New ion beam systems

New ion beam systems

Vacuum News Macro Assembler. a BASIC application code generator, a C-compiler for Pascal. a relational database manager, as well as a CP/M 2.2 boots...

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Vacuum

News

Macro Assembler. a BASIC application code generator, a C-compiler for Pascal. a relational database manager, as well as a CP/M 2.2 bootstrap input/output system (bios) and a UCSD P-system bios. Communications. Designed to be more than just a standalone unit, Dot provides two asynchronous V24 communications ports for high-speed connection to a local host, to terminals, or to a variety of peripherals, such as plotters or letter-quality printers, Optional builtin 300 baud or 300/1200 baud V22 modems with telephone plug direct connect are also available. There are two IBM bus compatible card slots, which can accommodate boards up to 10.5 in long. Also available is a bytesynchronous card to support communications to an IBM host, Dot users will be able to access a multitude of data bases and information services, including daily news, financial information, electronic mail, and games. Compucorp Ltd. Cunningham House, Westfreld Lane, Kenton, Middlesex

Series 1000-A

brand

new instrument

range

The Series 1000 comprises gauges, controllers, combinations and three new gauge heads. The range has a unique mix of features which places it far ahead of other instruments currently available.

The simplicity measurement,

shows gauge Pascal, all fully

which requires only four push buttons relay setting and calibration.

The freedom to allocate up to four independent gauge heads you choose.

comes from self-diagnostrcs

The security features.

by comprehensive

provided

and

safety and back-up

The value of standardization on, say, one model and a selectron of gauge heads which cover the range 1000 to 5 x 1 Oe8 mbar. With some exceptions the Series 1000 instruments replace most of Edwards Series 70 range. Edwards High Vacuum Manor Royal, Crawley. RHlO 2LW

Calibrated

leaks

for

helium

and

other

gases; helium

spray probes. These devices, are regarded as suitable for all makes of mass spectrometer leak detectors. Megatech Ltd. 2a Waterloo Road, Havant, Hants. PO9 1 BH

New

By combining OAR’s advanced product design with Oxford Instruments’ extensive productron facilities and sales support, the two companies in partnership will be able to provide a unique service to the semiconductor industry for vacuum processing, chip metallization and device fabrication in VLSI (very large scale integration) and also to the increasing number of processes using ion beam milling, plasma etching and deposition in other areas of development and manufacture. Oxford Instruments Limited, Osney Mead, Oxford, OX2 ODX, UK .

to control

relays to the

The confidence which calibration data.

A team of engineers have formed a new Materials Science group within Oxford Instruments to manufacture the ion beam systems with Dr Peter Hanley, formerly technical director of Oxford instruments, as manager and supported by key staff seconded from Oxford Applied Research. As part of the Materials Science group a fully equipped applications laboratory is being set up for inhouse development, feasibility tests and process trials for customers. The ion beam milling equipment was developed by Oxford Applied Research. The work was based on early research done in UK government laboratories’and by NASA.

Edwards Series 1000 is a completely new range of microprocessor based digital Pirani and Penning instruments offering advanced technical features with significant economic advantages and user convenience.

The luxury of a big 13 mm drgital display which head selected and pressure in mbar-or torr-or autoranging.

arsenide and lithium niobate to the very high level of power and precision needed for the application of thin film materials to industrial uses. Oxford Applied Research have signed an agreement with Oxford Instruments Limited, a member of the Oxford Instruments Group, whereby Oxford Instruments will manufacture and market OAR’s plasma and ion beam milling equipment. Sales and marketing support for the equipment will be provided by Oxford Instruments Group subsidiaries in the USA, West Germany, France, the Netherlands and Switzerland and by their existing worldwide agency network.

ion beam systems

A British company is responsible for breaking the U.S. monopoly on an advanced technique used in semiconductor and thrn film manufacture. Oxford Applied Research Limited, an independent company based near Oxford, has developed ion beam systems for use in milling and depositing advanced materials such as gallium

Data

quad

XD

A mrcroprocessor quadrupole mass spectrometer has been developed, It has (i) integral vdu; (ii) comprehensive software; (iii) a Faraday detector; (iv) twin filaments; (v) IEEE or RS272 optional control and (vi) audio leak detection. There are five different data quads:1. Data quad XD; 2. Data quad XDM (the same as 1 but with a multiplier detection system in addition to the Faraday plate with automatrc calibration); 3. Spectromass 100 (A range of quadrupoles is available in analogue or digital form with a choice of detection systems and a range of accessones, including an Apple plug-in computer interface); 4. lsopec 44 (A magnetic sector isotope radto mass spectrometer for precision analysis of C, N, 0 and S radios, with reproducibility to better than 0.03%); 5. Spectra mass 12-90 (A 12 cm radius, 90’ magnetic sector mass spectrometer developed from the lsopec 44 for use in precision gas analysis applications). Spectrum Scientific Ltd. Radnor Park Industrial Estate, Beck Lane, Congleton. Cheshire CW12 4XR. UK

Spectra

soft

Spectra-soft is based on all the best attributes of UTl’s other information systems. Unlike other ‘RGA software’, Spectra-soft is the first program set to go beyond simply labelling spectrum displays to offering true solutions to RGA applications problems Spectrasoft uses the UTI 1 OOC precision Mass Analyser through the UTI