Load-locked sputtering system

Load-locked sputtering system

Product Vacuum Coating Additional free information on any of these items can be obtained by circling the appropriate number on the reader service card...

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Product Vacuum Coating Additional free information on any of these items can be obtained by circling the appropriate number on the reader service card.

Load-Locked Sputtering System Mill Lane Engineering C6. Inc. Lowell, Mass.

Sputtering Targets Handy & Harman Fairfield, Conn.

Mill Lane introduces a fully automatic PC-controlled load-locked sputtering system, Model LL-4000, for research and development with production capabilities. The system handles multiple substrates up to 4-in. diameter on a 19-in. diameter table, which is adjustable from 2 to 4 in. from targets. RF plasma cleaning is handled in the load chamber for immediate transfer to the sputtering chamber for single or selectable multilayer processing from the four-target system. Developed process parameters can be stored and called up for automatic processing. The system occupies a very small space of 7.5 X 5 X 7 ft.

Handy & Harman offers precious metal sputtering targets, solid and bonded, in a broad range of alloys, shapes, and dimensions. Engineers will work with you to develop alloys and forms for specialized requirements. The company provides a complete package, from initial materials preparation to fabrication and reclamation.

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Arc-Free Sputtering lnnotec Group Inc. Simi VaIleN Calif. Duringdeposition by sputtering, arcing occurs. Suppressing the arc is not sufficient as the damage is done before the arc is quenched. Innotec has developed the Eliminator, which prevents the arc from occuring. This product can be interconnected with any manufacturer’s plasma power supply.

Circle 126 on reader information card

Molding/Metallizing/Finishing Thierica Equipment Co. Grand Rapids, Mich.

System

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Magnetron Enhancement So/eras Ltd. Beddeford, Maine

Thierica,Equipment Co. and Vergason Technology Inc. have cooperated to design a work cell that integrates molding, metallizing, and finishing systems into a synchronous manufacturing sequence. The new VTI Press-Side Rapid Cycle Metallizer applies the reflective coating to automotive light housings as soon as they are molded. Thierica integrated finishing systems then apply and cure the clear and decorative coatings required for high performance lighting applications. The assembled component can leave the cell within minutes of the time it is molded.

Soleras Ltd. is a target, backing plate, and vacuumrelated spare part manufacturer, which has been developing low cost methods for process improvement in coating systems. With the aid of magnetic analysis software, Soleras can enhance older magnetron sources with the use of a shunt. This modification achieves longer target life and more uniform process parameters.

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0 Copyright Elsevier Science Inc.

METAL

FINISHING

??

APRIL

1997