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Integrated Circuit Metrology, Inspection, & Process Control 4
during grinding and polishing operations and hence cannot simply be correlated to the gross surface topography in terms of surface roughness, particularly for hard and brittle ceramic materials. 57, N. Ueno, S. Okada, A. Tsukuda, Y. Kuroshima, Y. Kondo, "In-process Dressing of Resin-bonded Diamond Wheel,', Bulletin of the Japan Society of Precision Engineering, 24(2), pp. 112-117. (Jun 1990). A continuous dressing device for the resinbonded diamond wheel is experimentally prepared using an abrasive dressing stick, which is fed on the wheel periphery at a constant feed rate. The device is mounted on a conventional grinding machine of low rigidity. In consideration of the grinding force relating to the dressed wheel surface, experiments on the feed rate and on the type of dressing stick are performed. For this dressing method, proper feed rate is 3 p.m/rev and the adequate dressing stick is a vitrified bonded #100 silicon carbide of J grade. In addition, an intermittent in-process dressing device is proposed in order to reduce the grinding cost. This method is realized by applying the relationship between the slip of the induction motor and the grinding force. 8 Refs.
58, K. M. Monahan, "Integrated Circuit Metrology, Inspection, & Process Control 3," (SPIE. 1989). 545 pages. $65.00 59, W. E. Arnold, "Integrated Circuit Metrology, Inspection, & Process Control 4," (SPIE, Jul 1990). $64.00 60, W. Robertson, E. A. Puente, L. Nemes, "Integrated Manufacturing Using Coordinate Measuring Machines and
Statistical Process Control Software,"Information Control Problems in Manufacturing Technology 1989. 6th IFAC/IFIP/IFORS/IMACS Symposium, Madrid, Spain, 26-29 Sept. 1989. pp. 533-7. Pergamon Oxford, UK. The adaptation of statistical process control techniques on co-ordinate measuring machines for on-line quality control of a group of CNC machine tools is discussed (flexible manufacturing system). An explanation of the system and computer software is provided. The specific method of presenting measured results automatically to a database is given. The system can be configured to suit any appropriate small-tolarge batch manufacturing process which utilizes a mix of CNC machine tools and ancillary equipment. Although comprehensive failure and error detection routines are feasible, automatic feed-back to a machining cell for on-line dimensional correction of the workpiece is realistic but at this stage impractical. The variety and complexity of the workpieces involved, together with the response time required by the CNC machine tool system will dictate the level of integration required for the co-ordinate measuring system and other automation for workpiece handling etc. 61, K. Merkel, V. Giggel, K. -. Elssner, R. Spolaczyk, "Interferometric Real-time Testing of Optical Functional Surfaces as Basis of a Computer-assisted Corrective Polishing," Jemna Mechanika a Optika, pp. 137-40. (May 1990). Heavy demands are made on the modem high-grade photolithographic lenses as concerns the shape geometry accuracy. For testing such lenses, the concern ZEISS (GDR) along with the Central Institute of Optics and Spectroscopy of the Academy of Sciences in Berlin-Adlershof have investigated an interferometric real-time testing method and have developed the corresponding facilities. By use of a modem microcomputer and laser technique a conception of a corresponding computer-assisted Twyman-Green interferometer with real-time processing has been developed. The authors describe the method and the facilities for using it. (Czech) 62, Z. Jaroszewicz, M. Pluta, "Interferometry 'Eighty-Nine'," (SPIE, 1990). 660 pages. $84.00 63, A. Allcock, "Japanese Precision Targets Expansion," Much. Prod. Eng., 147(3775), pp. 55, 57. (19 Jan. 1990). A description is given of horizontal and vertical machining centres manufactured by Mitsui Seiki. The bases of both the vertical and horizontal machines are single piece castings. This dictates the hand scraping of locating surfaces for both the hardened and ground square slideway and linear guideway type elements used. Hand scraping is also applied to the surfaces at the interface between vertical machine column and bed, and also to the location positions for the ballscrew trunnion. The latter minimizes any misalignment which causes uneven wear on the ball screw. To obtain a test certificate, a machine is put through a cutting test where an AI spigot 250 mm diameter by 20 mm high is machined from solid, and cylindricity achieved must be within _ 0.006 ram. 64, B. Kasparick, "Laser Interferometers for Distance Measurements in NC Machines," Technica, pp. 29-32. (22 Aug. 1990). The author presents a general description of laser interferometers, either of single frequency construction or of two° frequency form where a frequency difference is obtained electrically. Applications of miniaturized built-in interferometers are explained and compensation for temperature changes is shown. Relative measurement uncertainty of less than 1 micrometer per meter is quoted, with movement speed of 1.8 meters/see. Interferometer system reliability is examined and the use of fiber optics in interferometric instruments is suggested. (German) 65, "Laser Interferometry Three: Quantitative Analysis of Interferograms," (SPIE, Feb 1990). $64.00 66, B. W. Sheldon, T. M. Besmann, T. M. Besmann, B. Gallois, "Light-scattering
Measurements of CVD Silicon Carbide.," Materials Research Society, Chemical vapor deposition of refractory metals and ceramics, Vol 168, Boston, MA (USA), 27 Nov - 2 Dec 1989. pp. 99-106. Materials Research Society. Pittsburgh, PA (USA). Surface morphologies created by the chemical vapor deposition (CVD) of silicon carbide were examined with light scattering. Silicon carbide was deposited from methyltrichlorosilane under various conditions to create different surfaces. A helium neon laser was used, and the scattered light was measured over a range of scattering angles. These measurements are compared with scanning electron microscopy (SEM) observations and profilometer measurements of the same surfaces. In theory the scattered light contains all of the information needed to provide a statistical description of a given surface; however, a complete vector theory for the scattering phenomena is Ioo complex to provide any simple basis for experimental analysis. The application and limits of existing descriptions of scattering from a rough surface are discussed.
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58, K. M. Monahan, "Integrated Circuit Metrology, Inspection, & Process Control 3," (SPIE. 1989). 545 pages. $65.00 59, W. E. Arnold, "Integrated Circuit Metrology, Inspection, & Process Control 4," (SPIE, Jul 1990). $64.00 60, W. Robertson, E. A. Puente, L. Nemes, "Integrated Manufacturing Using Coordinate Measuring Machines and
Statistical Process Control Software,"Information Control Problems in Manufacturing Technology 1989. 6th IFAC/IFIP/IFORS/IMACS Symposium, Madrid, Spain, 26-29 Sept. 1989. pp. 533-7. Pergamon Oxford, UK. The adaptation of statistical process control techniques on co-ordinate measuring machines for on-line quality control of a group of CNC machine tools is discussed (flexible manufacturing system). An explanation of the system and computer software is provided. The specific method of presenting measured results automatically to a database is given. The system can be configured to suit any appropriate small-tolarge batch manufacturing process which utilizes a mix of CNC machine tools and ancillary equipment. Although comprehensive failure and error detection routines are feasible, automatic feed-back to a machining cell for on-line dimensional correction of the workpiece is realistic but at this stage impractical. The variety and complexity of the workpieces involved, together with the response time required by the CNC machine tool system will dictate the level of integration required for the co-ordinate measuring system and other automation for workpiece handling etc. 61, K. Merkel, V. Giggel, K. -. Elssner, R. Spolaczyk, "Interferometric Real-time Testing of Optical Functional Surfaces as Basis of a Computer-assisted Corrective Polishing," Jemna Mechanika a Optika, pp. 137-40. (May 1990). Heavy demands are made on the modem high-grade photolithographic lenses as concerns the shape geometry accuracy. For testing such lenses, the concern ZEISS (GDR) along with the Central Institute of Optics and Spectroscopy of the Academy of Sciences in Berlin-Adlershof have investigated an interferometric real-time testing method and have developed the corresponding facilities. By use of a modem microcomputer and laser technique a conception of a corresponding computer-assisted Twyman-Green interferometer with real-time processing has been developed. The authors describe the method and the facilities for using it. (Czech) 62, Z. Jaroszewicz, M. Pluta, "Interferometry 'Eighty-Nine'," (SPIE, 1990). 660 pages. $84.00 63, A. Allcock, "Japanese Precision Targets Expansion," Much. Prod. Eng., 147(3775), pp. 55, 57. (19 Jan. 1990). A description is given of horizontal and vertical machining centres manufactured by Mitsui Seiki. The bases of both the vertical and horizontal machines are single piece castings. This dictates the hand scraping of locating surfaces for both the hardened and ground square slideway and linear guideway type elements used. Hand scraping is also applied to the surfaces at the interface between vertical machine column and bed, and also to the location positions for the ballscrew trunnion. The latter minimizes any misalignment which causes uneven wear on the ball screw. To obtain a test certificate, a machine is put through a cutting test where an AI spigot 250 mm diameter by 20 mm high is machined from solid, and cylindricity achieved must be within _ 0.006 ram. 64, B. Kasparick, "Laser Interferometers for Distance Measurements in NC Machines," Technica, pp. 29-32. (22 Aug. 1990). The author presents a general description of laser interferometers, either of single frequency construction or of two° frequency form where a frequency difference is obtained electrically. Applications of miniaturized built-in interferometers are explained and compensation for temperature changes is shown. Relative measurement uncertainty of less than 1 micrometer per meter is quoted, with movement speed of 1.8 meters/see. Interferometer system reliability is examined and the use of fiber optics in interferometric instruments is suggested. (German) 65, "Laser Interferometry Three: Quantitative Analysis of Interferograms," (SPIE, Feb 1990). $64.00 66, B. W. Sheldon, T. M. Besmann, T. M. Besmann, B. Gallois, "Light-scattering
Measurements of CVD Silicon Carbide.," Materials Research Society, Chemical vapor deposition of refractory metals and ceramics, Vol 168, Boston, MA (USA), 27 Nov - 2 Dec 1989. pp. 99-106. Materials Research Society. Pittsburgh, PA (USA). Surface morphologies created by the chemical vapor deposition (CVD) of silicon carbide were examined with light scattering. Silicon carbide was deposited from methyltrichlorosilane under various conditions to create different surfaces. A helium neon laser was used, and the scattered light was measured over a range of scattering angles. These measurements are compared with scanning electron microscopy (SEM) observations and profilometer measurements of the same surfaces. In theory the scattered light contains all of the information needed to provide a statistical description of a given surface; however, a complete vector theory for the scattering phenomena is Ioo complex to provide any simple basis for experimental analysis. The application and limits of existing descriptions of scattering from a rough surface are discussed.
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APRIL. 1991 VOL 13 NO 2