TOOLS & TECHNIQUES
Imaging software split into three zones ZEN is a digital imaging software package from Carl Zeiss organized into three zones for ease of use during experiments. Image acquisition and microscope control tools are on the left. This toolbar automatically adapts to each user’s personal requirements and can be freely positioned elsewhere on the screen when required. The right-hand side is devoted to file management tools. The majority of the screen is taken up by the central worktable for image viewing. This is optimized for widescreen format, creating additional space for complex experiments in which a large number of tool palettes and view windows are open. Up to three images can be opened simultaneously to allow comparison. Contact: www.zeiss.com
Lasers create an impression Gigaphoton has released the GT62A, a new argon fluoride (ArF) excimer laser for double-patterning immersion lithography. It has an emission wavelength of 193 nm, an output of 90 W, and a repetition rate of 6000 Hz. The GT62A features an improved laser chamber, and longer life for consumables. The laser has durable optics to ensure reliable performance during high-output operation. A 60 W version of the GT62A is also available that may be upgraded to 90 W when required. Contact: www.gigaphoton.com
conventional electron microscopes. Standard features include 8x to 300 000x imaging and up to 5 nm resolution. The sharpness of the image enables the CarryScope to make high-precision measurements on submicron structures. Optional extras include a eucentric motorized specimen stage that holds specimens up to 150 mm in diameter, low vacuum, and multiple live image display, including picture-in-picture.
New microscope delves deeper The LEXT OLS-3000IR from Olympus is a nearinfrared (IR) laser-based confocal microscope for nondestructive observation of semiconductor components. The combination of an objectives lens with a high-power 1300 nm near-IR laser enable the microscope to image through Si. The instrument features submicron imaging with 0.55 µm resolution, and a magnification range of 120x to 12 960x.
The MultiBeam has applications in integrated circuit defect analysis, circuit modification, transmission electron microscope thin-film sample preparation, and mask repair. Contact: www.jeol.com
The instrument can be used to inspect and analyze system-in-package, chip size package, flip chip mounting defects, and chip gap. Contact: www.olympus.com
FTIR on the go A2 Technologies has extended its range of Fourier transform infrared (FTIR) spectrometers with a new handheld model for field-based surface analysis of solids, pastes, gels, and liquids. The analyzer only weighs six pounds. This spectrometer combines all the capabilities of a laboratorybased FTIR with the advantages of a portable instrument for use in the field. It features interchangeable internal ATR and external reflectance interfaces for sampling materials and can also analyze large surfaces using a diamond internal reflection sampling system. Contact: www.a2technologies.com
JEOL has also introduced MultiBeam, a highthroughput SEM/FIB (focused ion beam) instrument that combines micromilling with the high-resolution imaging of an electron column. It features serial slicing and sampling for three-dimensional image reconstruction, as well as low-vacuum operation for imaging nonconductive specimens without coating or alteration, a gas injection system for etching and deposition, a large stage for up to 150 mm samples, and a multiple port design for a range of analytical needs.
Sizing up particles automatically
Carry on scanning JEOL’S new CarryScope (shown) is a portable scanning electron microscope (SEM) that can be used to image samples on site. The new SEM delivers high-resolution imaging and analytical capabilities equivalent to those of
The Morphologi G3 is an automated particle characterization system from Malvern Instruments that delivers high-quality, statistically significant particle size and shape information, together with microscope quality images. It features a fully integrated dry powder dispersion system, which ensures high reproducibility with consistent and controlled particle orientation, reducing sample preparation times. Particles with a size range of 0.5 µm – 3000 µm can be measured at different magnifications using a circle equivalent diameter parameter. Shape parameters such as elongation, circularity, and convexity can be calculated. Contact: www.malvern.com
APRIL 2008 | VOLUME 11 | NUMBER 4
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