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Subject Index of Volume 193
Surface & Coatings Technology 193 (2005) 377 – 383 www.elsevier.com/locate/surfcoat
Subject Index of Volume 193
Ablation Preparation of nanometer thin films with intense pulsed electron beam ablation, 325 AC bias Adhesion improvement of the diamond film in diamond-coated WC–Co insert prepared with AC substrate bias, 234 a-C:H:N films Effects of nitrogen incorporation on structure of a-C:H films deposited on polycarbonate by plasma CVD, 283 Adhesion Adhesion properties of Cu/Cr films on polyimide substrate treated by dielectric barrier discharge plasma, 101 Adhesion Adhesion improvement of the diamond film in diamond-coated WC–Co insert prepared with AC substrate bias, 234 Adhesion Characteristics of atmospheric pressure N2 cold plasma torch using 60-Hz AC power and its application to polymer surface modification, 319 Air plasma spray High-temperature oxidation of NiCrAlY/(ZrO2–Y2O3 and ZrO2–CeO2– Y2O3) composite coatings, 239 AISI 304L Corrosion behaviour of plasma sprayed coatings, 297 AISI H13 steel Mechanical properties of TiNx /Cr1 x N thin films on plasma nitridingassisted AISI H13 steel, 55 Al2O3 Galvanic corrosion properties of differently PVD-treated magnesium die cast alloy AZ91, 223 Amorphous diamond-like carbon Investigation of DLC synthesized by plasma immersion ion implantation and deposition, 206 Application Thin film solar cell technology in Germany, 329 Atmospheric pressure Sterilization of Escherichia coli and MRSA using microwave-induced argon plasma at atmospheric pressure, 35 Atmospheric pressure Characteristics of atmospheric pressure N2 cold plasma torch using 60-Hz AC power and its application to polymer surface modification, 319 Atmospheric pressure glow (APG) Plasma sterilization using glow discharge at atmospheric pressure, 29 Austenitic stainless steel Plasma-based low-energy ion implantation of austenitic stainless steel for improvement in wear and corrosion resistance, 22
doi:10.1016 /S0257-8972(05)00066-6
Austenitic stainless steel Behavior of carbon in low temperature plasma nitriding layer of austenitic stainless steel, 309 AZ91 Investigation of the macroscopic and microscopic electrochemical corrosion behaviour of PVD-coated magnesium die cast alloy AZ91, 179 AZ91 Galvanic corrosion properties of differently PVD-treated magnesium die cast alloy AZ91, 223 Bacillus atrophaeus Plasma sterilization using glow discharge at atmospheric pressure, 29 Band parameters Prediction of phase change in pseudobinary transition metal aluminum nitrides by band parameters method, 185 Band parameters Characterization of Zr–Al–N films synthesized by a magnetron sputtering method, 219 BON Oxidation of BON and Si-DLC thin films, 288 Bonding strength Characteristics of atmospheric pressure N2 cold plasma torch using 60-Hz AC power and its application to polymer surface modification, 319 Brass A study of plasma oxidation effects on the passive layer synthesis for the corrosion resistance of (a+h) brass, 243 Bulk modulus Prediction of phase change in pseudobinary transition metal aluminum nitrides by band parameters method, 185 Capacitively coupled plasma Study on the mode transitions for rf power dissipation in capacitively coupled plasma, 81 Carbon nitride The effect of r.f. substrate bias on the properties of carbon nitride films produced by an inductively coupled plasma chemical vapor deposition, 152 Carburizing Behavior of carbon in low temperature plasma nitriding layer of austenitic stainless steel, 309 Cathodic arc method Effects of nitrogen concentration on microstructures of WNX films synthesized by cathodic arc method, 372 CFUBMS Properties of TiAlN coatings synthesized by closed-field unbalanced magnetron sputtering, 213
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Subject Index of Volume 193
Chrome Adhesion properties of Cu/Cr films on polyimide substrate treated by dielectric barrier discharge plasma, 101 C–N films Hemocompatibility of C–N films fabricated by ion beam assisted deposition, 361 Coated tool wear Fractal dimension analysis of machined surface depending on coated tool wear, 259 Coating Comparison of tribological behaviour of TiN, TiCN and CrN at elevated temperatures, 192 Coating High-temperature oxidation of NiCrAlY/(ZrO2–Y2O3 and ZrO2–CeO2– Y2O3) composite coatings, 239 Composition Plasma-based low-energy ion implantation of austenitic stainless steel for improvement in wear and corrosion resistance, 22 Conventional Annealing temperature dependence on magnetoresistance of single and dual specular spin valve, 272 Corrosion Plasma-based low-energy ion implantation of austenitic stainless steel for improvement in wear and corrosion resistance, 22 Corrosion Friction and wear of DLC films on magnesium alloy, 277 Corrosion Corrosion behaviour of plasma sprayed coatings, 297 Corrosion properties Galvanic corrosion properties of differently PVD-treated magnesium die cast alloy AZ91, 223 Corrosion resistance A study of plasma oxidation effects on the passive layer synthesis for the corrosion resistance of (a+h) brass, 243 Crater A possible thermodynamic mechanism of craters formation on metal surfaces caused by intense pulsed ion beams, 69 CrN Galvanic corrosion properties of differently PVD-treated magnesium die cast alloy AZ91, 223 (Cr,Si)N Structural analysis of (Cr1 x Six )N coatings and tribological property in water environment, 167 CVD The effect of the substrate bias voltage and the deposition pressure on the properties of diamond-like carbon produced by inductively coupled plasma assisted chemical vapor deposition, 256 Deposition TiN deposition and ion current distribution for trench target by plasmabased ion implantation and deposition, 17 Deposition rate Reactive magnetron sputtering of TiOx films, 107 Diamond coatings Hardness measurement of CVD diamond coatings on SiC substrates, 200 Diamond film Adhesion improvement of the diamond film in diamond-coated WC–Co insert prepared with AC substrate bias, 234 Diamond-like carbon The effect of the substrate bias voltage and the deposition pressure on the properties of diamond-like carbon produced by inductively coupled plasma assisted chemical vapor deposition, 255 Dielectric barrier discharge Adhesion properties of Cu/Cr films on polyimide substrate treated by dielectric barrier discharge plasma, 101
Difficult-to-cut material Cutting performance of Ti–Al–Si–N-coated tool by a hybrid-coating system for high-hardened materials, 249 Diffusion Annealing temperature dependence on magnetoresistance of single and dual specular spin valve, 272 Diffusion Behavior of carbon in low temperature plasma nitriding layer of austenitic stainless steel, 309 DLC Friction and wear of DLC films on magnesium alloy, 277 Dual magnetron Reactive magnetron sputtering of TiOx films, 107 Dual specular spin valve Annealing temperature dependence on magnetoresistance of single and dual specular spin valve, 272 Ductile–brittle transition Ductile–brittle transition behaviors for the W-films-deposited stainless steel before and after hydrogen ion irradiation, 117 Duplex technology Plasma-ion beam source enhanced deposition system, 112 Duplex treatment Mechanical properties of TiNx /Cr1 x N thin films on plasma nitridingassisted AISI H13 steel, 55 Duplex treatment Application of the duplex TiN coatings to improve the tribological properties of Electro Hydrostatic Actuator pump parts, 266 Dust particles in plasma Some fundamental problems of pulse biased arc ion plating, 1
ECM Improvement of fibroblast adherence to titanium surface by calcium phosphate coating formed with IBAD, 366 ECR plasma Production of low electron temperature ECR plasma, 11 ECR plasma Gas mixture ratio dependence of ion temperature in ECR plasma, 147 EHA system Application of the duplex TiN coatings to improve the tribological properties of Electro Hydrostatic Actuator pump parts, 266 Electrochemical Comparison of nanometer-scale gold structures electrodeposited on Au and Pt seed electrode, 137 Electrochemical corrosion behaviour Investigation of the macroscopic and microscopic electrochemical corrosion behaviour of PVD-coated magnesium die cast alloy AZ91, 178 Electrode Comparison of nanometer-scale gold structures electrodeposited on Au and Pt seed electrode, 137 Electrodeposition Oxidation of Ni–W coatings at 700 and 800 8C in air, 292 Electron impact cross section Production of low electron temperature ECR plasma, 11 Electron temperature control Production of low electron temperature ECR plasma, 11 Electroplating Comparison of nanometer-scale gold structures electrodeposited on Au and Pt seed electrode, 137 Elevated temperature Comparison of tribological behaviour of TiN, TiCN and CrN at elevated temperatures, 192 Epitaxial growth Growth and characterization of MAX-phase thin films, 6
Subject Index of Volume 193 Escherichia coli Sterilization of Escherichia coli and MRSA using microwave-induced argon plasma at atmospheric pressure, 35 External magnetic field Synthesis of WC–Ni films using an arc ion plating system with attached solenoid coil, 303 Faceting Improvement of SiO2 pattern profiles etched in CF4 and SF6 plasmas by using a Faraday cage and neutral beams, 75 Faraday cage Improvement of SiO2 pattern profiles etched in CF4 and SF6 plasmas by using a Faraday cage and neutral beams, 75 Film Studies of the discharge properties of unbalanced magnetron sputtering system, 46 Film Preparation of nanometer thin films with intense pulsed electron beam ablation, 325 Focal adhesion plaque Improvement of fibroblast adherence to titanium surface by calcium phosphate coating formed with IBAD, 366 Fractal dimension Fractal dimension analysis of machined surface depending on coated tool wear, 259 Friction Temperature dependence of tribological properties of MoS2 and MoSe2 coatings, 230 Friction Friction and wear of DLC films on magnesium alloy, 277 Galvanic corrosion Galvanic corrosion properties of differently PVD-treated magnesium die cast alloy AZ91, 223 GaN The structural and morphological characteristics of 90 keV Mn+ ion implanted GaN films, 157 Geobacillus stearothermophilus Plasma sterilization using glow discharge at atmospheric pressure, 29 Hard coating Plasma-ion beam source enhanced deposition system, 112 Hardness Prediction of phase change in pseudobinary transition metal aluminum nitrides by band parameters method, 185 Hardness Hardness measurement of CVD diamond coatings on SiC substrates, 200 Hardness Properties of TiAlN coatings synthesized by closed-field unbalanced magnetron sputtering, 213 Hardness Characterization of Zr–Al–N films synthesized by a magnetron sputtering method, 219 Hardness Structure and properties of Ti–Si–N films prepared by ICP assisted magnetron sputtering, 345 Hemocompatibility Hemocompatibility of C–N films fabricated by ion beam assisted deposition, 361 High density plasma Etching characterization of shaped hole high density plasma for using MEMS devices, 314 High-speed end milling Fractal dimension analysis of machined surface depending on coated tool wear, 259
379
High-speed machining Cutting performance of Ti–Al–Si–N-coated tool by a hybrid-coating system for high-hardened materials, 249 Hole Etching characterization of shaped hole high density plasma for using MEMS devices, 314 Human dermal fibroblast Plasma surface modification of poly (d,l-lactic-co-glycolic acid) (65/35) film for tissue engineering, 60 Hybrid-coating system Cutting performance of Ti–Al–Si–N-coated tool by a hybrid-coating system for high-hardened materials, 249 Hydrophobic Low-temperature plasma treatment for hydrophobicity improvement of silk, 356 Hysteresis effect Reactive magnetron sputtering of TiOx films, 107
IBAD Hemocompatibility of C–N films fabricated by ion beam assisted deposition, 361 IBAD, cell attachment Improvement of fibroblast adherence to titanium surface by calcium phosphate coating formed with IBAD, 366 Impact test Mechanical properties of TiNx /Cr1 x N thin films on plasma nitridingassisted AISI H13 steel, 55 Inductively coupled plasma The effect of the substrate bias voltage and the deposition pressure on the properties of diamond-like carbon produced by inductively coupled plasma assisted chemical vapor deposition, 255 Inductively coupled plasma Structure and properties of Ti–Si–N films prepared by ICP assisted magnetron sputtering, 345 Inductively coupled plasma (ICP) The effect of r.f. substrate bias on the properties of carbon nitride films produced by an inductively coupled plasma chemical vapor deposition, 152 Industrial application MEVVA ion source development and its industrial applications at Beijing Normal University, 65 In-process monitoring Fractal dimension analysis of machined surface depending on coated tool wear, 259 Intense pulsed electron beam Preparation of nanometer thin films with intense pulsed electron beam ablation, 325 Intense pulsed ion beam A possible thermodynamic mechanism of craters formation on metal surfaces caused by intense pulsed ion beams, 69 Ion beam technique Ductile–brittle transition behaviors for the W-films-deposited stainless steel before and after hydrogen ion irradiation, 117 Ion implantation The structural and morphological characteristics of 90 keV Mn+ ion implanted GaN films, 157 Ion sheath TiN deposition and ion current distribution for trench target by plasmabased ion implantation and deposition, 17 Ion temperature Gas mixture ratio dependence of ion temperature in ECR plasma, 147 Iron Study of the transition from oxidation to nitriding in a single N2–H2–O2 post-discharge, 132
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Subject Index of Volume 193
316L Hemocompatibility of C–N films fabricated by ion beam assisted deposition, 361 Low-frequency RF PAMOCVD Enhanced hardness in two-layer a-BON/nc-SiC coating prepared by plasma-assisted MOCVD and thermal MOCVD, 163 Magnesium Galvanic corrosion properties of differently PVD-treated magnesium die cast alloy AZ91, 223 Magnesium alloy Friction and wear of DLC films on magnesium alloy, 277 Magnetic null plasma Magnetic null discharge sputtering with full target erosion, 123 Magnetic-mirror confinement Production of low electron temperature ECR plasma, 11 Magnetron Studies of the discharge properties of unbalanced magnetron sputtering system, 46 Magnetron sputtering Growth and characterization of MAX-phase thin films, 6 Manganese Metallurgical characteristics of the plasma (ion)-carburized layer of austenitic stainless steel SUS316L, 50 Market Growth Thin film solar cell technology in Germany, 329 MAX-phases Growth and characterization of MAX-phase thin films, 6 MEMS device Etching characterization of shaped hole high density plasma for using MEMS devices, 314 Metal A possible thermodynamic mechanism of craters formation on metal surfaces caused by intense pulsed ion beams, 69 Methicillin-resistant Staphylococcus aureus Sterilization of Escherichia coli and MRSA using microwave-induced argon plasma at atmospheric pressure, 35 Methylcyclohexane Growth of plasma-polymerized thin films by PECVD method and study on their surface and optical characteristics, 142 Mevva ion source MEVVA ion source development and its industrial applications at Beijing Normal University, 65 Micro-hardness Effects of nitrogen concentration on microstructures of WNX films synthesized by cathodic arc method, 372 Microstucture Properties of TiAlN coatings synthesized by closed-field unbalanced magnetron sputtering, 213 Microstructure Corrosion behaviour of plasma sprayed coatings, 297 Microstructure Effects of nitrogen concentration on microstructures of WNX films synthesized by cathodic arc method, 372 Microstructure control Behavior of carbon in low temperature plasma nitriding layer of austenitic stainless steel, 309 Microwave frequency Production of low electron temperature ECR plasma, 11 Microwave-induced argon plasma Sterilization of Escherichia coli and MRSA using microwave-induced argon plasma at atmospheric pressure, 35 MoS2 Temperature dependence of tribological properties of MoS2 and MoSe2 coatings, 230
MoSe2 Temperature dependence of tribological properties of MoS2 and MoSe2 coatings, 230 Multilayer coatings Tribological properties of unbalanced magnetron sputtered nano-scale multilayer coatings TiAlN/VN and TiAlCrYN deposited on plasma nitrided steels, 39 Multilayered a-BON/nc-SiC thin films Enhanced hardness in two-layer a-BON/nc-SiC coating prepared by plasma-assisted MOCVD and thermal MOCVD, 163
N2 cold plasma Characteristics of atmospheric pressure N2 cold plasma torch using 60-Hz AC power and its application to polymer surface modification, 319 N2/Ar plasma Gas mixture ratio dependence of ion temperature in ECR plasma, 147 Nanocomposite Effects of annealing on the microstructure and electrical properties of TaN-Cu nanocomposite thin films, 173 Nanocomposite Cutting performance of Ti–Al–Si–N-coated tool by a hybrid-coating system for high-hardened materials, 249 Nanocomposite film Structure and properties of Ti–Si–N films prepared by ICP assisted magnetron sputtering, 345 Nanoindentation Hardness measurement of CVD diamond coatings on SiC substrates, 200 Nanostructure Comparison of nanometer-scale gold structures electrodeposited on Au and Pt seed electrode, 137 Neutral beam Improvement of SiO2 pattern profiles etched in CF4 and SF6 plasmas by using a Faraday cage and neutral beams, 75 Neutral loop discharge Magnetic null discharge sputtering with full target erosion, 123 NEXAFS Structural and optical properties of silver-doped zinc oxide sputtered films, 340 Nickel Oxidation of Ni–W coatings at 700 and 800 8C in air, 292 NiCrAlY High-temperature oxidation of NiCrAlY/(ZrO2–Y2O3 and ZrO2–CeO2– Y2O3) composite coatings, 239 NiTi Hemocompatibility of C–N films fabricated by ion beam assisted deposition, 361 Nitriding Study of the transition from oxidation to nitriding in a single N2–H2–O2 post-discharge, 132 Nitrogen incorporation Effects of nitrogen incorporation on structure of a-C:H films deposited on polycarbonate by plasma CVD, 283 Non-transferred plasma torch Performance of an atmospheric plasma torch with various inlet angles, 94 Nozzle Performance of an atmospheric plasma torch with various inlet angles, 94 Nusselt number Effects of showerhead shapes on the flowfields in a RF-PECVD reactor, 88
Subject Index of Volume 193 O2/Ar plasma Gas mixture ratio dependence of ion temperature in ECR plasma, 147 Optical data storage A semiconducting thermooptic material for potential application to super-resolution optical data storage, 335 Optical emission spectroscopy Gas mixture ratio dependence of ion temperature in ECR plasma, 147 Optical properties Structural and optical properties of silver-doped zinc oxide sputtered films, 340 Organic polymerization Growth of plasma-polymerized thin films by PECVD method and study on their surface and optical characteristics, 142 Oscillating ball-on-disc friction Investigation of DLC synthesized by plasma immersion ion implantation and deposition, 206 Oscillations in biased arc plasma circuit Some fundamental problems of pulse biased arc ion plating, 1 Oxidation Study of the transition from oxidation to nitriding in a single N2–H2–O2 post-discharge, 132 Oxidation High-temperature oxidation of NiCrAlY/(ZrO2–Y2O3 and ZrO2–CeO2– Y2O3) composite coatings, 239 Oxidation Oxidation of BON and Si-DLC thin films, 288 Oxidation Oxidation of Ni–W coatings at 700 and 800 8C in air, 292 Passive layer A study of plasma oxidation effects on the passive layer synthesis for the corrosion resistance of (a+h) brass, 243 PbTe A semiconducting thermooptic material for potential application to super-resolution optical data storage, 335 PECVD Growth of plasma-polymerized thin films by PECVD method and study on their surface and optical characteristics, 142 PECVD reactor Effects of showerhead shapes on the flowfields in a RF-PECVD reactor, 88 Performance Plasma-ion beam source enhanced deposition system, 112 Phase change Prediction of phase change in pseudobinary transition metal aluminum nitrides by band parameters method, 185 Phase change Characterization of Zr–Al–N films synthesized by a magnetron sputtering method, 219 Phase composition Reactive magnetron sputtering of TiOx films, 107 Photolithography Comparison of nanometer-scale gold structures electrodeposited on Au and Pt seed electrode, 137 Plasma Studies of the discharge properties of unbalanced magnetron sputtering system, 46 Plasma carburizing Metallurgical characteristics of the plasma (ion)-carburized layer of austenitic stainless steel SUS316L, 50 Plasma CVD Friction and wear of DLC films on magnesium alloy, 277 Plasma distribution Performance of an atmospheric plasma torch with various inlet angles, 94
381
Plasma enhanced deposition Plasma-ion beam source enhanced deposition system, 112 Plasma etching Improvement of SiO2 pattern profiles etched in CF4 and SF6 plasmas by using a Faraday cage and neutral beams, 75 Plasma ion implantation and bias voltage Influence of bias voltage on the growth of films by hybrid plasma ion implantation/deposition, 129 Plasma nitriding Application of the duplex TiN coatings to improve the tribological properties of Electro Hydrostatic Actuator pump parts, 266 Plasma oxidation A study of plasma oxidation effects on the passive layer synthesis for the corrosion resistance of (a+h) brass, 243 Plasma oxynitridation Investigation of plasma oxynitridation of Si(001) by NH3/N2O/Ar remote plasma processing, 350 Plasma sheath Some fundamental problems of pulse biased arc ion plating, 1 Plasma source ion nitriding Plasma-based low-energy ion implantation of austenitic stainless steel for improvement in wear and corrosion resistance, 22 Plasma sprayed coatings Corrosion behaviour of plasma sprayed coatings, 297 Plasma sterilization Plasma sterilization using glow discharge at atmospheric pressure, 29 Plasma treatment Plasma surface modification of poly (d,l-lactic-co-glycolic acid) (65/35) film for tissue engineering, 60 Plasma treatment Low-temperature plasma treatment for hydrophobicity improvement of silk, 356 Plasma-based ion implantation TiN deposition and ion current distribution for trench target by plasmabased ion implantation and deposition, 17 Plasma-based low-energy ion implantation Plasma-based low-energy ion implantation of austenitic stainless steel for improvement in wear and corrosion resistance, 22 Plasma-enhanced chemical vapor deposition (PECVD) Effects of nitrogen incorporation on structure of a-C:H films deposited on polycarbonate by plasma CVD, 283 PLGA film Plasma surface modification of poly (d,l-lactic-co-glycolic acid) (65/35) film for tissue engineering, 60 Polycarbonate Effects of nitrogen incorporation on structure of a-C:H films deposited on polycarbonate by plasma CVD, 283 Polyimide Adhesion properties of Cu/Cr films on polyimide substrate treated by dielectric barrier discharge plasma, 101 Polypropylene Characteristics of atmospheric pressure N2 cold plasma torch using 60-Hz AC power and its application to polymer surface modification, 319 Porosity Corrosion behaviour of plasma sprayed coatings, 297 Post-discharge Study of the transition from oxidation to nitriding in a single N2–H2–O2 post-discharge, 132 Pseudobinary nitride Prediction of phase change in pseudobinary transition metal aluminum nitrides by band parameters method, 185 Pulse plasma A study of plasma oxidation effects on the passive layer synthesis for the corrosion resistance of (a+h) brass, 243
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Subject Index of Volume 193
Pulsed cathodic arc Influence of bias voltage on the growth of films by hybrid plasma ion implantation/deposition, 129 Pulsed plasma nitriding Tribological properties of unbalanced magnetron sputtered nano-scale multilayer coatings TiAlN/VN and TiAlCrYN deposited on plasma nitrided steels, 39 PVD Tribological properties of unbalanced magnetron sputtered nano-scale multilayer coatings TiAlN/VN and TiAlCrYN deposited on plasma nitrided steels, 39 PVD Investigation of the macroscopic and microscopic electrochemical corrosion behaviour of PVD-coated magnesium die cast alloy AZ91, 178 PVD Galvanic corrosion properties of differently PVD-treated magnesium die cast alloy AZ91, 223 PVD process Growth and characterization of MAX-phase thin films, 6 Raman spectroscopy Investigation of DLC synthesized by plasma immersion ion implantation and deposition, 206 Rat cortical neural cell Plasma surface modification of poly (d,l-lactic-co-glycolic acid) (65/35) film for tissue engineering, 60 Reactive sputtering Reactive magnetron sputtering of TiOx films, 107 Remote plasma Investigation of plasma oxynitridation of Si(001) by NH3/N2O/Ar remote plasma processing, 350 Research activities Thin film solar cell technology in Germany, 329 rf Magnetron sputtering Structural and optical properties of silver-doped zinc oxide sputtered films, 340 RGR Effects of showerhead shapes on the flowfields in a RF-PECVD reactor, 88 SF6 plasma Low-temperature plasma treatment for hydrophobicity improvement of silk, 356 Sherwood number Effects of showerhead shapes on the flowfields in a RF-PECVD reactor, 88 Showerhead Effects of showerhead shapes on the flowfields in a RF-PECVD reactor, 88 Si content Structural analysis of (Cr1 x Six )N coatings and tribological property in water environment, 167 Si-DLC Oxidation of BON and Si-DLC thin films, 288 Silicon dry etching Etching characterization of shaped hole high density plasma for using MEMS devices, 314 Silicon oxynitride Investigation of plasma oxynitridation of Si(001) by NH3/N2O/Ar remote plasma processing, 350 Silk Low-temperature plasma treatment for hydrophobicity improvement of silk, 356 Silver-doped ZnO (SZO) film Structural and optical properties of silver-doped zinc oxide sputtered films, 340
Solenoid coil Synthesis of WC–Ni films using an arc ion plating system with attached solenoid coil, 303 Solid lubricant coatings Temperature dependence of tribological properties of MoS2 and MoSe2 coatings, 230 Specular Annealing temperature dependence on magnetoresistance of single and dual specular spin valve, 272 Sputtering Magnetic null discharge sputtering with full target erosion, 123 Sputtering Structure and properties of Ti–Si–N films prepared by ICP assisted magnetron sputtering, 345 Sterilization Sterilization of Escherichia coli and MRSA using microwave-induced argon plasma at atmospheric pressure, 35 Stribeck curve Application of the duplex TiN coatings to improve the tribological properties of Electro Hydrostatic Actuator pump parts, 266 Structural properties Structural and optical properties of silver-doped zinc oxide sputtered films, 340 Structure Plasma-based low-energy ion implantation of austenitic stainless steel for improvement in wear and corrosion resistance, 22 Structure and morphology The structural and morphological characteristics of 90 keV Mn+ ion implanted GaN films, 157 Substrate self bias The effect of r.f. substrate bias on the properties of carbon nitride films produced by an inductively coupled plasma chemical vapor deposition, 152 Superhardness Enhanced hardness in two-layer a-BON/nc-SiC coating prepared by plasma-assisted MOCVD and thermal MOCVD, 162 Superresolution A semiconducting thermooptic material for potential application to super-resolution optical data storage, 335 Surface improvement Behavior of carbon in low temperature plasma nitriding layer of austenitic stainless steel, 309 Surface roughness Fractal dimension analysis of machined surface depending on coated tool wear, 259 Surface treatment Study of the transition from oxidation to nitriding in a single N2–H2–O2 post-discharge, 132 SUS316L Metallurgical characteristics of the plasma (ion)-carburized layer of austenitic stainless steel SUS316L, 50 Susceptor Effects of showerhead shapes on the flowfields in a RF-PECVD reactor, 88 Swirl effect Performance of an atmospheric plasma torch with various inlet angles, 94
TaN-Cu Effects of annealing on the microstructure and electrical properties of TaN-Cu nanocomposite thin films, 173 Target erosion Magnetic null discharge sputtering with full target erosion, 123 TCP/HA Improvement of fibroblast adherence to titanium surface by calcium phosphate coating formed with IBAD, 366
Subject Index of Volume 193 Technology Thin film solar cell technology in Germany, 329 Temperature coefficient of resistivity Effects of annealing on the microstructure and electrical properties of TaN-Cu nanocomposite thin films, 173 Thermal MOCVD Enhanced hardness in two-layer a-BON/nc-SiC coating prepared by plasma-assisted MOCVD and thermal MOCVD, 162 Thermodynamic nature of vapor deposition Some fundamental problems of pulse biased arc ion plating, 1 Thermoelectric A semiconducting thermooptic material for potential application to super-resolution optical data storage, 335 Thermooptic A semiconducting thermooptic material for potential application to super-resolution optical data storage, 335 Thin film Oxidation of BON and Si-DLC thin films, 288 Thin film solar cells Thin film solar cell technology in Germany, 329 Thin-film resistor Effects of annealing on the microstructure and electrical properties of TaN-Cu nanocomposite thin films, 173 Ti3SiC2 Growth and characterization of MAX-phase thin films, 6 TiAlN films Properties of TiAlN coatings synthesized by closed-field unbalanced magnetron sputtering, 213 TiN TiN deposition and ion current distribution for trench target by plasmabased ion implantation and deposition, 17 TiN coating Application of the duplex TiN coatings to improve the tribological properties of Electro Hydrostatic Actuator pump parts, 266 TiNx /Cr1 x N thin film Mechanical properties of TiNx /Cr1 x N thin films on plasma nitridingassisted AISI H13 steel, 55 TiOx films Reactive magnetron sputtering of TiOx films, 107 Tissue engineering Plasma surface modification of poly (d,l-lactic-co-glycolic acid) (65/35) film for tissue engineering, 60 Tool wear Cutting performance of Ti–Al–Si–N-coated tool by a hybrid-coating system for high-hardened materials, 249 Tribological property Structural analysis of (Cr1 x Six )N coatings and tribological property in water environment, 167 Tribology Comparison of tribological behaviour of TiN, TiCN and CrN at elevated temperatures, 192 Tungsten Oxidation of Ni–W coatings at 700 and 800 8C in air, 292 Tungsten nitride Effects of nitrogen concentration on microstructures of WNX films synthesized by cathodic arc method, 372 UBM Structural analysis of (Cr1 x Six )N coatings and tribological property in water environment, 167 UBMS Properties of TiAlN coatings synthesized by closed-field unbalanced magnetron sputtering, 213
383
Unbalanced magnetron sputtering Mechanical properties of TiNx /Cr1 x N thin films on plasma nitridingassisted AISI H13 steel, 55 Uphill diffusion Metallurgical characteristics of the plasma (ion)-carburized layer of austenitic stainless steel SUS316L, 50 Vacancy A possible thermodynamic mechanism of craters formation on metal surfaces caused by intense pulsed ion beams, 69 Vickers microhardness tester Hardness measurement of CVD diamond coatings on SiC substrates, 200 Void A possible thermodynamic mechanism of craters formation on metal surfaces caused by intense pulsed ion beams, 69 Volatilization Metallurgical characteristics of the plasma (ion)-carburized layer of austenitic stainless steel SUS316L, 50 W films Ductile–brittle transition behaviors for the W-films-deposited stainless steel before and after hydrogen ion irradiation, 117 Water environment Structural analysis of (Cr1 x Six )N coatings and tribological property in water environment, 167 WC–Co insert Adhesion improvement of the diamond film in diamond-coated WC–Co insert prepared with AC substrate bias, 234 WC–Ni Synthesis of WC–Ni films using an arc ion plating system with attached solenoid coil, 303 Wear Plasma-based low-energy ion implantation of austenitic stainless steel for improvement in wear and corrosion resistance, 22 Wear Friction and wear of DLC films on magnesium alloy, 277 Wear mechanisms Tribological properties of unbalanced magnetron sputtered nano-scale multilayer coatings TiAlN/VN and TiAlCrYN deposited on plasma nitrided steels, 39 Wear resistance Tribological properties of unbalanced magnetron sputtered nano-scale multilayer coatings TiAlN/VN and TiAlCrYN deposited on plasma nitrided steels, 39 Wear test Application of the duplex TiN coatings to improve the tribological properties of Electro Hydrostatic Actuator pump parts, 267 XRD Structural analysis of (Cr1 x Six )N coatings and tribological property in water environment, 167 Zirconia High-temperature oxidation of NiCrAlY/(ZrO2–Y2O3 and ZrO2–CeO2– Y2O3) composite coatings, 239 Zr–Al–N system Characterization of Zr–Al–N films synthesized by a magnetron sputtering method, 219
Subject Index of Volume 193
Ablation Preparation of nanometer thin films with intense pulsed electron beam ablation, 325 AC bias Adhesion improvement of the diamond film in diamond-coated WC–Co insert prepared with AC substrate bias, 234 a-C:H:N films Effects of nitrogen incorporation on structure of a-C:H films deposited on polycarbonate by plasma CVD, 283 Adhesion Adhesion properties of Cu/Cr films on polyimide substrate treated by dielectric barrier discharge plasma, 101 Adhesion Adhesion improvement of the diamond film in diamond-coated WC–Co insert prepared with AC substrate bias, 234 Adhesion Characteristics of atmospheric pressure N2 cold plasma torch using 60-Hz AC power and its application to polymer surface modification, 319 Air plasma spray High-temperature oxidation of NiCrAlY/(ZrO2–Y2O3 and ZrO2–CeO2– Y2O3) composite coatings, 239 AISI 304L Corrosion behaviour of plasma sprayed coatings, 297 AISI H13 steel Mechanical properties of TiNx /Cr1 x N thin films on plasma nitridingassisted AISI H13 steel, 55 Al2O3 Galvanic corrosion properties of differently PVD-treated magnesium die cast alloy AZ91, 223 Amorphous diamond-like carbon Investigation of DLC synthesized by plasma immersion ion implantation and deposition, 206 Application Thin film solar cell technology in Germany, 329 Atmospheric pressure Sterilization of Escherichia coli and MRSA using microwave-induced argon plasma at atmospheric pressure, 35 Atmospheric pressure Characteristics of atmospheric pressure N2 cold plasma torch using 60-Hz AC power and its application to polymer surface modification, 319 Atmospheric pressure glow (APG) Plasma sterilization using glow discharge at atmospheric pressure, 29 Austenitic stainless steel Plasma-based low-energy ion implantation of austenitic stainless steel for improvement in wear and corrosion resistance, 22
doi:10.1016 /S0257-8972(05)00066-6
Austenitic stainless steel Behavior of carbon in low temperature plasma nitriding layer of austenitic stainless steel, 309 AZ91 Investigation of the macroscopic and microscopic electrochemical corrosion behaviour of PVD-coated magnesium die cast alloy AZ91, 179 AZ91 Galvanic corrosion properties of differently PVD-treated magnesium die cast alloy AZ91, 223 Bacillus atrophaeus Plasma sterilization using glow discharge at atmospheric pressure, 29 Band parameters Prediction of phase change in pseudobinary transition metal aluminum nitrides by band parameters method, 185 Band parameters Characterization of Zr–Al–N films synthesized by a magnetron sputtering method, 219 BON Oxidation of BON and Si-DLC thin films, 288 Bonding strength Characteristics of atmospheric pressure N2 cold plasma torch using 60-Hz AC power and its application to polymer surface modification, 319 Brass A study of plasma oxidation effects on the passive layer synthesis for the corrosion resistance of (a+h) brass, 243 Bulk modulus Prediction of phase change in pseudobinary transition metal aluminum nitrides by band parameters method, 185 Capacitively coupled plasma Study on the mode transitions for rf power dissipation in capacitively coupled plasma, 81 Carbon nitride The effect of r.f. substrate bias on the properties of carbon nitride films produced by an inductively coupled plasma chemical vapor deposition, 152 Carburizing Behavior of carbon in low temperature plasma nitriding layer of austenitic stainless steel, 309 Cathodic arc method Effects of nitrogen concentration on microstructures of WNX films synthesized by cathodic arc method, 372 CFUBMS Properties of TiAlN coatings synthesized by closed-field unbalanced magnetron sputtering, 213
378
Subject Index of Volume 193
Chrome Adhesion properties of Cu/Cr films on polyimide substrate treated by dielectric barrier discharge plasma, 101 C–N films Hemocompatibility of C–N films fabricated by ion beam assisted deposition, 361 Coated tool wear Fractal dimension analysis of machined surface depending on coated tool wear, 259 Coating Comparison of tribological behaviour of TiN, TiCN and CrN at elevated temperatures, 192 Coating High-temperature oxidation of NiCrAlY/(ZrO2–Y2O3 and ZrO2–CeO2– Y2O3) composite coatings, 239 Composition Plasma-based low-energy ion implantation of austenitic stainless steel for improvement in wear and corrosion resistance, 22 Conventional Annealing temperature dependence on magnetoresistance of single and dual specular spin valve, 272 Corrosion Plasma-based low-energy ion implantation of austenitic stainless steel for improvement in wear and corrosion resistance, 22 Corrosion Friction and wear of DLC films on magnesium alloy, 277 Corrosion Corrosion behaviour of plasma sprayed coatings, 297 Corrosion properties Galvanic corrosion properties of differently PVD-treated magnesium die cast alloy AZ91, 223 Corrosion resistance A study of plasma oxidation effects on the passive layer synthesis for the corrosion resistance of (a+h) brass, 243 Crater A possible thermodynamic mechanism of craters formation on metal surfaces caused by intense pulsed ion beams, 69 CrN Galvanic corrosion properties of differently PVD-treated magnesium die cast alloy AZ91, 223 (Cr,Si)N Structural analysis of (Cr1 x Six )N coatings and tribological property in water environment, 167 CVD The effect of the substrate bias voltage and the deposition pressure on the properties of diamond-like carbon produced by inductively coupled plasma assisted chemical vapor deposition, 256 Deposition TiN deposition and ion current distribution for trench target by plasmabased ion implantation and deposition, 17 Deposition rate Reactive magnetron sputtering of TiOx films, 107 Diamond coatings Hardness measurement of CVD diamond coatings on SiC substrates, 200 Diamond film Adhesion improvement of the diamond film in diamond-coated WC–Co insert prepared with AC substrate bias, 234 Diamond-like carbon The effect of the substrate bias voltage and the deposition pressure on the properties of diamond-like carbon produced by inductively coupled plasma assisted chemical vapor deposition, 255 Dielectric barrier discharge Adhesion properties of Cu/Cr films on polyimide substrate treated by dielectric barrier discharge plasma, 101
Difficult-to-cut material Cutting performance of Ti–Al–Si–N-coated tool by a hybrid-coating system for high-hardened materials, 249 Diffusion Annealing temperature dependence on magnetoresistance of single and dual specular spin valve, 272 Diffusion Behavior of carbon in low temperature plasma nitriding layer of austenitic stainless steel, 309 DLC Friction and wear of DLC films on magnesium alloy, 277 Dual magnetron Reactive magnetron sputtering of TiOx films, 107 Dual specular spin valve Annealing temperature dependence on magnetoresistance of single and dual specular spin valve, 272 Ductile–brittle transition Ductile–brittle transition behaviors for the W-films-deposited stainless steel before and after hydrogen ion irradiation, 117 Duplex technology Plasma-ion beam source enhanced deposition system, 112 Duplex treatment Mechanical properties of TiNx /Cr1 x N thin films on plasma nitridingassisted AISI H13 steel, 55 Duplex treatment Application of the duplex TiN coatings to improve the tribological properties of Electro Hydrostatic Actuator pump parts, 266 Dust particles in plasma Some fundamental problems of pulse biased arc ion plating, 1
ECM Improvement of fibroblast adherence to titanium surface by calcium phosphate coating formed with IBAD, 366 ECR plasma Production of low electron temperature ECR plasma, 11 ECR plasma Gas mixture ratio dependence of ion temperature in ECR plasma, 147 EHA system Application of the duplex TiN coatings to improve the tribological properties of Electro Hydrostatic Actuator pump parts, 266 Electrochemical Comparison of nanometer-scale gold structures electrodeposited on Au and Pt seed electrode, 137 Electrochemical corrosion behaviour Investigation of the macroscopic and microscopic electrochemical corrosion behaviour of PVD-coated magnesium die cast alloy AZ91, 178 Electrode Comparison of nanometer-scale gold structures electrodeposited on Au and Pt seed electrode, 137 Electrodeposition Oxidation of Ni–W coatings at 700 and 800 8C in air, 292 Electron impact cross section Production of low electron temperature ECR plasma, 11 Electron temperature control Production of low electron temperature ECR plasma, 11 Electroplating Comparison of nanometer-scale gold structures electrodeposited on Au and Pt seed electrode, 137 Elevated temperature Comparison of tribological behaviour of TiN, TiCN and CrN at elevated temperatures, 192 Epitaxial growth Growth and characterization of MAX-phase thin films, 6
Subject Index of Volume 193 Escherichia coli Sterilization of Escherichia coli and MRSA using microwave-induced argon plasma at atmospheric pressure, 35 External magnetic field Synthesis of WC–Ni films using an arc ion plating system with attached solenoid coil, 303 Faceting Improvement of SiO2 pattern profiles etched in CF4 and SF6 plasmas by using a Faraday cage and neutral beams, 75 Faraday cage Improvement of SiO2 pattern profiles etched in CF4 and SF6 plasmas by using a Faraday cage and neutral beams, 75 Film Studies of the discharge properties of unbalanced magnetron sputtering system, 46 Film Preparation of nanometer thin films with intense pulsed electron beam ablation, 325 Focal adhesion plaque Improvement of fibroblast adherence to titanium surface by calcium phosphate coating formed with IBAD, 366 Fractal dimension Fractal dimension analysis of machined surface depending on coated tool wear, 259 Friction Temperature dependence of tribological properties of MoS2 and MoSe2 coatings, 230 Friction Friction and wear of DLC films on magnesium alloy, 277 Galvanic corrosion Galvanic corrosion properties of differently PVD-treated magnesium die cast alloy AZ91, 223 GaN The structural and morphological characteristics of 90 keV Mn+ ion implanted GaN films, 157 Geobacillus stearothermophilus Plasma sterilization using glow discharge at atmospheric pressure, 29 Hard coating Plasma-ion beam source enhanced deposition system, 112 Hardness Prediction of phase change in pseudobinary transition metal aluminum nitrides by band parameters method, 185 Hardness Hardness measurement of CVD diamond coatings on SiC substrates, 200 Hardness Properties of TiAlN coatings synthesized by closed-field unbalanced magnetron sputtering, 213 Hardness Characterization of Zr–Al–N films synthesized by a magnetron sputtering method, 219 Hardness Structure and properties of Ti–Si–N films prepared by ICP assisted magnetron sputtering, 345 Hemocompatibility Hemocompatibility of C–N films fabricated by ion beam assisted deposition, 361 High density plasma Etching characterization of shaped hole high density plasma for using MEMS devices, 314 High-speed end milling Fractal dimension analysis of machined surface depending on coated tool wear, 259
379
High-speed machining Cutting performance of Ti–Al–Si–N-coated tool by a hybrid-coating system for high-hardened materials, 249 Hole Etching characterization of shaped hole high density plasma for using MEMS devices, 314 Human dermal fibroblast Plasma surface modification of poly (d,l-lactic-co-glycolic acid) (65/35) film for tissue engineering, 60 Hybrid-coating system Cutting performance of Ti–Al–Si–N-coated tool by a hybrid-coating system for high-hardened materials, 249 Hydrophobic Low-temperature plasma treatment for hydrophobicity improvement of silk, 356 Hysteresis effect Reactive magnetron sputtering of TiOx films, 107
IBAD Hemocompatibility of C–N films fabricated by ion beam assisted deposition, 361 IBAD, cell attachment Improvement of fibroblast adherence to titanium surface by calcium phosphate coating formed with IBAD, 366 Impact test Mechanical properties of TiNx /Cr1 x N thin films on plasma nitridingassisted AISI H13 steel, 55 Inductively coupled plasma The effect of the substrate bias voltage and the deposition pressure on the properties of diamond-like carbon produced by inductively coupled plasma assisted chemical vapor deposition, 255 Inductively coupled plasma Structure and properties of Ti–Si–N films prepared by ICP assisted magnetron sputtering, 345 Inductively coupled plasma (ICP) The effect of r.f. substrate bias on the properties of carbon nitride films produced by an inductively coupled plasma chemical vapor deposition, 152 Industrial application MEVVA ion source development and its industrial applications at Beijing Normal University, 65 In-process monitoring Fractal dimension analysis of machined surface depending on coated tool wear, 259 Intense pulsed electron beam Preparation of nanometer thin films with intense pulsed electron beam ablation, 325 Intense pulsed ion beam A possible thermodynamic mechanism of craters formation on metal surfaces caused by intense pulsed ion beams, 69 Ion beam technique Ductile–brittle transition behaviors for the W-films-deposited stainless steel before and after hydrogen ion irradiation, 117 Ion implantation The structural and morphological characteristics of 90 keV Mn+ ion implanted GaN films, 157 Ion sheath TiN deposition and ion current distribution for trench target by plasmabased ion implantation and deposition, 17 Ion temperature Gas mixture ratio dependence of ion temperature in ECR plasma, 147 Iron Study of the transition from oxidation to nitriding in a single N2–H2–O2 post-discharge, 132
380
Subject Index of Volume 193
316L Hemocompatibility of C–N films fabricated by ion beam assisted deposition, 361 Low-frequency RF PAMOCVD Enhanced hardness in two-layer a-BON/nc-SiC coating prepared by plasma-assisted MOCVD and thermal MOCVD, 163 Magnesium Galvanic corrosion properties of differently PVD-treated magnesium die cast alloy AZ91, 223 Magnesium alloy Friction and wear of DLC films on magnesium alloy, 277 Magnetic null plasma Magnetic null discharge sputtering with full target erosion, 123 Magnetic-mirror confinement Production of low electron temperature ECR plasma, 11 Magnetron Studies of the discharge properties of unbalanced magnetron sputtering system, 46 Magnetron sputtering Growth and characterization of MAX-phase thin films, 6 Manganese Metallurgical characteristics of the plasma (ion)-carburized layer of austenitic stainless steel SUS316L, 50 Market Growth Thin film solar cell technology in Germany, 329 MAX-phases Growth and characterization of MAX-phase thin films, 6 MEMS device Etching characterization of shaped hole high density plasma for using MEMS devices, 314 Metal A possible thermodynamic mechanism of craters formation on metal surfaces caused by intense pulsed ion beams, 69 Methicillin-resistant Staphylococcus aureus Sterilization of Escherichia coli and MRSA using microwave-induced argon plasma at atmospheric pressure, 35 Methylcyclohexane Growth of plasma-polymerized thin films by PECVD method and study on their surface and optical characteristics, 142 Mevva ion source MEVVA ion source development and its industrial applications at Beijing Normal University, 65 Micro-hardness Effects of nitrogen concentration on microstructures of WNX films synthesized by cathodic arc method, 372 Microstucture Properties of TiAlN coatings synthesized by closed-field unbalanced magnetron sputtering, 213 Microstructure Corrosion behaviour of plasma sprayed coatings, 297 Microstructure Effects of nitrogen concentration on microstructures of WNX films synthesized by cathodic arc method, 372 Microstructure control Behavior of carbon in low temperature plasma nitriding layer of austenitic stainless steel, 309 Microwave frequency Production of low electron temperature ECR plasma, 11 Microwave-induced argon plasma Sterilization of Escherichia coli and MRSA using microwave-induced argon plasma at atmospheric pressure, 35 MoS2 Temperature dependence of tribological properties of MoS2 and MoSe2 coatings, 230
MoSe2 Temperature dependence of tribological properties of MoS2 and MoSe2 coatings, 230 Multilayer coatings Tribological properties of unbalanced magnetron sputtered nano-scale multilayer coatings TiAlN/VN and TiAlCrYN deposited on plasma nitrided steels, 39 Multilayered a-BON/nc-SiC thin films Enhanced hardness in two-layer a-BON/nc-SiC coating prepared by plasma-assisted MOCVD and thermal MOCVD, 163
N2 cold plasma Characteristics of atmospheric pressure N2 cold plasma torch using 60-Hz AC power and its application to polymer surface modification, 319 N2/Ar plasma Gas mixture ratio dependence of ion temperature in ECR plasma, 147 Nanocomposite Effects of annealing on the microstructure and electrical properties of TaN-Cu nanocomposite thin films, 173 Nanocomposite Cutting performance of Ti–Al–Si–N-coated tool by a hybrid-coating system for high-hardened materials, 249 Nanocomposite film Structure and properties of Ti–Si–N films prepared by ICP assisted magnetron sputtering, 345 Nanoindentation Hardness measurement of CVD diamond coatings on SiC substrates, 200 Nanostructure Comparison of nanometer-scale gold structures electrodeposited on Au and Pt seed electrode, 137 Neutral beam Improvement of SiO2 pattern profiles etched in CF4 and SF6 plasmas by using a Faraday cage and neutral beams, 75 Neutral loop discharge Magnetic null discharge sputtering with full target erosion, 123 NEXAFS Structural and optical properties of silver-doped zinc oxide sputtered films, 340 Nickel Oxidation of Ni–W coatings at 700 and 800 8C in air, 292 NiCrAlY High-temperature oxidation of NiCrAlY/(ZrO2–Y2O3 and ZrO2–CeO2– Y2O3) composite coatings, 239 NiTi Hemocompatibility of C–N films fabricated by ion beam assisted deposition, 361 Nitriding Study of the transition from oxidation to nitriding in a single N2–H2–O2 post-discharge, 132 Nitrogen incorporation Effects of nitrogen incorporation on structure of a-C:H films deposited on polycarbonate by plasma CVD, 283 Non-transferred plasma torch Performance of an atmospheric plasma torch with various inlet angles, 94 Nozzle Performance of an atmospheric plasma torch with various inlet angles, 94 Nusselt number Effects of showerhead shapes on the flowfields in a RF-PECVD reactor, 88
Subject Index of Volume 193 O2/Ar plasma Gas mixture ratio dependence of ion temperature in ECR plasma, 147 Optical data storage A semiconducting thermooptic material for potential application to super-resolution optical data storage, 335 Optical emission spectroscopy Gas mixture ratio dependence of ion temperature in ECR plasma, 147 Optical properties Structural and optical properties of silver-doped zinc oxide sputtered films, 340 Organic polymerization Growth of plasma-polymerized thin films by PECVD method and study on their surface and optical characteristics, 142 Oscillating ball-on-disc friction Investigation of DLC synthesized by plasma immersion ion implantation and deposition, 206 Oscillations in biased arc plasma circuit Some fundamental problems of pulse biased arc ion plating, 1 Oxidation Study of the transition from oxidation to nitriding in a single N2–H2–O2 post-discharge, 132 Oxidation High-temperature oxidation of NiCrAlY/(ZrO2–Y2O3 and ZrO2–CeO2– Y2O3) composite coatings, 239 Oxidation Oxidation of BON and Si-DLC thin films, 288 Oxidation Oxidation of Ni–W coatings at 700 and 800 8C in air, 292 Passive layer A study of plasma oxidation effects on the passive layer synthesis for the corrosion resistance of (a+h) brass, 243 PbTe A semiconducting thermooptic material for potential application to super-resolution optical data storage, 335 PECVD Growth of plasma-polymerized thin films by PECVD method and study on their surface and optical characteristics, 142 PECVD reactor Effects of showerhead shapes on the flowfields in a RF-PECVD reactor, 88 Performance Plasma-ion beam source enhanced deposition system, 112 Phase change Prediction of phase change in pseudobinary transition metal aluminum nitrides by band parameters method, 185 Phase change Characterization of Zr–Al–N films synthesized by a magnetron sputtering method, 219 Phase composition Reactive magnetron sputtering of TiOx films, 107 Photolithography Comparison of nanometer-scale gold structures electrodeposited on Au and Pt seed electrode, 137 Plasma Studies of the discharge properties of unbalanced magnetron sputtering system, 46 Plasma carburizing Metallurgical characteristics of the plasma (ion)-carburized layer of austenitic stainless steel SUS316L, 50 Plasma CVD Friction and wear of DLC films on magnesium alloy, 277 Plasma distribution Performance of an atmospheric plasma torch with various inlet angles, 94
381
Plasma enhanced deposition Plasma-ion beam source enhanced deposition system, 112 Plasma etching Improvement of SiO2 pattern profiles etched in CF4 and SF6 plasmas by using a Faraday cage and neutral beams, 75 Plasma ion implantation and bias voltage Influence of bias voltage on the growth of films by hybrid plasma ion implantation/deposition, 129 Plasma nitriding Application of the duplex TiN coatings to improve the tribological properties of Electro Hydrostatic Actuator pump parts, 266 Plasma oxidation A study of plasma oxidation effects on the passive layer synthesis for the corrosion resistance of (a+h) brass, 243 Plasma oxynitridation Investigation of plasma oxynitridation of Si(001) by NH3/N2O/Ar remote plasma processing, 350 Plasma sheath Some fundamental problems of pulse biased arc ion plating, 1 Plasma source ion nitriding Plasma-based low-energy ion implantation of austenitic stainless steel for improvement in wear and corrosion resistance, 22 Plasma sprayed coatings Corrosion behaviour of plasma sprayed coatings, 297 Plasma sterilization Plasma sterilization using glow discharge at atmospheric pressure, 29 Plasma treatment Plasma surface modification of poly (d,l-lactic-co-glycolic acid) (65/35) film for tissue engineering, 60 Plasma treatment Low-temperature plasma treatment for hydrophobicity improvement of silk, 356 Plasma-based ion implantation TiN deposition and ion current distribution for trench target by plasmabased ion implantation and deposition, 17 Plasma-based low-energy ion implantation Plasma-based low-energy ion implantation of austenitic stainless steel for improvement in wear and corrosion resistance, 22 Plasma-enhanced chemical vapor deposition (PECVD) Effects of nitrogen incorporation on structure of a-C:H films deposited on polycarbonate by plasma CVD, 283 PLGA film Plasma surface modification of poly (d,l-lactic-co-glycolic acid) (65/35) film for tissue engineering, 60 Polycarbonate Effects of nitrogen incorporation on structure of a-C:H films deposited on polycarbonate by plasma CVD, 283 Polyimide Adhesion properties of Cu/Cr films on polyimide substrate treated by dielectric barrier discharge plasma, 101 Polypropylene Characteristics of atmospheric pressure N2 cold plasma torch using 60-Hz AC power and its application to polymer surface modification, 319 Porosity Corrosion behaviour of plasma sprayed coatings, 297 Post-discharge Study of the transition from oxidation to nitriding in a single N2–H2–O2 post-discharge, 132 Pseudobinary nitride Prediction of phase change in pseudobinary transition metal aluminum nitrides by band parameters method, 185 Pulse plasma A study of plasma oxidation effects on the passive layer synthesis for the corrosion resistance of (a+h) brass, 243
382
Subject Index of Volume 193
Pulsed cathodic arc Influence of bias voltage on the growth of films by hybrid plasma ion implantation/deposition, 129 Pulsed plasma nitriding Tribological properties of unbalanced magnetron sputtered nano-scale multilayer coatings TiAlN/VN and TiAlCrYN deposited on plasma nitrided steels, 39 PVD Tribological properties of unbalanced magnetron sputtered nano-scale multilayer coatings TiAlN/VN and TiAlCrYN deposited on plasma nitrided steels, 39 PVD Investigation of the macroscopic and microscopic electrochemical corrosion behaviour of PVD-coated magnesium die cast alloy AZ91, 178 PVD Galvanic corrosion properties of differently PVD-treated magnesium die cast alloy AZ91, 223 PVD process Growth and characterization of MAX-phase thin films, 6 Raman spectroscopy Investigation of DLC synthesized by plasma immersion ion implantation and deposition, 206 Rat cortical neural cell Plasma surface modification of poly (d,l-lactic-co-glycolic acid) (65/35) film for tissue engineering, 60 Reactive sputtering Reactive magnetron sputtering of TiOx films, 107 Remote plasma Investigation of plasma oxynitridation of Si(001) by NH3/N2O/Ar remote plasma processing, 350 Research activities Thin film solar cell technology in Germany, 329 rf Magnetron sputtering Structural and optical properties of silver-doped zinc oxide sputtered films, 340 RGR Effects of showerhead shapes on the flowfields in a RF-PECVD reactor, 88 SF6 plasma Low-temperature plasma treatment for hydrophobicity improvement of silk, 356 Sherwood number Effects of showerhead shapes on the flowfields in a RF-PECVD reactor, 88 Showerhead Effects of showerhead shapes on the flowfields in a RF-PECVD reactor, 88 Si content Structural analysis of (Cr1 x Six )N coatings and tribological property in water environment, 167 Si-DLC Oxidation of BON and Si-DLC thin films, 288 Silicon dry etching Etching characterization of shaped hole high density plasma for using MEMS devices, 314 Silicon oxynitride Investigation of plasma oxynitridation of Si(001) by NH3/N2O/Ar remote plasma processing, 350 Silk Low-temperature plasma treatment for hydrophobicity improvement of silk, 356 Silver-doped ZnO (SZO) film Structural and optical properties of silver-doped zinc oxide sputtered films, 340
Solenoid coil Synthesis of WC–Ni films using an arc ion plating system with attached solenoid coil, 303 Solid lubricant coatings Temperature dependence of tribological properties of MoS2 and MoSe2 coatings, 230 Specular Annealing temperature dependence on magnetoresistance of single and dual specular spin valve, 272 Sputtering Magnetic null discharge sputtering with full target erosion, 123 Sputtering Structure and properties of Ti–Si–N films prepared by ICP assisted magnetron sputtering, 345 Sterilization Sterilization of Escherichia coli and MRSA using microwave-induced argon plasma at atmospheric pressure, 35 Stribeck curve Application of the duplex TiN coatings to improve the tribological properties of Electro Hydrostatic Actuator pump parts, 266 Structural properties Structural and optical properties of silver-doped zinc oxide sputtered films, 340 Structure Plasma-based low-energy ion implantation of austenitic stainless steel for improvement in wear and corrosion resistance, 22 Structure and morphology The structural and morphological characteristics of 90 keV Mn+ ion implanted GaN films, 157 Substrate self bias The effect of r.f. substrate bias on the properties of carbon nitride films produced by an inductively coupled plasma chemical vapor deposition, 152 Superhardness Enhanced hardness in two-layer a-BON/nc-SiC coating prepared by plasma-assisted MOCVD and thermal MOCVD, 162 Superresolution A semiconducting thermooptic material for potential application to super-resolution optical data storage, 335 Surface improvement Behavior of carbon in low temperature plasma nitriding layer of austenitic stainless steel, 309 Surface roughness Fractal dimension analysis of machined surface depending on coated tool wear, 259 Surface treatment Study of the transition from oxidation to nitriding in a single N2–H2–O2 post-discharge, 132 SUS316L Metallurgical characteristics of the plasma (ion)-carburized layer of austenitic stainless steel SUS316L, 50 Susceptor Effects of showerhead shapes on the flowfields in a RF-PECVD reactor, 88 Swirl effect Performance of an atmospheric plasma torch with various inlet angles, 94
TaN-Cu Effects of annealing on the microstructure and electrical properties of TaN-Cu nanocomposite thin films, 173 Target erosion Magnetic null discharge sputtering with full target erosion, 123 TCP/HA Improvement of fibroblast adherence to titanium surface by calcium phosphate coating formed with IBAD, 366
Subject Index of Volume 193 Technology Thin film solar cell technology in Germany, 329 Temperature coefficient of resistivity Effects of annealing on the microstructure and electrical properties of TaN-Cu nanocomposite thin films, 173 Thermal MOCVD Enhanced hardness in two-layer a-BON/nc-SiC coating prepared by plasma-assisted MOCVD and thermal MOCVD, 162 Thermodynamic nature of vapor deposition Some fundamental problems of pulse biased arc ion plating, 1 Thermoelectric A semiconducting thermooptic material for potential application to super-resolution optical data storage, 335 Thermooptic A semiconducting thermooptic material for potential application to super-resolution optical data storage, 335 Thin film Oxidation of BON and Si-DLC thin films, 288 Thin film solar cells Thin film solar cell technology in Germany, 329 Thin-film resistor Effects of annealing on the microstructure and electrical properties of TaN-Cu nanocomposite thin films, 173 Ti3SiC2 Growth and characterization of MAX-phase thin films, 6 TiAlN films Properties of TiAlN coatings synthesized by closed-field unbalanced magnetron sputtering, 213 TiN TiN deposition and ion current distribution for trench target by plasmabased ion implantation and deposition, 17 TiN coating Application of the duplex TiN coatings to improve the tribological properties of Electro Hydrostatic Actuator pump parts, 266 TiNx /Cr1 x N thin film Mechanical properties of TiNx /Cr1 x N thin films on plasma nitridingassisted AISI H13 steel, 55 TiOx films Reactive magnetron sputtering of TiOx films, 107 Tissue engineering Plasma surface modification of poly (d,l-lactic-co-glycolic acid) (65/35) film for tissue engineering, 60 Tool wear Cutting performance of Ti–Al–Si–N-coated tool by a hybrid-coating system for high-hardened materials, 249 Tribological property Structural analysis of (Cr1 x Six )N coatings and tribological property in water environment, 167 Tribology Comparison of tribological behaviour of TiN, TiCN and CrN at elevated temperatures, 192 Tungsten Oxidation of Ni–W coatings at 700 and 800 8C in air, 292 Tungsten nitride Effects of nitrogen concentration on microstructures of WNX films synthesized by cathodic arc method, 372 UBM Structural analysis of (Cr1 x Six )N coatings and tribological property in water environment, 167 UBMS Properties of TiAlN coatings synthesized by closed-field unbalanced magnetron sputtering, 213
383
Unbalanced magnetron sputtering Mechanical properties of TiNx /Cr1 x N thin films on plasma nitridingassisted AISI H13 steel, 55 Uphill diffusion Metallurgical characteristics of the plasma (ion)-carburized layer of austenitic stainless steel SUS316L, 50 Vacancy A possible thermodynamic mechanism of craters formation on metal surfaces caused by intense pulsed ion beams, 69 Vickers microhardness tester Hardness measurement of CVD diamond coatings on SiC substrates, 200 Void A possible thermodynamic mechanism of craters formation on metal surfaces caused by intense pulsed ion beams, 69 Volatilization Metallurgical characteristics of the plasma (ion)-carburized layer of austenitic stainless steel SUS316L, 50 W films Ductile–brittle transition behaviors for the W-films-deposited stainless steel before and after hydrogen ion irradiation, 117 Water environment Structural analysis of (Cr1 x Six )N coatings and tribological property in water environment, 167 WC–Co insert Adhesion improvement of the diamond film in diamond-coated WC–Co insert prepared with AC substrate bias, 234 WC–Ni Synthesis of WC–Ni films using an arc ion plating system with attached solenoid coil, 303 Wear Plasma-based low-energy ion implantation of austenitic stainless steel for improvement in wear and corrosion resistance, 22 Wear Friction and wear of DLC films on magnesium alloy, 277 Wear mechanisms Tribological properties of unbalanced magnetron sputtered nano-scale multilayer coatings TiAlN/VN and TiAlCrYN deposited on plasma nitrided steels, 39 Wear resistance Tribological properties of unbalanced magnetron sputtered nano-scale multilayer coatings TiAlN/VN and TiAlCrYN deposited on plasma nitrided steels, 39 Wear test Application of the duplex TiN coatings to improve the tribological properties of Electro Hydrostatic Actuator pump parts, 267 XRD Structural analysis of (Cr1 x Six )N coatings and tribological property in water environment, 167 Zirconia High-temperature oxidation of NiCrAlY/(ZrO2–Y2O3 and ZrO2–CeO2– Y2O3) composite coatings, 239 Zr–Al–N system Characterization of Zr–Al–N films synthesized by a magnetron sputtering method, 219