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MRS News
MRSNEWS
Journal of Materials Research Editor-in-Chief Appointed Scope of New Archival Journal Defined MRS Nominations Prepared for 1986 Elections
Editor-in-Chief Appointed for Journal of Materials Research Dr. Charles B. Duke has been appointed Editor-in-Chief of.Jvurna/ ofh4ureriul.s Research, the new archival journal. to be published for MRS by the American Institute of Physics. “Charlie Duke’s reputation and credentials as a diverse and energetic scientist. author. editor and educator in many disciplines of materials science make him the perfect choice for this challenging new position.” according to MRS President Elton N. Kaufmann. “We are delighted that the new journal will be steered by such an important force as Duke. who brings to the task broad interests and allegiances to key research fields.” Duke is manager. Theoretical Physics and Chemistry Research for Xerox Corporation. Webster, New York, and is a Senior Research Fellow of the Corporate Rcscorch Group. Since joining Xerox in 1972. he ha< held thr positions of principal scientist, Materials Research Section: and manager. Molecular and Organic Materials Research: manager. Materials Science Laboratory. From 1Y63-1 Y6Y. hc wab a slaff mcrnbtx of Gtzrrcral Electric R&D Centrt. Schenectady. New York, working in the areas of solid-state physics. surface science, and technological forecasting-planning. He then served for three years as professor of physics. rc\earch professor of coordinated science, and staff member of the Materials Research Laboratory at the University of Illinois-Urbana. Duke has 256 technical publications to his credit in the areas of nuclear physics. semiconductor physics. organic chemistry. molecular physics. quantum field theory, surface science and technology assessment. He is also author of 7’rrr1rrr/iq in .%/iak (Academic Press. 1969). Hia professional society activities herald his publications and management expertise. Duke is past president and honorary member of the American Vacuum Society and has served as chairman of AVS’s Scholarships and Awards, Publications, and Nominations Committen. Hc is a Fclluw of the American Physical Society, and is serving in his seventh year on the Board of Governors of the American Institute of Physics. He has also served or is currently serving on AIP Committees on Corporate Associates, Public Information and Education. Journals, Educational Policy, and the AIP Executive Committee. He is a past member of the hoard of editors for Journal of b’wuum Science and Technologv, Journalde Microscopic et de .Spcw-ovcopir Elecrroniyues, and currently serves on editorial hoards of Surfuct~Scrence, Surface Science Reporrs,
Crikal Rel3iew.r of‘ Solid State and Marerials Science Advances in the Mechanics and Ph_vsicc of Surfac,e.s, and Journal of Molecular Elecrronics. He has served as rcfcrcc for 16 journals, as well as for the National Science Foundation, Air Force Office of Scientific Research, and the National Research Council, and he has worked in an advisory capacity for four unicersities, as well as on numerous natlonal research and conterence committees. “The Eatabliahmcnt of Jourrrul U/ Mawr-i& Resrur-c/f under the direction of Charlie Duke is a significant milestone for MRS as we pursue our overall mission of service to the materials research community.” Kaufmann said, “We are all quite enthusiastic about our journal prospects and eager to see it evolve under the direction of Charlie Duke.” Journal of Mawr-i& Research will debut in January 1986 For information on scope and manuscript submission requirements, contact MRS Headquarters. 9800 McKnight Road, Suite 327. Pittsburgh, PA 15237: telephone (412) _+67-3003.
MHS 1
MRS Publications Committee Defines Scope of New Archival Journal For the past several months the MRS Publications Committee has been studying the need for a new archival journal in the materials science field. A survey was part of an overall effort to establish both the need for and defining the purpose and content of the proposed journal. Approximately 40 individuals were involved in executing the survey, providing ideas, and interpreting survey results. Among them were eminent scientists, journal editors and consultants, MRS Officers, committee members, and Society enthusiasts. The survey consisted of 18 questions, which were divided into three groups: (I) questions on format (appearance, title, etc.) (2) substantive issues (editorial policy, aim and scope, etc.), and (3) the “bottom line”questions dealing with the need and desirability of the journal and degree of support expected from within and without MRS. Discussions concerning the suitability of starting a new materials science journal have been ongoing within MRS circles for the past few years. The Society has been sensitive to the need to provide a medium for the publication of members’ archival papers as well as the work of other scientists to augmerit its Symposia Proceedings series. Additionally. there appeared to be a genuine desire for a highcaliber, interdisciplinary journal as the preferred mode of publication for the scientific community, and it was evident that this need was not entirely met by any of the existing journals.
Subject-wise, respondents indicated that it should be very broad-based, encompassing a wider range of materials, material properties, processes, etc., than can now be found between the covers of virtually any other journal. Special consideration was to be given to topics in the forefront of materials research. The new journal would exist primarily to publish full-length, archival articles in the materials science field, although it was also clear that critical reviews would be well received by most readers. The respondents demanded that the scientific quality of every article be high. In fact, most respondents expressed the view that a journal’s reputation for publishing high-quality papers is the most significant factor in deciding whether to submit their manuscripts. It was furthermore recommended that the editorial board be comprised of an Editor-in-Chief and a group of Principal Editors, who collectively, will be reponsible for the day-to-day work of reviewing, assembling, and publishing thejoumal. A panel of distinguished scientists should meet annually to critique the performance of the editorial board and recommend ways to improve the journal. One may well ask, as several of the respondents did, why publish another journal for the scientific community? This question was answered partially by the type of journal the respondents defined. Of the few interdisciplinary materials journals now being published, none benefit from the direct ownership and control of a scientific society. With effective management, the society affiliation can be utilized to enhance both circulation and manuscript submission.
MRS Nominating Committee Prepares Slate of Candidates for Upcoming Elections The MRS Nominating Committee is in the process of preparing a slate of candidates for several positions to be submitted to the MRS membership in the upcoming elections. Positions that must be filled for 1986 by the elections include those of 1st Vice President, 2nd Vice President, and five positions on the MRS Council. These elections will determine the leadershipof MRS for 1986 and beyond. The objective of the Nominating Committee is to submit to the membership candidates who would provide strong, creative leadership and oversight to the Materials Research Society. An important criterion is that the candidates represent a wide range of scientific backgrounds, since one of the main objectives of MRS is the promotion of interdisciplinary research. Another important objective is that candidates represent academic, government, and industrial laboratories, since MRS membership is divided roughly equally along these lines. The positions of 1st and 2nd Vice President are responsible for overseeing most of the MRS Committee activities, and candidates for the Vice Presidential positions must have substantial previous experience with MRS and understand its operation. The individual elected to the position of 1st Vice President is also the President-Elect for the following year as provided for in the MRS Constitution.
The Council of MRS Ls the governing body and the ultimate authority of the Society. The Council is composed of the Officers of the Society and I5 elected Council members. Individual Council members are elected for threeyear terms, and each year five positions on the Council are determined by the elections, Candidates for these positions must be capable of providing careful and thoughtful leadership to the Society. The Council meets twice a year as a body and is responsible for determining all of the major policies and directions for MRS. Candidates for positions of the Council must be capable of assuming these responsibilities. Ideally, the Council should consist of a mixture of individuals who have substantial previous experience with MRS, and some senior individuals with broad vision and experience but limited previous involvement with the Society. After the Nominating Committee prepares the slate of candidates, it will be submitted to the MRS Council for approval and then submitted to the MRS membership for the vote which will determine the Officers and Council members for the following year. Members will receive their ballots for selection of 1985 Officers and Council by August
MRS 2
MRSNEWS
Highlights from Microscopy
of Semiconducting
The fourth in a biennial series on Microscopy of Semiconducting Materials was held at St. Catherine’s College. Oxford. England, on March 27-29. 198.5. The chairmen of the conference were Dr. A. Cl. Cullis (RSRE, Malvern) and Dr. D. B. Holt (Imperial College. London). The event was organized under the auspices of the Royal Microscopical Society and cosponsored by the Institute of Physics (UK) and the Materials Research Society. More than 200delegates attended from the UK and fourteen other countries. The applications of various types of microscopy and related characterization techniques to semiconductrng materials studies spanned a wide range which encompassed both fundamental solid-state research and also advanced electronic device work. While much of the work reported in the 85 conference papers involved the study of elemental silicon. extensive coverage was also given to compound semiconductors. The conference was opened by Prof. Sir Peter Hirsch. The different scientific sessions focused attention on individual topics of particluar current importance and were introduced by invited speakers. A paper by Dr. F. A. Ponce (Xerox Labs) reviewed the application of high resolution transmission electron microscopy to the study of microdefects in silicon. gallium arsenide. and II-VI semiconducting compounds. The use of lattice imaging techniques to identify nanometer-size crystal defects was described. A special session was devoted to dislocation phenomena with an initial presentation by Prof. P. Haasen(Gottingen University) outlining the effects of stage IV compression in elemental semiconductors. An overview of developments in transmission electron microscope studies of compound semiconductors was given by Dr. G. R. Booker (Oxford University). The session following this wide-ranging talk covered important EL2 defect phenomena. grain boundaries, and the effects of heav y ion damage in gallium arsenide. Several papers discussed alloy clustering and spinodal decomposition effects in ternary and quaternary III-V semiconductor layers. The importance of lattice relaxation in thin specimens was emphasized. A number of transmission microscope studies of the structure of superlattices based on gallium arsenide and lead telluride demonstrated the layer growth characteristics found m these svstems. The growth of epitaxial silicon was also described with detailed consideration of both homoepitaxy and silicon deposited on sapphire and gallium arsenide. Work showing the nature of silicide layers on silicon was reported and Dr. J. M. Gibson (AT&T Bell Labs) discussed the influence of interfactal atomic structure on Schottky barrier height.
Materials
1985
The application of special techniques in the scanning electron microscope was covered in a session opened by Prof. J. Heydenreich (East German Academv of Sciences) who treated advances in the characterization of semiconductor defects by electron beam induced conductivity and scanning deep level transient spectroscopy techniques. Applications of microanalysis with special reference to the scanning transmission electron microscope were presented by Dr. L. M. Brown (Cambridge IJniversity). and other workers covered analysis ranging from the use of Auger electrons to Z-contrast imaging of dopnt distributions in silicon. Prof. J. W. Mayer (Cornell University) described a detailed study of silicides and lateral diffusion couples by combined microscopy and ion backscattering technique\. X-ray topography and diffraction studies of semiconductors were treated in a session introduced by Dr. B. K. Tanner (Durham University). The mam emphasis of the work described focused on III-V compounds, and the various authors in the session covered such topics as the measurement of dislocation mobilities and electronic device studies by techniques including synchrotron x-ray topography and double crystal diffradometry. Transient processing of semiconductors was a further important conference topic. and Dr. B. Bensahel (CNET, Grenoble) reviewed the fabrication of single crystal siliconon-insulator by transient melting techniques. The effect\ of rapid thermal annealing upon ion-implanted silicon and gallium arsenide was another topic described in a number of microscopy-based studies. Conventional device processing steps introduce a range of defects and mtcroscopic structures into semiconductors and the application of transmission electron microscopy, particularly of cross-s~:ctional samples, for the support of VLSI silicon technology was addressed by Dr. C. Claeys (IMEC. Heverlee) and Dr. H. Oppolzer (Siemens Research Labs). The conference closed with a session on device testing by use of scanning electron beam techniques and recent advances in this area were surveved by Dr. S. M. Davidson (Lintech Instruments). Several other papers continued the discussion and included consideration of electron beam damage in finished transistors and the measurement of VLSI pattern linewidths. The proceedings of the conference are being published by the UK Institute of Physics as Number 76 in their Conference Series. The volume can be obtained from the Publications Office at Techno House. Redcliffe Way. Brtstol BSI 6NX. UK.
MRS 3
MRSNEWS
Topics Announced for 1986 MRS Spring Meeting Program Chairs for the Society’s 1986 Spring Meeting, Wei-Kan Chu, Rod K. Quinn, and Malcolm J. Thompson, have announced topics to be addressed in nine extensive symposia. Papers will focus on various aspects of: l
Heteroepitaxy and Silicon Technology
l
Compound Semi~onda~tor Material
0
P~~rna Processing
and Processes
l
Maternal Characterization by Ion Beams, Electron Beams and Photons Amorphous Silicon Materials and Applications
l
Materials Issues in Si IC Processing
l
l
Electronic Packaging in Materials Science Better Ceramics Through Chemistry
l
Materials Problems on Chemical Sensors
l
Additional information on manuscript submission will be available shortly from MRS Headquarters. The Spring Meeting will be held April 15-18, 1986 in Palo Alto, California.
PROCEEDINGS
OF 1985 MRS SPRING MEETING
Send orders IO Materials Research Society, 9800 McKnight Road Suite 327, Pittsburgh, PA 15237; telephone (412)367-3003 Volume 45 Ion Beam Processes in Advanced Electronic Materials and Device Technology, edited by F. H. Eisen, T. W. Siymon. and B. R. Appleton (approx. 58 papers) ISEN: O-93 1837-I O-3 Pm-publication prices: MRS Members - $30 6:. S. Nonmembers - $36 Foreign Nonmembers - $42 Prices after August I: MRS Members - $35 6. S. ~~onmemb~rs _ $42 Foreign Nonrne~lber~ - $48
Volume 46 Microscopic Identi~cation of Electronic Defects in Semiconductors, edited by Noble M. Johnson, Stephen G. Bishop, and George 13. Watkins (spprox. 82 papers) ISBN: O-931 837-I I- 1 Pre-publication pricer MRS Members - $36 U. S. Nanmember~ -- $43 I~oreign Nonmembers ~ $50 Foreign Nonmembers - $57 (i S. Nonmembers - $50 Prices after August I: MRS Members - $41
Volume 47 Thin Films: The Relationship of Structure to Properties,
edited by C. R. Aita and K. S. SreeHarsha (approx. 43 papers) ISBN: 0-931837-12-X Pre-publication prices: MRS Members - $25 U. S. Nonmembers - $30 Forergn Nonmembers - $35 Prices after August 1: MRS Members - $30 U. S. Nonmembers - $35 Foreign Nonmembers - $42
Volume 48 Applied Materials Characterization, edited by W. Katz and P. Williams (npprox. 64 papers) ISBN: O-931 X37-13-8 Pre-prrblication prices: MRS Member,s - $36 U. S. Nonmembers --- $43 Foreign Nonmembers - $50 Prices after August 1: MRS ‘~~~~tb~rs - $4 1 C! S ~off~rern~ers -- $50 Foreign ‘~#jr~l~rnbers - $S7
Volume 49 Materials Issues in Applications of Amo~bous
Silicon Technology,
edited by D. Adler, A. Madan. and M. J. Thompson (approx. 60 papers) ISBN: O-931837-14-6 Forezgn Nonmembers - $42 Pre-pubiicaiion prices: MRS Members - $30 cl. S. Nonmembers - $36 Prices after August 1: MRS Members - $35 U. S. Nonmembers - $42 Foreign Nonmembers - $48
Journal of Materials Research Editor-in-Chief Appointed Scope of New Archival Journal Defined MRS Nominations Prepared for 1986 Elections
Editor-in-Chief Appointed for Journal of Materials Research Dr. Charles B. Duke has been appointed Editor-in-Chief of.Jvurna/ ofh4ureriul.s Research, the new archival journal. to be published for MRS by the American Institute of Physics. “Charlie Duke’s reputation and credentials as a diverse and energetic scientist. author. editor and educator in many disciplines of materials science make him the perfect choice for this challenging new position.” according to MRS President Elton N. Kaufmann. “We are delighted that the new journal will be steered by such an important force as Duke. who brings to the task broad interests and allegiances to key research fields.” Duke is manager. Theoretical Physics and Chemistry Research for Xerox Corporation. Webster, New York, and is a Senior Research Fellow of the Corporate Rcscorch Group. Since joining Xerox in 1972. he ha< held thr positions of principal scientist, Materials Research Section: and manager. Molecular and Organic Materials Research: manager. Materials Science Laboratory. From 1Y63-1 Y6Y. hc wab a slaff mcrnbtx of Gtzrrcral Electric R&D Centrt. Schenectady. New York, working in the areas of solid-state physics. surface science, and technological forecasting-planning. He then served for three years as professor of physics. rc\earch professor of coordinated science, and staff member of the Materials Research Laboratory at the University of Illinois-Urbana. Duke has 256 technical publications to his credit in the areas of nuclear physics. semiconductor physics. organic chemistry. molecular physics. quantum field theory, surface science and technology assessment. He is also author of 7’rrr1rrr/iq in .%/iak (Academic Press. 1969). Hia professional society activities herald his publications and management expertise. Duke is past president and honorary member of the American Vacuum Society and has served as chairman of AVS’s Scholarships and Awards, Publications, and Nominations Committen. Hc is a Fclluw of the American Physical Society, and is serving in his seventh year on the Board of Governors of the American Institute of Physics. He has also served or is currently serving on AIP Committees on Corporate Associates, Public Information and Education. Journals, Educational Policy, and the AIP Executive Committee. He is a past member of the hoard of editors for Journal of b’wuum Science and Technologv, Journalde Microscopic et de .Spcw-ovcopir Elecrroniyues, and currently serves on editorial hoards of Surfuct~Scrence, Surface Science Reporrs,
Crikal Rel3iew.r of‘ Solid State and Marerials Science Advances in the Mechanics and Ph_vsicc of Surfac,e.s, and Journal of Molecular Elecrronics. He has served as rcfcrcc for 16 journals, as well as for the National Science Foundation, Air Force Office of Scientific Research, and the National Research Council, and he has worked in an advisory capacity for four unicersities, as well as on numerous natlonal research and conterence committees. “The Eatabliahmcnt of Jourrrul U/ Mawr-i& Resrur-c/f under the direction of Charlie Duke is a significant milestone for MRS as we pursue our overall mission of service to the materials research community.” Kaufmann said, “We are all quite enthusiastic about our journal prospects and eager to see it evolve under the direction of Charlie Duke.” Journal of Mawr-i& Research will debut in January 1986 For information on scope and manuscript submission requirements, contact MRS Headquarters. 9800 McKnight Road, Suite 327. Pittsburgh, PA 15237: telephone (412) _+67-3003.
MHS 1
MRS Publications Committee Defines Scope of New Archival Journal For the past several months the MRS Publications Committee has been studying the need for a new archival journal in the materials science field. A survey was part of an overall effort to establish both the need for and defining the purpose and content of the proposed journal. Approximately 40 individuals were involved in executing the survey, providing ideas, and interpreting survey results. Among them were eminent scientists, journal editors and consultants, MRS Officers, committee members, and Society enthusiasts. The survey consisted of 18 questions, which were divided into three groups: (I) questions on format (appearance, title, etc.) (2) substantive issues (editorial policy, aim and scope, etc.), and (3) the “bottom line”questions dealing with the need and desirability of the journal and degree of support expected from within and without MRS. Discussions concerning the suitability of starting a new materials science journal have been ongoing within MRS circles for the past few years. The Society has been sensitive to the need to provide a medium for the publication of members’ archival papers as well as the work of other scientists to augmerit its Symposia Proceedings series. Additionally. there appeared to be a genuine desire for a highcaliber, interdisciplinary journal as the preferred mode of publication for the scientific community, and it was evident that this need was not entirely met by any of the existing journals.
Subject-wise, respondents indicated that it should be very broad-based, encompassing a wider range of materials, material properties, processes, etc., than can now be found between the covers of virtually any other journal. Special consideration was to be given to topics in the forefront of materials research. The new journal would exist primarily to publish full-length, archival articles in the materials science field, although it was also clear that critical reviews would be well received by most readers. The respondents demanded that the scientific quality of every article be high. In fact, most respondents expressed the view that a journal’s reputation for publishing high-quality papers is the most significant factor in deciding whether to submit their manuscripts. It was furthermore recommended that the editorial board be comprised of an Editor-in-Chief and a group of Principal Editors, who collectively, will be reponsible for the day-to-day work of reviewing, assembling, and publishing thejoumal. A panel of distinguished scientists should meet annually to critique the performance of the editorial board and recommend ways to improve the journal. One may well ask, as several of the respondents did, why publish another journal for the scientific community? This question was answered partially by the type of journal the respondents defined. Of the few interdisciplinary materials journals now being published, none benefit from the direct ownership and control of a scientific society. With effective management, the society affiliation can be utilized to enhance both circulation and manuscript submission.
MRS Nominating Committee Prepares Slate of Candidates for Upcoming Elections The MRS Nominating Committee is in the process of preparing a slate of candidates for several positions to be submitted to the MRS membership in the upcoming elections. Positions that must be filled for 1986 by the elections include those of 1st Vice President, 2nd Vice President, and five positions on the MRS Council. These elections will determine the leadershipof MRS for 1986 and beyond. The objective of the Nominating Committee is to submit to the membership candidates who would provide strong, creative leadership and oversight to the Materials Research Society. An important criterion is that the candidates represent a wide range of scientific backgrounds, since one of the main objectives of MRS is the promotion of interdisciplinary research. Another important objective is that candidates represent academic, government, and industrial laboratories, since MRS membership is divided roughly equally along these lines. The positions of 1st and 2nd Vice President are responsible for overseeing most of the MRS Committee activities, and candidates for the Vice Presidential positions must have substantial previous experience with MRS and understand its operation. The individual elected to the position of 1st Vice President is also the President-Elect for the following year as provided for in the MRS Constitution.
The Council of MRS Ls the governing body and the ultimate authority of the Society. The Council is composed of the Officers of the Society and I5 elected Council members. Individual Council members are elected for threeyear terms, and each year five positions on the Council are determined by the elections, Candidates for these positions must be capable of providing careful and thoughtful leadership to the Society. The Council meets twice a year as a body and is responsible for determining all of the major policies and directions for MRS. Candidates for positions of the Council must be capable of assuming these responsibilities. Ideally, the Council should consist of a mixture of individuals who have substantial previous experience with MRS, and some senior individuals with broad vision and experience but limited previous involvement with the Society. After the Nominating Committee prepares the slate of candidates, it will be submitted to the MRS Council for approval and then submitted to the MRS membership for the vote which will determine the Officers and Council members for the following year. Members will receive their ballots for selection of 1985 Officers and Council by August
MRS 2
MRSNEWS
Highlights from Microscopy
of Semiconducting
The fourth in a biennial series on Microscopy of Semiconducting Materials was held at St. Catherine’s College. Oxford. England, on March 27-29. 198.5. The chairmen of the conference were Dr. A. Cl. Cullis (RSRE, Malvern) and Dr. D. B. Holt (Imperial College. London). The event was organized under the auspices of the Royal Microscopical Society and cosponsored by the Institute of Physics (UK) and the Materials Research Society. More than 200delegates attended from the UK and fourteen other countries. The applications of various types of microscopy and related characterization techniques to semiconductrng materials studies spanned a wide range which encompassed both fundamental solid-state research and also advanced electronic device work. While much of the work reported in the 85 conference papers involved the study of elemental silicon. extensive coverage was also given to compound semiconductors. The conference was opened by Prof. Sir Peter Hirsch. The different scientific sessions focused attention on individual topics of particluar current importance and were introduced by invited speakers. A paper by Dr. F. A. Ponce (Xerox Labs) reviewed the application of high resolution transmission electron microscopy to the study of microdefects in silicon. gallium arsenide. and II-VI semiconducting compounds. The use of lattice imaging techniques to identify nanometer-size crystal defects was described. A special session was devoted to dislocation phenomena with an initial presentation by Prof. P. Haasen(Gottingen University) outlining the effects of stage IV compression in elemental semiconductors. An overview of developments in transmission electron microscope studies of compound semiconductors was given by Dr. G. R. Booker (Oxford University). The session following this wide-ranging talk covered important EL2 defect phenomena. grain boundaries, and the effects of heav y ion damage in gallium arsenide. Several papers discussed alloy clustering and spinodal decomposition effects in ternary and quaternary III-V semiconductor layers. The importance of lattice relaxation in thin specimens was emphasized. A number of transmission microscope studies of the structure of superlattices based on gallium arsenide and lead telluride demonstrated the layer growth characteristics found m these svstems. The growth of epitaxial silicon was also described with detailed consideration of both homoepitaxy and silicon deposited on sapphire and gallium arsenide. Work showing the nature of silicide layers on silicon was reported and Dr. J. M. Gibson (AT&T Bell Labs) discussed the influence of interfactal atomic structure on Schottky barrier height.
Materials
1985
The application of special techniques in the scanning electron microscope was covered in a session opened by Prof. J. Heydenreich (East German Academv of Sciences) who treated advances in the characterization of semiconductor defects by electron beam induced conductivity and scanning deep level transient spectroscopy techniques. Applications of microanalysis with special reference to the scanning transmission electron microscope were presented by Dr. L. M. Brown (Cambridge IJniversity). and other workers covered analysis ranging from the use of Auger electrons to Z-contrast imaging of dopnt distributions in silicon. Prof. J. W. Mayer (Cornell University) described a detailed study of silicides and lateral diffusion couples by combined microscopy and ion backscattering technique\. X-ray topography and diffraction studies of semiconductors were treated in a session introduced by Dr. B. K. Tanner (Durham University). The mam emphasis of the work described focused on III-V compounds, and the various authors in the session covered such topics as the measurement of dislocation mobilities and electronic device studies by techniques including synchrotron x-ray topography and double crystal diffradometry. Transient processing of semiconductors was a further important conference topic. and Dr. B. Bensahel (CNET, Grenoble) reviewed the fabrication of single crystal siliconon-insulator by transient melting techniques. The effect\ of rapid thermal annealing upon ion-implanted silicon and gallium arsenide was another topic described in a number of microscopy-based studies. Conventional device processing steps introduce a range of defects and mtcroscopic structures into semiconductors and the application of transmission electron microscopy, particularly of cross-s~:ctional samples, for the support of VLSI silicon technology was addressed by Dr. C. Claeys (IMEC. Heverlee) and Dr. H. Oppolzer (Siemens Research Labs). The conference closed with a session on device testing by use of scanning electron beam techniques and recent advances in this area were surveved by Dr. S. M. Davidson (Lintech Instruments). Several other papers continued the discussion and included consideration of electron beam damage in finished transistors and the measurement of VLSI pattern linewidths. The proceedings of the conference are being published by the UK Institute of Physics as Number 76 in their Conference Series. The volume can be obtained from the Publications Office at Techno House. Redcliffe Way. Brtstol BSI 6NX. UK.
MRS 3
MRSNEWS
Topics Announced for 1986 MRS Spring Meeting Program Chairs for the Society’s 1986 Spring Meeting, Wei-Kan Chu, Rod K. Quinn, and Malcolm J. Thompson, have announced topics to be addressed in nine extensive symposia. Papers will focus on various aspects of: l
Heteroepitaxy and Silicon Technology
l
Compound Semi~onda~tor Material
0
P~~rna Processing
and Processes
l
Maternal Characterization by Ion Beams, Electron Beams and Photons Amorphous Silicon Materials and Applications
l
Materials Issues in Si IC Processing
l
l
Electronic Packaging in Materials Science Better Ceramics Through Chemistry
l
Materials Problems on Chemical Sensors
l
Additional information on manuscript submission will be available shortly from MRS Headquarters. The Spring Meeting will be held April 15-18, 1986 in Palo Alto, California.
PROCEEDINGS
OF 1985 MRS SPRING MEETING
Send orders IO Materials Research Society, 9800 McKnight Road Suite 327, Pittsburgh, PA 15237; telephone (412)367-3003 Volume 45 Ion Beam Processes in Advanced Electronic Materials and Device Technology, edited by F. H. Eisen, T. W. Siymon. and B. R. Appleton (approx. 58 papers) ISEN: O-93 1837-I O-3 Pm-publication prices: MRS Members - $30 6:. S. Nonmembers - $36 Foreign Nonmembers - $42 Prices after August I: MRS Members - $35 6. S. ~~onmemb~rs _ $42 Foreign Nonrne~lber~ - $48
Volume 46 Microscopic Identi~cation of Electronic Defects in Semiconductors, edited by Noble M. Johnson, Stephen G. Bishop, and George 13. Watkins (spprox. 82 papers) ISBN: O-931 837-I I- 1 Pre-publication pricer MRS Members - $36 U. S. Nanmember~ -- $43 I~oreign Nonmembers ~ $50 Foreign Nonmembers - $57 (i S. Nonmembers - $50 Prices after August I: MRS Members - $41
Volume 47 Thin Films: The Relationship of Structure to Properties,
edited by C. R. Aita and K. S. SreeHarsha (approx. 43 papers) ISBN: 0-931837-12-X Pre-publication prices: MRS Members - $25 U. S. Nonmembers - $30 Forergn Nonmembers - $35 Prices after August 1: MRS Members - $30 U. S. Nonmembers - $35 Foreign Nonmembers - $42
Volume 48 Applied Materials Characterization, edited by W. Katz and P. Williams (npprox. 64 papers) ISBN: O-931 X37-13-8 Pre-prrblication prices: MRS Member,s - $36 U. S. Nonmembers --- $43 Foreign Nonmembers - $50 Prices after August 1: MRS ‘~~~~tb~rs - $4 1 C! S ~off~rern~ers -- $50 Foreign ‘~#jr~l~rnbers - $S7
Volume 49 Materials Issues in Applications of Amo~bous
Silicon Technology,
edited by D. Adler, A. Madan. and M. J. Thompson (approx. 60 papers) ISBN: O-931837-14-6 Forezgn Nonmembers - $42 Pre-pubiicaiion prices: MRS Members - $30 cl. S. Nonmembers - $36 Prices after August 1: MRS Members - $35 U. S. Nonmembers - $42 Foreign Nonmembers - $48