- Email: [email protected]
MKS portable calibrator
M K S Portable Calibrator N G S Division of MKS Instruments Inc (Walpole, MA, USA) has introduced the PVS-60 Portable Vacuum Calibration System. The PVS-60 is designed for the calibration of capacitance manometers, pressure transducers and transmitters, TC gauges and mechanical/dial gauges over the range of 104, to atmosphere. With an optional NIST-traceable hot filament nude ion gauge, ionization gauges can be calibrated to 5 x l0 -s m m H g . The sturdy cart system features all-metal sealed construction, includes up to three high accuracy Transfer Standards, and allows instruments to be calibrated in-situ. M K S has also published Vol 10 of its Monitor newsletter. Call below for your copy.
• Contact: Amanda Singer, MKS, tel~]'ax." [1] (508)975-2350 (800-2821770)/975-0093.
Bronkhurst MFC Bronkhurst High-Tech has expanded the Combi-Flow product line with an M F C for large gasflows. The metal sealed MFCs, especially designed for the advanced semiconductor market, now cover the range from 0,2.. 10 sscm up to 2..100 slm gas. The Combi-Flow M F C is of modular construction and contains only two metal to metal seals; excellent leak integrity can be guaranteed. The accuracy is improved to 0.5% off reading, + 0.1% off full scale, by making use of a 'polynomial calibration'. The C o m b i - F l o w M F C is interchangeable with all major M F C makes.
• Contact: Carin Lieven, Bronkhorst High-Tech BV., Nijverheidsstraat la, 7261 AK Ruurlo, The Netherlands. tel~fax: [31] 5735-2929/3297.
UTI Controller U T I I n s t r u m e n t s , San Jose, CA, USA, has a new vacuum system c o n t r o l l e r for o p e n - s o u r c e Q M A process monitoring at high vacuum. These are needed for pumping systems and valves associated with
Q M A s monitoring high-vacuum applications where isolation is critical and the extra sensitivity of an open soruce is desired. Applications include open-source monitoring in high-vacuum process systems, loadlocks.
• Contact: Tom Strahl, tel/fax: [1] (408) 428-9400/428-0823.
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• Contact: Amanda Singer, MKS, tel~]'ax." [1] (508)975-2350 (800-2821770)/975-0093.
Bronkhurst MFC Bronkhurst High-Tech has expanded the Combi-Flow product line with an M F C for large gasflows. The metal sealed MFCs, especially designed for the advanced semiconductor market, now cover the range from 0,2.. 10 sscm up to 2..100 slm gas. The Combi-Flow M F C is of modular construction and contains only two metal to metal seals; excellent leak integrity can be guaranteed. The accuracy is improved to 0.5% off reading, + 0.1% off full scale, by making use of a 'polynomial calibration'. The C o m b i - F l o w M F C is interchangeable with all major M F C makes.
• Contact: Carin Lieven, Bronkhorst High-Tech BV., Nijverheidsstraat la, 7261 AK Ruurlo, The Netherlands. tel~fax: [31] 5735-2929/3297.
UTI Controller U T I I n s t r u m e n t s , San Jose, CA, USA, has a new vacuum system c o n t r o l l e r for o p e n - s o u r c e Q M A process monitoring at high vacuum. These are needed for pumping systems and valves associated with
Q M A s monitoring high-vacuum applications where isolation is critical and the extra sensitivity of an open soruce is desired. Applications include open-source monitoring in high-vacuum process systems, loadlocks.
• Contact: Tom Strahl, tel/fax: [1] (408) 428-9400/428-0823.
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i•;~i~i!ili:~!~:/~i!::¸¸¸~ ~ !~!
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