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New small turbomolecular vacuum pump
Vacuum/volume Printed in Great
31 /number Britain
B/g/pages
VACUUM Manufacturers Manufacturers The Vacuum
Brey
to 394/l
981
0042-207x/81
/0803asi Pergamon
0$02.00/o Press Ltd
News
and others and others News Editor,
New products New
385
pumps
are invited to submit information for inclusion in this feature addressed Vacuum, Pergamon Press Ltd. Headington Hill Hall, Oxford OX3 OBW,
to UK
and developments
are inherently
leak-proof
G-M Series Pumps, a new range from Brey, use magnetic motor couplings to eliminate shaft seals. They provide completely leakproof pumping at pressure differentials up to 200 mbar and will handle gas temperatures up to BO’C. Also completely clean, contamination free pumping is ensured by exclusive use of 316 stainless steel and carbon in the construction of the pumps, which are oil-free in operation. G-M Pumps are designed for the most demanding applications, such as high system pressure and temperature gas circulation, de-adsorption tube gas analysis, and nuclear and high temperature gas sampling.
Range of vacuum booster pumps A comprehensive range of single and two been introduced by Leybold-Heraeus Ltd.
booster
pumps
has
Known as the Roots range, the pumps are used in various applications where high pumping speeds at low pressures are required. Some models are designed with an integral bypass or gas cooling device. The pumps can be combined to provide complete pumping 10,000 m3 h-l. There are also specialized chemical solvent recovery
In such applications, where leaks may be completely intolerable, the inherently safe design of G-M pumps enables them, uniquely, to be mounted outside instead of inside the pressure system. Four G-M models are available to provide flow rates from 1 to 15 I min“. All are available with a choice of 6, 12. or 24 V dc ironless skew-wound motors, and accessories include voltage regulators for performance regulation. Brey (Compressors & Vacuum Pumps) Ltd. Stockholm Road, Sutton Fields Industrial Estate, Hull HUB OXW. UK
stage
16 Endeavour
New
small
in different sizes or with other pumps systems with speeds ranging to over
Roots systems applications.
Way,
turbomolecular
Durnsford
devoted
Road,
vacuum
to laboratory
and
Leybold-Heraeus Ltd, London SW1 9 BUH, UK
pump
Leybold-Heraeus Ltd, have introduced a new model of small turbomolecular vacuum pump. The TMP 150 pump offers increased pumping speed, even lower noise and vibration level under load and double the time intervals between servicing.
The photograph shows the Brey GK07 vacuum/compressor pump, in which the motor is separated from the pump by an extended drive shaft passing through a steel heat sink to allow continuous pumping of gases at up to 25o’C. The pump itself, which is constructed exclusively of 376 stainless steel and carbon, is highly corrosion resistant. Measuring only 200 mm long by 45 mm in diameter. the GK07 delivers maximum pressure or vacuum of 400 mbar and a flow rate of 15 I min- ’ A sparking plug is shown in the foreground to give scale. 385
Vacuum
News
The pump can be mounted in any position, can cooled and can produce a completely hydrocarbon few minutes from start up time. 16 Endeavour
Way,
Durnsford
Road,
be air or water free vacuum
in a
Leybold-Heraeus London, SW19 8UH.
The filter housings, corrosion so that acrds, hydroxides,
Ltd. UK
2a Waterloo
The Megatech
New
leak
oil filtration
detector
A new automatic Edwards LT205, available The
The
TMP
and
unit’s
Havant,
150pump
Oil
filtration
systems
The
new
oil filtration
GHS-6
for
plasma system
chemistry
from
Megatech
Limited
be increased
by a factor
system.
is fastest
and
has
to be probably
rate
detection
the
range
fastest extends
is the
first
single
instrument
for the most demanding and locate massive leaks, in production line testing.
15 decades:
In small a second
to combine
research plus the
work speed
of 3 to 10.
In operation it requires merely start automatically sequenced
volume after
sufficient with the ability and simplicity
to
cycle. Audio
Leaks exceeding leak indication
The instrument can running unattended
the use of two push buttons: one to pumping and one to finish the test
any pre-set figure is also available. be kept permanently overnight if required.
are
indicated
ready
for
particles, adsorbs moisture and prevents stray Fullers earth reaching the vacuum pump. The rotary vane pump, filter, pipework and flexible connections are arranged neatly on a simple chassis with
This enables the mass spectrometer than the test piece, thus allowing testing for massive leaks at high
convenient
considerably
handle.
range
through
An important new feature contributing to the of speed and sensitivity-range is an automatic test volume and the high vacuum system.
386
widest
in operation.
The GHS-6 consists of a starnless steel rotary vane liquid pump and a 2-stage filter. The first stage is a large Fullers earth bag which intercepts the larger partrcles and neutralizes the acids. The second stage has a large-capacity inert cellulose element which retains fine
carrying
Megatech Ltd. PO9 1 BH, UK
Hants
is a
compact, portable umt designed for plasma etch, LPCVD and ion implantation systems, and wherever oil-filled rotary vacuum pumps are used in contaminatmg processes. It protects and improves the performance of the pump by removing particulate contamination, absorbing water and neutralizing acids present in the oil. The period oil changes may on conditions,
LT205
sensitivity indicate required
to
helium mass spectrometer leak detector, the is claimed to have the widest leak rate range
also
leak
Road,
from 2000 mbar I s-’ to 2 x 1O-‘2 mbar I se’. testing it indicates massive leaks just over half starting the test cycle. The
between depending
vane pump and pipework are highly resistant the GHS-6 may also be used for filtering many sulphates, glycols and alcohols.
reduce
the
cycle
to be kept the instrument pressure: 500
time
required.
visually.
immediate
LT205’s throttle
use,
combination between the
at a lower pressure to commence mbar. This device
can
31 /number Britain
B/g/pages
VACUUM Manufacturers Manufacturers The Vacuum
Brey
to 394/l
981
0042-207x/81
/0803asi Pergamon
0$02.00/o Press Ltd
News
and others and others News Editor,
New products New
385
pumps
are invited to submit information for inclusion in this feature addressed Vacuum, Pergamon Press Ltd. Headington Hill Hall, Oxford OX3 OBW,
to UK
and developments
are inherently
leak-proof
G-M Series Pumps, a new range from Brey, use magnetic motor couplings to eliminate shaft seals. They provide completely leakproof pumping at pressure differentials up to 200 mbar and will handle gas temperatures up to BO’C. Also completely clean, contamination free pumping is ensured by exclusive use of 316 stainless steel and carbon in the construction of the pumps, which are oil-free in operation. G-M Pumps are designed for the most demanding applications, such as high system pressure and temperature gas circulation, de-adsorption tube gas analysis, and nuclear and high temperature gas sampling.
Range of vacuum booster pumps A comprehensive range of single and two been introduced by Leybold-Heraeus Ltd.
booster
pumps
has
Known as the Roots range, the pumps are used in various applications where high pumping speeds at low pressures are required. Some models are designed with an integral bypass or gas cooling device. The pumps can be combined to provide complete pumping 10,000 m3 h-l. There are also specialized chemical solvent recovery
In such applications, where leaks may be completely intolerable, the inherently safe design of G-M pumps enables them, uniquely, to be mounted outside instead of inside the pressure system. Four G-M models are available to provide flow rates from 1 to 15 I min“. All are available with a choice of 6, 12. or 24 V dc ironless skew-wound motors, and accessories include voltage regulators for performance regulation. Brey (Compressors & Vacuum Pumps) Ltd. Stockholm Road, Sutton Fields Industrial Estate, Hull HUB OXW. UK
stage
16 Endeavour
New
small
in different sizes or with other pumps systems with speeds ranging to over
Roots systems applications.
Way,
turbomolecular
Durnsford
devoted
Road,
vacuum
to laboratory
and
Leybold-Heraeus Ltd, London SW1 9 BUH, UK
pump
Leybold-Heraeus Ltd, have introduced a new model of small turbomolecular vacuum pump. The TMP 150 pump offers increased pumping speed, even lower noise and vibration level under load and double the time intervals between servicing.
The photograph shows the Brey GK07 vacuum/compressor pump, in which the motor is separated from the pump by an extended drive shaft passing through a steel heat sink to allow continuous pumping of gases at up to 25o’C. The pump itself, which is constructed exclusively of 376 stainless steel and carbon, is highly corrosion resistant. Measuring only 200 mm long by 45 mm in diameter. the GK07 delivers maximum pressure or vacuum of 400 mbar and a flow rate of 15 I min- ’ A sparking plug is shown in the foreground to give scale. 385
Vacuum
News
The pump can be mounted in any position, can cooled and can produce a completely hydrocarbon few minutes from start up time. 16 Endeavour
Way,
Durnsford
Road,
be air or water free vacuum
in a
Leybold-Heraeus London, SW19 8UH.
The filter housings, corrosion so that acrds, hydroxides,
Ltd. UK
2a Waterloo
The Megatech
New
leak
oil filtration
detector
A new automatic Edwards LT205, available The
The
TMP
and
unit’s
Havant,
150pump
Oil
filtration
systems
The
new
oil filtration
GHS-6
for
plasma system
chemistry
from
Megatech
Limited
be increased
by a factor
system.
is fastest
and
has
to be probably
rate
detection
the
range
fastest extends
is the
first
single
instrument
for the most demanding and locate massive leaks, in production line testing.
15 decades:
In small a second
to combine
research plus the
work speed
of 3 to 10.
In operation it requires merely start automatically sequenced
volume after
sufficient with the ability and simplicity
to
cycle. Audio
Leaks exceeding leak indication
The instrument can running unattended
the use of two push buttons: one to pumping and one to finish the test
any pre-set figure is also available. be kept permanently overnight if required.
are
indicated
ready
for
particles, adsorbs moisture and prevents stray Fullers earth reaching the vacuum pump. The rotary vane pump, filter, pipework and flexible connections are arranged neatly on a simple chassis with
This enables the mass spectrometer than the test piece, thus allowing testing for massive leaks at high
convenient
considerably
handle.
range
through
An important new feature contributing to the of speed and sensitivity-range is an automatic test volume and the high vacuum system.
386
widest
in operation.
The GHS-6 consists of a starnless steel rotary vane liquid pump and a 2-stage filter. The first stage is a large Fullers earth bag which intercepts the larger partrcles and neutralizes the acids. The second stage has a large-capacity inert cellulose element which retains fine
carrying
Megatech Ltd. PO9 1 BH, UK
Hants
is a
compact, portable umt designed for plasma etch, LPCVD and ion implantation systems, and wherever oil-filled rotary vacuum pumps are used in contaminatmg processes. It protects and improves the performance of the pump by removing particulate contamination, absorbing water and neutralizing acids present in the oil. The period oil changes may on conditions,
LT205
sensitivity indicate required
to
helium mass spectrometer leak detector, the is claimed to have the widest leak rate range
also
leak
Road,
from 2000 mbar I s-’ to 2 x 1O-‘2 mbar I se’. testing it indicates massive leaks just over half starting the test cycle. The
between depending
vane pump and pipework are highly resistant the GHS-6 may also be used for filtering many sulphates, glycols and alcohols.
reduce
the
cycle
to be kept the instrument pressure: 500
time
required.
visually.
immediate
LT205’s throttle
use,
combination between the
at a lower pressure to commence mbar. This device
can