Stable optofluidic Fabry-Pérot resonator for liquid and gas sensing

Accepted Manuscript Title: Stable Optofluidic Fabry-P´erot Resonator for Liquid and Gas Sensing Authors: Fethi Metehri, Mahmoud Youcef Mahmoud, Ghaouti Bassou, Elodie Richalot, Tarik Bourouina PII: DOI: Reference:

S0924-4247(18)31173-7 https://doi.org/10.1016/j.sna.2018.08.027 SNA 10951

To appear in:

Sensors and Actuators A

Received date: Revised date: Accepted date:

13-7-2018 30-7-2018 15-8-2018

Please cite this article as: Metehri F, Mahmoud MY, Bassou G, Richalot E, Bourouina T, Stable Optofluidic Fabry-P´erot Resonator for Liquid and Gas Sensing, Sensors and amp; Actuators: A. Physical (2018), https://doi.org/10.1016/j.sna.2018.08.027 This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain.

Stable Optofluidic Fabry-Pérot Resonator for Liquid and Gas Sensing Fethi Metehri1, Mahmoud Youcef Mahmoud1, Ghaouti Bassou1, Elodie Richalot2 and Tarik

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Bourouina3 Laboratoire de Microscopie, Microanalyse de la Matière et Spectroscopie Moléculaire,

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Faculté des Sciences Exactes, Université Djilali Liabès de Sidi Bel Abbes, Algérie. 2

Laboratoire ESYCOM, EA2552, UPEM, Université Paris-Est France.

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Laboratoire ESYCOM, EA2552, ESIEE Paris, Université Paris-Est France.

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*Corresponding author: Mahmoud Youcef Mahmoud

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E-mail address: [email protected]

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Tel: +213 6 62 67 29 63

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Highlights  A stable optofluidic Fabry-Pérot (FP) cavity consisting of silicon cylindrical Bragg mirrors combined with a central capillary-tube is investigated.  We investigate the properties of these components numerically through the finite-

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difference time-domain (FDTD) technique with perfectly matched layers (PMLs) absorbing boundary conditions.

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 A sensitivity of 592 nm per refractive index unit (RIU) with a resolution of less than 10-3 is obtained for liquid refractometry.

 For gas refractometry, a sensitivity of 1053 nm per refractive index unit (RIU)

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with a resolution of 5x10-4 is achieved.

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Abstract

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In this paper, a stable optofluidic Fabry-Pérot (FP) resonator consisting of silicon cylindrical Bragg mirrors combined with a central capillary-tube is investigated. The

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cylindrical Bragg mirrors provides an in-plane confinement of light while the central capillary tube full of fluid improves the out-of-plane light confinement. Through the Finite-Difference

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Time-Domain (FDTD) technique with perfectly matched layers (PMLs) absorbing boundary conditions, a sensitivity of 592 nm per refractive index unit (RIU) with a detection limit (DL)

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of less than 10-3 RIU is obtained for liquid refractometry. For gas refractometry, a sensitivity of 1053 nm per refractive index unit (RIU) with a detection limit (DL) of 5x10-4 RIU is achieved. Such sensitivity is, to our knowledge, the highest ever reported for an RI gas refractometer based on stable optofluidic FP resonator. The proposed device has promising

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performances which suggest its potential use in future sensing applications.

Keywords: Cylindrical Bragg mirrors, Fabry-Pérot resonator, stable optofluidic cavity, sensors.

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Introduction Refractive index (RI) liquid and gas sensors have attracted a great deal of attention from

researchers due to their potential uses in biomedical, industrial, environmental and optofluidics applications. They can be used to measure the RI of homogeneous liquids [1] or of single living cell [2], to detect alcohol concentration [3], to monitor temperature / pressure changes [4], and to detect any type of analyte that has a different RI than the carrier gas [5].

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Several techniques can be employed to measure RI such as refraction of light [6] or total internal reflection [7]. Interferometric methods can be implemented as well [8-14], taking advantage of the phase shift upon light propagation that is actually related to the optical path

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and is given by the product of the propagation distance and the refraction index. In all the above-mentioned techniques, special care needs to be taken when the material is a fluid.

Recently, several types of RI liquid / gas sensors have been developed using multiple optical mode waveguides, Mach-Zehnder interferometers, Young Interferometers, micro-ring,

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micro-tube, photonic crystals and FP resonators [15–24]. The latter type of sensors has the

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advantages of simplicity, CMOS compatibility, easy alignment, high sensitivity and high

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resolution [25-28]. Various on-chip FP resonators have been previously reported in the literature. The ones based on straight Bragg mirrors [11, 12] suffers optical losses as the

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cavity length increases, whereas the use of cylindrical Bragg mirrors [28] provides better light manipulation and confinement, and hence improves the finesse of the FP resonator, and

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resonators made of spherical Bragg mirrors benefit from the most stable configuration due to their excellent focusing ability, but are difficult to miniaturize and integrate.

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In our proposed geometry, the parallel mirrors of the FP resonator are spaced by a central microfluidic channel through which the fluid passes, and the sensor mechanism is

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based on the detection of the resonance wavelength shift caused by the physical material properties changes (i.e. the RI changes). Such configuration has been successfully fabricated by our group. It has been used for

the first time in volume refractometry (i.e. liquid sensing) and optical trapping of solid

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particles. More details on the design and fabrication process can be found elsewhere [1]. In this paper, RI liquid / gas sensor based on FP resonator with cylindrical Bragg

mirrors is proposed and numerically studied using the FDTD technique with perfectly matched layers (PMLs) absorbing boundary conditions. This configuration has been used in liquid sensing, but it has not yet, to the best of our knowledge, been used for gas sensing. A

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sensitivity of 1053 nm per refractive index unit (RIU) with a DL of 5x10-4 RIU is achieved which is the highest as compared to the earlier works based on this architecture. 2.

Numerical results and analysis Figure 1 shows the schematic diagram of the proposed optofluidic FP resonator, which

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consists of a single silicon layer per mirror and a central capillary-tube with the fluid inside.

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Figure 1. Schematic diagram of the optofluidic FP resonator based cylindrical mirrors combined with a central capillary-tube (a) (X-Z) cross section, (b) (X-Y) cross section. The cylindrical Bragg mirrors whose radius of curvature is R = 17.5 μm, are made of silicon. The silicon layer has a thickness of 111.4 nm, which corresponds to an odd multiple

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of quarter the central wavelength at the optical communication window, while the resonant wavelength is 1550 nm. The silica micro-tube whose refractive index is 1.47, has outer and inner diameters of 20.0125 μm and 14.4125 μm respectively. The physical cavity length is chosen to be 35 μm which corresponds to the diameter of the cylindrical mirrors. The performance stability of the FP resonator with cylindrical Bragg mirrors shall be investigated by the ray matrix approach [27], while considering the light beam behavior successively decoupled in horizontal (X-Z) and vertical (X-Y) planes. On the other hand, the

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top view (i.e. (X-Z) cross section) and the side view (i.e. (X-Y) cross section) are treated

separately as one-dimensional 1D problem. Thereby, to ensure full stability in both planes,

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two conditions must be satisfied simultaneously. The analysis of the stability criteria can be found more in detail in [28].

As shown in Figure 2, for refractive indices of fluids (i.e. that may be injected into the capillary-tube) ranging from 1 to 2, the stability is assured in both horizontal (X-Z) (thanks to

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the mirrors curvature) and vertical (X-Y) planes (where the capillary-tube permits the beam

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focalization).

Figure 2. Stability parameter versus the refractive index of the fluids inside the capillary tube. As a consequence, the stability is fully guaranteed for the great majority of fluids including gases as their refractive index is close to 1 and liquids as their refractive index starts from 1.26. It should be noted that uncareful choice of the cavity geometrical parameters,

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which affects the stability criteria, may limit the applications of such device to gases only or liquids only. The spectral response of stable and instable FP resonators based cylindrical mirrors combined with a central capillary-tube filled by fluid are obtained using the twodimensional finite difference time domain (2D-FDTD) technique, with perfectly matched layers (PMLs) absorbing boundary conditions [29]. The rigorous analysis of the actual device would require a full 3D analysis, but the later would necessitate enormous calculations resources. However, the 2D approach can give useful indications on the in-plane behaviour. A

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transverse electric (TE) Gaussian beam (corresponding to an electric field polarized along the

Y axis), which is placed at 3 μm from the left side of the FP resonator and covering the whole

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frequency range of interest, is launched at the excitation port. Transmitted power is placed at the collection port, at the same distance of 3 μm from the right side of the FP resonator. The

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transmitted spectral power density is obtained after Fourier-transformation.

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Figure 3. The spectral responses of the instable and stable FP resonator based cylindrical mirrors combined with a central capillary-tube. In the instable case, the liquid RI is of 2.3 whereas it is of 1.32 in the stable case. The transmitted spectral power density is normalized to the incident light spectral power density at the excitation port. The spectral responses for the two cases are displayed in Figure

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3 as red and blue lines respectively. As shown in Figure 3, significant difference over the whole range of interest can be noticed. With the instable FP resonator (whose fluid’ RI is outside the proposed range as mentioned above), isolated peaks of small amplitude are observed. The stable FP resonator improves the spectral selectivity and enhances the output power. In this later case, resonances correspond to the excitation of the higher order modes (m = 2, n = 0, q = 50-52) indicated in dark cyan color, also referred as Hermite-Gaussian modes in addition to the fundamental Gaussian modes (m = 0, n = 0, q = 52-54) in black color are

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observed. Note that the group (m, n, q) refer to the transverse mode order, the mode order and

the longitudinal mode order respectively, which are characteristics of optical resonator made

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of cylindrical mirrors [30]. One can also notice from this figure that both fundamental Gaussian and transverse modes have approximately the same finesse F, defined as the ratio

between the free spectral range (FSR) and the full width at half maximum (FWHM) of the resonance.

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The electric field snapshots of the FP resonator based on cylindrical mirrors with

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micro capillary-tube filled by DI (deionized) water at the resonant wavelengths of the fundamental (m = 0, n = 0, q = 53) and higher order Hermites-Gaussian modes (m = 2, n = 0,

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q = 52) are shown in Figures 4(a) and (b) respectively.

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Figure 4. Electric field snapshots of the FP resonator based on cylindrical mirrors with micro capillary-tube filled by DI water at the resonance wavelengths (a) the fundamental Gaussian

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mode order (m = 0, n = 0, q = 53) at the resonance wavelength 1586.96 nm, (b) the higher mode order (m = 2, n = 0, q = 52) at the resonance wavelength 1570.00 nm. It can be clearly seen from figure 4 that the light is well collimated by the FP resonator based on cylindrical mirrors which makes it suitable for both liquid and gas refractometry as described below.

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Figure 5. (a) The spectral responses of the FP resonator based cylindrical mirrors with tube filled by test liquids for (0,0,52) cavity mode. (b) The resonance wavelength shift of (0,0,52) cavity mode versus the refractive index of the test liquid.

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In order to use the proposed configuration as liquid refractometer, liquids whose refractive indices ranging from 1.4 to 1.408 are injected into the FP resonator through the central microfluidic channel. Simulated spectral responses after injecting these liquids are presented in Figure 5(a). One can notice that the resonance wavelength given by the peak position increases while increasing the RI of the considered liquid. This red shift of the peak wavelength is associated to a very low decrease of the peak amplitude when the liquid RI increases.

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According to the obtained results, we conclude that the resonances’ conditions are modified as the RI of the test liquid is modified.

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The linear window indicated in the Figure 5(a) (i.e. the linear region) as dashed lines,

corresponds to the slope at specified wavelengths which remains constant for the proposed range of RI.

The relation between the resonance wavelength and the RI of the inserted liquid in the

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FP resonator based on cylindrical mirrors is shown in Figure 5(b). A sensitivity of 592

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nm/RIU with a DL of less than 10-3 RIU is obtained for a refractive index of 1.4. We have to

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mention that the DL characterizes the minimum detectable RI change (i.e. DL = Δnmin). It can be defined as DL = R / S [31] where R and S are the sensor resolution and sensitivity,

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respectively. In other words, the present device can detect variations of Δn = 2. 10-3. Such sensitivity is lower than obtained by Chin et al for an optofluidic FP resonator based liquid

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microlenses (S = 981nm/RIU) [32], but higher than obtained by Zhou et al for a liquid refractometer based on reflective smf-small diameter (S = 349.5nm/RIU) [33]. Note that the

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obtained sensitivity which is acceptable for our application can be improved by further optimization process such as increasing / decreasing the radius of mirrors, the cavity length,

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the outer / inner diameters of the capillary-tube and the RI of the mirrors. Based on the result shown above and with the aim of demonstrating the ability of the

proposed device to be used as gas refractometer, gases with different refractive indices are introduced into the cavity through the micro capillary-tube. As a reference, the ambiant air

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whose RI is 1.000292 is injected to establish the baseline of the refractometer upon the resonance wavelength shift caused by the gases RI changes. As depicted in Figure 7(a), the peak maximum wavelength is shifted to longer wavelengths as the gas RI increases from 1.000292 to 1.0022. The relationship between the resonant wavelength shifts in regard to ambiant air and the gas RI is illustrated in Figure 7(b).

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Figure 7. (a) The spectral responses of the FP resonator based cylindrical mirrors with micro capillary-tube filled by test gas. (b) The resonance wavelength shift (in regard to ambiant air) versus the refractive index of the test gas.

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We observe a constant shift of 0.526 nm for every increase of 0.0005 in the RI so that a linear dependence on the gas RI changes is obtained. A sensitivity of 1053 nm per refractive index unit (RIU) with a DL of 5x10-4 RIU is achieved. Assuming in experiment that the sensor resolution R is around 1 pm, the DL is estimated to be 1x10-6 RIU. With such DL, we believe that ultra low concentrations of gas analyte can be detected. As compared to the earlier reported gas sensors [20-24] [4], [12], such sensitivity is, to

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our knowledge, the highest ever reported for a RI gas refractometer based FP resonator with cylindrical mirrors. Table 1 compares the reported RI gas refractomter with our proposed device.

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Table I Summary of different RI gas refractometers Structure type

Sensitivity(nm/RIU)

Reference

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Heterostructure Cavity

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[24]

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Ln Slot Photonic Crystal Microcavity

421

[22]

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Photonic Crystal Micro-Cavity

433

[21]

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Ring-shaped Photonic Crystal

513

[20]

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Fabry-Pérot

812.5

[23]

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Fabry-Pérot

1053

Our work

Conclusions

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In this paper, a stable FP resonator based on cylindrical mirrors separated by a micro

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capillary-tube guiding the tested fluid is proposed for liquid / gas sensing and numerically studied through the Finite Difference Time Domain (FDTD) technique with perfectly matched

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layers (PMLs) absorbing boundary conditions. For refractive indices ranging from 1.4 to 1.408, a sensitivity of 592 nm/RIU with a detection limit of 2.10-3 RIU is obtained. As gas refractometer, a sensitivity of 1053 nm/RIU with a detection limit of 5.10-4 RIU can be

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achieved, which to our knowledge is the highest ever reported based FP resonator with cylindrical Bragg mirrors. The proposed device has the advantages of simplicity, CMOS compatibility and high sensitivity, which could be used in the future sensing applications. Acknowledgment The present work was supported by the Ministry of Higher Education and Scientific Research of Algeria.

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Fethi Metehri received the M.Sc. degree in electronics from the University Djilali liabès of Sidi Bel Abbes, Algeria, in 2011. He is a permanent researcher at the department of Space Instrumentation at Space in Algeria. He is currently working toward the Ph.D. degree in physics at the University Djilali liabès of Sidi Bel Abbes. His research interests focus on the design of optical devices for vibration sensing.

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Mahmoud Youcef Mahmoud was born in 1976. He received the M.Sc. degree in electronics from the University Djilali liabès of Sidi Bel Abbes, Algeria, in 2005, the Doctorat

(Ph.D. degree) in physics from the University Djilali liabès of Sidi Bel Abbes, Algeria,

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in 2010, and the Habilitation à Diriger les Recherches degree from the University Djilali

liabès of Sidi Bel Abbes, Algeria in 2013. His current research interests include optofluidics, sensing and design of photonic devices.

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Ghaouti Bassou received the M.Sc. degree in physics from the University of Tlemcen,

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Algeria, in 1980, the Diplôme d’Etudes Approfondies in electronics from the INP of Toulouse, France, in 1981, the Doctorat 3ème cycle from the INP of Toulouse, France,

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in 1984, (Ph.D. degree) and the Habilitation à Diriger les Recherches degree from the

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University Djilali liabès of Sidi Bel Abbes, Algeria, in 2001. He is currently a Professor at the University Djilali liabès of Sidi Bel Abbes, Algeria. His research interests include

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photonic crystals, optical near field microscopy, microelectronics, scanning electron microscopy and microanalysis.

Elodie Richalot received the Diploma and Ph.D. degree in electronics engineering from the Nationale

Superieure

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Ecole

d’Electronique,

d’Electrotechnique,

d’Informatique,

et

d’Hydraulique de Toulouse, Toulouse, France, in 1995 and 1998, respectively. Since 1998,

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she has been with the University of Marne-la-Vallee, Champs-sur-Marne, France, where she became a professor in electronics in 2010. Her current research interests include modeling techniques, sensors, electromagnetic compatibility and millimeter wave devices.

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Tarik Bourouina holds M.Sc. in Physics, M.Eng. in Optoelectronics, Ph.D. in MEMS (1991), and HDR (2000) from Université Paris-Sud, Orsay. His entire career was devoted to the field of MEMS and Lab-On-Chip. He started research at ESIEE Paris in 1988 on MEMS microphones and acoustic gyroscopes. More recently, he had several contributions in optical MEMS, among which the smallest MEMS-based FTIR Optical Spectrometer, jointly developed with Si-Ware-System and Hamamatsu Photonics, awarded the Prism award on

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photonics innovation in 2014. Among his contributions to the scientific community, Dr. Bourouina served in the Technical Program Committee of IEEE MEMS from 2012 to 2013. He is now serving as an Editor in two journals of Nature Publishing Group;“Light: Science and Applications” and “Microsystems and Nanoengineering, in partnership with the Chinese Academy of Science. Dr. Bourouina took several positions in France and in Japan, at the Université Paris-Sud, at the French National Center for Scientific Research (CNRS) and at The University of Tokyo. Since 2002 Dr. Bourouina is full Professor at ESIEE Paris,

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Université Paris-Est, appointed as Dean for Research from 2012 to 2015. His current interests

include optofluidics, analytical chemistry on-chip, seeking new opportunities for MEMS in

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the areas of Sustainable Environment and Smart-Cities.

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