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Subject index of volume 246
Thin Solid Films, 246 (1994) 179-181
179
Subject Index of Volume 246 Adhesion relation between adhesion and friction forces across thin films, 71 Adsorption effects of hydrogen absorption on the electrical conduction in discontinuous palladium films, 17 Aluminium A I - S i - V and A I - S i - V - P d films as alternatives for A I - S i - C u interconnect: microstructure and its impact on reliability, 164 modified high resolution electron energy loss spectra applied to analyse nanometre features in AlSn sputter films, 53 Amorphous materials DLC film deposition by Laser-Arc and study of properties, 92 Auger electron spectroscopy Auger electron spectroscopy rotational depth profiling of Ni/Cr multilayers using Oz ÷ and Ar + ions, 35 growth mode of C_refilms on Si(100) substrate deposited by ion beam sputtering, 30 Carbides reactive magnetron sputter deposition of CNx films On Si(001) substrates: film growth, microstructure and mechanical properties, 103 Carbon DLC film deposition by Laser-Arc and study of properties, 92 shock fracture replicas for thin film microstructure investigation in a transmission electron microscope, 42 Chemical vapour deposition rapid thermal processing with microwave heating, 151 transparent conducting ZnO thin films prepared on low temperature substrates by chemical vapor deposition using Zn(C5H702)2, 65 Computer simulation rapid thermal processing with microwave heating, 151 Contacts evolution of the microstructure of Au(Zn) metallization during formation of an ohmic contact to p-type GaAs, 143 Deposition process deposition of thin indium oxide film and its application to selective epitaxy for in situ processing, 58 Depth profiling Auger electron spectroscopy rotational depth profiling of Ni/Cr multilayers using 02 + and Ar + ions, 35 Dielectric properties development of a novel eUipsometer based on a four-detector photopolarimeter, 47 Electrical properties and measurements changes of the optical and electrical properties of plasma polymer-metal composite films during thermal annealing, 77 effects of hydrogen absorption on the electrical conduction in discontinuous palladium films, 17 nanodispersed CrxSi~ _x thin films: transport properties and thermoelectric application, 24 photoelectric properties of colloidal semiconductor films, 13 preparation of EuO and EuO/Cu multilayered films and their magnetic properties, l
structural, optical and electrical properties of polycrystalline iron pyrite layers deposited by reactive d.c. magnetron sputtering, 6 transparent conducting ZnO thin films prepared on low temperature substrates by chemical vapor deposition using Zn(CsH702)2, 65 Electrochemistry electrochromism of iron oxide films prepared via the sol-gel route by the dip-coating technique, 131 Electromigration A1-Si-V and A I - S i - V - P d films as alternatives for A1-Si-Cu interconnect: microstructure and its impact on reliability, 164 Electron diffraction reactive magnetron sputter deposition of CNx films on Si(001) substrates: film growth, microstructure and mechanical properties, 103 Electron energy emission spectroscopy modified high resolution electron energy loss spectra applied to analyse nanometre features in AISn sputter films, 53 Ellipsometry development of a novel ellipsometer based on a four-detector photopolarimeter, 47 Epitaxy low temperature epitaxial growth by molecular beam epitaxy on hydrogen-plasma-cleaned silicon wafers, 158 magnetic and structural properties of Pt/Co and Pd/Co multilayers sputtered on single-crystal ZnO, 126 Etching Auger electron spectroscopy rotational depth profiling of Ni/Cr multilayers using O2 + and Ar + ions, 35 Europium oxide preparation of EuO and EuO/Cu multilayered films and their magnetic properties, 1 Evaporation deposition of thin indium oxide film and its application to selective epitaxy for/n situ processing, 58 Gallium arsenide evolution of the microstructure of Au(Zn) metallization during formation of an ohmic contact to p-type CraAs, 143 Germanium growth mode of Ge films on Si(100) substrate deposited by ion beam sputtering, 30 Growth mechanism growth mode of Ge films on Si(100) substrate deposited by ion beam sputtering, 30 Hydrogen effects of hydrogen absorption on the electrical conduction in discontinuous palladium films, 17 low temperature epitaxial growth by molecular beam epitaxy on hydrogen plasma-cleaned silicon wafers, 158 Indium oxide deposition of thin indium oxide film and its application to selective epitaxy for in situ processing, 58 Interfaces evolution of the microstructurc of Au(Zn) metallization during formation of an ohmic contact to p-type GaAs, 143
180 Ion bombardment growth mode of Ge films on Si(100) substrate deposited by ion beam sputtering, 30 Iron oxide electrochromism of iron oxide films prepared via the sol-gel route by the dip-coating technique, 131
Plasma processing and deposition DLC film deposition by Laser-Arc and study of properties, 92 Platinum shock feature replicas for thin film microstructure investigation in a transmission electron microscope, 42
Magnetic properties and measurements magnetic and structural properties of Pt/Co and Pd/Co multilayers sputtered on single-crystal ZnO, 126 preparation of EuO and EuO/Cu multilayered films and their magnetic properties, 1 Metallization AI-Si-V and A I - S i - V - P d films as alternatives for AI-Si-Cu interconnect: microstructure and its impact on reliability, 164 evolution of the microstructure of Au(Zn) metallization during formation of an ohmic contact to p-type GaAs, 143 Mica relation between adhesion and friction forces across thin films, 71 Molecular beam epitaxy low temperature epitaxial growth by molecular beam epitaxy on hydrogen-Plasma-cleaned silicon wafers, 158 Monolayers modified high resolution electron energy loss spectra applied to analyse nanometre features in AISn sputter films, 53 Multilayers development of Ni/Ti multilayer supermirrors for neutron optics, 110 magnetic and structural properties of Pt/Co and Pd/Co multilayers sputtered on single-crystal ZnO, 1 2 6 ' preparation of EuO and EuO/Cu multilayered films and their magnetic properties, 1 shock fracture replicas for thin film microstructure investigation in a transmission electron microscope, 42
Schottky barrier preparation of Si-TiSi2 Schottky diodes by rapid thermal annealing, 172 Sensors nanodispersed CrxSil-x thin films: transport properties and thermoelectric application, 24 Silane rapid thermal processing with microwave heating, 151 Silicides ', ~nfinodispersed CrxSif_ x thin films: transport properties and • thermoelectric apl~lication, 24 preparation of Si-TiSi2 Sehottky diodes by rapid thermal annealing, 172~ ~ ~" Silicon low temperature epitaxial growth by molecular beam epitaxy on hydrogen-plasma-cleaned silicon wafers, 158 rapid thermal prpcessing with: microwave heating, 151 Silver changes of the optical and electrical properties of plasma polymer-metal composite films during thermal annealing, 77 Solar cells aluminium content dependence of milky transparent conducting ZnO:AI films with textured surface prepared by d.c. magnetron sputtering, 86 transparent conducting ZnO thin films prepared on low temperature substrates by chemical vapor deposition using Zn(C 5 H702)2, 65 Sputtering aluminium content dependence of milky transparent conducting ZnO:AI films with textured surface prepared by d.c. magnetron sputtering, 86 Auger electron spectroscopy rotational depth profiling of Ni/Cr multilayers using 02 + and Ar + ions, 35 reactive magnetron sputter deposition of CNx films on Si(001) substrates: film growth, microstructure and mechanical properties, 103 structural, optical and electrical properties of polycrystalline iron pyrite layers deposited by reactive d.c. magnetron sputtering, 6 X-ray study of generalized Cantor supedattices, 120 Structural properties nanodispersed CrxSi t -x thin films: transport properties and thermoelectric application, 24 structural, optical and electrical properties of polycrystalline iron pyrite layers deposited by reactive d.c. magnetron sputtering, 6 Superlattices X-ray study of generalized Cantor superlattices, 120 development of Ni/Ti multilayer supermirrors for neutron optics, 1I0 Surface morphology aluminium content dependence of milky transparent conducting ZnO:AI films with textured surface prepared by d.c. magnetron sputtering, 86
Nanostructures changes of the optical and electrical properties of plasma polymer-metal composite films during thermal annealing, 77 Nickel development of Ni/Ti multilayer supermirrors for neutron optics, 110 Nitrides reactive magnetron sputter deposition of CN x films on Si(001) substrates: film growth, microstructure and mechanical properties, 103 Optical properties changes of the, optical and electrical properties of plasma polymer-metal composite films during thermal annealing, 77 development of a novel ellipsometer based on a four-detector photopolarimeter, 47 structural, optical and electrical properties of polycrystalline iron pyrite layers deposited by reactive d.c. magnetron sputtering, 6 Palladium effects of hydrogen absorption on the electrical conduction in discontinuous palladium films, 17 Photoconductivity photoelectric properties of colloidal semiconductor films, 13 Physical vapour d~osition DLC film deposition by Laser-Arc and study of properties, 92
Tin oxide modified high resolution electron energy loss spectra applied to analyse nanometre features in AISn sputter films, 53
181 Titanium development of Ni/Ti multilayer supermirrors for neutron optics, 110 preparation of Si-TiSi 2 Schottky diodes by rapid thermal annealing, 172 Titanium oxide photoelectric properties of colloidal semiconductor films, 13 Transmission electron microscopy A I - S i - V and A I - S i - V - P d films as alternatives for A1-Si-Cu in interconnect: microstructure and its impact on reliability, 164 shock fracture replicas for thin film microstructure investigation in a transmission electron microscope, 42
X-ray diffraction X-ray study of generalized Cantor superlattices, 120 X-ray photoelectron spectroscopy deposition of thin indium oxide film and its application to selective epitaxy for in situ processing, 58 Zinc oxide aluminium content dependence of milky transparent conducting ZnO:AI films with textured surface prepared by d.c. magnetron sputtering, 86 magnetic and structural properties of Pt/Co and Pd/Co multilayers sputtered on single-crystal ZnO, 126 transparent conducting ZnO thin films prepared on low temperature substrates by chemical vapor deposition using
Zn(CsH702)2, 65
179
Subject Index of Volume 246 Adhesion relation between adhesion and friction forces across thin films, 71 Adsorption effects of hydrogen absorption on the electrical conduction in discontinuous palladium films, 17 Aluminium A I - S i - V and A I - S i - V - P d films as alternatives for A I - S i - C u interconnect: microstructure and its impact on reliability, 164 modified high resolution electron energy loss spectra applied to analyse nanometre features in AlSn sputter films, 53 Amorphous materials DLC film deposition by Laser-Arc and study of properties, 92 Auger electron spectroscopy Auger electron spectroscopy rotational depth profiling of Ni/Cr multilayers using Oz ÷ and Ar + ions, 35 growth mode of C_refilms on Si(100) substrate deposited by ion beam sputtering, 30 Carbides reactive magnetron sputter deposition of CNx films On Si(001) substrates: film growth, microstructure and mechanical properties, 103 Carbon DLC film deposition by Laser-Arc and study of properties, 92 shock fracture replicas for thin film microstructure investigation in a transmission electron microscope, 42 Chemical vapour deposition rapid thermal processing with microwave heating, 151 transparent conducting ZnO thin films prepared on low temperature substrates by chemical vapor deposition using Zn(C5H702)2, 65 Computer simulation rapid thermal processing with microwave heating, 151 Contacts evolution of the microstructure of Au(Zn) metallization during formation of an ohmic contact to p-type GaAs, 143 Deposition process deposition of thin indium oxide film and its application to selective epitaxy for in situ processing, 58 Depth profiling Auger electron spectroscopy rotational depth profiling of Ni/Cr multilayers using 02 + and Ar + ions, 35 Dielectric properties development of a novel eUipsometer based on a four-detector photopolarimeter, 47 Electrical properties and measurements changes of the optical and electrical properties of plasma polymer-metal composite films during thermal annealing, 77 effects of hydrogen absorption on the electrical conduction in discontinuous palladium films, 17 nanodispersed CrxSi~ _x thin films: transport properties and thermoelectric application, 24 photoelectric properties of colloidal semiconductor films, 13 preparation of EuO and EuO/Cu multilayered films and their magnetic properties, l
structural, optical and electrical properties of polycrystalline iron pyrite layers deposited by reactive d.c. magnetron sputtering, 6 transparent conducting ZnO thin films prepared on low temperature substrates by chemical vapor deposition using Zn(CsH702)2, 65 Electrochemistry electrochromism of iron oxide films prepared via the sol-gel route by the dip-coating technique, 131 Electromigration A1-Si-V and A I - S i - V - P d films as alternatives for A1-Si-Cu interconnect: microstructure and its impact on reliability, 164 Electron diffraction reactive magnetron sputter deposition of CNx films on Si(001) substrates: film growth, microstructure and mechanical properties, 103 Electron energy emission spectroscopy modified high resolution electron energy loss spectra applied to analyse nanometre features in AISn sputter films, 53 Ellipsometry development of a novel ellipsometer based on a four-detector photopolarimeter, 47 Epitaxy low temperature epitaxial growth by molecular beam epitaxy on hydrogen-plasma-cleaned silicon wafers, 158 magnetic and structural properties of Pt/Co and Pd/Co multilayers sputtered on single-crystal ZnO, 126 Etching Auger electron spectroscopy rotational depth profiling of Ni/Cr multilayers using O2 + and Ar + ions, 35 Europium oxide preparation of EuO and EuO/Cu multilayered films and their magnetic properties, 1 Evaporation deposition of thin indium oxide film and its application to selective epitaxy for/n situ processing, 58 Gallium arsenide evolution of the microstructure of Au(Zn) metallization during formation of an ohmic contact to p-type CraAs, 143 Germanium growth mode of Ge films on Si(100) substrate deposited by ion beam sputtering, 30 Growth mechanism growth mode of Ge films on Si(100) substrate deposited by ion beam sputtering, 30 Hydrogen effects of hydrogen absorption on the electrical conduction in discontinuous palladium films, 17 low temperature epitaxial growth by molecular beam epitaxy on hydrogen plasma-cleaned silicon wafers, 158 Indium oxide deposition of thin indium oxide film and its application to selective epitaxy for in situ processing, 58 Interfaces evolution of the microstructurc of Au(Zn) metallization during formation of an ohmic contact to p-type GaAs, 143
180 Ion bombardment growth mode of Ge films on Si(100) substrate deposited by ion beam sputtering, 30 Iron oxide electrochromism of iron oxide films prepared via the sol-gel route by the dip-coating technique, 131
Plasma processing and deposition DLC film deposition by Laser-Arc and study of properties, 92 Platinum shock feature replicas for thin film microstructure investigation in a transmission electron microscope, 42
Magnetic properties and measurements magnetic and structural properties of Pt/Co and Pd/Co multilayers sputtered on single-crystal ZnO, 126 preparation of EuO and EuO/Cu multilayered films and their magnetic properties, 1 Metallization AI-Si-V and A I - S i - V - P d films as alternatives for AI-Si-Cu interconnect: microstructure and its impact on reliability, 164 evolution of the microstructure of Au(Zn) metallization during formation of an ohmic contact to p-type GaAs, 143 Mica relation between adhesion and friction forces across thin films, 71 Molecular beam epitaxy low temperature epitaxial growth by molecular beam epitaxy on hydrogen-Plasma-cleaned silicon wafers, 158 Monolayers modified high resolution electron energy loss spectra applied to analyse nanometre features in AISn sputter films, 53 Multilayers development of Ni/Ti multilayer supermirrors for neutron optics, 110 magnetic and structural properties of Pt/Co and Pd/Co multilayers sputtered on single-crystal ZnO, 1 2 6 ' preparation of EuO and EuO/Cu multilayered films and their magnetic properties, 1 shock fracture replicas for thin film microstructure investigation in a transmission electron microscope, 42
Schottky barrier preparation of Si-TiSi2 Schottky diodes by rapid thermal annealing, 172 Sensors nanodispersed CrxSil-x thin films: transport properties and thermoelectric application, 24 Silane rapid thermal processing with microwave heating, 151 Silicides ', ~nfinodispersed CrxSif_ x thin films: transport properties and • thermoelectric apl~lication, 24 preparation of Si-TiSi2 Sehottky diodes by rapid thermal annealing, 172~ ~ ~" Silicon low temperature epitaxial growth by molecular beam epitaxy on hydrogen-plasma-cleaned silicon wafers, 158 rapid thermal prpcessing with: microwave heating, 151 Silver changes of the optical and electrical properties of plasma polymer-metal composite films during thermal annealing, 77 Solar cells aluminium content dependence of milky transparent conducting ZnO:AI films with textured surface prepared by d.c. magnetron sputtering, 86 transparent conducting ZnO thin films prepared on low temperature substrates by chemical vapor deposition using Zn(C 5 H702)2, 65 Sputtering aluminium content dependence of milky transparent conducting ZnO:AI films with textured surface prepared by d.c. magnetron sputtering, 86 Auger electron spectroscopy rotational depth profiling of Ni/Cr multilayers using 02 + and Ar + ions, 35 reactive magnetron sputter deposition of CNx films on Si(001) substrates: film growth, microstructure and mechanical properties, 103 structural, optical and electrical properties of polycrystalline iron pyrite layers deposited by reactive d.c. magnetron sputtering, 6 X-ray study of generalized Cantor supedattices, 120 Structural properties nanodispersed CrxSi t -x thin films: transport properties and thermoelectric application, 24 structural, optical and electrical properties of polycrystalline iron pyrite layers deposited by reactive d.c. magnetron sputtering, 6 Superlattices X-ray study of generalized Cantor superlattices, 120 development of Ni/Ti multilayer supermirrors for neutron optics, 1I0 Surface morphology aluminium content dependence of milky transparent conducting ZnO:AI films with textured surface prepared by d.c. magnetron sputtering, 86
Nanostructures changes of the optical and electrical properties of plasma polymer-metal composite films during thermal annealing, 77 Nickel development of Ni/Ti multilayer supermirrors for neutron optics, 110 Nitrides reactive magnetron sputter deposition of CN x films on Si(001) substrates: film growth, microstructure and mechanical properties, 103 Optical properties changes of the, optical and electrical properties of plasma polymer-metal composite films during thermal annealing, 77 development of a novel ellipsometer based on a four-detector photopolarimeter, 47 structural, optical and electrical properties of polycrystalline iron pyrite layers deposited by reactive d.c. magnetron sputtering, 6 Palladium effects of hydrogen absorption on the electrical conduction in discontinuous palladium films, 17 Photoconductivity photoelectric properties of colloidal semiconductor films, 13 Physical vapour d~osition DLC film deposition by Laser-Arc and study of properties, 92
Tin oxide modified high resolution electron energy loss spectra applied to analyse nanometre features in AISn sputter films, 53
181 Titanium development of Ni/Ti multilayer supermirrors for neutron optics, 110 preparation of Si-TiSi 2 Schottky diodes by rapid thermal annealing, 172 Titanium oxide photoelectric properties of colloidal semiconductor films, 13 Transmission electron microscopy A I - S i - V and A I - S i - V - P d films as alternatives for A1-Si-Cu in interconnect: microstructure and its impact on reliability, 164 shock fracture replicas for thin film microstructure investigation in a transmission electron microscope, 42
X-ray diffraction X-ray study of generalized Cantor superlattices, 120 X-ray photoelectron spectroscopy deposition of thin indium oxide film and its application to selective epitaxy for in situ processing, 58 Zinc oxide aluminium content dependence of milky transparent conducting ZnO:AI films with textured surface prepared by d.c. magnetron sputtering, 86 magnetic and structural properties of Pt/Co and Pd/Co multilayers sputtered on single-crystal ZnO, 126 transparent conducting ZnO thin films prepared on low temperature substrates by chemical vapor deposition using
Zn(CsH702)2, 65