The Cathodic Arc Plasma Deposition of Thin Films

THIN FILM PROCESSES II

11-5

The Cathodic Arc Plasma Deposition of Thin Films PHILIP C.

JOHNSON

Vac-Tec Systems, Inc. Boulder, Colorado

I. I n t r o d u c t i o n II. I o n Plating III. T h e C a t h o d i c A r c A . V a c u u m Arcs B . T h e C a t h o d e Spot C. T h e T a r g e t Surface D . Spot Size E . C a t h o d e Voltage F . C u r r e n t Densities G . Splitting of the C a t h o d e Spot H . M o t i o n of the C a t h o d e Spot I V . E m i t t e d Material A . The Vapor Stream B . C a t h o d e E r o s i o n and E r o s i o n R a t e s C. I o n Emission D . Microdroplets V. Cathodic Arc Deposition A . C a t h o d i c A r c D e p o s i t i o n Systems B . T h e C a t h o d i c A r c Source C. A r c Ignition D . C a t h o d e Materials E . C o a t i n g Cycle F . S u b s t r a t e Effects G . E l i m i n a t i o n of Macroparticles V I . T h i n Film D e p o s i t i o n A . M e t a l and E l e m e n t a l Film D e p o s i t i o n B. Reactive Deposition C. Alloy D e p o s i t i o n D . Compound Deposition

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