- Email: [email protected]
Perlast FFKMs deliver low plasma erosion rates and increased seal lifetime in semiconductor production
sealing
TECHNOLOGY
ISSN 1350-4789 September July-September 2017 2017
Perlast FFKMs deliver low plasma erosion rates and increased seal lifetime in semiconductor production
P
recision Polymer Engineering Ltd (PPE), a manufacturer of high-performance moulded elastomer seals and O-rings, used Semicon West, which was held recently in San Francisco, USA, as an opportunity to launch two new material grades. These perfluoroelastomers (FFKMs) – Perlast G65HP and Perlast G67G – which are targeted at semiconductor production, have been formulated to deliver low plasma erosion rates and increased seal lifetime with minimal particle generation, says the company that is part of US-based IDEX Corp. Semiconductor production creates some of the most aggressive environments encountered by seals. G65HP and G67G are described as plasma-resistant, nano-filled elastomer sealing materials – each providing unique and process-optimised sealing for semiconductor applications. These high purity materials have been developed to meet the needs of critical applications where seals are in direct contact with the process chemistry. They are expected to provide an extended lifetime that is compatible with existing maintenance cycles – potentially increasing process tool uptime, leading to an overall lower cost of consumables. They have been tested and benchmarked against market-leading materials, in several
commonly used plasma chemistries, says PPE. According to the company, the test results show that the materials perform better than their closest competitors – with a 30% reduction in erosion rates in some cases. Both materials also boast low trace metal content, which reduces the risk of lower yield and warranty failures. The Perlast G67G grade incorporates low levels of nanoparticle fillers, which means that particle agglomeration or large particle contamination, are far less likely. It has been formulated to deliver excellent resistance to aggressive oxygen, chlorine and fluorine-based plasmas, says PPE. Together with outstanding thermal and mechanical resistance qualities and low particle generation, it is ideally suited to wet and dry etching, stripping, cleaning and PVD processes. Perlast G65HP has a unique organic formulation, developed specifically for critical semiconductor processes where seals are in direct contact with plasma. It is resistant to high concentration radical fluorine plasma, as well as other plasma chemistries. With a structure that is completely organic, it minimises the risk of particle generation, resulting in extended maintenance cycles. In addition, with fewer than 10k parts per billion trace metals, this material is ideal for manufacturers of devices at advanced technology nodes, Continued on page 16...
www.sealingtechnology.info
Contents News Perlast FFKMs deliver low plasma erosion rates and increased seal lifetime in semiconductor production 1 & 16 Labyrinth seals ensure durability of deep groove ball bearings
2
FFKM extends seal service life in high-temperature environments
2
Seals, gaskets can be spotted by metal detectors and inspected by X-rays
3
Sealing system provides protection from gamma radiation
3
DuPont and TactoTek work together to support growing IME market
4
Double-offset butterfly valve enables huge volumes of water to be transported and shut off reliably 16
Company News Antwerp office strengthens Flexitallic’s presence in Europe
4
Hydratight supplies tie-in components for North Sea gas field
4
Accreditation recognises excellent people management at PPE
4
Bal Seal opens new office to support French industry
5
Armatec acquires DVC and Valtor Offshore from Eriks
5
New organisation draws together Evonik’s cross-linking technology
6
MCC and Air Liquide cooperate in licensing butadiene production processes
6
BASF sets up company to pursue business opportunities in 3D printing
6
Conferences and Meetings News Oil & Gas Non-Metallics conference takes place in November
6
Seminar covers designing with fluoropolymers
7
Publications of Interest Study surveys the current state of the gasket market 7
Perlast G65HP O-rings developed for plasma processes used in semiconductor manufacturing (photograph courtesy of Precision Polymer Engineering Ltd).
News Focus Robust seal developed for emergency subsea release system coupler
8
Drinktec – an ideal platform for Freudenberg to reveal its latest technologies
9
Recently Published Papers
11
Regulars
In Brief 3,5 & 7 Patents 12 Events Calendar 16
ISSN 1350-4789/17 1350-4789/10 © 2017 2011 Elsevier Ltd. All rights reserved. This journal and the individual contributions contained in it are protected under copyright by Elsevier Ltd, and the following terms and conditions apply to their use: Photocopying Single photocopies of single articles may be made for personal use as allowed by national copyright laws. Permission of the publisher and payment of a fee is required for all other photocopying, including multiple or systematic copying, copying for advertising or promotional purposes, resale, and all forms of document delivery. Special rates are available for educational institutions that wish to make photocopies for non-profit educational classroom use.
EVENTS/NEWS
EVENTS CALENDAR 9–11 October 2017
Offshore Energy 17
Amsterdam, The Netherlands Contact: Navingo Bv, Las Palmas Building, Wilhelminakade 302,3072 AR Rotterdam, The Netherlands Tel: +31 10 209 2600 Web: www.offshore-energy.biz 9–12 October 2017
2017 International Elastomer Conference
Cleveland, Ohio, USA Contact: Rubber Division, American Chemical Society, 411 Wolf Ledges, Suite 201, Akron, OH 44311, USA Tel: +1 330 9727 814 Web: www.rubberiec.org/aboutinternational-elastomer-conference.aspx 18–19 October 2017
Surface Metrology Autumn School (University of Huddersfield EPSRC Future Metrology Hub)
Contact: Fluid Sealing Association (FSA), 994 Old Eagle School Road #1019, Wayne, PA 19087-1866, USA Tel: +1 610 971 4850 Web: www.fluidsealing.com/meeting-registration 26 October 2017
Designing with Fluoropolymers (seminar)
Mannheim, Germany Contact: Stefanie Wüst – Project Management, Academy, International Sealing and Gasket Technology (ISGATEC), Am Exerzierplatz 1A, 68167 Mannheim, Germany Tel: +49 621 7176888 2, Fax: +49 621 717 68888 Email: [email protected] Web: www.isgatec.com/index.php/de/ Akademie/Seminare/WerkstoffeVerarbeitung/Fluoropolymers 7–8 November 2017
Oil & Gas Non-Metallics 2017
Huddersfield, UK Contact: EPSRC Centre for Innovative Manufacturing in Advanced Metrology University of Huddersfield, Firth St, Huddersfield HD1 3DH, UK Tel: +44 1484 473634 Web: www.store.hud.ac.uk/product-catalogue/conferences/computing-and-engineering/future-metrology-hub
London, UK Contact: Jenny Skinner, Deputy Conference Manager, Applied Market Information Ltd, 6 Pritchard Street, Bristol BS2 8RH, UK Tel: +44 117 314 8111, Fax: +44 117 311 1534 Email: [email protected] Web: www.amiplastics.com/eventsevent?Code=C854
23–26 October 2017
14–15 November 2017
Fort Worth, Texas, USA
Houston, Texas, USA
FSA Fall 2017 Meeting
...Continued from front page and those wishing to ensure the integrity of device electrical specifications and minimal reliability failures. Commenting on these materials, Dr Murat Gulcur, Product Manager – Semiconductor, PPE, said: ‘PPE is committed to the development of ever more resilient semiconductor
Pipeline Coating USA 2017
material grades, to help our customers solve sealing problems mainly associated with the miniaturisation in the chip market across a range of critical applications.’ ‘Aggressive plasma chemistries have always been a major challenge for our customers, and with the extensive testing and subsequent launch of Perlast G65HP and Perlast
Contact: Chrissy Stelluti, Conference Manager, Applied Market Information Llc, 1210 Broadcasting Road, Suite 103, Wyomissing, PA 19610, USA Tel: +1 610 478 0800, Fax: +1 610 478 0900 Email: [email protected] Web: www.ami.international/events/ event?Code=C837 28–29 November 2017
Thermoplastic Elastomers World Summit 2017 & Silicone Elastomers World Summit 2017
Munich, Germany Contact: Smithers Rapra, Shawbury, Shropshire SY4 4NR, UK Tel: +44 1939 250383 Web: www.smithersrapra.com/events/ conference/thermoplastic-elastomersworld-summit-2017 Web: www.smithersrapra.com/events/ conference/silicone-elastomers-world-summit-2017 5 December 2017
Pressure Testing 2017
London, UK Contact: Event Enquiries, Institution of Mechanical Engineers, 1 Birdcage Walk, Westminster, London SW1H 9JJ, UK Tel: +44 20 7973 1258 Email: [email protected] http://events.imeche.org/ViewEvent?e=6575
G67G, we believe we can give our customers market-leading performance against all other elastomer sealing technologies under the same conditions – along with significant cost savings.’ For further information, visit: Web: www.prepol.com & Web: www.idexcorp.com
Double-offset butterfly valve enables huge volumes of water to be transported and shut off reliably
V
KSB’s Aporis butterfly valves are used for applications where huge volumes of water need to be transported and shut off reliably (photograph courtesy of KSB Aktiengesellschaft).
16
Sealing Technology
alves and pumps manufacturer KSB Aktiengesellschaft, based in Frankenthal, Germany, has introduced the Aporis double-offset butterfly valve with an elastomer sealing element. It has been developed for applications where huge volumes of water need to be transported and shut off reliably. Applications include systems for water transport, water treatment or large industrial cooling circuits. Two stainless steel stems hold the valve disc in position. Torque transmission from the actuating stem to the disc is ensured by a keyed connection. Neither of the stems come into contact with the fluid as they are surrounded by sealed protective sleeves. This keeps them dry and, in conjunction with the stainless steel reinforced
polytetrafluoroethylene bearing bushes, ensures extended, trouble-free service, says the firm. The valve is available with the face-to-face lengths specified in the EN 558/ISO 5752 Series 14 standard and in nominal sizes DN 300 to DN 2000. It has a maximum permissible operating pressure of 1.6 MPa (16 bar) and can be used with a standard fluid temperature of between 0°C and 85°C. The valve discs and bodies are made from epoxy-coated EN-GJS-400-15. The use of standardised top flanges – which meet ISO 5211 – ensures that the valve can be combined with a wide range of manual, electric, pneumatic and hydraulic actuators. For further information, visit: Web: www.ksb.com
September 2017
TECHNOLOGY
ISSN 1350-4789 September July-September 2017 2017
Perlast FFKMs deliver low plasma erosion rates and increased seal lifetime in semiconductor production
P
recision Polymer Engineering Ltd (PPE), a manufacturer of high-performance moulded elastomer seals and O-rings, used Semicon West, which was held recently in San Francisco, USA, as an opportunity to launch two new material grades. These perfluoroelastomers (FFKMs) – Perlast G65HP and Perlast G67G – which are targeted at semiconductor production, have been formulated to deliver low plasma erosion rates and increased seal lifetime with minimal particle generation, says the company that is part of US-based IDEX Corp. Semiconductor production creates some of the most aggressive environments encountered by seals. G65HP and G67G are described as plasma-resistant, nano-filled elastomer sealing materials – each providing unique and process-optimised sealing for semiconductor applications. These high purity materials have been developed to meet the needs of critical applications where seals are in direct contact with the process chemistry. They are expected to provide an extended lifetime that is compatible with existing maintenance cycles – potentially increasing process tool uptime, leading to an overall lower cost of consumables. They have been tested and benchmarked against market-leading materials, in several
commonly used plasma chemistries, says PPE. According to the company, the test results show that the materials perform better than their closest competitors – with a 30% reduction in erosion rates in some cases. Both materials also boast low trace metal content, which reduces the risk of lower yield and warranty failures. The Perlast G67G grade incorporates low levels of nanoparticle fillers, which means that particle agglomeration or large particle contamination, are far less likely. It has been formulated to deliver excellent resistance to aggressive oxygen, chlorine and fluorine-based plasmas, says PPE. Together with outstanding thermal and mechanical resistance qualities and low particle generation, it is ideally suited to wet and dry etching, stripping, cleaning and PVD processes. Perlast G65HP has a unique organic formulation, developed specifically for critical semiconductor processes where seals are in direct contact with plasma. It is resistant to high concentration radical fluorine plasma, as well as other plasma chemistries. With a structure that is completely organic, it minimises the risk of particle generation, resulting in extended maintenance cycles. In addition, with fewer than 10k parts per billion trace metals, this material is ideal for manufacturers of devices at advanced technology nodes, Continued on page 16...
www.sealingtechnology.info
Contents News Perlast FFKMs deliver low plasma erosion rates and increased seal lifetime in semiconductor production 1 & 16 Labyrinth seals ensure durability of deep groove ball bearings
2
FFKM extends seal service life in high-temperature environments
2
Seals, gaskets can be spotted by metal detectors and inspected by X-rays
3
Sealing system provides protection from gamma radiation
3
DuPont and TactoTek work together to support growing IME market
4
Double-offset butterfly valve enables huge volumes of water to be transported and shut off reliably 16
Company News Antwerp office strengthens Flexitallic’s presence in Europe
4
Hydratight supplies tie-in components for North Sea gas field
4
Accreditation recognises excellent people management at PPE
4
Bal Seal opens new office to support French industry
5
Armatec acquires DVC and Valtor Offshore from Eriks
5
New organisation draws together Evonik’s cross-linking technology
6
MCC and Air Liquide cooperate in licensing butadiene production processes
6
BASF sets up company to pursue business opportunities in 3D printing
6
Conferences and Meetings News Oil & Gas Non-Metallics conference takes place in November
6
Seminar covers designing with fluoropolymers
7
Publications of Interest Study surveys the current state of the gasket market 7
Perlast G65HP O-rings developed for plasma processes used in semiconductor manufacturing (photograph courtesy of Precision Polymer Engineering Ltd).
News Focus Robust seal developed for emergency subsea release system coupler
8
Drinktec – an ideal platform for Freudenberg to reveal its latest technologies
9
Recently Published Papers
11
Regulars
In Brief 3,5 & 7 Patents 12 Events Calendar 16
ISSN 1350-4789/17 1350-4789/10 © 2017 2011 Elsevier Ltd. All rights reserved. This journal and the individual contributions contained in it are protected under copyright by Elsevier Ltd, and the following terms and conditions apply to their use: Photocopying Single photocopies of single articles may be made for personal use as allowed by national copyright laws. Permission of the publisher and payment of a fee is required for all other photocopying, including multiple or systematic copying, copying for advertising or promotional purposes, resale, and all forms of document delivery. Special rates are available for educational institutions that wish to make photocopies for non-profit educational classroom use.
EVENTS/NEWS
EVENTS CALENDAR 9–11 October 2017
Offshore Energy 17
Amsterdam, The Netherlands Contact: Navingo Bv, Las Palmas Building, Wilhelminakade 302,3072 AR Rotterdam, The Netherlands Tel: +31 10 209 2600 Web: www.offshore-energy.biz 9–12 October 2017
2017 International Elastomer Conference
Cleveland, Ohio, USA Contact: Rubber Division, American Chemical Society, 411 Wolf Ledges, Suite 201, Akron, OH 44311, USA Tel: +1 330 9727 814 Web: www.rubberiec.org/aboutinternational-elastomer-conference.aspx 18–19 October 2017
Surface Metrology Autumn School (University of Huddersfield EPSRC Future Metrology Hub)
Contact: Fluid Sealing Association (FSA), 994 Old Eagle School Road #1019, Wayne, PA 19087-1866, USA Tel: +1 610 971 4850 Web: www.fluidsealing.com/meeting-registration 26 October 2017
Designing with Fluoropolymers (seminar)
Mannheim, Germany Contact: Stefanie Wüst – Project Management, Academy, International Sealing and Gasket Technology (ISGATEC), Am Exerzierplatz 1A, 68167 Mannheim, Germany Tel: +49 621 7176888 2, Fax: +49 621 717 68888 Email: [email protected] Web: www.isgatec.com/index.php/de/ Akademie/Seminare/WerkstoffeVerarbeitung/Fluoropolymers 7–8 November 2017
Oil & Gas Non-Metallics 2017
Huddersfield, UK Contact: EPSRC Centre for Innovative Manufacturing in Advanced Metrology University of Huddersfield, Firth St, Huddersfield HD1 3DH, UK Tel: +44 1484 473634 Web: www.store.hud.ac.uk/product-catalogue/conferences/computing-and-engineering/future-metrology-hub
London, UK Contact: Jenny Skinner, Deputy Conference Manager, Applied Market Information Ltd, 6 Pritchard Street, Bristol BS2 8RH, UK Tel: +44 117 314 8111, Fax: +44 117 311 1534 Email: [email protected] Web: www.amiplastics.com/eventsevent?Code=C854
23–26 October 2017
14–15 November 2017
Fort Worth, Texas, USA
Houston, Texas, USA
FSA Fall 2017 Meeting
...Continued from front page and those wishing to ensure the integrity of device electrical specifications and minimal reliability failures. Commenting on these materials, Dr Murat Gulcur, Product Manager – Semiconductor, PPE, said: ‘PPE is committed to the development of ever more resilient semiconductor
Pipeline Coating USA 2017
material grades, to help our customers solve sealing problems mainly associated with the miniaturisation in the chip market across a range of critical applications.’ ‘Aggressive plasma chemistries have always been a major challenge for our customers, and with the extensive testing and subsequent launch of Perlast G65HP and Perlast
Contact: Chrissy Stelluti, Conference Manager, Applied Market Information Llc, 1210 Broadcasting Road, Suite 103, Wyomissing, PA 19610, USA Tel: +1 610 478 0800, Fax: +1 610 478 0900 Email: [email protected] Web: www.ami.international/events/ event?Code=C837 28–29 November 2017
Thermoplastic Elastomers World Summit 2017 & Silicone Elastomers World Summit 2017
Munich, Germany Contact: Smithers Rapra, Shawbury, Shropshire SY4 4NR, UK Tel: +44 1939 250383 Web: www.smithersrapra.com/events/ conference/thermoplastic-elastomersworld-summit-2017 Web: www.smithersrapra.com/events/ conference/silicone-elastomers-world-summit-2017 5 December 2017
Pressure Testing 2017
London, UK Contact: Event Enquiries, Institution of Mechanical Engineers, 1 Birdcage Walk, Westminster, London SW1H 9JJ, UK Tel: +44 20 7973 1258 Email: [email protected] http://events.imeche.org/ViewEvent?e=6575
G67G, we believe we can give our customers market-leading performance against all other elastomer sealing technologies under the same conditions – along with significant cost savings.’ For further information, visit: Web: www.prepol.com & Web: www.idexcorp.com
Double-offset butterfly valve enables huge volumes of water to be transported and shut off reliably
V
KSB’s Aporis butterfly valves are used for applications where huge volumes of water need to be transported and shut off reliably (photograph courtesy of KSB Aktiengesellschaft).
16
Sealing Technology
alves and pumps manufacturer KSB Aktiengesellschaft, based in Frankenthal, Germany, has introduced the Aporis double-offset butterfly valve with an elastomer sealing element. It has been developed for applications where huge volumes of water need to be transported and shut off reliably. Applications include systems for water transport, water treatment or large industrial cooling circuits. Two stainless steel stems hold the valve disc in position. Torque transmission from the actuating stem to the disc is ensured by a keyed connection. Neither of the stems come into contact with the fluid as they are surrounded by sealed protective sleeves. This keeps them dry and, in conjunction with the stainless steel reinforced
polytetrafluoroethylene bearing bushes, ensures extended, trouble-free service, says the firm. The valve is available with the face-to-face lengths specified in the EN 558/ISO 5752 Series 14 standard and in nominal sizes DN 300 to DN 2000. It has a maximum permissible operating pressure of 1.6 MPa (16 bar) and can be used with a standard fluid temperature of between 0°C and 85°C. The valve discs and bodies are made from epoxy-coated EN-GJS-400-15. The use of standardised top flanges – which meet ISO 5211 – ensures that the valve can be combined with a wide range of manual, electric, pneumatic and hydraulic actuators. For further information, visit: Web: www.ksb.com
September 2017