- Email: [email protected]
STM) UHV scanning probe microscope (SPM)
SEM PSU: Farnell Hivolt, Bognor Regis, UK, has developed a custom, digitally-controlled high voltage power supply system for Leica Cambridge's new SEMs, the Stereoscan 440 and 420. Control and monitoring of the system uses a fibre optic RS232 link. Fibres also provide critical 40kV isolation between the control circuits at ground potential and those at the high voltage. Developed in close liaison with Leica, the "crash proof" microprocessor-based digital interface was specially designed to resist 40kV "flashovers" in the electron gun. High resolution SEMs are very demanding of supply stability and low noise. The Farnell system achieves drift performance better than 0.001% per hour, with output ripple better than 0.0005%. nContact. Care), Austin, Farnell Hivolt. Tel/flax: [44] (0)243 841888 / 824698. NESLAB Chillers: robust and yet precise, NESLAB (Runcorn, UK) chillers are "the most dependable cooling source you will find anywhere". The chiller can be run 24 hrs/day with industrial grade pumps for non-stop circulation. Hermetically sealed refrigeration compressors provide trouble-free cooling and external
cases and casters withstand rough treatment. The chiller has the precision to meet demanding tasks in the semiconductor equipment field such as MBE, sputtering, CVD, plasma etching and SEM/TEM. • Call for the NESLAB catalogue, tell fax: [44] (0)582 472988 / 472. Air Products and Stainless Design IPA Reprocessor: joint marketing programme is underway to supply isopropyl alcohol (IPA) reprocessor systems for semiconductor wafer drying. Stainless Design Corp (SDC) will manufacture it and AP will provide engineering, technical and safety support. AP will market the system throughout the USA and Europe. The reprocessor produces a continuous flow of fully dehydrated, UHP IPA from any currently available IPA vapour dryer and achieve purity levels higher than commodity IPA. It thus saves on transport, on-site storage and disposal costs. • UK Contact." Air Products pie, tel: [44] (0)932 249273. Drager IN m e a s u r e m e n t o f flammable gases: the new field transducer Polytron IR Ex from Dragerwerk AG, Lubeck, Germany, works reliably at test gas concentrations of up to 100% by volume and is poison
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resistant. Very accurate detection compared to conventional detectors, says the company: 0-10% LEL for propane or 0-2000 ppm hexane. It is configured for use in areas of explosive hazard. IContact: Dragerwerk AG, tel/fax: [49] (0)451 882-2185 / -3944. 12-page brochure on 8550 Series sputter system: available from Nordiko, Webster, NY, USA, for a range of thin-film deposition applications including III-Vs, II-VIs, superconductors etc. System options include: substrate heating/cooling, RF etch/ bias, RF ion source, (filamentless operation), process control automation, load-lock with CTC operation. nContact: Tamela Nelson, Nordiko USA, Inc. Tel/fax: [1] (716) 671 3570 / 3579. Oxford Instruments MonoCL: is a cathodoluminescence imaging and spectrometry system which "offers the highest spatial resolution currently available". It allows a SEM to detect very low optical CL signals emitted by many materials when bombarded with an e-beam. It can display panchromatic images at all wavelengths, as well as mono images at single wavelengths plus high res spectral analysis. • Contact; Andrew Searle, Oxford Instruments, tel~fax: [44] (0)865 882855/881567. Edwards P r e s s u r e Monitor: the Model 1570 pressure monitor is a low-cost, microprocessor-based display and set point controller for Models 600, 622, 655 and 590 Barocel vacuum transducers. • Contact: JF Fowler, Edwards, tel,~ .fax. [44] (0)293 528844 / 533453. Park Scientific Instruments introduces Dual ( A F M / S T M ) U H V scanning probe microscope (SPM): Park Scientific Instruments (PSI), Sunnyvale, CA, USA, Autoprobe UHV AFM/STM features compact AFM/ STM that require no optics or alignment, and tips and cantilevers that canbe interchanged in situ. AutoProbe UHV AFM/STM images both conducting and non-conducting samples prepared in vacuum conditions. The UHV system provides a controlled environment, eliminating contamination that is often responsible for ambiguous data. • Contact. Lindsey Mitobe, Park Scientific Instruments, tel,{fax." [1] (408) 747-1600/1601.
cases and casters withstand rough treatment. The chiller has the precision to meet demanding tasks in the semiconductor equipment field such as MBE, sputtering, CVD, plasma etching and SEM/TEM. • Call for the NESLAB catalogue, tell fax: [44] (0)582 472988 / 472. Air Products and Stainless Design IPA Reprocessor: joint marketing programme is underway to supply isopropyl alcohol (IPA) reprocessor systems for semiconductor wafer drying. Stainless Design Corp (SDC) will manufacture it and AP will provide engineering, technical and safety support. AP will market the system throughout the USA and Europe. The reprocessor produces a continuous flow of fully dehydrated, UHP IPA from any currently available IPA vapour dryer and achieve purity levels higher than commodity IPA. It thus saves on transport, on-site storage and disposal costs. • UK Contact." Air Products pie, tel: [44] (0)932 249273. Drager IN m e a s u r e m e n t o f flammable gases: the new field transducer Polytron IR Ex from Dragerwerk AG, Lubeck, Germany, works reliably at test gas concentrations of up to 100% by volume and is poison
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Vol 6 No 5
resistant. Very accurate detection compared to conventional detectors, says the company: 0-10% LEL for propane or 0-2000 ppm hexane. It is configured for use in areas of explosive hazard. IContact: Dragerwerk AG, tel/fax: [49] (0)451 882-2185 / -3944. 12-page brochure on 8550 Series sputter system: available from Nordiko, Webster, NY, USA, for a range of thin-film deposition applications including III-Vs, II-VIs, superconductors etc. System options include: substrate heating/cooling, RF etch/ bias, RF ion source, (filamentless operation), process control automation, load-lock with CTC operation. nContact: Tamela Nelson, Nordiko USA, Inc. Tel/fax: [1] (716) 671 3570 / 3579. Oxford Instruments MonoCL: is a cathodoluminescence imaging and spectrometry system which "offers the highest spatial resolution currently available". It allows a SEM to detect very low optical CL signals emitted by many materials when bombarded with an e-beam. It can display panchromatic images at all wavelengths, as well as mono images at single wavelengths plus high res spectral analysis. • Contact; Andrew Searle, Oxford Instruments, tel~fax: [44] (0)865 882855/881567. Edwards P r e s s u r e Monitor: the Model 1570 pressure monitor is a low-cost, microprocessor-based display and set point controller for Models 600, 622, 655 and 590 Barocel vacuum transducers. • Contact: JF Fowler, Edwards, tel,~ .fax. [44] (0)293 528844 / 533453. Park Scientific Instruments introduces Dual ( A F M / S T M ) U H V scanning probe microscope (SPM): Park Scientific Instruments (PSI), Sunnyvale, CA, USA, Autoprobe UHV AFM/STM features compact AFM/ STM that require no optics or alignment, and tips and cantilevers that canbe interchanged in situ. AutoProbe UHV AFM/STM images both conducting and non-conducting samples prepared in vacuum conditions. The UHV system provides a controlled environment, eliminating contamination that is often responsible for ambiguous data. • Contact. Lindsey Mitobe, Park Scientific Instruments, tel,{fax." [1] (408) 747-1600/1601.