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New product manager forTosoh SMD
Vacuum News vacuum source which can be wheeled around production plants supplying vacuum whenever and wherever the need arises. Further information from: Werner Rietschle (UK) Ltd Unit M Paddock Wood Kent TN12 6UU Tel 0892 835237/8 Fax 0892 834643
New product manager for Tosoh SMD To.,~oh SMD Inc recently appointed Michael W Morris as product manager, Media Products Segment. Morris joins Tosoh from NCR Corporation/AT&T, where he was a senior product manager/marketing. He will be responsible for marketing Tosoh's sputtering targets used for thin-film deposition in the media market. A member of the forecast panel of the National Association of Business Economists, Morris holds his BS in Engineering from the Ohio State University and an M B A in Finance/Marketing from Xavier University. He brings more than 15 years experience in engineering and marketing to Tosoh SMD. Further information from: Tosoh SMD Inc 351 5 Grove City Road Grove City OH 43123-3099 USA Tel 614 875 7912 Fax 614 875 0031
Ultra-high
vacuum systems with cryopumps
The scientific production company VACUUM & CRYOGENIC SYSTEMS Corporation ALFA has designed and produces several modifications of uhv units, including cryogenic filling pumps in which liquid or solid nitrogen or liquid helium are used as cryogenic media, and also angle valves with metallic seal, gate valves, troubleshooting valves, and pressure sensors. The cryopumps developed allow one to solve many problems of evacuation and long autonomous support of ultra-clean oil-free vacuum with operating pressures between 105 and 1 0 - " Pa when pumping chambers of 10 -3 to 102 m 3 volume. Most efficiently these pumps are used in vacuum systems of wide application and research instrument systems, e.g. for pumping systems used for surface analysis of materials, molecular beam epitaxy, ion lithography, various mass spectrometers, monocrystal growth systems, super pure materials, industrial production of electronics elements and semiconductor materials, for pumping out plasma-chemical devices, charged-particle accelerator chambers, space simulation chambers, thermonuclear installations and other systems used in the vacuum inclustry. Th,,= merits of cryosystems are: High specific pumping speed. Wide range of working pressures. Low specific consumption of cryogenic agents. l:asy and economic maintenance. No moving parts, vibration, magnetic and electric fields, high voltage. Full independence of power, water and pneumatic supply. No need for heat regeneration. Super pure hydrocarbon-free residual gas content. Low specific metal content. High reliability in operation providing at least 10 y warranty life.
Cryosystems w i t h s o r p t i o n cryopumps cooled b y l i q u i d nitrogen. These are mainly intended to provide oil-free fore-vacuum within the pressure range of 105-10 -~ Pa, or 102-10 -3 Pa. Units consist of a cryogenic proof pump in which liquid nitrogen is used as a cryogenic media, angle valves NW 16, NW 40, NW 63, NW 100 with metallic seal, troubleshoot valves, pressure sensors with measuring range from 105 to 10 -1 and from 10 -1 to 10 -3 Pa. The pumps incorporate a sorbing element cooled by the cryogenic medium contained in a vessel, a housing which envelopes the sorbing element arranged with a gap and a floating screen located within the gap. The sorbing element consists of heat lines, activated carbon used as an adsorber and a porous gas-permeable screen efficiently protecting the chamber to be evacuated from adsorbent dust. A pocket with an adsorbent in the cavity gap is situated on the liquid nitrogen vessel. Once every few years the security vacuum cavity is pumped to pressure 100-40 Pa via the valve NW 16 with metallic seal. After the vessel is filled with liquid nitrogen its own protecting vacuum is formed in the cavity of the gap with the pressure below 10 -4 Pa, which is independent of the admission pressure. The vessel with a cryogenic medium incorporates also a builtin adequately conductive and optically dense tube which can be used, if necessary, as a permanently cold oil vapour trap of the fore-vacuum mechanical pump. For that purpose, one end of the tube can be connected to the fore-vacuum mechanical pump, the other end through a valve to the evacuated chamber. Where necessary, such an assembly can be used for oil-free fore evacuation of the chamber from pressures of 10L102 down to pressures of 10 ° Pa and under. Two modifications of the pumps have been developed, namely: with 63 mm and 100 mm bore joint flanges. They are capable of operating with an inlet either directed upwards or downwards.
C r y o s y s t e m s w i t h s o r p t i o n cryopumps cooled by solid nitrogen. These are mainly intended for pumping out vacuum deposition units, magnetron sputtering units, plasma and chemical plasma cells with a high gas load (to 50 m 3 Pa s -1) of any gases other than helium but including active and corrosive gases, within a wide range of working pressures (102-10 -6 Pa). Units consist of cryogenic pool pump cooled by solid nitrogen angle valves NW 16, NW 40, NW 63, NW 100 with metallic seal gate NW 25 or NW 400, troubleshoot valves and pressure sensors. The pump incorporates a sorbing element which is similar in its design to that used in the pump of the above modification but cooled by a vessel with nitrogen whose temperature is reduced down to 5 0 + 5 K by means of pumping off vapours of first liquid and then of solidified nitrogen. The outer surface of the sorbing element and the vessel with solid nitrogen which cools the element is surrounded by a screen cooled by another vessel containing liquid nitrogen at a temperature 77.4 K. As in the above modification, arranged inside the vessel is an oiI-vapour trap of the fore-vacuum mechanical pump. The nitrogen consumption from the sorbing element vessel is approximately by an order less than from the screen cooling vessel. Three modifications of the pumps are available, with NW 100, NW 260, NW 400 joint flanges located on the top the pump with the next pumping speed~O.2, 1 and 5 m 3 s -1.
Cryosystems with condensation sorption cryopumps cooled b y l i q u i d h e l i u m . Units consist of condensation sorption pool cryopump cooling by liquid helium, sorption cryopump cooling by liquid nitrogen (NW 63) for previous evacuation of working chambers and vessel of helium cryopump for the first startup angle valves NW 16 and NW 63 with metallic seal, gate valves, troubleshoot valves, pressure sensors with measuring range from 105 to 10 -1 Pa and from 10 -1 to 10 -11 Pa. These are single action pumps which have the lowest limit pressures (under 10 -11 Pa). They are particularly efficient in precision research. They have the highest specific pumping speed and are capable of pumping all gases including hydrogen and helium in the condensation sorption regime. The optimum application is for operation pressures between 10 -5 to 10 -~° Pa. The pump incorporates 407
New product manager for Tosoh SMD To.,~oh SMD Inc recently appointed Michael W Morris as product manager, Media Products Segment. Morris joins Tosoh from NCR Corporation/AT&T, where he was a senior product manager/marketing. He will be responsible for marketing Tosoh's sputtering targets used for thin-film deposition in the media market. A member of the forecast panel of the National Association of Business Economists, Morris holds his BS in Engineering from the Ohio State University and an M B A in Finance/Marketing from Xavier University. He brings more than 15 years experience in engineering and marketing to Tosoh SMD. Further information from: Tosoh SMD Inc 351 5 Grove City Road Grove City OH 43123-3099 USA Tel 614 875 7912 Fax 614 875 0031
Ultra-high
vacuum systems with cryopumps
The scientific production company VACUUM & CRYOGENIC SYSTEMS Corporation ALFA has designed and produces several modifications of uhv units, including cryogenic filling pumps in which liquid or solid nitrogen or liquid helium are used as cryogenic media, and also angle valves with metallic seal, gate valves, troubleshooting valves, and pressure sensors. The cryopumps developed allow one to solve many problems of evacuation and long autonomous support of ultra-clean oil-free vacuum with operating pressures between 105 and 1 0 - " Pa when pumping chambers of 10 -3 to 102 m 3 volume. Most efficiently these pumps are used in vacuum systems of wide application and research instrument systems, e.g. for pumping systems used for surface analysis of materials, molecular beam epitaxy, ion lithography, various mass spectrometers, monocrystal growth systems, super pure materials, industrial production of electronics elements and semiconductor materials, for pumping out plasma-chemical devices, charged-particle accelerator chambers, space simulation chambers, thermonuclear installations and other systems used in the vacuum inclustry. Th,,= merits of cryosystems are: High specific pumping speed. Wide range of working pressures. Low specific consumption of cryogenic agents. l:asy and economic maintenance. No moving parts, vibration, magnetic and electric fields, high voltage. Full independence of power, water and pneumatic supply. No need for heat regeneration. Super pure hydrocarbon-free residual gas content. Low specific metal content. High reliability in operation providing at least 10 y warranty life.
Cryosystems w i t h s o r p t i o n cryopumps cooled b y l i q u i d nitrogen. These are mainly intended to provide oil-free fore-vacuum within the pressure range of 105-10 -~ Pa, or 102-10 -3 Pa. Units consist of a cryogenic proof pump in which liquid nitrogen is used as a cryogenic media, angle valves NW 16, NW 40, NW 63, NW 100 with metallic seal, troubleshoot valves, pressure sensors with measuring range from 105 to 10 -1 and from 10 -1 to 10 -3 Pa. The pumps incorporate a sorbing element cooled by the cryogenic medium contained in a vessel, a housing which envelopes the sorbing element arranged with a gap and a floating screen located within the gap. The sorbing element consists of heat lines, activated carbon used as an adsorber and a porous gas-permeable screen efficiently protecting the chamber to be evacuated from adsorbent dust. A pocket with an adsorbent in the cavity gap is situated on the liquid nitrogen vessel. Once every few years the security vacuum cavity is pumped to pressure 100-40 Pa via the valve NW 16 with metallic seal. After the vessel is filled with liquid nitrogen its own protecting vacuum is formed in the cavity of the gap with the pressure below 10 -4 Pa, which is independent of the admission pressure. The vessel with a cryogenic medium incorporates also a builtin adequately conductive and optically dense tube which can be used, if necessary, as a permanently cold oil vapour trap of the fore-vacuum mechanical pump. For that purpose, one end of the tube can be connected to the fore-vacuum mechanical pump, the other end through a valve to the evacuated chamber. Where necessary, such an assembly can be used for oil-free fore evacuation of the chamber from pressures of 10L102 down to pressures of 10 ° Pa and under. Two modifications of the pumps have been developed, namely: with 63 mm and 100 mm bore joint flanges. They are capable of operating with an inlet either directed upwards or downwards.
C r y o s y s t e m s w i t h s o r p t i o n cryopumps cooled by solid nitrogen. These are mainly intended for pumping out vacuum deposition units, magnetron sputtering units, plasma and chemical plasma cells with a high gas load (to 50 m 3 Pa s -1) of any gases other than helium but including active and corrosive gases, within a wide range of working pressures (102-10 -6 Pa). Units consist of cryogenic pool pump cooled by solid nitrogen angle valves NW 16, NW 40, NW 63, NW 100 with metallic seal gate NW 25 or NW 400, troubleshoot valves and pressure sensors. The pump incorporates a sorbing element which is similar in its design to that used in the pump of the above modification but cooled by a vessel with nitrogen whose temperature is reduced down to 5 0 + 5 K by means of pumping off vapours of first liquid and then of solidified nitrogen. The outer surface of the sorbing element and the vessel with solid nitrogen which cools the element is surrounded by a screen cooled by another vessel containing liquid nitrogen at a temperature 77.4 K. As in the above modification, arranged inside the vessel is an oiI-vapour trap of the fore-vacuum mechanical pump. The nitrogen consumption from the sorbing element vessel is approximately by an order less than from the screen cooling vessel. Three modifications of the pumps are available, with NW 100, NW 260, NW 400 joint flanges located on the top the pump with the next pumping speed~O.2, 1 and 5 m 3 s -1.
Cryosystems with condensation sorption cryopumps cooled b y l i q u i d h e l i u m . Units consist of condensation sorption pool cryopump cooling by liquid helium, sorption cryopump cooling by liquid nitrogen (NW 63) for previous evacuation of working chambers and vessel of helium cryopump for the first startup angle valves NW 16 and NW 63 with metallic seal, gate valves, troubleshoot valves, pressure sensors with measuring range from 105 to 10 -1 Pa and from 10 -1 to 10 -11 Pa. These are single action pumps which have the lowest limit pressures (under 10 -11 Pa). They are particularly efficient in precision research. They have the highest specific pumping speed and are capable of pumping all gases including hydrogen and helium in the condensation sorption regime. The optimum application is for operation pressures between 10 -5 to 10 -~° Pa. The pump incorporates 407