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air admittance valves
VACUUM
News
M a n u f a c t u r e r s and o t h e r s Manufacturers and others are invited to submit information for inclusion in this feature addressed to The Vacuum New Editor V a c u u m Pergamon Press Ltd Headington Hill Hall Oxford O X 3 0 B W
New
products
and
developments
New isolation/air admittance valves The new version of the Edwards 'Speedivalve' isolation/air admittance vacuum valve is built to metric standards and is generally of more compact, rugged and modern design than valves previously available. Available in straight-through (Model SC5) or right-angle (Model PV5) versions, it can be pipeline or panel mounted and operates on the weir and diaphragm principle which isolates the mechanism and gives good tolerance to dusty conditions. The valve is suitable for most gas/liquid handling systems and for pressures down to 1 0 - 5 - 1 0 - 6 mbar depending on whether a nitrile or Viton diaphragm is chosen. The modern coupling system gives a choice of muff-coupling to plain 6 mm O/D tube or permanent connection by brazing or soldering; nominal internal bore is 5 mm. Edwards High Vacuum, Manor Royal, Crawley, West Sussex RH10 2LW, UK High current implanter with hybrid scanner Balzers High Vacuum Limited announce the Scanibal SC1 218, claimed to be the first ion implanter to apply electrostaticmechanical hybrid scanning to high current beams. The specially developed scanning and deflector system for high currents combined with a magnetic quadrupole ensures sufficient overscanning of a 5 in. matrix at a frequency of 1000 Hz with no space-charge expansion of the beam, eliminating extreme local hot spots. This fast scanning together with the 615 m/s circumference speed of the carousel keeps the wafer load low. The system operates between 20 and 200 keV and for scanned currents up to 1.5 mA. Requiring the minimum of electronic controls the Scanibal effectively implants high and low doses, but because of the electrostatic deflector does not implant neutral particles. The technique achieves uniformities of ±1% standard deviation over the whole dose range from 101~ ions/cm 2 to high doses. Balzers High Vacuum Ltd, Northbridge Road, Berkhamsted, Herts, UK Metric slimline spool valves Schrader have introduced a range of Slimline Spool Valves, utilizing their long established and much imitated static seal design. The new Slimline -~ in. BSP (-~R conforms to ISO R228) single sub-based 3/2 and 5/2 valves meet the demand for small compact units, delivering high flow, created by the trend towards packaged systems. The Slimline Spool Valves are suitable for use in systems and cabinets where space is at a premium. Schrader offers a choice of automatic actuator/return mechanism combinations. There is a choice of side- or bottom-ported valves and ganged manifold combinations are also available. All port connections in the sub-bases comply with CETOP recommendation RP68. The Slimline valves utilize a lightweight stainless steel balanced spool with short travel for high cycle speeds-fluctuations in inlet pressure do not affect the operating forces. Sealing the pressure and exhaust port in mid travel permits the pilot-operated valves to be used with air, oil or vacuum. The
The Scanibal SCI 218 high current ion implanter with hybrid scanner solenoid actuator in the Slimline features a new ultra-small coil assembly with 4 W consumption and 1 00% continuously rated. The exhaust connection has a built-on muffler which can be removed to pipe away exhaust air. Where space is limited the coil can be repositioned at 180 ° to the normal position as can the cable plug, with its built in collet cable lock. The solenoid/pilot valves are available with manual override. The bodies, bases and actuator housings on the Slimline Spool valves are in diecast zinc ; the stainless steel spools are guided by brass bushes and sealed by static 'Viton' rubber O rings. The valves can all be serviced without disturbing any of the pipe connections. Schrader-Bellows, Division of Scovill Manufacturing Co, Walkmill Lane, Bridgtown, Cannock, Staffs WS11 3LR, UK
Heater assemblies IVI has available two sizes of heater assemblies for use in vacuum systems. The Model 1010-1 offers 1000 W of radiant heat. The Model 1005-1 is designed for use in tight spaces and has 500 W capability. Both of these designs have specially designed contacts
91
News
M a n u f a c t u r e r s and o t h e r s Manufacturers and others are invited to submit information for inclusion in this feature addressed to The Vacuum New Editor V a c u u m Pergamon Press Ltd Headington Hill Hall Oxford O X 3 0 B W
New
products
and
developments
New isolation/air admittance valves The new version of the Edwards 'Speedivalve' isolation/air admittance vacuum valve is built to metric standards and is generally of more compact, rugged and modern design than valves previously available. Available in straight-through (Model SC5) or right-angle (Model PV5) versions, it can be pipeline or panel mounted and operates on the weir and diaphragm principle which isolates the mechanism and gives good tolerance to dusty conditions. The valve is suitable for most gas/liquid handling systems and for pressures down to 1 0 - 5 - 1 0 - 6 mbar depending on whether a nitrile or Viton diaphragm is chosen. The modern coupling system gives a choice of muff-coupling to plain 6 mm O/D tube or permanent connection by brazing or soldering; nominal internal bore is 5 mm. Edwards High Vacuum, Manor Royal, Crawley, West Sussex RH10 2LW, UK High current implanter with hybrid scanner Balzers High Vacuum Limited announce the Scanibal SC1 218, claimed to be the first ion implanter to apply electrostaticmechanical hybrid scanning to high current beams. The specially developed scanning and deflector system for high currents combined with a magnetic quadrupole ensures sufficient overscanning of a 5 in. matrix at a frequency of 1000 Hz with no space-charge expansion of the beam, eliminating extreme local hot spots. This fast scanning together with the 615 m/s circumference speed of the carousel keeps the wafer load low. The system operates between 20 and 200 keV and for scanned currents up to 1.5 mA. Requiring the minimum of electronic controls the Scanibal effectively implants high and low doses, but because of the electrostatic deflector does not implant neutral particles. The technique achieves uniformities of ±1% standard deviation over the whole dose range from 101~ ions/cm 2 to high doses. Balzers High Vacuum Ltd, Northbridge Road, Berkhamsted, Herts, UK Metric slimline spool valves Schrader have introduced a range of Slimline Spool Valves, utilizing their long established and much imitated static seal design. The new Slimline -~ in. BSP (-~R conforms to ISO R228) single sub-based 3/2 and 5/2 valves meet the demand for small compact units, delivering high flow, created by the trend towards packaged systems. The Slimline Spool Valves are suitable for use in systems and cabinets where space is at a premium. Schrader offers a choice of automatic actuator/return mechanism combinations. There is a choice of side- or bottom-ported valves and ganged manifold combinations are also available. All port connections in the sub-bases comply with CETOP recommendation RP68. The Slimline valves utilize a lightweight stainless steel balanced spool with short travel for high cycle speeds-fluctuations in inlet pressure do not affect the operating forces. Sealing the pressure and exhaust port in mid travel permits the pilot-operated valves to be used with air, oil or vacuum. The
The Scanibal SCI 218 high current ion implanter with hybrid scanner solenoid actuator in the Slimline features a new ultra-small coil assembly with 4 W consumption and 1 00% continuously rated. The exhaust connection has a built-on muffler which can be removed to pipe away exhaust air. Where space is limited the coil can be repositioned at 180 ° to the normal position as can the cable plug, with its built in collet cable lock. The solenoid/pilot valves are available with manual override. The bodies, bases and actuator housings on the Slimline Spool valves are in diecast zinc ; the stainless steel spools are guided by brass bushes and sealed by static 'Viton' rubber O rings. The valves can all be serviced without disturbing any of the pipe connections. Schrader-Bellows, Division of Scovill Manufacturing Co, Walkmill Lane, Bridgtown, Cannock, Staffs WS11 3LR, UK
Heater assemblies IVI has available two sizes of heater assemblies for use in vacuum systems. The Model 1010-1 offers 1000 W of radiant heat. The Model 1005-1 is designed for use in tight spaces and has 500 W capability. Both of these designs have specially designed contacts
91