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Piezoelectric properties of lead-free (Na0.5Bi0.5)0.95Ba0.05TiO3 thin films on polycrystalline nickel foils
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CERAMICS INTERNATIONAL
Ceramics International ] (]]]]) ]]]–]]] www.elsevier.com/locate/ceramint
Piezoelectric properties of lead-free (Na0.5Bi0.5)0.95Ba0.05TiO3 thin films on polycrystalline nickel foils Sheng Chenga, Ming Liua,n, Jiangbo Lua, Lu Lua, Linglong Lib, Yaodong Yangb a
Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education and International Center for Dielectric Research, Xi'an Jiaotong University, Xi'an 710049, PR China b Multi-Disciplinary Materials Research Center, Frontier Institute of Science and Technology, Xi'an Jiaotong University, Xi'an, PR China Received 26 October 2014; accepted 14 March 2015
Abstract Lead-free (Na0.5Bi0.5)0.95Ba0.05TiO3 (0.95NBT–0.05BT) thin films were deposited on polycrystalline Ni substrates by using the RF highpressure sputtering system. Microstructural studies by high resolution X-ray diffraction reveal that the as-deposited 0.95NBT–0.05BT thin films are polycrystalline structures. The piezoelectric property measurements by a piezoresponse force microscopy exhibit that the polycrystalline 0.95NBT–0.05BT thin films have an excellent piezoelectric response. It is indicated that the as-grown 0.95NBT–0.05BT thin films have the potential for the development of the structural health monitoring systems and related device applications. & 2015 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
Keywords: A. Films; C. Piezoelectric properties; BaTiO3; Titanate
1. Introduction In the past two decades, lead-free ferroelectric/piezoelectric materials have attracted considerable attention of research by scientists and technicians due to the environmental and biological issues [1–4]. Among them, environmental-friendly perovskite structure materials present good dielectric, ferroelectric and piezoelectric properties, which resulted in the broad device applications such as ferroelectric random access memories, optical modulators, waveguides, micro-electro-magnetic systems and micro-mechanism control systems [5–9]. Especially, the Asite complex perovskite (Na0.5Bi0.5)TiO3 (BNT) system have been considered to be one of the most important promising candidates because of its excellent ferroelectric and piezoelectric properties [10–15]. BNT thin films have been fabricated on n Corresponding author at: Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education and International Center for Dielectric Research, Xi'an Jiaotong University, Xi'an 710049, PR China. Tel.: +86 29 82668679; fax: +86 29 82668794. E-mail address: [email protected] (M. Liu).
various oxide single-crystal substrates using a broad spectrum of techniques [16–21]. However, it is well known that the singlecrystal oxide substrates have high cost and limited sizes. Therefore, replacing these substrates with metal materials (Steel, Nickel, Iron, etc.) has been attempted. Not only the cost can be greatly reduced, but also it can be widely adopted to design lots of devices, such as structural health monitoring systems, supercapacitors, energy harvester, operating under extreme conditions [22–28]. For the structural health monitoring systems, the integration of ferroelectric/piezoelectric films on metal substrates can increase the safety and reliability and reduce the cost of assembly. Some previous results about the BNT thin films on single-crystal oxide substrates have been reported. However, the BNT thin films were directly fabricated on polycrystalline Ni metal foils with excellent piezoelectric properties have not yet been reported. In this paper, we attempted to fabricate the 0.95(Na0.5Bi0.5) TiO3–0.05BaTiO3 thin films (0.95NBT–0.05BT) on polycrystalline Ni metal foils by using the RF high-pressure sputtering system and have systematically investigated its microstructure and piezoelectric properties. The polycrystalline 0.95NBT–0.05BT thin films
http://dx.doi.org/10.1016/j.ceramint.2015.03.187 0272-8842/& 2015 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
Please cite this article as: S. Cheng, et al., Piezoelectric properties of lead-free (Na0.5Bi0.5)0.95Ba0.05TiO3 thin films on polycrystalline nickel foils, Ceramics International (2015), http://dx.doi.org/10.1016/j.ceramint.2015.03.187
S. Cheng et al. / Ceramics International ] (]]]]) ]]]–]]]
2
on Ni metal substrates present an excellent piezoelectric response, which indicated that the as-grown 0.95NBT–0.05BT thin films have the potential to develop the structural health monitoring systems and related device applications. 2. Experimental The polycrystalline 0.95NBT–0.05BT thin films have been fabricated on polycrystalline Ni metal substrates by using the high-pressure sputtering system. The stoichiometric 0.95NBT– 0.05BT ceramic target was prepared through a standard solid state reaction method reported previously [29]. Before the thin film deposition, the target was pre-sputtered for 12 h to eliminate any contaminant on the surface. A thin 0.95NBT– 0.05BT buffer layer was first deposited at 200 1C, then the temperature was increased to 850 1C for the growth of the 0.95NBT–0.05BT thin films. The working pressure was set at 0.2 mbar with the mixed ambient of Ar and O2 at the ratio of 1:1. The crystallinity and growth behavior of the 0.95NBT– 0.05BT films were characterized by high resolution X-ray diffraction (HRXRD) using PANalytical X'Pert MRD. The surface morphology and piezoelectric properties of the 0.95NBT–0.05BT thin films were evaluated by using a piezoresponse force microscopy (PFM) at room temperature. 3. Results and discussion X-ray diffraction (XRD) has been employed to examine the phase and microstructure of the as-grown 0.95NBT–0.05BT thin films on polycrystalline Ni metal foils. Fig. 1 shows the typical θ 2θ scanning pattern of the 0.95NBT–0.05BT films on Ni foils. All diffraction peaks in the pattern can be indexed from the 0.95NBT–0.05BT film, polycrystalline Ni foil and NiO buffer layer, which suggest that the phase-pure 0.95NBT– 0.05BT film has been successfully fabricated. The NiO buffer shows that the surface of Ni was oxidized when the substrate was heated to 850 1C in an oxygen rich atmosphere. Fig. 2(a) is the surface morphology of the 0.95NBT–0.05BT films on Ni foils with the area of 20 mm 20 mm. It can be seen clearly
Fig. 1. A typical XRD scanning pattern of the as-grown 0.95NBT–0.05BT films on Ni foils.
Fig. 2. Surface morphology of (a) the as-grown 0.95NBT–0.05BT films on Ni foils; (b) Ni substrates without films.
that the surface of the film is not smooth and have many voids, which should be induced by the scratches on the Ni foils, as shown in the Fig. 2(b). To understand the physical properties of the as-grown 0.95NBT–0.05BT thin films on Ni foils, the piezoresponse force microscopy was performed to study the polarization and piezoelectric properties. A dc bias input voltages were applied on the film by PFM in the range of 20 V to þ 20 V with an intervals of 0.8 V. The similar experimental procedures were reported by Li et al. [30]. To make sure the reliability of the piezoresponse, a 2 μm 2 μm sized mesh with 256 points have been measured by PFM. Fig. 3(a) and (b) is the static piezoresponse amplitude and the phase hysteresis loops with the increase of the bias dc input voltage at room temperature, respectively. A typical butterfly-shaped piezoresponse loop and large piezoresponse amplitude of 770 pm have been obtained at the input voltage of 20 V, which reveal that the 0.95NBT–0.05BT films have an excellent piezoelectric response. Moreover, the phase contrast of 1801 reveals that
Please cite this article as: S. Cheng, et al., Piezoelectric properties of lead-free (Na0.5Bi0.5)0.95Ba0.05TiO3 thin films on polycrystalline nickel foils, Ceramics International (2015), http://dx.doi.org/10.1016/j.ceramint.2015.03.187
S. Cheng et al. / Ceramics International ] (]]]]) ]]]–]]]
3
51390472, and 51471169) and the Fundamental Research Funds for the Central University. References
Fig. 3. Piezoelectric response of the 0.95NBT–0.05BT films on Ni substrates. (a) Typical butterfly-shaped amplitude and voltage curve; (b) phase hysteresis loop.
the 0.95NBT–0.05BT films present a typical ferroelectric domain switching. Overall, the excellent piezoelectric response indicates that the as-grown 0.95NBT–0.05BT thin films have the potential to develop and design the structural health monitoring systems and related device applications. 4. Summary Polycrystalline lead-free 0.95NBT–0.05BT thin films were directly grown on Ni foils by using the RF high-pressure sputtering system. The polarization and piezoelectric properties by a piezoresponse force microscopy show that the polycrystalline 0.95NBT– 0.05BT thin films present an excellent piezoelectric response, which reveals that the as-grown 0.95NBT–0.05BT thin films have the potential development for designing the structural health monitoring systems and related device applications. Conflict of interest The authors declare no competing financial interest. Acknowledgments This research was supported by grants of the National Natural Science Foundation of China (Nos. 51202185,
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Please cite this article as: S. Cheng, et al., Piezoelectric properties of lead-free (Na0.5Bi0.5)0.95Ba0.05TiO3 thin films on polycrystalline nickel foils, Ceramics International (2015), http://dx.doi.org/10.1016/j.ceramint.2015.03.187
CERAMICS INTERNATIONAL
Ceramics International ] (]]]]) ]]]–]]] www.elsevier.com/locate/ceramint
Piezoelectric properties of lead-free (Na0.5Bi0.5)0.95Ba0.05TiO3 thin films on polycrystalline nickel foils Sheng Chenga, Ming Liua,n, Jiangbo Lua, Lu Lua, Linglong Lib, Yaodong Yangb a
Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education and International Center for Dielectric Research, Xi'an Jiaotong University, Xi'an 710049, PR China b Multi-Disciplinary Materials Research Center, Frontier Institute of Science and Technology, Xi'an Jiaotong University, Xi'an, PR China Received 26 October 2014; accepted 14 March 2015
Abstract Lead-free (Na0.5Bi0.5)0.95Ba0.05TiO3 (0.95NBT–0.05BT) thin films were deposited on polycrystalline Ni substrates by using the RF highpressure sputtering system. Microstructural studies by high resolution X-ray diffraction reveal that the as-deposited 0.95NBT–0.05BT thin films are polycrystalline structures. The piezoelectric property measurements by a piezoresponse force microscopy exhibit that the polycrystalline 0.95NBT–0.05BT thin films have an excellent piezoelectric response. It is indicated that the as-grown 0.95NBT–0.05BT thin films have the potential for the development of the structural health monitoring systems and related device applications. & 2015 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
Keywords: A. Films; C. Piezoelectric properties; BaTiO3; Titanate
1. Introduction In the past two decades, lead-free ferroelectric/piezoelectric materials have attracted considerable attention of research by scientists and technicians due to the environmental and biological issues [1–4]. Among them, environmental-friendly perovskite structure materials present good dielectric, ferroelectric and piezoelectric properties, which resulted in the broad device applications such as ferroelectric random access memories, optical modulators, waveguides, micro-electro-magnetic systems and micro-mechanism control systems [5–9]. Especially, the Asite complex perovskite (Na0.5Bi0.5)TiO3 (BNT) system have been considered to be one of the most important promising candidates because of its excellent ferroelectric and piezoelectric properties [10–15]. BNT thin films have been fabricated on n Corresponding author at: Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education and International Center for Dielectric Research, Xi'an Jiaotong University, Xi'an 710049, PR China. Tel.: +86 29 82668679; fax: +86 29 82668794. E-mail address: [email protected] (M. Liu).
various oxide single-crystal substrates using a broad spectrum of techniques [16–21]. However, it is well known that the singlecrystal oxide substrates have high cost and limited sizes. Therefore, replacing these substrates with metal materials (Steel, Nickel, Iron, etc.) has been attempted. Not only the cost can be greatly reduced, but also it can be widely adopted to design lots of devices, such as structural health monitoring systems, supercapacitors, energy harvester, operating under extreme conditions [22–28]. For the structural health monitoring systems, the integration of ferroelectric/piezoelectric films on metal substrates can increase the safety and reliability and reduce the cost of assembly. Some previous results about the BNT thin films on single-crystal oxide substrates have been reported. However, the BNT thin films were directly fabricated on polycrystalline Ni metal foils with excellent piezoelectric properties have not yet been reported. In this paper, we attempted to fabricate the 0.95(Na0.5Bi0.5) TiO3–0.05BaTiO3 thin films (0.95NBT–0.05BT) on polycrystalline Ni metal foils by using the RF high-pressure sputtering system and have systematically investigated its microstructure and piezoelectric properties. The polycrystalline 0.95NBT–0.05BT thin films
http://dx.doi.org/10.1016/j.ceramint.2015.03.187 0272-8842/& 2015 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
Please cite this article as: S. Cheng, et al., Piezoelectric properties of lead-free (Na0.5Bi0.5)0.95Ba0.05TiO3 thin films on polycrystalline nickel foils, Ceramics International (2015), http://dx.doi.org/10.1016/j.ceramint.2015.03.187
S. Cheng et al. / Ceramics International ] (]]]]) ]]]–]]]
2
on Ni metal substrates present an excellent piezoelectric response, which indicated that the as-grown 0.95NBT–0.05BT thin films have the potential to develop the structural health monitoring systems and related device applications. 2. Experimental The polycrystalline 0.95NBT–0.05BT thin films have been fabricated on polycrystalline Ni metal substrates by using the high-pressure sputtering system. The stoichiometric 0.95NBT– 0.05BT ceramic target was prepared through a standard solid state reaction method reported previously [29]. Before the thin film deposition, the target was pre-sputtered for 12 h to eliminate any contaminant on the surface. A thin 0.95NBT– 0.05BT buffer layer was first deposited at 200 1C, then the temperature was increased to 850 1C for the growth of the 0.95NBT–0.05BT thin films. The working pressure was set at 0.2 mbar with the mixed ambient of Ar and O2 at the ratio of 1:1. The crystallinity and growth behavior of the 0.95NBT– 0.05BT films were characterized by high resolution X-ray diffraction (HRXRD) using PANalytical X'Pert MRD. The surface morphology and piezoelectric properties of the 0.95NBT–0.05BT thin films were evaluated by using a piezoresponse force microscopy (PFM) at room temperature. 3. Results and discussion X-ray diffraction (XRD) has been employed to examine the phase and microstructure of the as-grown 0.95NBT–0.05BT thin films on polycrystalline Ni metal foils. Fig. 1 shows the typical θ 2θ scanning pattern of the 0.95NBT–0.05BT films on Ni foils. All diffraction peaks in the pattern can be indexed from the 0.95NBT–0.05BT film, polycrystalline Ni foil and NiO buffer layer, which suggest that the phase-pure 0.95NBT– 0.05BT film has been successfully fabricated. The NiO buffer shows that the surface of Ni was oxidized when the substrate was heated to 850 1C in an oxygen rich atmosphere. Fig. 2(a) is the surface morphology of the 0.95NBT–0.05BT films on Ni foils with the area of 20 mm 20 mm. It can be seen clearly
Fig. 1. A typical XRD scanning pattern of the as-grown 0.95NBT–0.05BT films on Ni foils.
Fig. 2. Surface morphology of (a) the as-grown 0.95NBT–0.05BT films on Ni foils; (b) Ni substrates without films.
that the surface of the film is not smooth and have many voids, which should be induced by the scratches on the Ni foils, as shown in the Fig. 2(b). To understand the physical properties of the as-grown 0.95NBT–0.05BT thin films on Ni foils, the piezoresponse force microscopy was performed to study the polarization and piezoelectric properties. A dc bias input voltages were applied on the film by PFM in the range of 20 V to þ 20 V with an intervals of 0.8 V. The similar experimental procedures were reported by Li et al. [30]. To make sure the reliability of the piezoresponse, a 2 μm 2 μm sized mesh with 256 points have been measured by PFM. Fig. 3(a) and (b) is the static piezoresponse amplitude and the phase hysteresis loops with the increase of the bias dc input voltage at room temperature, respectively. A typical butterfly-shaped piezoresponse loop and large piezoresponse amplitude of 770 pm have been obtained at the input voltage of 20 V, which reveal that the 0.95NBT–0.05BT films have an excellent piezoelectric response. Moreover, the phase contrast of 1801 reveals that
Please cite this article as: S. Cheng, et al., Piezoelectric properties of lead-free (Na0.5Bi0.5)0.95Ba0.05TiO3 thin films on polycrystalline nickel foils, Ceramics International (2015), http://dx.doi.org/10.1016/j.ceramint.2015.03.187
S. Cheng et al. / Ceramics International ] (]]]]) ]]]–]]]
3
51390472, and 51471169) and the Fundamental Research Funds for the Central University. References
Fig. 3. Piezoelectric response of the 0.95NBT–0.05BT films on Ni substrates. (a) Typical butterfly-shaped amplitude and voltage curve; (b) phase hysteresis loop.
the 0.95NBT–0.05BT films present a typical ferroelectric domain switching. Overall, the excellent piezoelectric response indicates that the as-grown 0.95NBT–0.05BT thin films have the potential to develop and design the structural health monitoring systems and related device applications. 4. Summary Polycrystalline lead-free 0.95NBT–0.05BT thin films were directly grown on Ni foils by using the RF high-pressure sputtering system. The polarization and piezoelectric properties by a piezoresponse force microscopy show that the polycrystalline 0.95NBT– 0.05BT thin films present an excellent piezoelectric response, which reveals that the as-grown 0.95NBT–0.05BT thin films have the potential development for designing the structural health monitoring systems and related device applications. Conflict of interest The authors declare no competing financial interest. Acknowledgments This research was supported by grants of the National Natural Science Foundation of China (Nos. 51202185,
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Please cite this article as: S. Cheng, et al., Piezoelectric properties of lead-free (Na0.5Bi0.5)0.95Ba0.05TiO3 thin films on polycrystalline nickel foils, Ceramics International (2015), http://dx.doi.org/10.1016/j.ceramint.2015.03.187