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Samples move into position
TOOLS & TECHNIQUES
Larger crystals increase TEM collector efficency
Combined techniques enable analysis at high resolution
The Oxford Instruments NanoAnalysis Si(Li) TEM EDS detector enables microscope users to maximize sample contact angle at the surface and minimize counting time. The larger crystal size in the new 50 mm2 detector results in a two- to three-fold increase in solid angle and collection efficiency compared with standard 30 mm2 detectors. The detector also uses a shutter mechanism that closes when the pulse processor detects a high flux of radiation, protecting the detector against X-ray overload and high-energy backscattered electrons without moving the detector. This results in less wear and tear on the detector’s motor and O-ring seals, reducing the likelihood of a gas leak in the system and the chances of a sample moving between readings. Contact: www.oxford-instruments.com
Hitachi High Technologies has introduced the model HF-3300, a new high-resolution field-emission transmission electron microscope (FE-TEM), able to achieve atomic resolution by combining a cold field-emission electron source and a 300 kV high accelerating voltage. The high accelerating voltage enables stable observation of samples, the results only slightly affected by specimen thickness and composition. The FE-TEM can achieve a lattice resolution of 0.10 nm, a magnification of 200–1 500 000, and a specimen traverse range X, Y = ±1 mm, T = ±15°. Double-biprism electron holography, spatially-resolved electron energy loss spectroscopy (EELS), and nano electron-beam diffraction have been included in the system, in addition to conventional energy dispersive X-ray analysis (EDX) and EELS. These analytical techniques enable elemental, chemical bonding state, and high precision local analysis of crystalline structure, respectively. Contact: www.hitachi-hitec.com/global
Fine line patterning at a low cost The new JBX-5500FS is a low-cost electron beam lithography system from JEOL that can write patterns on substrates with a minimum line width of 10 nm. The JBX-5500FS can be operated in two modes: high resolution with an overlay accuracy of <40 nm at 50 kV, or high speed, giving 1 mm fields at 50 kV or 2 mm fields at 25 kV. The JBX-5500FS can load parts or wafers with substrates up to 100 mm in diameter. Contact: www.jeol.com
Latest software to build up molecules Virtual NanoLab® 1.4 is the latest software release from Atomistix for designing nanoscale structures. Virtual NanoLab® features a molecular builder that allows the user to create molecules based on fundamental chemical properties such as hybridization and bond order. The builder includes a store of up to 70 prebuilt structures that can be used directly in simulations or combined into larger molecules using a database of atomic distances and bond angles, as well as automatic addition of hydrogen atoms. Contact: www.atomistix.com
Dualbeam systems and vitrification devices FEI’s Expida™ 1255S is a wafer DualBeam system that integrates wafer level scanning/transmission electron microscopy (STEM) sample preparation with ultra-high-resolution imaging and analysis. It features an ion beam column for preparing TEM samples and an enhanced electron column with a 14-segment STEM detector for high-resolution 30 kV imaging. The new system achieves high-throughput STEM imaging and analysis for sub-45 nm process control. The company has also released microValidator™, a software package designed to deliver rapid validation of scanning electron microscope (SEM) and X-ray microanalysis (EDS) systems used for automated particle and phase search analysis. The package includes software, an integrated beam current meter, and a substage mount containing standards. All standards are certified, each one serialized, fully characterized, and documented. The microValidator offers three levels of automated testing: SEM, EDS, and combined SEM/EDS checks.
Samples move into position PI (Physik Instrumente) has produced a new range of piezomotor stages and servo controllers for microscopes. The low-profile M-686 open-frame XY piezomotor stages are intended for automated positioning applications, but can also be combined with nanopositioning scanning stages for ultra-high-resolution fluorescence microscopy and three-dimensional imaging.
The piezo motors are self-locking at rest and can travel through a range of 25 mm x 25 mm.
FEI has also introduced the Vitrobot™ Mark IV, a fully automated vitrification device for plunge-freezing colloidal suspensions. It is designed to prevent the cooling and concentration artifacts that are normally seen in ‘open-space’ freezing methods. Temperature, relative humidity, the number of blottings, blotting pressure, and drain time can be programmed for each individual application. The liquid coolant container minimizes contamination risk during transfer, while the isolated container ensures better temperature conditions and a lower consumption rate of liquid coolant.
Contact: www.pi-usa.us
Contact: www.fei.com
The M-686 stages can be operated in closed-loop mode with the new C-866 piezo motor controller/ driver. This controller achieves very short settling times in the millisecond range and can handle speeds of up to 400 mm/s.
SEPTEMBER 2007 | VOLUME 10 | NUMBER 9
63
Larger crystals increase TEM collector efficency
Combined techniques enable analysis at high resolution
The Oxford Instruments NanoAnalysis Si(Li) TEM EDS detector enables microscope users to maximize sample contact angle at the surface and minimize counting time. The larger crystal size in the new 50 mm2 detector results in a two- to three-fold increase in solid angle and collection efficiency compared with standard 30 mm2 detectors. The detector also uses a shutter mechanism that closes when the pulse processor detects a high flux of radiation, protecting the detector against X-ray overload and high-energy backscattered electrons without moving the detector. This results in less wear and tear on the detector’s motor and O-ring seals, reducing the likelihood of a gas leak in the system and the chances of a sample moving between readings. Contact: www.oxford-instruments.com
Hitachi High Technologies has introduced the model HF-3300, a new high-resolution field-emission transmission electron microscope (FE-TEM), able to achieve atomic resolution by combining a cold field-emission electron source and a 300 kV high accelerating voltage. The high accelerating voltage enables stable observation of samples, the results only slightly affected by specimen thickness and composition. The FE-TEM can achieve a lattice resolution of 0.10 nm, a magnification of 200–1 500 000, and a specimen traverse range X, Y = ±1 mm, T = ±15°. Double-biprism electron holography, spatially-resolved electron energy loss spectroscopy (EELS), and nano electron-beam diffraction have been included in the system, in addition to conventional energy dispersive X-ray analysis (EDX) and EELS. These analytical techniques enable elemental, chemical bonding state, and high precision local analysis of crystalline structure, respectively. Contact: www.hitachi-hitec.com/global
Fine line patterning at a low cost The new JBX-5500FS is a low-cost electron beam lithography system from JEOL that can write patterns on substrates with a minimum line width of 10 nm. The JBX-5500FS can be operated in two modes: high resolution with an overlay accuracy of <40 nm at 50 kV, or high speed, giving 1 mm fields at 50 kV or 2 mm fields at 25 kV. The JBX-5500FS can load parts or wafers with substrates up to 100 mm in diameter. Contact: www.jeol.com
Latest software to build up molecules Virtual NanoLab® 1.4 is the latest software release from Atomistix for designing nanoscale structures. Virtual NanoLab® features a molecular builder that allows the user to create molecules based on fundamental chemical properties such as hybridization and bond order. The builder includes a store of up to 70 prebuilt structures that can be used directly in simulations or combined into larger molecules using a database of atomic distances and bond angles, as well as automatic addition of hydrogen atoms. Contact: www.atomistix.com
Dualbeam systems and vitrification devices FEI’s Expida™ 1255S is a wafer DualBeam system that integrates wafer level scanning/transmission electron microscopy (STEM) sample preparation with ultra-high-resolution imaging and analysis. It features an ion beam column for preparing TEM samples and an enhanced electron column with a 14-segment STEM detector for high-resolution 30 kV imaging. The new system achieves high-throughput STEM imaging and analysis for sub-45 nm process control. The company has also released microValidator™, a software package designed to deliver rapid validation of scanning electron microscope (SEM) and X-ray microanalysis (EDS) systems used for automated particle and phase search analysis. The package includes software, an integrated beam current meter, and a substage mount containing standards. All standards are certified, each one serialized, fully characterized, and documented. The microValidator offers three levels of automated testing: SEM, EDS, and combined SEM/EDS checks.
Samples move into position PI (Physik Instrumente) has produced a new range of piezomotor stages and servo controllers for microscopes. The low-profile M-686 open-frame XY piezomotor stages are intended for automated positioning applications, but can also be combined with nanopositioning scanning stages for ultra-high-resolution fluorescence microscopy and three-dimensional imaging.
The piezo motors are self-locking at rest and can travel through a range of 25 mm x 25 mm.
FEI has also introduced the Vitrobot™ Mark IV, a fully automated vitrification device for plunge-freezing colloidal suspensions. It is designed to prevent the cooling and concentration artifacts that are normally seen in ‘open-space’ freezing methods. Temperature, relative humidity, the number of blottings, blotting pressure, and drain time can be programmed for each individual application. The liquid coolant container minimizes contamination risk during transfer, while the isolated container ensures better temperature conditions and a lower consumption rate of liquid coolant.
Contact: www.pi-usa.us
Contact: www.fei.com
The M-686 stages can be operated in closed-loop mode with the new C-866 piezo motor controller/ driver. This controller achieves very short settling times in the millisecond range and can handle speeds of up to 400 mm/s.
SEPTEMBER 2007 | VOLUME 10 | NUMBER 9
63