NOTES Solid-Srorc
Eklronics
was also measured in the same ways and is included simply for comparative purposes. Physical properties of the first two diodes are given in Table 1. The injection current was supplied in 100 nsec pulses at 60 Hz, and the output radiation was detected by an Amperex CVP-I50 type S-l photomultiplier tube after passing through a Spex 1400 double grating spectrometer. In Fig. 1 the spectral output of a typical GaAs diode for different currents is shown. It is to be noted that increased current causes an upward shift in output light intensity and spectral position and also a narrowing of the halfwidth. The variation of the first two parameters with current has been widely published (e.g. Pankove[l] and Wittmann[2]), and thus this topic will not be pursued here. Figure 2 shows the decrease in halfwidth which occurs with increasing current. All three diodes show nearly the same characteristics, the current variation of Ahu being slightly greater for the commercial diode than for the others. The crosses terminating the curve mark the halfwidth AhVth at which the first mode of stimulated emission
Pergamon Press 197 I. Vol. 14, pp. 175-178. Printed in Great Britain
Variation
(Received
of electroluminescence diodes
line halfwidth
8 April 1970; in revisedfbrm29
June
in GaAs
1970)
NOTATION
h
Plank’s constant (eV-set) frequency ( I /set) Ah: EL halfwidth (eV) RerL(hu) external radiation (photons/set-eV) efficiency (dimension711, power conversion less) A area of p-n junction (cm2) e electronic charge (Coulombs) J current density (A/cm2) plus diffraction coefficient _ %fl absorption (l/cm) A NEGLECTED part of the great amount of experimental data on GaAs diode properties is a simultaneous display of the current and temperature variations of the electroluminescence (EL) line halfwidth. Although EL line halfwidth narrowing with increasing current is already known, data is fragmentary. One purpose of this paper is to demonstrate the decrease of EL halfwidth with increasing current at various temperatures and to suggest a plausible reason for it. Another purpose is to show that the EL halfwidth at the threshold for lasing does not increase sufficiently with temperature to account for more than a small part of the temperature dependence of the threshold current. The above two properties were noted in preliminary measurements on both diffused and epitaxially grown, degenerately doped diodes. One from each group was chosen for more detailed measurements, and the results are given here. A commercial diode* (denoted by C in Figs. 2 and 3)
I.““‘-“‘.“1
hv, ev Fig. I. Spectral distribution at I l.YK of EL emission from GaAs diode 28-E for three different current values. The spectral appearance is similar for the other diodes tested.
*A developmental type RCA-TA2628 laser diode in modified TO-46 package with low-absorbing glass window. Detailed knowledge of physical properties not available. 175
176
NOTES
Tuble I. Drrtcr for GaAs laser diodes. Fabry-Perot swfuces ure cleuved rend IIIIcarted on 5-D and 28-E. Currier wncentrmtion and mobility ut room tempercituw 5-I) (diffused)
n-region
p-region
dopant
Si
Zn
carrier concentration
I O’“/cm:’
carrier mobility
Junction thickness
==8pm
area
4.5 X 10 ~.’cm’
diffusion time at 900°C
3 hr
thickness
+Ipm
I WS/cm:’
2850 cm’/\/-set
parameters
28-E (epitaxial) dopant
Si
carrier concentration carrier mobility
Zn
I O’x/cm”
7.8 x 10’H/cm:’
2794 cm’/V-set
86 cm’/V-set
area
diffusion time at 900°C
-
becomes the
evident.
multimode
appears
about
the
and
In
kept narrow mode
slitwidths
of
Fermi
halfwidth
will
A\hu,,. To avoid this Spex
could
be
easily
level
in
in the donor The
with increased
as
not greatly
resultant
into
of finite
width.
quasi-Fermi
level p-side
The region states).
current level
when stimulated
an upward
position
temperatures,
the
by additional
does
picture
absorption
of the EL emission the quasi-Fermi Thermal
20 min
smearing
u1[.5] that
increases
EL is In
and the
the
EL
Fabry-Perot halfwidth we
current the
before
by
offer
diffraction.
the
over
faces
(the
this gain is greatest emission.
sharper
and the halfwidth
emission
did
that
current
the
is due
more
following
narrowing
ex-
of Al~u
in Fig. 2: At than loss by
current
increases
loss by absorp-
a significant
range of
it is equal to this loss plus that from
taneous
here
As
significantly
inducing
and it may exceed
Fabry-Perot
Since
Reasoning of Danilova
mirrors
Akv
with increasing current as depicted low currents. gain is much less and
halfwidth.
with current.
for the subthreshold
absorption
about
effect on any
and the observation
emission,
planation
smearing
to have a significant
this model
stimulated
higher
complicated
at the higher energy edge
varicltion of the halfwidth
EL
At
is slightly
levels of both holes and electrons.
but is unlikely with
shift in amplitude occur).
due to thermal
tion and diffraction[7]
(due to degen-
of pertinent
of injection
change the El. linewidth
the
(although
spectral
so does gain[6].
diodes[4].
the trcticc
by absorption
occupancy
rise of the
GaAs
distance along
this model an increase
devel-
electrolumines-
of the quasi-Fermi
a hole-band
affected
the energy
donor tail and takes into
with
of emission
electron
of the quasi-
have recently
doped
the drop
the junction
and
et
band tail since this level
authors
degenerately
consideration
lineshape
The
is omitted
reduce
31 and increases
It asserts an exponential
ah well
were
for the EL measurements
in the EL halfwidth
current[2,
involved.
cence
1400
identified.
oped a model for low temperature
erate
been
can not be due to a lowering
rises with
from
has
0.2 and 0.S A.
The decrease
range
of
of the
near threshold
was between current
lasing
so that the separate lines of the multi-
emission
resolution
in
such a case it is not
threshold
a measurement
the
is poor, emission
of the EL. spectrum
be less than the EL halfwidth problem.
resolution
of stimulated
fashion.
that
reached,
optical
the center
a smeared-out known
When structure
8.2 x 10m4cm’
not
the
El.
mainly
emission.
condition).
line
observed
will
be
less than if stimulated
occur.
narrowing
threshold
near the peak of spon-
Hence
it is concluded
of A/tv
with
to the gradual
does not
stimulated
This
emission
patible with that of Danilova
interpretation
increasing growth i\
of
com-
rt ct/.[51who obtained
177
NOTES
that nU does depend on absorption, diffraction, and the internal quantum efficiences; and that the temperature dependence of these factors affects that of Q,. RpS’(hv,) is proportional to the internal Aux density at frequency vp. At threshold the internal flux density at, this frequency must be sufficient to insure that gain via stimulated emission equals loss by absorption plus diffraction (oI,,,) as well as transmission through the Fabry-Perot faces. Hence the temperature dependence of cypff determines that of the external radiation threshold intensity R;,ff(hu,,). Thus at threshold we have from equation ( I):
lr
D
/-
Y
4 )O
YL
OM
where the temperature behavior of Jr,, established by the factor in brackets arises from that of (Y,,~ and the internal quantum efficiences for stimulated and spontaneous emission. The temperature dependence of Ahr+,, also affects JLh. The quantity Ahv reflects the energy range for the electrons and holes at low currents. However, at higher currents where stimulated emission occurs, Ahv narrows even more and begins to represent only the energy range for which radiative transitions occur at the highest rate. Nevertheless, since thermal smearing
A.&
CURRENT, A -
of EL line as a function of current at Fig. 2. Halfwidth different temperatures for three CiaAs diodes. I he letters E, D and C denote epitaxial, diffused and commercial, respectively.
for only one temperature current-emission linewidth data which was somewhat incomplete over the subthreshold range. The total external radiation can be written in terms of current density J, the area of the p-n junction A. and power conversion efficiency[8] r), as I
R’“‘(hv) dhv = R’“‘(hv,) Ahv = nPA$,
(1)
where hv, is the energy at which the EL emission peaks, Rest(hv) is the number of photons per unit time per unit energy interval emitted externally, and the linewidth is written Ahv since it is almost identical to the halfwidth. The quantity nl, can be expressed in terms of internal quantum efficiences for stimulated and spontaneous emission and factors which involve integration over all directions while taking account of absorption and reflections [9]. The important point to note here is simply
T,“K-Fig. 3. Comparison of temperature depen,‘_itces of EL line halfwidth evaluated at threshold and the threshold current for three GaAs diodes. The areas of the p-n junctions are listed in ‘Table 1.
178
NOTES
does increase trons
and
stimulated Hence
the energy
holes
exist,
emission
band
a broadening
is mainly
and
does not fully
holes
the
rise
electron-hole Other
effects[lO,
(Yangand
1I]
halfwidth It
more
is
perature
two
whereas
of two or three. is not
Hence
the
perature through
that
just be
an
orders
of
efficiences.
variation
the
one
of Ahv,,,.
increase
quantum
I? June,
(Receiwd
I Y70: in reui,~edfbrm
24 July
1970)
of both
Rather
tions
on crystal
semiconductor proposed
in fundamental
growth
is
and in the fabrication
devices. Various
to obtain
wafer
invchtigaof
methods have been
the doping
profile[l-IO].
Of
capacitance technique [ I-31 is used. It involves measurement
these the differential the most commonly
as a function
bias for a Schottky
diode or an abrupt p+n junction.
current
magnitude
from
ofJ,,, with tem-
due to a wider
energy
from
increase
tem-
relates
and resultant
smearing
in (Y,~, and the internal
quantum
The
technique
before
of interpolating
accuracy
between
two
computation
and is limited
in
by the necessity
point5 to obtain
the
slope of the capacitance
vs. voltage curve. The use
of an automated
data handling
digital
system
has
been suggested to speed up the computationl41. This note describes the
differential system
which
the doping profile. used
a simple method of automacapacitance
technique
using
;I direct
plot of
described
can be
provides
The technique
in conjunction
with
abrupt p+n junction J. LYNN
considerable
and numerical
an analog Ackno,cled~~f~Pnt-The authors wish to thank R. A. Shatas for helpful comments pertaining to the preparation of this paper.
requires
of reverse applied
the final result is obtained
resolution
ing
efficiences.
Solid Stcrte Physic,.7 Brunch Physical Sciencrs Lrrhorutory Redstone Arsenal, Alahamrt.
in a semiconductor
parameter
of the capacitance
of
its
profile
DOPING
an important
threshold
the increase
to temperature
THE
and the threshold
and holes resulting
smearing. changes
discussed.
to
Ahvlh rises by only a factor
primarily
of electrons
indirectly
itself
is due
be an increase
would of
seen
A technique for directly plotting the doping profile of semiconductor wafers
range
A~v,*
temperature
at threshold
than
11 to 300°K
range
though
As
would
decreases
current.
in width.
temperature
of the energy
3 shows the temperature
the EL rises
increase with
elec-
and also
suggested that the main reason
smearing.
of smearing
which
the energy range occupied
of Jth with
effect
Figure
will
even
represent
by them. Pilkuhn[8]
over
of Ahvlh
due to an increase
of electrons
for
range
the spontaneous
a Schottky
diode or an MIS
diode.
an
capacitor.
SMITH
H. K. WITTMANN
C-V
rrlmtiotts
For a Schottky
U.S.A.
capacitance
C,
diode, the relation the
doping
profile
between
the
n(.u) and
the
applied bias V is given by: REFERENCES I. J. I. Pankove, Phys. Reo. Lett. 9,283 ( 1Y62). 2. H. R. Wittmann, Phgs. stotw solidi. 35. 865 3. D. F. Nelson, M. Gershenson, A. Ashkin,
4. 5.
6. 7. 8. 9. IO.
I I.
( 1969).
L. A. D’Asaro and J. C. Sarace, Appl. Phys. Lett. 2, 182 (1963). J. I_. Smith and I-1. R. Wittmann, Phys. status .w/idi. (a)2.371 (1970). T. N. Danilova, L. M. Kogan, S. S. Meskin, D. N. Nasledov and B. V. Tsarenkov. Soviet Phys-Solid Sttrtr 8, I963 ( 1967). F. Stern, Phys. Rev. 148, I 86 ( 1966). W. Susaki. /nncm .I. cr~ool. Phvs. 5. 845 (1966). M. H. Pilkuhn. Plrgs. .&m skidi. 2.5. 9 ( 1968). G. Cheroff, F. Stern and S. Triebwasser, Appl. PI2ys. Lett. 2, I73 (1963). M. Pilkuhn, H. Rupprecht and S. Blum, So/id-St. Electron. 7.90s ( 1964). M. Pilkuhn and H. Rupprecht. J. opp/. Phys. 38, 5 (1967).
and xx-
0
c
where A is the area of the diode, 4 is the electronic charge
and t,? is the permittivity
ductor.
For an abrupt ~+n junction
ing in the high resistivity
of the semiconn(r) is the dop-
side of the junction
and
x is the distance from the edge of the junction. For an MIS
diode, in the deep depletion
the space charge
extends
region,
into the semiconductor
*Strictly speaking n(x) i\ the majority rather than the doping profile [ 11. 121.
carrieI-
profile