhv e-beam evaporator for all major systems from Bakers. A new uhv e-beam evaporation system-the EBS 200, which is suitable for retrofitting to all major systems and backed up by a full application support service, has been launched by Balzers and features unsurpassed process control and source material utilisation. This is achieved with material dependent choice of the trajectory and dwell time of the e-beam in a 16 x 16 matrix. Parameter sets for up to 32 materials can be stored, enabling optimally designed and reproducible processes. The new EBS 200 U e-beam evaporation systems are available with one, two, or four hearth e-beam guns. They feature very high up-time, thanks to a large crucible volume and unrivalled material utilisation. These features make the EBS 200 U the ideal evaporation system for any uhv coating plant. The combination of the closedloop QuadGun rate control in Balzers’ uhv systems guarantees top film quality for MBE of Si and Si/Ge, for atomic layer epitaxy, and for other processes where very good long term stability and reproducible rate control are essential. Further information from: Allan Jaunzens Balzers Limited Bradbourne Drive Tilbrook Milton Keynes MK7 8AZ UK Tel 0908 373333 Fax0908377776
New
from
Moorfield
Associates
Digital image system. Moorfield Associates (UK, France) has launched the KSA 300, a new digital imaging system for the acquisition, analysis and archiving of RHEED and LEED diffraction patterns. The system is particularly suited to RHEED quantitative analysis during deposition of MBE and CBE layers. Captured by a CCD camera, the image is then digitised at a 512 x 512 frame size, at rates of up to 30 frames per second. The user can select the on-chip integration in any multiple of l/30 s, to be applied to any data acquisition mode, static or time resolved. When used for LEED multiple spot tracking and generation of IN curves, the kinetic energy is controlled via a 12 bit D/A board. 983
Vacuum
News
Further information
from: Jon Whitead Moorfield Associates Moorfield House Plumley Moor Road Plumley Knutsford Cheshire WA16 9RS UK Tel 565 722 609
New
from
Edwards
Two pumps in one. The RV range of rotary vacuum pumps offers users real practical benefits. There are four in the range from 3.7 to 14.2 m3 h ‘. The pumps can cope with high gas loads and still achieve high ultimate vacuum. These RV pumps have the unique ability to deliver excellent ultimate vacuum in both high vacuum and high throughput modes, with or without gas ballast; this gives the user an unrivalled opportunity to select the optimum pumping performance without compromising the application. In its high vacuum mode, the RV is ideal for analytical instrumentation, electron microscopes, physics research, backing turbo pumps, TV tube pumping and leak detection applications. Configure the same pump in the high throughput mode and it becomes suitable for mass spectrometer inlet systems, distillation, laboratory furnaces, backing vapour pumps, solvent concentration, freeze drying and other drying applications. The simple mode selector valve and three-position gas ballast control allow the pump to be reconfigured at any time, even when it is running. The benefits are: less money tied up in different pumps ‘on the shelf’, the opportunity to select optimum pumping performance without compromising the application and the ability to meet future changes in pumping requirements. The motors that power RV pumps are specially designed for international use. They are ready wired and can be configured for different voltages by flicking a rocker switch. There is no need for hard wiring as dedicated cables are available for most countries, so the user just has to plug in. The dual mode valve and choice of gas ballast are quick and easy to select. Two oil fillers allow accessories to be fitted to one, leaving the other free. Servicing requires no special tools, needing only two socket head keys. Service kits of guaranteed Edwards parts are available. A new and radical production philosophy, coupled with
Two pumps
984
in one-and
a lot more
besides!
massive investment in the latest in manufacturing technology, has prevented such problems as casting defects and porosity. All key components of the pumping cartridge are manufactured from solid cast bar, eliminating casting defects and porosity. The cartridge is assembled in a robotic assembly cell specially developed for the RV series and one of the most advanced in the world; this removes errors and inconsistencies from the assembly process. Computerised testing then ensures that no RV pumps leave the factory without a pass certificate. Ultimate vacuum ranges from 2 x 10m3 mbar to IO-’ mbar (total pressure) depending on the operational mode selected. Further information from: Mr J. F. Fowler Edwards High Vacuum Int Manor Royal Crawley West Sussex RH 30 2LW UK New
from
Surface/Interface
New uhv-compatible Hot/Cold Stage. Mountain View, California-Surface/Interface (S/I) announces the availability of their new Hot/Cold Stage (Model ALHCS) transfer station, which will heat 2-3 in. samples up to 600°C and cool them down to - 190°C. Key features of the Hot/Cold Stage are: an efficient heat transfer system that can rapidly heat and cool the sample; uhv-compatible banana plugs that eliminate the need to break vacuum to rewire the experiment or make new electrical connections; and a flexible design that enables users to connect a variety of measurement systems to the same station. Applications for the transfer station include maintenance of sample temperature during ion etching, ECR and similar processes. Designed to heat and cool samples evenly, S/l’s Hot/Cold Stage eliminates any hot or cold spots on the sample that could affect test results or process outcomes. The Hot/Cold Stage has an efficient heat transfer system and it can be cooled and then heated immediately (and vice versa) without equipment sticking or damage-the common problems that can plague such systems. The puck (which holds the sample) can be cooled with water, liquid nitrogen, or any other liquid and is heated electrically. Using an S/I precision magnetic manipulator, the Hot/Cold Stage can transfer samples in and out of a chamber through a loadlock, without breaking main chamber vacuum. Consequently, pressure stays lower and little to no moisture is introduced into the chamber. In addition, uhv-compatible banana plugs provide electrical connections and completely eliminate the need to open the vacuum chamber and manually wire the puck to implement experiments. The puck has seven
New
uhv-compatible
Hot/Cold
Stage
from
Surface/Interface.