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Ion and atom guns from CMS.
Balzers
A X I S - - f r o m Kratos Analytical
New from
An example of XPS mapping using AXIS is given below using a Mg flood X-ray source. The map shows 300 micron solder dots on silicon. The map was taken, using the Sn 3d peak, over approximately 2 mm. The effects of X-ray flux density variation over the sample surface, due to inverse square law, can be clearly seen. The bottom dots are less intense than the dots at the top, which are closer to the X-ray source.
I o n i s a t i o n gauge and c o n t r o l l e r f o r high pressure a p p l i c a t i o n s . A versatile new ionisation gauge, the IMG 300, has been introduced by Balzers to control and monitor vacuum installations and plasma and sputtering processes. In its basic configuration, the IMG 300 is a simple ionisation vacuum gauge which can be bench or rack mounted. When a high pressure gauge head is fitted, the IMG 300 covers the 1-10 6 mbar range, while a Bayard-Alpert gauge head covers the measurement range from 10 2 to 10 9 mbar. The high pressure gauge head is immune from electric and magnetic interference often encountered in the process plant. The design incorporates space for the addition of further measurement boards to extend the performance of the unit to meet individual customer needs. There is the option to add two Pirani boards, t w o cold cathode ionisation boards, or a combination of one Pirani and one cold cathode unit to provide a complete measurement and process control unit. The cold cathode gauge head is suitable for either high vacuum or ultra-high vacuum measurement. The IMG 300 has six programmable switching functions, which can be assigned to any gauge head and used for external units via the interface and an integral microprocessor supports a full range of digital displays.
C'... ",
. "2~$.
300 #m solder dots on silicon.
Ion and a t o m guns f o r C M S . Cambridge Mass Spectrometry (CMS), which is a division of Kratos Analytical, now design and manufacture a range of molecular ion and atom guns of high quality and performance. These guns are suitable for a range of applications, from high current depth profiling, micro-machining, sputter cleaning, low energy ion implantation, reverse engineering, ion scattering spectroscopy and Static SIMS. The I M G 3 0 0 from Balzers.
Further information from : lan Ferguson Kratos Analytical Barton Dock Road Urmston Manchester M31 2LD Tel 061 865 4466 Fax 061 865 0707
N e w evaporation materials for a n t i - r e f l e c t i o n c o a t i n g s . A new range of evaporation materials for anti-reflection thin film coatings has been introduced by Balzers. Known as "PASO', the materials have been designed for anti-reflection coating on glass and high index substrates such as silicon, germanium and gallium arsenide. The three grades of the new material can be mixed to obtain any refractive index between 1.65 and 1,9. 945
Ion and atom guns from CMS.
Balzers
A X I S - - f r o m Kratos Analytical
New from
An example of XPS mapping using AXIS is given below using a Mg flood X-ray source. The map shows 300 micron solder dots on silicon. The map was taken, using the Sn 3d peak, over approximately 2 mm. The effects of X-ray flux density variation over the sample surface, due to inverse square law, can be clearly seen. The bottom dots are less intense than the dots at the top, which are closer to the X-ray source.
I o n i s a t i o n gauge and c o n t r o l l e r f o r high pressure a p p l i c a t i o n s . A versatile new ionisation gauge, the IMG 300, has been introduced by Balzers to control and monitor vacuum installations and plasma and sputtering processes. In its basic configuration, the IMG 300 is a simple ionisation vacuum gauge which can be bench or rack mounted. When a high pressure gauge head is fitted, the IMG 300 covers the 1-10 6 mbar range, while a Bayard-Alpert gauge head covers the measurement range from 10 2 to 10 9 mbar. The high pressure gauge head is immune from electric and magnetic interference often encountered in the process plant. The design incorporates space for the addition of further measurement boards to extend the performance of the unit to meet individual customer needs. There is the option to add two Pirani boards, t w o cold cathode ionisation boards, or a combination of one Pirani and one cold cathode unit to provide a complete measurement and process control unit. The cold cathode gauge head is suitable for either high vacuum or ultra-high vacuum measurement. The IMG 300 has six programmable switching functions, which can be assigned to any gauge head and used for external units via the interface and an integral microprocessor supports a full range of digital displays.
C'... ",
. "2~$.
300 #m solder dots on silicon.
Ion and a t o m guns f o r C M S . Cambridge Mass Spectrometry (CMS), which is a division of Kratos Analytical, now design and manufacture a range of molecular ion and atom guns of high quality and performance. These guns are suitable for a range of applications, from high current depth profiling, micro-machining, sputter cleaning, low energy ion implantation, reverse engineering, ion scattering spectroscopy and Static SIMS. The I M G 3 0 0 from Balzers.
Further information from : lan Ferguson Kratos Analytical Barton Dock Road Urmston Manchester M31 2LD Tel 061 865 4466 Fax 061 865 0707
N e w evaporation materials for a n t i - r e f l e c t i o n c o a t i n g s . A new range of evaporation materials for anti-reflection thin film coatings has been introduced by Balzers. Known as "PASO', the materials have been designed for anti-reflection coating on glass and high index substrates such as silicon, germanium and gallium arsenide. The three grades of the new material can be mixed to obtain any refractive index between 1.65 and 1,9. 945