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Sputtering unit
Vacuurn news
Contents Technical and industrial developments
419
Mini Module sputtering unit - - Digital deposition c o n t r o l l e r - Automated planetary evaporator - - New System 90 from MRC - - Vacuum furnace - - Pennwalt's vacuum cooling plant - - Marshall furnaces
Commercial news
421
Preservation plant for Canterbury - - Manipulator agreement
New literature
422
Summary of Edwards vapour diffusion pumps
Conference and group activities
422
Conferences on: (6th Thin films) Interfacial and surface phenomena - - Laser Interactions - - Ultrahigh vacuum - A p p l i c a t i o n s of auger spectroscopy
Personal
422
Wentgate a p p o i n t m e n t - - R & D manager for Varian
Technical and industrial developments Sputtering unit Vacuum Technology Associates has introduced a completely self-contained sputtering unit called the "Mini Module", which consists of a diffusion pumped chamber, gauging, and direct coupled radio frequency power supply. The unit is available as a table top or floor model. The table top unit is enclosed in approximately a two foot cube. Designed particularly for rf sputter etching of microscopy samples and printed circuits, the unit may also be used for sputter deposition with up to five-inch diameter targets. An ion pumped version is available as well as accessories allowing
"Mini Module" sputtering unit
conversion for use in the dc, biased substrate, and magnetic field enhanced sputtering modes. The company is also offering a complete line of accessory items for ion plating, including ground shielded electrodes, an electron bombardment heated evaporation source, high voltage power supplies, and substrate holders. This equipment may be used with conventional diode, tetrode and other methods of ion plating.
Vacuum Technology Associates Circle number 30 on Reader Enquiry Service card
Digital deposition controller The new Sloan Model 5000 Digital Deposition Controller has a keyboard for the entry of all data and pushbuttons for selection of all functions for fully automated deposition control. Memory circuits allow programming for up to 5 layers from up to 5 different sources. The system features one digit accuracy in all deposition modes; full scale measurement and control from 0 to 999.999 A with automatic range switching and dual thickness setpoints; and deposition rate control from 1.0 to 999 A/sec with 1 A/sec rate resolution full
Sloan's new Model 5000 digital deposition controller 419
Contents Technical and industrial developments
419
Mini Module sputtering unit - - Digital deposition c o n t r o l l e r - Automated planetary evaporator - - New System 90 from MRC - - Vacuum furnace - - Pennwalt's vacuum cooling plant - - Marshall furnaces
Commercial news
421
Preservation plant for Canterbury - - Manipulator agreement
New literature
422
Summary of Edwards vapour diffusion pumps
Conference and group activities
422
Conferences on: (6th Thin films) Interfacial and surface phenomena - - Laser Interactions - - Ultrahigh vacuum - A p p l i c a t i o n s of auger spectroscopy
Personal
422
Wentgate a p p o i n t m e n t - - R & D manager for Varian
Technical and industrial developments Sputtering unit Vacuum Technology Associates has introduced a completely self-contained sputtering unit called the "Mini Module", which consists of a diffusion pumped chamber, gauging, and direct coupled radio frequency power supply. The unit is available as a table top or floor model. The table top unit is enclosed in approximately a two foot cube. Designed particularly for rf sputter etching of microscopy samples and printed circuits, the unit may also be used for sputter deposition with up to five-inch diameter targets. An ion pumped version is available as well as accessories allowing
"Mini Module" sputtering unit
conversion for use in the dc, biased substrate, and magnetic field enhanced sputtering modes. The company is also offering a complete line of accessory items for ion plating, including ground shielded electrodes, an electron bombardment heated evaporation source, high voltage power supplies, and substrate holders. This equipment may be used with conventional diode, tetrode and other methods of ion plating.
Vacuum Technology Associates Circle number 30 on Reader Enquiry Service card
Digital deposition controller The new Sloan Model 5000 Digital Deposition Controller has a keyboard for the entry of all data and pushbuttons for selection of all functions for fully automated deposition control. Memory circuits allow programming for up to 5 layers from up to 5 different sources. The system features one digit accuracy in all deposition modes; full scale measurement and control from 0 to 999.999 A with automatic range switching and dual thickness setpoints; and deposition rate control from 1.0 to 999 A/sec with 1 A/sec rate resolution full
Sloan's new Model 5000 digital deposition controller 419